Furnace door structure and quartz furnace equipment

Abstract

The utility model relates to a furnace door structure and quartz furnace equipment, and the furnace door structure comprises a mounting unit which comprises a mounting body, the mounting body extends along a first direction, and the mounting body is provided with a first mounting surface and a second mounting surface which are opposite to each other along the thickness direction of the mounting body; the furnace door unit comprises a first furnace door, a second furnace door, a first connecting assembly and a second connecting assembly, and the first furnace door is slidably connected with the first mounting surface through the first connecting assembly; the second furnace door is in sliding connection with the second mounting surface through the second connecting assembly; the first furnace door can be driven to move in the first direction and the second direction, and the second furnace door can be driven to move in the first direction and the second direction; the second direction is perpendicular to the first direction. The space can be effectively saved, the furnace doors do not interfere with one another, independent control can be achieved while the space is saved, the orderliness of the process is improved, and then the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of quartz furnace technology, and in particular to a furnace door structure and quartz furnace equipment. Background Technology

[0002] A quartz furnace is a heating or melting device that uses quartz as its main component. It is widely used in laboratories, industrial production, and scientific research. Quartz (primarily composed of silicon dioxide, SiO2) is an ideal material for heating equipment due to the following advantages: high temperature resistance (it can withstand temperatures above 1200°C; high-purity quartz can even reach 1600°C); good thermal stability and a low coefficient of thermal expansion, enabling it to resist rapid temperature changes; furthermore, quartz is resistant to acid and alkali corrosion and does not react with most chemicals. In existing technologies, a single device typically uses one furnace. To increase output, the furnace size needs to be expanded. Therefore, multiple quartz furnaces are installed in a single device, operating simultaneously to improve efficiency and output. In existing technologies, each furnace door is equipped with an independent opening and closing control mechanism.

[0003] However, the shortcoming of the existing technology is that for quartz furnace equipment with multiple furnace door structures, setting up an opening and closing control mechanism for each furnace door separately would make the overall structure more complex and cumbersome, and would occupy more space. Utility Model Content

[0004] Therefore, the technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a furnace door structure and quartz furnace equipment. By arranging the furnace door structure of the quartz furnace equipment in an alternating manner, space can be effectively saved, and each furnace door does not interfere with the others. Independent control can be achieved while saving space, improving the orderliness of the process and thus improving production efficiency.

[0005] To solve the above-mentioned technical problems, this utility model provides a furnace door structure applied to a high-temperature quartz furnace device. The high-temperature quartz furnace device includes at least one double-furnace structure. The double-furnace structure includes two sets of quartz furnaces arranged side-by-side in a horizontal direction. Each set of quartz furnaces includes multiple furnace bodies arranged in a height direction. Each pair of furnace doors staggered in the height direction is equipped with the furnace door structure. Specifically, the furnace door structure includes:

[0006] The mounting unit includes a mounting body extending along a first direction, and the mounting body having opposing first and second mounting surfaces along its thickness direction.

[0007] The furnace door unit includes a first furnace door, a second furnace door, a first connecting component, and a second connecting component. The first furnace door is slidably connected to the first mounting surface via the first connecting component; the second furnace door is slidably connected to the second mounting surface via the second connecting component.

[0008] The first furnace door can be driven to move along the first direction and the second direction, and the second furnace door can be driven to move along the first direction and the second direction; the second direction is perpendicular to the first direction.

[0009] In one embodiment of the present invention, a first guide rail and a first driving member are provided on the first mounting surface, the first connecting component is slidably connected to the first guide rail, and the first connecting component is also connected to the movable output end of the first driving member so as to move along the first guide rail under the drive of the first driving member.

[0010] The first guide rail extends along the second direction; the driving direction of the first driving member is the same as the second direction.

[0011] In one embodiment of the present invention, the first connecting component includes a first connecting plate, a first track, a first slider, a first mounting base, and a second driving member. The first connecting plate is slidably connected to the first guide rail. The first track extends along the first direction and is disposed on the first connecting plate. The first slider is slidably connected to the first track. The first mounting base is fixedly connected to the first slider. At the same time, the first mounting base is connected to the movable output end of the second driving member. The first furnace door is connected to the first mounting base.

[0012] In one embodiment of the present invention, a second guide rail and a third driving member are provided on the second mounting surface, the second connecting component is slidably connected to the second guide rail, and the second connecting component is also connected to the movable output end of the third driving member so as to move along the second guide rail under the drive of the third driving member;

[0013] The second guide rail extends along the second direction; the driving direction of the third driving member is the same as the second direction.

[0014] In one embodiment of the present invention, the second connecting component includes a second connecting plate, a second track, a second slider, a second mounting base, and a fourth driving member. The second connecting plate is slidably connected to the second guide rail. The second track extends along the first direction and is disposed on the second connecting plate. The second slider is slidably connected to the second track. The second mounting base is fixedly connected to the second slider. At the same time, the second mounting base is connected to the movable output end of the fourth driving member. The second furnace door is connected to the second mounting base.

[0015] In one embodiment of the present invention, a floating connection unit is further included, the floating connection unit including a first floating connection component; the first furnace door is connected to the first connection component through the first floating connection component.

[0016] In one embodiment of the present invention, the first floating connection assembly includes a fixed plate and a floating module; the fixed plate is connected to the first connection assembly, and the fixed plate is movably connected to the first furnace door through the floating module.

[0017] In one embodiment of this utility model, the floating module includes an elastic element, a connecting column, a mounting block, a floating joint, and a bushing. The connecting column is mounted on the fixed plate. The mounting block is elastically connected to the first furnace door through the elastic element and the floating joint. The mounting block is provided with a through hole. The connecting column is connected to the through hole through the bushing, and the connecting column and the through hole are clearance-fitted.

[0018] In one embodiment of this utility model, the floating connection unit further includes a second floating connection component, and the second furnace door is connected to the second connection component through the floating connection component; the second floating connection component has the same structure as the first floating connection component.

[0019] This utility model also provides a quartz furnace device, including a furnace door structure as described above, wherein the quartz furnace device includes a double furnace body structure arranged in parallel.

[0020] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0021] The furnace door structure described in this utility model is applied to a double-furnace structure. The double-furnace structure includes two sets of quartz furnaces arranged side by side along the horizontal direction. Each set of quartz furnaces includes multiple furnace bodies arranged along the vertical direction. The furnace door structure is provided with an installation unit and a furnace door unit. The installation unit includes an installation body disposed between the two sets of quartz furnaces. The furnace door unit includes a first furnace door, a second furnace door, a first connecting component, and a second connecting component. The first furnace door is movably connected to the first mounting surface of the installation body through the first connecting component, and the second furnace door is movably connected to the second mounting surface of the installation body through the second connecting component. Since the first mounting surface and the second mounting surface are opposite each other, the movement interference between the first furnace door and the second furnace door can be effectively avoided. In addition, the furnace door structure of this utility model can effectively save space and achieve independent control while saving space, improving the orderliness of the process and thus improving production efficiency. Attached Figure Description

[0022] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0023] Figure 1 This is a first-view schematic diagram of the overall structure of a preferred embodiment of the present invention.

[0024] Figure 2 This is a second-view schematic diagram of the overall structure of a preferred embodiment of the present invention.

[0025] Figure 3 This is a partial structural diagram of the first floating connection component, the first furnace door, and the first mounting base of the preferred embodiment of this utility model.

[0026] Figure 4 This is a schematic diagram of the dual-furnace structure of a preferred embodiment of the present invention.

[0027] Explanation of reference numerals in the accompanying drawings: 100, Double furnace body structure; 1, Mounting body; 11, First mounting surface; 110, First guide rail; 111, First driving component; 12, Second mounting surface; 120, Second guide rail; 121, Third driving component; 21, First furnace door; 210, First connecting plate; 211, First track; 212, First slider; 213, First mounting base; 214, Second driving component; 22, Second furnace door; 220, Second connecting plate; 221, Second track; 222, Second slider; 223, Second mounting base; 224, Fourth driving component; 31, Fixing plate; 32, Elastic component; 33, Connecting column; 34, Mounting block; 35, Bushing. Detailed Implementation

[0028] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments described are not intended to limit the present invention. Example

[0029] Reference Figures 1 to 4 As shown, this utility model discloses a furnace door structure applied to a high-temperature quartz furnace device. The high-temperature quartz furnace device includes at least one double furnace body structure 100. The double furnace body structure 100 includes two sets of quartz furnaces arranged side by side along the horizontal direction. Each set of quartz furnaces includes multiple furnace bodies arranged along the height direction.

[0030] It should be noted that each pair of furnace doors staggered in the height direction is equipped with one of the aforementioned furnace door structures.

[0031] Specifically, the furnace door structure includes an installation unit, the installation unit includes an installation body 1, the installation body 1 extends along a first direction, and the installation body 1 is located between two sets of quartz furnaces arranged in an alternating manner. It should be noted that, in this embodiment, the first direction is the same as the setting direction of the two sets of quartz furnaces.

[0032] The mounting body 1 has a first mounting surface 11 and a second mounting surface 12 opposite each other along its thickness direction.

[0033] The furnace door structure further includes a furnace door unit, which comprises a first furnace door 21, a second furnace door 22, a first connecting component, and a second connecting component. The first furnace door 21 is slidably connected to the first mounting surface 11 via the first connecting component; the second furnace door 22 is slidably connected to the second mounting surface 12 via the second connecting component. This effectively avoids movement interference between the first furnace door 21 and the second furnace door 22.

[0034] Furthermore, the first furnace door 21 can be driven to move along the first direction and the second direction. When the first furnace door 21 moves along the second direction, it can close or open the first furnace body. Then, when the first furnace door 21 moves along the first direction, it can be completely removed from the opening of the first furnace body, thereby facilitating the entry and exit of materials in the first furnace body or other operations.

[0035] Accordingly, the second furnace door 22 can be driven to move along the first direction and the second direction. When the geothermal furnace door 22 moves along the second direction, it can close or open the second furnace body. Then, when the second furnace door 22 moves along the first direction, it can be completely removed from the opening of the second furnace body to facilitate the entry and exit of materials in the second furnace body or to perform other operations.

[0036] It should be noted that the second direction is perpendicular to the first direction.

[0037] Therefore, it can be understood that the furnace door structure protected by this utility model is applied to a double-furnace structure. The double-furnace structure includes two sets of quartz furnaces arranged side by side along the horizontal direction. Each set of quartz furnaces includes multiple furnace bodies arranged along the height direction. The furnace door structure is provided with an installation unit and a furnace door unit. The installation unit includes an installation body disposed between the two sets of quartz furnaces. The furnace door unit includes a first furnace door, a second furnace door, a first connecting component, and a second connecting component. The first furnace door is movably connected to the first mounting surface of the installation body through the first connecting component, and the second furnace door is movably connected to the second mounting surface of the installation body through the second connecting component. Since the first mounting surface and the second mounting surface are opposite each other, the movement interference between the first furnace door and the second furnace door can be effectively avoided. In addition, the furnace door structure of this utility model can effectively save space and can achieve independent control while saving space, improve the orderliness of the process, and thus improve production efficiency.

[0038] In a preferred embodiment, the first mounting surface 11 is provided with a first guide rail 110 and a first driving member 111. The first connecting component is slidably connected to the first guide rail 110, and the first connecting component is also connected to the movable output end of the first driving member 111 so as to move along the first guide rail 110 under the drive of the first driving member 111.

[0039] In detail, the first guide rail 110 extends along the second direction; the driving direction of the first driving member 111 is the same as the second direction.

[0040] In a preferred embodiment, in order to improve the stability of the first connecting component when it moves along the first guide rail 110, two first guide rails 110 are provided, and the two first guide rails 110 are installed in parallel on the first mounting surface 11.

[0041] The first driving component 111 includes, but is not limited to, a driving cylinder.

[0042] In a preferred embodiment, the first connecting assembly includes a first connecting plate 210, a first track 211, a first slider 212, a first mounting base 213, and a second driving member 214. The first guide rail 110 is provided with a sliding block, and the first connecting plate 210 is slidably connected to the first guide rail 110 via the sliding block. The first track 211 extends along the first direction and is disposed on the upper surface of the first connecting plate 210. The first slider 212 is slidably connected to the first track 211, and the first mounting base 213 is fixedly connected to the first slider 212. Simultaneously, the first mounting base 213 is connected to the movable output end of the second driving member 214, and the first furnace door 21 is connected to the first mounting base 213.

[0043] The second driving component 214 includes, but is not limited to, a driving cylinder.

[0044] In a preferred embodiment, the second mounting surface 12 is provided with a second guide rail 120 and a third drive member 121. The second connecting component is slidably connected to the second guide rail 120, and the second connecting component is also connected to the movable output end of the third drive member 121 so as to move along the second guide rail 120 under the drive of the third drive member 121.

[0045] It should be noted that the second guide rail 120 extends along the second direction; the driving direction of the third driving member 121 is the same as the second direction.

[0046] In a preferred embodiment, in order to improve the stability of the second connecting component when it moves along the second guide rail 120, two second guide rails 120 are provided, and the two second guide rails 120 are installed in parallel on the second mounting surface 12.

[0047] The third driving component 121 includes, but is not limited to, a driving cylinder.

[0048] In a preferred embodiment, the second connecting assembly includes a second connecting plate 220, a second track 221, a second slider 222, a second mounting base 223, and a fourth driving member 224. The second connecting plate 220 is slidably connected to the second guide rail 120. The second track 221 extends along the first direction and is disposed on the second connecting plate 220. The second slider 222 is slidably connected to the second track 221. The second mounting base 223 is fixedly connected to the second slider 222. At the same time, the second mounting base 223 is connected to the movable output end of the fourth driving member 224. The second furnace door 22 is connected to the second mounting base 223.

[0049] The fourth driving component 224 includes, but is not limited to, a driving cylinder.

[0050] In order to compensate and buffer during the opening and closing of the furnace door, and to absorb mechanical errors during the sealing of the furnace door, the furnace door structure also includes a floating connection unit, which includes a first floating connection component; the first furnace door 21 is connected to the first connection component through the first floating connection component.

[0051] Specifically, the first furnace door 21 is connected to the first mounting base 213 via the first floating connection assembly.

[0052] Furthermore, the first floating connection assembly includes a fixed plate 31 and a floating module; the fixed plate 31 is connected to the first mounting base 213, and the fixed plate 31 is movably connected to the first furnace door 21 through the floating module.

[0053] Furthermore, the floating module includes an elastic element 32, a connecting column 33, a mounting block 34, a floating joint, and a bushing 35. The connecting column 33 is mounted on the fixed plate 31. The mounting block 34 is elastically connected to the first furnace door 21 through the elastic element 32 and the floating joint. The mounting block 34 has a through hole, which is vertically positioned on the mounting block 34. The connecting column 33 is connected to the through hole through the bushing 35, and the connecting column 33 and the through hole are clearance-fitted. With this configuration, the first furnace door 21 can have a certain amount of movement redundancy in both the horizontal and vertical directions.

[0054] In a preferred embodiment, two elastic elements 32 are spaced apart, and the floating joint is disposed between the two elastic elements 32.

[0055] The elastic element 32 includes, but is not limited to, a spring.

[0056] In a preferred embodiment, the floating connection unit further includes a second floating connection component, through which the second furnace door 22 is connected to the second connection component; the second floating connection component has the same structure as the first floating connection component. Example

[0057] This utility model also discloses a quartz furnace device, including a furnace door structure as described in Embodiment 1, wherein the quartz furnace device includes a double furnace body structure 100 arranged in parallel.

[0058] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0059] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0060] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A furnace door structure, applied to high-temperature quartz furnace equipment, characterized in that: The high-temperature quartz furnace device comprises at least one double-furnace structure, the double-furnace structure comprises two groups of quartz furnaces arranged side by side in a horizontal direction, each group of quartz furnaces comprises a plurality of furnace bodies arranged in a height direction, wherein each two furnace doors arranged alternately in the height direction are provided with the furnace door structure, and the furnace door structure comprises: The mounting unit comprises a mounting body extending in a first direction, and the mounting body has opposite first and second mounting surfaces in the thickness direction thereof; The furnace door unit comprises a first furnace door, a second furnace door, a first connecting assembly, and a second connecting assembly, the first furnace door is connected to the first mounting surface in sliding mode through the first connecting assembly, and the second furnace door is connected to the second mounting surface in sliding mode through the second connecting assembly; The first furnace door can be driven to move in the first and second directions, and the second furnace door can be driven to move in the first and second directions; the second direction is perpendicular to the first direction.

2. A door structure according to claim 1, wherein: The first mounting surface is provided with a first guide rail and a first driving member, the first connecting assembly is connected to the first guide rail in sliding mode, and the first connecting assembly is further connected to the movable output end of the first driving member to move along the first guide rail under the driving of the first driving member; The first guide rail extends in the second direction, and the driving direction of the first driving member is the same as the second direction.

3. A door structure according to claim 2, wherein: The first connecting assembly comprises a first connecting plate, a first rail, a first slider, a first mounting seat, and a second driving member, the first connecting plate is connected to the first guide rail in sliding mode, the first rail extends in the first direction and is arranged on the first connecting plate, the first slider is connected to the first rail in sliding mode, the first mounting seat is fixedly connected to the first slider, the first mounting seat is further connected to the movable output end of the second driving member, and the first furnace door is connected to the first mounting seat.

4. A door structure according to claim 1, wherein: The second mounting surface is provided with a second guide rail and a third driving member, the second connecting assembly is connected to the second guide rail in sliding mode, and the second connecting assembly is further connected to the movable output end of the third driving member to move along the second guide rail under the driving of the third driving member; The second guide rail extends in the second direction, and the driving direction of the third driving member is the same as the second direction.

5. A door structure according to claim 4, wherein: The second connecting assembly comprises a second connecting plate, a second rail, a second slider, a second mounting seat, and a fourth driving member, the second connecting plate is connected to the second guide rail in sliding mode, the second rail extends in the first direction and is arranged on the second connecting plate, the second slider is connected to the second rail in sliding mode, the second mounting seat is fixedly connected to the second slider, the second mounting seat is further connected to the movable output end of the fourth driving member, and the second furnace door is connected to the second mounting seat.

6. A door structure according to claim 1, wherein: The floating connecting unit comprises a first floating connecting assembly, and the first furnace door is connected to the first connecting assembly through the first floating connecting assembly.

7. A door structure according to claim 6, wherein: The first floating connection assembly comprises a fixed plate and a floating module; the fixed plate is connected with the first connection assembly, and the fixed plate is movably connected with the first furnace door through the floating module.

8. A door structure according to claim 7, wherein: The floating module comprises an elastic member, a connecting column, a mounting block, a floating joint and a bushing; the connecting column is mounted on the fixed plate; the mounting block is elastically connected with the first furnace door through the elastic member and the floating joint; the mounting block is provided with a through hole; the connecting column is connected with the through hole through the bushing; and the connecting column and the through hole are in clearance fit.

9. A door structure according to claim 6, wherein: The floating connection unit further comprises a second floating connection assembly; the second furnace door is connected with the second connection assembly through the floating connection assembly; and the second floating connection assembly has the same structure as the first floating connection assembly.

10. A quartz furnace apparatus characterized by comprising: The quartz furnace device comprises a furnace door structure as claimed in any one of claims 1-9 and a double furnace body structure arranged side by side.

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