Mechanical arm performance detection system

Abstract

The utility model provides a mechanical arm performance detection system, which comprises a plurality of sampling sensors and a master control end, the sampling sensors are used for acquiring operating parameters of rod walls on a mechanical arm, the master control end is used for receiving and displaying the operating parameters, the sampling sensors are wirelessly connected with the master control end through a first wireless circuit, and each sampling sensor is in one-to-one correspondence with the rod walls of the mechanical arm; the master control end comprises a master control chip, the master control chip is connected with a storage module, a display module and a plurality of second wireless circuits, and the second wireless circuits correspond to the first wireless circuits one by one. According to the utility model, the operation parameters of each rod wall on the mechanical arm can be independently acquired and wirelessly transmitted, and the accuracy of acquired data is prevented from being influenced by a power supply wire and a signal wire.

Description

Technical Field

[0001] This utility model relates to the field of robotic arm performance technology, and specifically to a robotic arm performance testing system. Background Technology

[0002] In the semiconductor manufacturing industry, wafer fabrication is an extremely critical step that directly determines the quality and performance of chips. As core equipment, wafer fabrication equipment relies heavily on robotic arms that transport or transfer wafers.

[0003] Because wafers are thin and light, they require extremely high precision in the transmission of data by robotic arms. Even the slightest movement error by the robotic arm, causing the wafer to deviate from the preset distance, will seriously affect subsequent processing steps such as photolithography, etching, and coating, ultimately reducing chip yield and increasing production costs.

[0004] Especially for large robotic arms with many degrees of freedom, complex and diverse movements occur during operation. In such cases, the power supply and signal wires connecting the sensors are prone to tangling, leading to problems such as loose wires and signal interference, severely impacting the accuracy and stability of the detection results. Utility Model Content

[0005] In view of this, the problem to be solved by this utility model is to provide a robotic arm performance testing system. This system can individually collect the operating parameters of each link on the robotic arm and transmit them wirelessly, avoiding the influence of power supply wires and signal lines on the accuracy of the collected data.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a robotic arm performance testing system, including a number of sampling sensors for collecting the operating parameters of each link wall on the robotic arm and a main control terminal for receiving and displaying the operating parameters. The sampling sensors are wirelessly connected to the main control terminal through a first wireless circuit, and each sampling sensor corresponds one-to-one with a link wall of the robotic arm.

[0007] The main control terminal includes a main control chip, which is connected to a storage module, a display module and several second wireless circuits, and the second wireless circuits correspond one-to-one with the first wireless circuits.

[0008] Furthermore, the first wireless circuit includes a conversion chip U6. The SDI and SDO pins of the conversion chip U6 communicate with the sampling sensor data. The TX pin of the conversion chip U6 is connected in series with the wireless transceiver via capacitor C6, inductor L3, capacitor C10, and inductor L4. The two ends of inductor L3 are connected in series with ground via capacitors C8 and C7, respectively. The two ends of inductor L4 are connected in series with ground via capacitors C9 and C11, respectively.

[0009] Furthermore, both the sampling sensor and the first wireless circuit are connected to a power supply circuit, which includes an energy storage power source, which is a rechargeable dry cell battery.

[0010] Furthermore, the power supply circuit includes a voltage regulation circuit connected to the energy storage power supply. The voltage regulation circuit includes a voltage regulation chip U1. The VIN pin of the voltage regulation chip U1 is connected to the positive terminal of the energy storage power supply, and the SW pin of the voltage regulation chip U1 is connected to the VOUT port through an inductor L1.

[0011] Furthermore, the main control chip is model DTM32.

[0012] Furthermore, the second wireless circuit includes a conversion chip U3. The nSEL pin, nIRQ pin, SDI pin, SDO pin, and SCLK pin of the conversion chip U3 are all connected to the main control chip. The RXn pin of the conversion chip U3 is connected in series with the wireless transceiver via capacitors C12, C13, and inductor L6. The two ends of inductor L6 are connected in series with ground via capacitors C14 and C15, respectively.

[0013] Furthermore, the sampling sensor is a distance sensor.

[0014] The advantages and positive effects of this utility model are:

[0015] The sampling sensor is connected to a first wireless circuit and a power supply circuit. The power supply circuit is powered by a rechargeable dry cell battery and supplies power to both the sampling sensor and the first wireless circuit. When the sampling sensor is installed on the robotic arm, there is no need to connect a large number of power supply wires and signal lines. It can collect the operating parameters of each link wall on the robotic arm independently and transmit them wirelessly. This avoids the interference of power supply wires and signal lines with the normal operation of the robotic arm, the sampling of the sampling sensor, and the generation and transmission of sampling and data, thereby improving the accuracy of the test. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0017] Figure 1 This is an overall structural diagram of a robotic arm performance testing system according to this utility model;

[0018] Figure 2 This is a first wireless circuit diagram of a robotic arm performance testing system according to this utility model;

[0019] Figure 3 This is a voltage regulation circuit diagram of a robotic arm performance testing system according to this utility model;

[0020] Figure 4 This is a second wireless circuit diagram of a robotic arm performance testing system according to this utility model; Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0023] This utility model provides a robotic arm performance testing system, such as Figure 1 As shown, it includes several sampling sensors that collect the operating parameters of each link wall on the robotic arm and a main control terminal that receives and displays the operating parameters. The sampling sensors are wirelessly connected to the main control terminal through a first wireless circuit. Each sampling sensor corresponds one-to-one with a link wall of the robotic arm, collects the operating parameters of each link wall individually, and wirelessly transmits them to the main control terminal.

[0024] The main control unit includes a main control chip, which is connected to a storage module, a display module, and several second wireless circuits. Each second wireless circuit corresponds one-to-one with a first wireless circuit to receive operating parameters collected by the corresponding sampling sensors. The main control chip receives and processes the operating parameters, storing them in the storage module. The display module displays the operating parameters in waveform form, allowing the user to confirm that the movement distance and rotation angle of each pole meet the set requirements.

[0025] In one embodiment of this application, the sampling sensor is a distance sensor, used to collect data on whether the movement distance or rotation angle of each arm on the robotic arm meets the requirements.

[0026] like Figure 2 As shown, the first wireless circuit includes a conversion chip U6. The SDI and SDO pins of the conversion chip U6 communicate with the sampling sensor, and the TX pin of the conversion chip U6 is connected to the wireless transceiver. The conversion chip U6 receives operating parameters in the form of electrical signals, converts them into wireless signals, and transmits them through the wireless transceiver.

[0027] The SCLK pin of the conversion chip U6 is connected to the sampling sensor to transmit the clock signal. A capacitor C6, an inductor L3, a capacitor C10, and an inductor L4 are connected in series between the TX pin of the conversion chip U6 and the wireless transceiver. Capacitors C8 and C7 are connected in series between the two ends of inductor L3 and ground, and capacitors C9 and C11 are connected in series between the two ends of inductor L4 and ground, respectively, to filter out noise in the wireless signal. By adjusting the wave characteristics of inductors L4 and L3, the frequency band of the wireless signal is adjusted to transmit the operating parameters of the corresponding sampling sensor individually.

[0028] The sampling sensor and the first wireless circuit are connected to the power supply circuit, which includes an energy storage power supply and two voltage regulation circuits. The two voltage regulation circuits provide electrical energy of corresponding pressure to the conversion chip U6 and the sampling sensor respectively. The circuit structures of the two voltage regulation circuits are the same.

[0029] like Figure 3 As shown, the voltage regulation circuit includes a voltage regulator chip U1. The VIN pin of the voltage regulator chip U1 is connected to the positive terminal of the energy storage power supply, and the negative terminal of the energy storage power supply is grounded. The SW pin of the voltage regulator chip U1 is connected to one end of the inductor L1, and the other end is connected to the VOUT port. The inductor L1 is used to filter out noise, and the VOUT port is used to output electrical energy at a set voltage. To improve the stability of the output electrical energy at the VOUT port, a variable resistor R2 is connected in series between the VOUT port and ground. The variable pin of the variable resistor R2 is connected to the FB pin of the voltage regulator chip U1, feeding back the voltage signal of the VOUT port to the voltage regulator chip U1 for feedback regulation. In one embodiment of this application, the energy storage power supply is a rechargeable dry cell battery.

[0030] The main control chip is connected to several second wireless circuits to individually receive wireless signals in corresponding frequency bands. One embodiment of this application uses a DTM32 main control chip, which is compatible with multiple second wireless circuits.

[0031] like Figure 4 As shown, the second wireless circuit includes a conversion chip U3. The nSEL pin, nIRQ pin, SDI pin, SDO pin and SCLK pin of the conversion chip U3 are all connected to the main control chip to control whether the conversion chip U3 receives wireless signals.

[0032] The RXn pin of the conversion chip U3 is connected in series with capacitors C12 and C13 and inductor L6. The two ends of inductor L6 are connected in series with ground with capacitors C14 and C15 respectively to filter out noise in the wireless signal. The conversion chip U3 receives the wireless signal of the corresponding frequency band and converts it into an electrical signal. The main control chip receives the electrical signal through the SDI and SDO pins and then saves it to the storage module.

[0033] The working principle and process of this utility model are as follows:

[0034] On each link of the robotic arm, a number of sampling sensors are evenly distributed. These sensors correspond one-to-one with each link of the robotic arm and collect the operating parameters of each link individually. Whether it is the displacement change of the link during linear movement or the slight change of angle during rotation around the axis, it can be accurately captured by the sampling sensors.

[0035] The operating parameters collected by the sampling sensors are transmitted to the main control unit wirelessly via a first wireless circuit. This wireless connection eliminates the constraints of cables, allowing the robotic arm to operate more flexibly and avoiding malfunctions caused by cable tangling or pulling. The robotic arm's frequent and complex movements do not interfere with the data acquisition and transmission of the sampling sensors.

[0036] The main control chip receives the wireless signal transmitted by the corresponding first wireless circuit through the second wireless circuit, analyzes and organizes it, and stores it in the storage module for easy access and in-depth analysis later. When users view the test data, the display module presents the operating parameters to them in an intuitive waveform format, allowing them to easily determine whether the operating status of each pole meets the set requirements.

[0037] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made within the scope of this utility model should still fall within the scope of this patent.

Claims

1. A robotic arm performance testing system, characterized in that, It includes several sampling sensors that collect the operating parameters of each link wall on the robotic arm and a main control terminal that receives and displays the operating parameters. The sampling sensors are wirelessly connected to the main control terminal through a first wireless circuit, and each sampling sensor corresponds one-to-one with a link wall of the robotic arm. The main control terminal includes a main control chip, which is connected to a storage module, a display module and several second wireless circuits, and the second wireless circuits correspond one-to-one with the first wireless circuits.

2. The robotic arm performance testing system according to claim 1, characterized in that, The first wireless circuit includes a conversion chip U6. The SDI and SDO pins of the conversion chip U6 communicate with the sampling sensor. The TX pin of the conversion chip U6 is connected in series with the wireless transceiver via capacitor C6, inductor L3, capacitor C10, and inductor L4. The two ends of inductor L3 are connected in series with ground via capacitors C8 and C7, respectively. The two ends of inductor L4 are connected in series with ground via capacitors C9 and C11, respectively.

3. The robotic arm performance testing system according to claim 1, characterized in that, Both the sampling sensor and the first wireless circuit are connected to a power supply circuit, which includes an energy storage power source, which is a rechargeable dry cell battery.

4. The robotic arm performance testing system according to claim 3, characterized in that, The power supply circuit includes a voltage regulation circuit connected to the energy storage power supply. The voltage regulation circuit includes a voltage regulation chip U1. The VIN pin of the voltage regulation chip U1 is connected to the positive terminal of the energy storage power supply, and the SW pin of the voltage regulation chip U1 is connected to the VOUT port through an inductor L1.

5. The robotic arm performance testing system according to claim 1, characterized in that, The main control chip is model DTM32.

6. The robotic arm performance testing system according to claim 1, characterized in that, The second wireless circuit includes a conversion chip U3. The nSEL pin, nIRQ pin, SDI pin, SDO pin and SCLK pin of the conversion chip U3 are all connected to the main control chip. The RXn pin of the conversion chip U3 is connected in series with the wireless transceiver with capacitor C12, capacitor C13 and inductor L6 in sequence. The two ends of the inductor L6 are connected in series with ground with capacitor C14 and capacitor C15 respectively.

7. The robotic arm performance testing system according to claim 1, characterized in that, The sampling sensor is a distance sensor.

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