Device capable of controlling compression amount of elastic piece and pressing equipment

Abstract

The utility model relates to the technical field of semiconductors, and discloses a device capable of controlling the compression amount of an elastic piece, which comprises a transmission shaft, a connecting rod, an elastic piece and a fixing piece, wherein the transmission shaft is provided with a limiting structure; one end of the connecting rod is connected with the transmission shaft, and a sliding block is arranged on the connecting rod and moves along the connecting rod under the action of the transmission shaft; the first end of the elastic piece is arranged on the sliding block; the fixing piece is matched with the limiting structure to limit rotation of the transmission shaft. The utility model further discloses pressing equipment which comprises a first pressing plate, a second pressing plate and a device capable of controlling the compression amount of the elastic piece. The first pressing plate and the second pressing plate are connected to the two ends of the elastic piece correspondingly. According to the device capable of controlling the compression amount of the elastic piece and the pressing equipment, the connecting rod rotates along with the transmission shaft, the sliding block can move along the connecting rod, and therefore the elastic piece can be compressed, and when the elastic piece is compressed by the needed amount, the fixing piece can abut against the limiting structure to control the elastic piece to be in the needed compression state.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a device and pressing equipment capable of controlling the compression amount of an elastic element. Background Technology

[0002] During the manufacturing process of semiconductor devices, some devices require a pressing process. The amount of compression of the elastic element during pressing directly affects the pressure applied. In existing technologies, the amount of compression of the elastic element during pressing cannot be controlled, often leading to damage to the semiconductor device due to inappropriate pressure.

[0003] Therefore, there is an urgent need for a device that can control the compression of elastic elements in order to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this invention is to provide a device that can control the compression amount of an elastic element, thereby solving the problem that the compression amount of the elastic element cannot be controlled during the pressing process, which often leads to damage to semiconductor devices due to inappropriate pressure.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A device capable of controlling the compression of an elastic element, comprising:

[0007] The drive shaft is equipped with a limiting structure;

[0008] A connecting rod, one end of which is connected to the drive shaft, and a slider is provided on the connecting rod, which can move along the connecting rod under the action of the drive shaft;

[0009] An elastic element, wherein the first end of the elastic element is disposed on the slider, and the second end of the elastic element can be restricted from moving during the movement of the elastic element;

[0010] The fixing component, in conjunction with the limiting structure, restricts the rotation of the drive shaft.

[0011] As an alternative, a housing is included, in which the drive shaft, connecting rod, and elastic element are disposed, and the second end of the elastic element can be restricted to move by the housing.

[0012] As an alternative, the housing has a first limiting groove on the side adjacent to the second end of the elastic member. During the movement of the elastic member, at least a portion of the second end of the elastic member can extend into the first limiting groove to limit the movement of the elastic member.

[0013] As an alternative, the housing is provided with mounting holes, the fastener passes through the mounting holes, and can abut against the limiting structure.

[0014] As an optional solution, the fixing element is a pin, and the limiting structure is a plurality of second limiting grooves provided along the circumference of the transmission shaft, wherein the pin can at least partially engage in the second limiting grooves.

[0015] As an alternative, a bracket is included, one end of which has a receiving portion, and the drive shaft is at least partially disposed within the receiving portion.

[0016] As an alternative, the drive shaft is provided with a force-applying part, which is located outside the receiving part.

[0017] As an alternative, the bracket is provided with a sliding groove, and the slider is disposed in the sliding groove.

[0018] As an optional solution, the sidewall of the slide is provided with a third limiting groove, and the slider is provided with a protrusion, the protrusion being at least partially accommodated within the third limiting groove.

[0019] This application also provides a pressing device, including a first pressure plate, a second pressure plate, and a device for controlling the compression amount of an elastic element, wherein the first pressure plate and the second pressure plate are respectively connected to both ends of the elastic element.

[0020] This utility model has at least the following beneficial effects:

[0021] In the device and pressing equipment provided by this utility model that can control the compression amount of an elastic element, under the action of external force, the transmission shaft can rotate, the connecting rod rotates together with the transmission shaft, and the slider can move along the connecting rod, thereby compressing the elastic element. When the elastic element is compressed to the required amount, the fixing member can be used to abut against the limiting structure to prevent the transmission shaft from rotating, thereby controlling the elastic element to be in the required compression state. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments of this utility model will be briefly introduced below.

[0023] Figure 1 A schematic diagram of the first angle of a device for controlling the compression amount of an elastic element, provided in an embodiment of this utility model;

[0024] Figure 2 A schematic diagram of the second angle of a device for controlling the compression amount of an elastic element provided in an embodiment of this utility model;

[0025] Figure 3 A schematic diagram of the third angle of a device for controlling the compression amount of an elastic element provided in an embodiment of this utility model;

[0026] Figure 4A schematic diagram of a device (without housing) for controlling the compression amount of an elastic element, provided for an embodiment of this utility model;

[0027] Figure 5 A schematic diagram of the slider provided in this embodiment of the utility model;

[0028] Figure 6 This is a schematic diagram of a pressing device provided in an embodiment of the present utility model.

[0029] Figure label:

[0030] 1. Device capable of controlling the compression of an elastic element; 11. Drive shaft; 111. Limiting structure; 112. Force-applying part; 12. Connecting rod; 13. Slider; 131. Protrusion; 14. Elastic element; 15. Bracket; 151. Receiving part; 152. Slide groove; 153. Support block; 16. Housing; 161. First limiting groove; 17. Fixing element; 2. First pressure plate; 3. Second pressure plate. Detailed Implementation

[0031] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0032] In the prior art, when semiconductor devices need to be pressed, the compression of the elastic element cannot be controlled, which often leads to damage to the semiconductor device due to inappropriate pressure.

[0033] Therefore, such as Figures 1 to 6 As shown, an embodiment of this utility model provides a device and a pressing equipment capable of controlling the compression amount of an elastic element, in order to solve the above-mentioned technical problems.

[0034] Specifically, such as Figure 6 As shown, a pressing device includes a first pressure plate 2, a second pressure plate 3, and a device 1 capable of controlling the compression amount of an elastic element. The first pressure plate 2 and the second pressure plate 3 are respectively connected to both ends of the elastic element 14. When a semiconductor device needs to be pressed, the semiconductor device is placed between the first pressure plate 2 and the second pressure plate 3, and the compression amount of the device 1 capable of controlling the compression amount of the elastic element is adjusted so that the semiconductor device is under the required pressure, thereby avoiding damage to the semiconductor device due to unsuitable pressure.

[0035] like Figures 1 to 3As shown, a device 1 capable of controlling the compression of an elastic element includes a drive shaft 11, a connecting rod 12, an elastic element 14, and a fixing member 17. The drive shaft 11 is provided with a limiting structure 111. One end of the connecting rod 12 is connected to the drive shaft 11, and a slider 13 is provided on the connecting rod 12. The slider 13 can move along the connecting rod 12 under the action of the drive shaft 11. The first end of the elastic element 14 is disposed on the slider 13, and during the movement of the elastic element 14, the second end of the elastic element 14 can be restricted from moving. The fixing member 17 cooperates with the limiting structure 111 to restrict the rotation of the drive shaft 11. When the semiconductor device needs to be pressed, the semiconductor device is placed between the first pressure plate 2 and the second pressure plate 3. External force is used to rotate the drive shaft 11, and the connecting rod 12 rotates together with the drive shaft 11. The slider 13 can move along the connecting rod 12, thereby compressing the elastic element 14. When the elastic element 14 is compressed to the required amount, the fixing member 17 abuts against the limiting structure 111, preventing the drive shaft 11 from rotating. This allows the elastic element 14 to be controlled to be in the required compression state (i.e., the semiconductor device between the first pressure plate 2 and the second pressure plate 3 is under the required pressure).

[0036] In some embodiments, to improve safety during production and prevent workers from touching the housing 16, the drive shaft 11, connecting rod 12, or elastic element 14 is disposed within the housing 16. The second end of the elastic element 14 can be restricted from movement by the housing 16.

[0037] In some embodiments, such as Figure 2 As shown, in order to facilitate the restriction of the second end of the elastic member 14, a first limiting groove 161 is provided on the side of the housing 16 adjacent to the second end of the elastic member 14. During the movement of the elastic member 14, at least part of the second end of the elastic member 14 can be inserted into the first limiting groove 161 to limit the movement of the elastic member 14.

[0038] In some embodiments, such as Figure 3 As shown, in order to facilitate the fixing member 17 to restrict the rotation of the drive shaft 11, the housing 16 is provided with a mounting hole, the fixing member 17 passes through the mounting hole and can abut against the limiting structure 111.

[0039] In some embodiments, to reduce manufacturing costs, the fastener 17 of this application is preferably a pin, and the limiting structure 111 is a plurality of second limiting grooves provided along the circumference of the transmission shaft 11, so that the pin can be at least partially engaged in the second limiting grooves.

[0040] In some embodiments, in order to facilitate the installation of the drive shaft 11 in the housing 16, this application also includes a bracket 15, which is fixed in the housing 16. One end of the bracket 15 is provided with a receiving portion 151, and the drive shaft 11 is at least partially disposed in the receiving portion 151, and the drive shaft 11 can rotate inside the receiving portion 151.

[0041] In some embodiments, in order to facilitate the application of external force to the drive shaft 11, the drive shaft 11 is provided with a force-applying part 112, which is located outside the receiving part 151.

[0042] In some embodiments, in order to enable the slider 13 to move stably along the connecting rod 12, the bracket 15 is provided with a groove 152. One end of the groove 152 is connected to the outside of the receiving part 151, and the other end of the groove 152 is provided with a support block 153. The connecting rod 12 and the slider 13 are disposed in the groove 152. The end of the connecting rod 12 away from the transmission shaft 11 is rotatably connected to the support block 153. The elastic element 14 is at least partially disposed on the upper part of the support block 153 and is in contact with the support block 153. The support block 153 can support the elastic element 14. When the transmission shaft 11 is subjected to external force, the slider 13 can move in the groove 152.

[0043] In some embodiments, to further enhance the stability of the slider 13 during its movement along the connecting rod 12, the sidewall of the slide groove 152 is provided with a third limiting groove, such as... Figure 5 As shown, the slider 13 is provided with a protrusion 131, which matches the third limiting groove. The protrusion 131 can be at least partially accommodated in the third limiting groove, which can prevent the slider 13 from shaking during movement.

[0044] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A device (1) capable of controlling the amount of compression of an elastic member, characterized in that, The transmission shaft (11) is provided with a limiting structure (111); A connecting rod (12) is connected to the transmission shaft (11) at one end, and a sliding block (13) is arranged on the connecting rod (12) and can move along the connecting rod (12) under the action of the transmission shaft (11); An elastic member (14) is arranged on the sliding block (13) at a first end, and a second end of the elastic member (14) can be limited in movement during movement of the elastic member (14); A fixing member (17) cooperates with the limiting structure (111) to limit rotation of the transmission shaft (11). The transmission shaft (11), the connecting rod (12) and the elastic member (14) are arranged in a housing (16), and the second end of the elastic member (14) can be limited in movement by the housing (16).

2. A device (1) capable of controlling the compression amount of an elastic member according to claim 1, characterized in that, The housing (16) is provided with a first limiting groove (161) on a side adjacent to the second end of the elastic member (14), and at least part of the second end of the elastic member (14) can extend into the first limiting groove (161) during movement of the elastic member (14) to limit movement of the elastic member (14).

3. A device (1) capable of controlling the compression amount of elastic members according to claim 2, characterized in that, The housing (16) is provided with a mounting hole, and the fixing member (17) is arranged in the mounting hole and can abut against the limiting structure (111).

4. A device (1) capable of controlling the compression amount of elastic members according to claim 2, characterized in that, The fixing member (17) is a pin, and the limiting structure (111) is a plurality of second limiting grooves arranged circumferentially along the transmission shaft (11), and the pin can be at least partially clamped in the second limiting groove.

5. A device (1) capable of controlling the compression amount of an elastic member according to claim 4, characterized in that, The transmission shaft (11) is provided with a force applying portion (112) arranged outside the accommodating portion (151).

6. A device (1) capable of controlling the compression amount of elastic members according to any one of claims 1 to 5, characterized in that, The housing (16) is provided with a sliding groove (152), and the sliding block (13) is arranged in the sliding groove (152).

7. A device (1) capable of controlling the compression of an elastic member according to claim 6, characterized in that, The side wall of the sliding groove (152) is provided with a third limiting groove, and the sliding block (13) is provided with a protruding portion (131) which can be at least partially accommodated in the third limiting groove.

8. A device (1) capable of controlling the compression amount of elastic members according to claim 6, characterized in that, The device (1) capable of controlling the compression amount of the elastic member according to any one of claims 1 to 9 is provided, and the first pressing plate (2) and the second pressing plate (3) are respectively connected to the two ends of the elastic member (14).

9. A device (1) capable of controlling the compression of an elastic member according to claim 8, characterized in that, ​ 10. A press apparatus characterized by comprising: ​

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