DLC coating deposition equipment

Abstract

The utility model provides DLC (Diamond Like Carbon) coating deposition equipment. The DLC coating deposition equipment comprises a furnace body, a rotating stand vehicle, two fans and two conveying components, the rotating stand vehicle is arranged at the central position in the furnace body; the two fans are respectively mounted on the outer surface of the furnace body; the two conveying assemblies are arranged in the furnace body, each conveying assembly comprises a plurality of hollow plates, a plurality of air outlet holes and a plurality of conveying pipes, the hollow plates are sequentially installed on the inner wall of the furnace body from left to right, the air outlet holes are formed in the surfaces of the hollow plates, and the conveying pipes are connected between the hollow plates. According to the DLC coating deposition equipment provided by the utility model, the plurality of hollow plates, the plurality of air outlet holes and the plurality of conveying pipes are arranged on the inner wall of the furnace body and are matched with the fan for use, so that when gas is conveyed into the furnace body, the gas can be conveniently conveyed at different positions in the furnace body; therefore, the uniformity of whole gas conveying can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of deposition equipment, especially to a DLC coating deposition equipment. BACKGROUND

[0002] DLC is a kind of substance that is composed of carbon elements, similar in nature to diamond, and also has the structure of graphite atomic composition, diamond-like carbon film (DLC) is an amorphous thin film, due to high hardness and high elastic modulus, low friction factor, wear resistance and good vacuum tribological properties, it is very suitable as a wear-resistant coating, DLC film has good anti-bonding property, especially for copper and aluminum, therefore, DLC has a wide application in copper and aluminum processing tools, molds and friction parts, the DLC equipment is a kind of equipment for depositing DLC thin film, which can deposit DLC thin film on metal substrate at low temperature of 260 degrees.

[0003] The deposition technology of DLC coating mainly includes chemical vapor deposition (CVD) and physical vapor deposition (PVD), the most common deposition method of CVD is plasma enhanced chemical vapor deposition technology (PECVD), and the metal bottom layer (such as Cr / Ti) is deposited by PVD method, then the carbon-containing gas such as methane and acetylene is introduced into the vacuum chamber, the gas is ionized by microwave and radio frequency discharge, and DLC is generated by gas ionization and reaction deposition, so the equipment generally has the functions of PVD and gas discharge cracking deposition thin film.

[0004] The patent application with publication number CN212375360U proposed in the prior art is configured with two kinds of gas inlet duct delivery pipes and rectangular cavities, one surrounds the target baffle outside, and the other is away from the target seat, and the delivery pipe and the rectangular cavity are both rectangular hollow, the operation control panel opens the air blower and the air blower to suck the external gas, which is delivered to the rectangular cavity by the air supply box and then released to the inside of the furnace body, the delivery pipe surrounding the target baffle outside is mainly used for passing Ar gas, the plate-shaped gas inlet channel is mainly used for passing contaminated gas, and cooperates with the baffle to protect the surface of the target material and reduce pollution, the operation control panel opens the air extractor, and the air extractor is supported by the air extraction box to deliver the gas in the furnace body out of the pipe, the rectangular hollow plate-shaped rectangular cavity and the delivery pipe are air supply devices, the existing basic air supply pipe is a steel pipe, and the rectangular hollow plate-shaped air supply device has the advantages of large gas inlet amount and low pressure of each gas outlet, realizes stable flow of the gas of the deposition equipment, ensures stable operation of the deposition equipment, and completes the use of the deposition equipment.

[0005] However, the rectangular hollow plate-shaped delivery pipe and the rectangular cavity on the existing deposition equipment can realize stable flow of the gas, but the existing mechanism can only deliver the gas at the specified position, and cannot deliver the gas at the specified position according to the required position.

[0006] Therefore, it is necessary to provide a DLC coating deposition device to solve the above technical problems. Inventive Content

[0007] The utility model provides a kind of DLC coating deposition equipment, solve the problem that current mechanism is transported only in specified position when carrying out gas, and cannot be transported according to the position required by gas.

[0008] To solve the above technical problems, the utility model provides a kind of DLC coating deposition equipment, comprising:

[0009] Furnace body, rotating dolly, two fans and two conveying components;

[0010] The rotating dolly is arranged at the center position inside the furnace body;

[0011] Two fans are respectively installed on the outer surface of the furnace body.

[0012] Two conveying components are respectively arranged inside the furnace body, the conveying component includes a plurality of hollow plates, a plurality of air outlets and a plurality of conveying pipes, the plurality of hollow plates are sequentially installed on the inner wall of the furnace body from left to right, the plurality of air outlets are all arranged on the surface of the plurality of hollow plates, and the plurality of conveying pipes are respectively connected between the plurality of hollow plates.

[0013] Preferably, a fixing assembly is arranged between the hollow plate and the furnace body, the fixing assembly includes a threaded block, a communication block and a threaded sleeve, the threaded block is connected to the inner wall of the furnace body, and the communication block is sleeved on the surface of the threaded block and connected with the hollow plate.

[0014] Preferably, the threaded sleeve is threadedly connected to the surface of the threaded block.

[0015] Preferably, a plurality of controllers are installed on the surface of the furnace body.

[0016] Preferably, a furnace door is arranged on one side of the furnace body.

[0017] Preferably, a support is installed on the bottom of the furnace body.

[0018] Preferably, a splicing assembly is arranged between the furnace body and the hollow plate, the splicing assembly includes a hollow conveying plate, two mounting heads and a hose, the hollow conveying plate is arranged on one side of the inner wall of the furnace body, the two mounting heads are respectively arranged between the hollow plate and the hollow conveying plate, and the hose is connected between the two mounting heads.

[0019] Compared with the related art, the utility model provides a kind of DLC coating deposition equipment with the following advantages

[0020] Beneficial effects:

[0021] This invention provides a DLC coating deposition equipment, which has multiple hollow plates, multiple air outlets and multiple conveying pipes on the inner wall of the furnace body to work with a blower. When conveying gas into the interior of the furnace body, it is convenient to convey gas to different positions inside the furnace body, thereby increasing the uniformity of the entire gas delivery. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a first embodiment of a DLC coating deposition apparatus provided by this utility model;

[0023] Figure 2 for Figure 1 The enlarged schematic diagram of part A shown below;

[0024] Figure 3 for Figure 1 A three-dimensional structural diagram of the external structure of the deposition equipment is shown.

[0025] Figure 4 This is a schematic diagram of the structure of a second embodiment of a DLC coating deposition apparatus provided by the present invention;

[0026] Figure 5 for Figure 4 The enlarged schematic diagram of part B is shown.

[0027] The diagram labels are: 1. Furnace body; 2. Rotary car;

[0028] 3. Conveying assembly; 31. Hollow plate; 32. Air outlet; 33. Conveying pipe;

[0029] 4. Fan;

[0030] 5. Fixing component; 51. Threaded block; 52. Connecting block; 53. Threaded sleeve;

[0031] 6. Controller; 7. Furnace door;

[0032] 8. Splicing components; 81. Hollow conveyor plate; 82. Mounting head; 83. Flexible hose;

[0033] 9. Bracket. Detailed Implementation

[0034] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0035] First Embodiment

[0036] Please refer to the following: Figure 1 , Figure 2 and Figure 3wherein, Figure 1 A structure schematic view of a first embodiment of the DLC coating deposition equipment provided by the utility model; Figure 2 A structure schematic view of a first embodiment of the DLC coating deposition equipment provided by the utility model; Figure 1 An enlarged schematic view of part A shown in the figure; Figure 3 A structure schematic view of a first embodiment of the DLC coating deposition equipment provided by the utility model; Figure 1 A structure schematic view of a first embodiment of the DLC coating deposition equipment provided by the utility model, comprising:

[0037] The furnace body 1, the rotating trolley 2, two air fans 4 and two conveying assemblies 3;

[0038] The rotating trolley 2 is arranged at the central position inside the furnace body 1;

[0039] The two air fans 4 are respectively mounted on the outer surface of the furnace body 1;

[0040] The two conveying assemblies 3 are respectively arranged inside the furnace body 1, and the conveying assembly 3 comprises a plurality of hollow plates 31, a plurality of air outlet holes 32 and a plurality of conveying pipes 33, the plurality of hollow plates 31 are sequentially mounted on the inner wall of the furnace body 1 from left to right, the plurality of air outlet holes 32 are all arranged on the surface of the plurality of hollow plates 31, and the plurality of conveying pipes 33 are respectively connected between the plurality of hollow plates 31.

[0041] The fixing assembly 5 is arranged between the hollow plate 31 and the furnace body 1, the fixing assembly 5 comprises a threaded block 51, a communication block 52 and a threaded sleeve 53, the threaded block 51 is connected to the inner wall of the furnace body 1, and the communication block 52 is sleeved on the surface of the threaded block 51 and connected with the hollow plate 31.

[0042] The threaded sleeve 53 is threadedly connected to the surface of the threaded block 51.

[0043] The shape of the hollow plate 31 is matched with the shape inside the furnace body 1, so that the hollow plate 31 is conveniently attached to the inner wall of the furnace body 1, and one of the hollow plates 31 is connected with one of the conveying pipes on one side of the air fan 4.

[0044] The threaded block 51, the communication block 52 and the threaded sleeve 53 facilitate the installation between the hollow plate 31 and the inner wall of the furnace body 1, when the hollow plate 31 is installed, the hollow plate 31 is first placed on the inner wall of the furnace body 1, the communication block 52 on the side of the hollow plate 31 is sleeved on the surface of the threaded block 51, and finally the threaded sleeve 53 is threadedly connected with the threaded block 51 to fix the communication block 52, so that the hollow plate 31 is fixed.

[0045] A plurality of controllers 6 are mounted on the surface of the furnace body 1.

[0046] The plurality of controllers 6 are constant-temperature storage chambers and control panels.

[0047] The furnace body 1 is provided with a furnace door 7 on one side.

[0048] The bottom of the furnace body 1 is provided with a support 9.

[0049] The working principle of the DLC coating deposition equipment provided by the utility model is as follows:

[0050] When the fan 4 works, the gas generated is transported to the inside of the other hollow plate 31 through one of the hollow plates 31 and the plurality of conveying pipes 33, and then is transported to different positions inside the furnace body 1 through the plurality of gas outlet holes 32 on the surfaces of the plurality of hollow plates 31.

[0051] Compared with the related art, the DLC coating deposition equipment provided by the utility model has the following advantages

[0052] Advantages:

[0053] The DLC coating deposition equipment provided by the utility model is characterized in that a plurality of hollow plates 31, a plurality of gas outlet holes 32 and a plurality of conveying pipes 33 are arranged on the inner wall of the furnace body 1 and are used in cooperation with the fan 4, so that when the gas is transported to the inside of the furnace body 1, the gas can be conveniently transported to different positions inside the furnace body 1, thereby increasing the uniformity of the entire gas transportation.

[0054] Second embodiment

[0055] Please refer to Figure 4 and Figure 5 , based on the first embodiment of the application, another DLC coating deposition equipment is provided in the second embodiment of the application. The second embodiment is only a preferred mode of the first embodiment, and the implementation of the second embodiment does not affect the separate implementation of the first embodiment.

[0056] Specifically, the difference between the DLC coating deposition equipment provided by the second embodiment of the application lies in that the DLC coating deposition equipment is provided with a splicing assembly 8 between the furnace body 1 and the hollow plate 31, the splicing assembly 8 comprises a hollow conveying plate 81, two mounting heads 82 and a hose 83, the hollow conveying plate 81 is arranged on one side of the inner wall of the furnace body 1, the two mounting heads 82 are respectively arranged between the hollow plate 31 and the hollow conveying plate 81, and the hose 83 is connected between the two mounting heads 82.

[0057] The mounting head 82 is composed of a communication mounting sleeve and a communication mounting head and is connected through threads, and a plurality of gas holes are formed in the hollow conveying plate 81 to facilitate the transportation of the gas.

[0058] The working principle of the DLC coating deposition equipment provided by the utility model is as follows:

[0059] When using, when increasing the position of gas delivery inside the furnace body 1, first, the hollow delivery plate 81 is bolted on the inner wall of the furnace body 1, then the hose 83 is connected between the mounting head 82 between the hollow delivery plate 81 and the hollow plate 31, and the gas delivery can be carried out.

[0060] Compared with the related art, the DLC coating deposition equipment has the following advantages

[0061] Beneficial effects:

[0062] The utility model provides a kind of DLC coating deposition equipment, hollow delivery plate 81, two mounting heads 82 and hose 83 are set on the inner wall of furnace body 1, to facilitate the position of gas delivery is increased.

[0063] The above-mentioned is only the embodiment of the utility model, and not therefore limit the patent range of the utility model, any equivalent structure or equivalent process transformation using the utility model specification and attached drawing contents, or directly or indirectly applied in other related technical fields, are also included in the patent protection range of the utility model.

Claims

1. A DLC coating deposition apparatus, characterized in that, include: Furnace body, rotating frame, two blowers, and two conveyor components; The rotating carriage is located at the center of the furnace body; The two blowers are respectively installed on the outer surface of the furnace body; The two conveying assemblies are respectively disposed inside the furnace body. Each conveying assembly includes multiple hollow plates, multiple air outlets, and multiple conveying pipes. The multiple hollow plates are installed sequentially from left to right on the inner wall of the furnace body. The multiple air outlets are all opened on the surface of the multiple hollow plates. The multiple conveying pipes are respectively connected between the multiple hollow plates.

2. The DLC coating deposition equipment according to claim 1, characterized in that, A fixing component is provided between the hollow plate and the furnace body. The fixing component includes a threaded block, a connecting block and a threaded sleeve. The threaded block is connected to the inner wall of the furnace body, and the connecting block is sleeved on the surface of the threaded block and connected to the hollow plate.

3. The DLC coating deposition equipment according to claim 2, characterized in that, The threaded sleeve is threadedly connected to the surface of the threaded block.

4. The DLC coating deposition equipment according to claim 1, characterized in that, Multiple controllers are installed on the surface of the furnace body.

5. The DLC coating deposition equipment according to claim 1, characterized in that, A furnace door is provided on one side of the furnace body.

6. The DLC coating deposition apparatus according to claim 1, characterized in that, A support frame is installed at the bottom of the furnace body.

7. The DLC coating deposition apparatus according to claim 1, characterized in that, A splicing assembly is provided between the furnace body and the hollow plate. The splicing assembly includes a hollow conveying plate, two mounting heads, and a hose. The hollow conveying plate is located on one side of the inner wall of the furnace body. The two mounting heads are respectively installed between the hollow plate and the hollow conveying plate. The hose is connected between the two mounting heads.

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