Solid precursor heating device for induction heating

Abstract

The present application provides a solid precursor heating device for induction heating, comprising: a stainless steel cylinder having a bottom plate, an outer ring wall, a cover and an exhaust pipe, the bottom plate and the outer ring wall define an internal space, the cover is separably arranged at the top of the outer ring wall, the exhaust pipe is arranged on the cover and is communicated with the internal space, and the exhaust pipe is communicated with the internal space; the magnetic conductivity of the stainless steel cylinder is higher than 1H / m; the plurality of vertically stacked disc bodies are separably arranged in the inner space, each disc body is provided with a bearing space, an additional circuit board, an annular edge and a circular ring, and the bearing space is defined among the additional circuit board, the annular edge and the circular ring.

Description

TECHNICAL FIELD

[0001] The present application relates to a heating device for generating vapor-phase chemical reagents. BACKGROUND

[0002] In the industrial application fields such as semiconductor manufacturing, vapor-phase chemical reagents are used in vapor-utilizing processes, which are produced by heating and sublimating solid-state precursors in a heating device.

[0003] In the prior art, the heating device for solid-state precursors is heated by a heating belt to conductively heat the steel bottle of the heating device, and the steel bottle further conducts heat to the solid-state precursors inside to sublimate them. However, the conductive heating method has high heat consumption and low energy efficiency. CONTENT OF THE INVENTION

[0004] The technical problem to be solved by the present application is to provide a solid-state precursor heating device with high energy efficiency.

[0005] To achieve the above and other objects, the present application provides a solid-state precursor heating device, which comprises: a stainless steel bottle (hereinafter referred to as a steel bottle) having a bottom plate, an outer ring wall, a cover and an exhaust pipe, the bottom plate and the outer ring wall defining an internal space, the cover being separably arranged at the top of the outer ring wall, the exhaust pipe being arranged on the cover and communicating with the internal space, the magnetic permeability of the stainless steel bottle being higher than 1H / m; a plurality of vertically stacked disc bodies, which are separably arranged in the internal space, each of the disc bodies having a carrying space, an additional circuit board, a ring-shaped edge and a circular ring, the carrying space being defined between the additional circuit board, the ring-shaped edge and the circular ring, the additional circuit board being connected to the bottom of the ring-shaped edge and used to carry the solid-state precursor, the circular ring being connected to the top of the ring-shaped edge, the ring-shaped edge being in close contact with the outer ring wall, the bottommost one of the disc bodies being a bottom disc body, the additional circuit board of the bottom disc body being non-hollow; wherein the additional circuit board of each of the disc bodies other than the bottom disc body is abutted against the circular ring of the disc body immediately below it; a buffer bottle having a buffer space, the buffer space being fluidly connected to the internal space; a pressure gauge arranged in the buffer bottle and used to sense the air pressure in the buffer space; and an inductive heater signal-connected to the pressure gauge, the inductive heater being used to heat the steel bottle by induction according to the air pressure sensed by the pressure gauge.

[0006] The advantage of the present application is that the provided stainless steel bottle can be suitable for inductive heating, and its high magnetic permeability helps to increase energy efficiency.

[0007] Further details of other effects and embodiments of the present application are described below with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0008] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments described in the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0009] Figure 1 is a schematic diagram of one embodiment of the present application;

[0010] Figure 2 is a perspective view of part of the components of one embodiment of the present application;

[0011] Figure 3 is an exploded view of part of the components of one embodiment of the present application;

[0012] Figure 4 is a sectional view of part of the components of one embodiment of the present application.

[0013] SYMBOL EXPLANATION

[0014] 10: steel bottle 11: bottom plate

[0015] 12: outer ring wall 13: cover

[0016] 14: internal space 15: locking member

[0017] 16: exhaust pipe 20a, 20b, 20c: disc body

[0018] 21: bearing space 22: additional circuit board

[0019] 23: annular edge 24: circular ring

[0020] 25: upright cylinder 26: inner circular ring

[0021] 30: buffer bottle 31: buffer space

[0022] 40: pressure gauge 50: inductive heater DETAILED DESCRIPTION

[0023] In the positional relationships described in the following embodiments, "upper", "lower", "left" and "right" are all based on the directions in which the components are drawn in the drawings, unless otherwise specified.

[0024] Reference should be made to Figures 1 to 3The illustrated is one embodiment of the solid precursor warming device for inductive heating of the present application, which includes a cylinder 10, vertically stacked disks 20a, 20b, 20c, a buffer bottle 30, a pressure gauge 40, and an inductive heater 50.

[0025] The cylinder 10 has a bottom plate 11, an outer ring wall 12, and a cover 13. The bottom plate 11 and the outer ring wall 12 define an internal space 14. The cover 13 is detachably disposed on the top of the outer ring wall 12. The cylinder 10 can further have fastening members 15 for fastening the cover 13 to the top of the outer ring wall 12. In addition, the cylinder 10 has an exhaust pipe 16 disposed on the cover 13 and communicating with the internal space 14 for outputting the vaporized chemical reagent. In possible embodiments, the cylinder 10 is made of stainless steel. Preferably, the magnetic permeability of the cylinder 10 (particularly the portion of the outer ring wall) is higher than 1 H / m, for example, between 1.04-1.05 H / m. In possible embodiments, the stainless steel used can contain the following components: 1 wt% or less of nickel (Ni), 17-20 wt% of chromium (Cr), 1.75-2.5 wt% of molybdenum (Mo), 0.025 wt% or less of carbon (C), 0.035 wt% or less of nitrogen (N), about 0.8 wt% of titanium (Ti) and niobium (Nb) in total, and the balance of iron (Fe). Preferably, the content of nickel in the above components is 0.6 wt% or less, the content of chromium is 17.5-19.5 wt%, and the content of nitrogen is 0.025 wt% or less. The stainless steel with the above characteristics has good thermal conductivity and inductive heating efficiency.

[0026] The plurality of trays 20a, 20b, 20c are detachably arranged in the inner space 14. Each tray 20a, 20b, 20c has a carrying space 21, an additional circuit board 22, a ring-shaped edge 23 and a circular ring 24. The carrying space 21 is defined between the additional circuit board 22, the ring-shaped edge 23 and the circular ring 24. The additional circuit board 22 is connected to the bottom of the ring-shaped edge 23 and is used to carry solid precursors, such as tungsten precursors or molybdenum precursors, which can be vaporized into gaseous phase chemical reagents when heated. The circular ring 24 is connected to the top of the ring-shaped edge 23. The ring-shaped edge 23 is tightly attached to the outer ring wall 12, so that the heat energy of the cylinder 10 can be conducted to the plurality of trays. The bottommost tray among the plurality of trays is a bottom tray 20c. The additional circuit board 22 of the bottom tray 20c is not hollowed out. The additional circuit boards 22 of the remaining trays 20a, 20b are all supported on the circular rings 24 of the trays immediately below them. Among them, the topmost tray among the plurality of trays is a top tray 20a. The additional circuit board 22 of the top tray 20a is hollowed out in the center. Among them, the at least one intermediate tray 20b (there are multiple intermediate trays in this embodiment) is between the bottom tray 20c and the top tray 20a. The additional circuit board 22 of the intermediate tray 20b has a top-to-bottom penetrating vertical cylinder 25 and an inner circular ring 26 in the center. The inner circular ring 26 extends radially outward from the top of the vertical cylinder 25. The height of the vertical cylinder 25 of each intermediate tray 20b is less than the height of the ring-shaped edge 23 thereof, so that the gaseous phase chemical reagents can be output externally through the exhaust pipe 16 via the channel formed by the vertical cylinder.

[0027] The buffer bottle 30 has a buffer space 31 which is fluidly connected to the inner space 14, so that the gaseous phase chemical reagents can be supplied from the inner space 14 into the buffer space 31. The pressure gauge 40 is arranged in the buffer bottle 30 and is used to sense the air pressure in the buffer space 31. The inductive heater 50 is signal-connected to the pressure gauge 40 and can heat the cylinder 10 by inductive heating according to the air pressure sensed by the pressure gauge 40. Specifically, when the sensed air pressure is lower than the required air pressure range, the inductive heater 50 can be turned on or increased in power to directly heat the cylinder, so as to indirectly heat the solid precursors in the cylinder to supply more gaseous phase chemical reagents. When the sensed air pressure is higher than the required air pressure range, the inductive heater can be turned off or reduced in power to reduce the heating of the cylinder, so as to reduce the supply of gaseous phase chemical reagents. In this way, the supply air pressure of the gaseous phase chemical reagents can be more stably maintained, so as to solve the control lag problem commonly found in the prior art. In addition, compared with the conduction heating of the cylinder in the prior art, the inductive heating used in the present application also has better energy efficiency.

[0028] The above-described embodiments and / or implementations are merely used to illustrate the preferred embodiments and / or implementations of the present application, and are not intended to limit the embodiments of the present application in any form, and any person skilled in the art can make some changes or modifications to other equivalent embodiments without departing from the technical means disclosed in the present application, but should be considered as the same technology or embodiments as the present application.

Claims

1. A device for heating solid precursors by induction heating, characterized in that, The solid precursor heating device for induction heating includes: A stainless steel cylinder has a base plate, an outer ring wall, a cap and an exhaust pipe. The base plate and the outer ring wall define an internal space. The cap is detachably disposed on the top of the outer ring wall. The exhaust pipe is disposed on the cap and communicates with the internal space. The magnetic permeability of the stainless steel cylinder is higher than 1H / m. Multiple vertically stacked disks are detachably disposed within the internal space. Each disk has a support space, an additional circuit board, an annular edge, and a ring. The support space is defined between the additional circuit board, the annular edge, and the ring. The additional circuit board is connected to the bottom of the annular edge and supports the solid precursor. The ring is connected to the top of the annular edge, which is in close contact with the outer ring wall. The disk located at the bottom is a bottom disk, and the additional circuit board of the bottom disk is not perforated. The additional circuit boards of the other disks, except for the bottom disk, are all supported by the ring of the disk immediately below them. An induction heater is used to heat the stainless steel cylinder by induction heating.

2. The solid precursor heating device for induction heating according to claim 1, characterized in that, The topmost of these disks is a top disk, which has a central cutout of the additional circuit board.

3. The solid precursor heating device for induction heating according to claim 2, characterized in that, Among these discs, at least one is an intermediate disc located between the bottom disc and the top disc. The intermediate disc has an additional circuit board with a top-to-bottom open vertical cylinder and an inner ring at its center. The inner ring extends radially outward from the top of the vertical cylinder. The height of the vertical cylinder of the at least one intermediate disc is less than the height of the annular edge of the at least one intermediate disc.

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