Waste gas purification device
By combining activated carbon filters and dust filters with cleaning and connecting components, the problem of easy filter clogging is solved, achieving efficient purification and convenient maintenance, and improving purification efficiency and equipment stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-08
- Publication Date
- 2026-04-07
AI Technical Summary
Traditional exhaust gas purification equipment is prone to filter clogging when treating exhaust gas from the semiconductor industry, resulting in reduced filtration efficiency and cumbersome, time-consuming, and labor-intensive maintenance.
The system uses a combination of activated carbon filter and dust filter. The cleaning component uses a rotating shaft to drive a rotating rod to clean the dust filter by agitation. The connecting component allows for quick installation and removal of the activated carbon filter, the positioning component fixes the dust filter, and the collection box collects the dust.
It effectively removes harmful gases and dust from exhaust gas, improves purification efficiency, reduces maintenance difficulty and cost, prevents filter clogging, and avoids secondary dust pollution.
Smart Images

Figure CN224086385U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of purification technology, and in particular to a waste gas purification device. Background Technology
[0002] In the semiconductor manufacturing industry, the production process inevitably generates waste gases containing toxic substances (such as ammonia, chlorine, hydrogen fluoride, and volatile organic solvents). If these waste gases are discharged directly without proper treatment, they will not only cause serious pollution to the surrounding environment but also pose a significant threat to the health of nearby residents and workers. Therefore, effectively purifying the waste gases generated in the semiconductor industry to remove toxic components is a crucial step in ensuring production safety and environmental protection.
[0003] Traditional waste gas purification methods face numerous challenges in treating waste gas from the semiconductor industry. On the one hand, the waste gas contains a wide variety of toxic substances with diverse properties, requiring highly efficient purification technologies to ensure treatment effectiveness. On the other hand, the waste gas often contains a large amount of particulate matter, which easily accumulates on the filter screen, leading to decreased filtration efficiency or even filter blockage, affecting the stable operation of the entire purification system.
[0004] Furthermore, the fast-paced production rhythm of the semiconductor industry places higher demands on the maintenance efficiency of exhaust gas purification equipment. Traditional exhaust gas purification equipment is cumbersome to operate in terms of filter replacement and cleaning, which is not only time-consuming and labor-intensive, but may also lead to equipment damage or reduced purification effect due to improper operation. Utility Model Content
[0005] The purpose of this invention is to solve the problem that in the prior art, when exhaust gas passes through the filter screen, the filter screen will be filled with dust, and the filter screen cannot be cleaned during the filtration process, which will reduce the filtration efficiency. Therefore, an exhaust gas purification device is proposed.
[0006] To achieve the above objectives, the present invention adopts the following technical solution:
[0007] An exhaust gas purification device includes a housing, an air inlet pipe for introducing air into the housing is fixed to the side end of the housing, and an exhaust fan is fixed inside the air inlet pipe.
[0008] The chamber is provided with an exhaust port for venting air. An activated carbon filter is provided in the exhaust port for filtering the air. A connecting component is provided between the activated carbon filter and the chamber, and the connecting component is used to quickly fix the activated carbon filter in the exhaust port.
[0009] The air outlet is also equipped with a dust filter for filtering dust, and the housing is equipped with a positioning component for fixing the position of the dust filter.
[0010] And a cleaning component used in conjunction with the positioning component, the cleaning component being disposed inside the housing for cleaning the dust filter by agitation.
[0011] In one possible design, the connecting assembly includes a matching frame fixed to the surface of the activated carbon filter, with two second grooves provided in the matching frame, and a snap-fit block sliding in each of the two second grooves. A snap-fit spring is fixed to the adjacent ends of the two snap-fit blocks, and the two snap-fit springs are respectively fixed in the two second grooves. Two snap-fit slots are provided in the housing, and the two snap-fit blocks are respectively snapped into the two snap-fit slots.
[0012] In one possible design, a lever is fixed to the top of each of the two snap-fit blocks.
[0013] In one possible design, the positioning assembly includes a U-shaped frame fixed inside the air outlet, four connecting rods sliding inside the U-shaped frame, a dust filter fixed to the bottom end of the four connecting rods, two extrusion plates fixed to the top end of the four connecting rods, and four return springs fixed between the U-shaped frame and the two extrusion plates, with the four return springs respectively sleeved on the surface of the four connecting rods.
[0014] In one possible design, the cleaning assembly includes a rotating shaft that rotates within an air outlet, with two rotating rods fixed to the surface of the shaft. The two rotating rods are in contact with two extrusion plates, and a drive motor is fixed to the side of the housing. The drive motor is fixedly connected to the rotating shaft via a coupling.
[0015] In one possible design, a first groove is provided inside the box, and a collection box for collecting dust slides in the first groove, with a handle fixed to the side end of the collection box.
[0016] In one possible design, a first magnetic block is fixed to the side of the receiving box, and a second magnetic block that is magnetically connected to the first magnetic block is fixed in the first groove.
[0017] In one possible design, casters are fixed at the four corners of the bottom of the box.
[0018] In this application, during use, exhaust gas is drawn into the chamber by starting the exhaust fan for filtration. The exhaust gas passes through a dust filter to remove dust, and then through an activated carbon filter to remove harmful substances from the air. The drive motor is started to rotate the shaft, which in turn rotates the rod. The rod rotates and squeezes the extrusion plate, causing it to move in the opposite direction. The extrusion plate, through four connecting rods, moves the dust filter downwards. After the rod rotates to a certain position, it releases the pressure on the extrusion plate, and a return spring pushes the extrusion plate back to its original position. This process is repeated to agitate the dust filter, and the dust falls into the collection box for collection. The collection box is then pulled out by pulling the handle to clean the dust.
[0019] Beneficial effects
[0020] In this utility model, the exhaust gas purification device, through the combined use of the cleaning component and the positioning component, can achieve the effect of continuously agitating and cleaning the dust filter, thus preventing the dust filter from becoming clogged.
[0021] In this utility model, the exhaust gas purification device can achieve the effect of quick installation and disassembly of activated carbon filter screen through the connecting components;
[0022] In this invention, the dual filtration of activated carbon filter and dust filter effectively removes harmful gases and dust from the exhaust gas, improving purification efficiency. The activated carbon filter can be quickly installed and disassembled through connecting components, and the dust filter can be automatically cleaned through positioning and cleaning components, reducing maintenance difficulty and cost. A collection box is set up to collect the dust that falls during the cleaning process, avoiding secondary dust pollution, and facilitating cleaning and disposal. Attached Figure Description
[0023] Figure 1 This is a front perspective view of a waste gas purification device proposed in this utility model;
[0024] Figure 2 This is a first cross-sectional view of a waste gas purification device proposed in this utility model;
[0025] Figure 3 This utility model proposes a waste gas purification device. Figure 2 A magnified view of a section at point A in the middle;
[0026] Figure 4 This is a second cross-sectional view of a waste gas purification device proposed in this utility model.
[0027] In the diagram: 1. Box body; 2. Air inlet pipe; 3. Exhaust fan; 4. Casters; 5. First groove; 6. Receiving box; 7. Handle; 8. Air outlet; 9. Matching frame; 10. Activated carbon filter; 11. Second groove; 12. Paddle; 13. Drive motor; 14. Rotating shaft; 15. Rotating rod; 16. U-shaped frame; 17. Dust filter; 18. Connecting rod; 19. Return spring; 20. Extrusion plate; 21. Snap-fit groove; 22. Snap-fit block; 23. Snap-fit spring; 24. First magnetic block; 25. Second magnetic block. Detailed Implementation
[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0029] Example 1
[0030] Reference Figures 1-4 A purification device includes a housing 1, which serves as the main body of the entire device. An air inlet pipe 2 is fixed to its side, and an exhaust fan 3 is installed inside the air inlet pipe 2 to draw the waste gas to be purified into the housing 1. An air outlet 8 is provided inside the housing 1, and an activated carbon filter 10 is first installed inside the air outlet 8 to initially remove harmful gases from the waste gas.
[0031] The activated carbon filter 10 is fixed in the air outlet 8 by a connecting assembly. The connecting assembly includes two second grooves 11 set in the matching frame 9. A snap-fit block 22 is slidably installed in the second groove 11. The snap-fit block 22 is connected to the second groove 11 by a snap-fit spring 23, ensuring that the snap-fit block 22 can be elastically snapped into the snap-fit groove 21 in the housing 1, thereby realizing the quick installation and removal of the activated carbon filter 10.
[0032] Both locking blocks 22 have a lever 12 fixed at their top ends for easy movement of the locking blocks 22;
[0033] Inside the air outlet 8, a dust filter 17 is further provided to filter dust in the exhaust gas. The dust filter 17 is fixed by a positioning assembly, which includes a U-shaped frame 16. Four connecting rods 18 are slidably installed inside the U-shaped frame 16, and the dust filter 17 is fixed to the bottom end of the connecting rods 18. A pressing plate 20 is fixed to the top end of the connecting rods 18. The pressing plate 20 is connected to the U-shaped frame 16 by a return spring 19 to ensure that the dust filter 17 can elastically return to its original position when subjected to external force.
[0034] A cleaning assembly is provided for automatically cleaning the dust filter 17. The cleaning assembly includes a rotating shaft 14 that rotates within the air outlet 8. Two rotating rods 15 are fixed on the shaft 14, and the rods 15 contact the extrusion plate 20. When the shaft 14 rotates, the rods 15 push the extrusion plate 20 up and down, thereby causing the dust filter 17 to vibrate slightly, achieving a cleaning effect. The shaft 14 is driven by a drive motor 13 located on the side of the housing 1 via a coupling.
[0035] This application can be used for waste gas purification, or in other fields applicable to this application.
[0036] Example 2
[0037] refer to Figures 1-4 An improvement upon Embodiment 1: A waste gas purification device, applied in the field of air purification technology, further includes a first groove 5 inside the housing 1 for placing a collection box 6 to collect dust that falls during the cleaning process. A handle 7 and a first magnetic block 24 are fixed to the side of the collection box 6. A second magnetic block 25, magnetically connected to the first magnetic block 24, is fixed inside the first groove 5, facilitating the placement and removal of the collection box 6.
[0038] Finally, casters 4 are fixed at the four corners of the bottom of the housing 1 to facilitate the movement and handling of the entire device.
[0039] However, as is well known to those skilled in the art, the working principle and wiring method of the exhaust fan 3 are commonplace and are all conventional methods or common knowledge. They will not be described in detail here. Those skilled in the art can make any selections according to their needs or convenience.
[0040] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A waste gas purification device, characterized in that, include: Box (1), with an air inlet pipe (2) fixed to the side end of the box (1) for air intake into the box (1), and an exhaust fan (3) fixed inside the air inlet pipe (2); The box (1) is provided with an air outlet (8) for exhausting air. The air outlet (8) is provided with an activated carbon filter (10) for filtering air. A set of connecting components is provided between the activated carbon filter (10) and the box (1). The connecting components are used to quickly fix the activated carbon filter (10) in the air outlet (8). The air outlet (8) is also provided with a dust filter (17) for filtering dust, and the housing (1) is provided with a positioning component for fixing the position of the dust filter (17). The cleaning component is used in conjunction with the positioning component. The cleaning component is located inside the housing (1) and is used to clean the dust filter (17) by agitation. The connecting component includes a matching frame (9) fixed to the surface of the activated carbon filter (10). The matching frame (9) has two second grooves (11). Each of the two second grooves (11) has a snap-fit block (22) sliding inside. Each of the two snap-fit blocks (22) has a snap-fit spring (23) fixed at the close ends. Each of the two snap-fit springs (23) is fixed in the two second grooves (11). The housing (1) has two snap-fit slots (21). Each of the two snap-fit blocks (22) snaps into the two snap-fit slots (21). Each of the top ends of the two snap-fit blocks (22) has a paddle (12) fixed.
2. The waste gas purification device according to claim 1, characterized in that, The positioning component includes a U-shaped frame (16) fixed inside the air outlet (8), four connecting rods (18) sliding inside the U-shaped frame (16), a dust filter (17) fixed to the bottom of the four connecting rods (18), two extrusion plates (20) fixed to the top of the four connecting rods (18), and four return springs (19) fixed between the U-shaped frame (16) and the two extrusion plates (20), with the four return springs (19) respectively sleeved on the surface of the four connecting rods (18).
3. The waste gas purification device according to claim 2, characterized in that, The cleaning assembly includes a rotating shaft (14) that rotates within the air outlet (8). Two rotating rods (15) are fixed to the surface of the rotating shaft (14). The two rotating rods (15) are in contact with the top ends of the two extrusion plates (20) respectively. A drive motor (13) is fixed to the side end of the housing (1). The drive motor (13) is fixedly connected to the rotating shaft (14) via a coupling.
4. The waste gas purification device according to claim 3, characterized in that, The box (1) has a first groove (5) inside, and a collection box (6) for collecting dust slides in the first groove (5). A handle (7) is fixed to the side of the collection box (6).
5. The waste gas purification device according to claim 4, characterized in that, The receiving box (6) is fixed with a first magnetic block (24) on its side, and a second magnetic block (25) is fixed in the first groove (5) and magnetically connected to the first magnetic block (24).
6. The waste gas purification device according to claim 1, characterized in that, The four corners of the bottom of the box (1) are all fixed with casters (4).