RTP annealing furnace lamp tube temperature real-time monitoring and management system

Abstract

The utility model provides an RTP annealing furnace tube temperature real-time monitoring management system, which relates to the technical field of annealing furnace tube monitoring, and is characterized in that temperature detection modules are uniformly arranged in an annealing furnace to detect the temperature of different positions of an annealing furnace tube, and a temperature difference module determines the temperature of the annealing furnace tube according to a voltage signal; the maximum voltage signal and the minimum voltage signal are screened, whether temperature distribution of the lamp tube is abnormal or not is judged, a temperature abnormal signal is sent, the current detection module detects a current signal of the annealing furnace lamp tube and sends a current abnormal signal, and the fault detection module converts the temperature abnormal signal and the current abnormal signal into a fault pulse signal according to the temperature abnormal signal and the current abnormal signal. And the fault counting module accumulates the number of times of the fault pulse signals in the cycle time, and sends stage early warning signals to the early warning module by stages according to the result of the accumulated number of times to display the monitoring result of the annealing furnace lamp tube.

Description

TECHNICAL FIELD

[0001] The utility model relates to annealing furnace lamp tube temperature monitoring technical field, concretely is a kind of RTP annealing furnace lamp tube temperature real-time monitoring management system. BACKGROUND

[0002] As the key equipment in semiconductor manufacturing, the uniformity and stability of the lamp tube temperature of the rapid thermal annealing (RTP) furnace directly affect the wafer doping activation efficiency and thin film stress control. The traditional monitoring system relies on single-point temperature detection and independent current threshold alarm, which is difficult to capture the temperature differences in multiple areas of the furnace in real time, and lacks effective early warning mechanisms for progressive failures caused by lamp tube aging, such as local thermal radiation attenuation and resistance changes. Especially in high-temperature processes, lamp tube aging can easily lead to temperature distribution imbalance, causing process drift and even batch rejection. However, the existing monitoring solutions based on software analysis have high response delays and weak anti-interference capabilities, making it difficult to meet the high real-time and high-reliability control requirements in industrial scenarios. In addition, most systems do not correlate temperature anomalies with current anomalies, making it impossible to predict lamp tube life based on historical fault counts, leading to delayed maintenance or excessive downtime. Therefore, there is an urgent need for an RTP annealing furnace lamp tube temperature real-time monitoring management system based on hardware circuit that can effectively distinguish between transient interference and real aging trends through fast response, strong anti-interference, and multi-dimensional correlation analysis, to solve the above technical bottlenecks. SUMMARY

[0003] The utility model aims at providing a kind of RTP annealing furnace lamp tube temperature real-time monitoring management system to solve the problems raised in the above background.

[0004] To achieve the above purpose, the utility model provides the following technical scheme:

[0005] A kind of RTP annealing furnace lamp tube temperature real-time monitoring management system, wherein:

[0006] Temperature detection module, the temperature detection module includes 5 temperature detectors, is evenly installed in annealing furnace, is electrically connected with temperature difference module, for detecting the temperature of different positions of annealing furnace lamp tube, and converts voltage signal sent to temperature difference module;

[0007] Temperature difference module, the temperature difference module is electrically connected with fault detection module, for judging whether the temperature distribution of lamp tube is abnormal according to the voltage signal sent by temperature detection module, by screening maximum voltage signal and minimum voltage signal, and sends temperature anomaly signal to fault detection module;

[0008] A current detection module is electrically connected with the fault detection module, installed on the power cable of the annealing furnace lamp tube, used for detecting the current signal of the annealing furnace lamp tube and sending the current abnormal signal to the fault detection module;

[0009] The fault detection module is electrically connected with the fault counting module, used for detecting the received temperature abnormal signal and the current abnormal signal and converting the detection result into the fault pulse signal sent to the fault counting module;

[0010] The fault counting module is electrically connected with the early warning module, used for counting the number of the fault pulse signals in the cycle time and sending the counted number of the results to the early warning module in stages as the stage early warning signal;

[0011] The cycle adjustment module is electrically connected with the fault counting module, used for generating the cycle time signal sent to the fault counting module;

[0012] The early warning module is used for displaying different early warning signals as the stage early warning signal to display the monitoring result of the annealing furnace lamp tube.

[0013] Further, the temperature difference module (20) comprises 10 diodes D1-D10, an operational amplifier LM358, a differential amplifier AD620, a comparator LM393 and resistors R1-R5, the anodes of the diodes D1-D15 are electrically connected with the output ends of the temperature detectors 1-5 respectively, the cathodes of the diodes D1-D5 are connected in parallel and electrically connected with the IN1+ end of the differential amplifier, the cathodes of the diodes D6-D10 are electrically connected with the output ends of the temperature detectors 1-5 respectively, the anodes of the diodes D5-D10 are connected in parallel and electrically connected with the IN2+ end of the differential amplifier, the differential amplifier comprises an IN1+ end, an IN1- end, an IN2+ end, an IN2- end, a VCC end, a GND end, an OUT1 end and an OUT2 end, the IN1- end is electrically connected with the OUT1 end, one end of the resistor R1 and the IN+ end of the differential amplifier AD620, the IN1+ end is electrically connected with the OUT2 end, one end of the resistor R2 and the IN- end of the differential amplifier AD620, the other end of the resistor R1 is electrically connected with one end of the resistor R2, the GND end and the ground end GND, the VCC end is electrically connected with the power supply end VCC, the differential amplifier AD620 comprises an IN+ end, an IN- end and an OUT end, the comparator LM393 comprises an IN+ end, an IN- end and an OUT end, the OUT end of the differential amplifier AD620 is electrically connected with the IN+ end of the comparator LM393, the resistors R3-R5 are connected in series between the power supply end VCC and the ground end GND, the sliding end of the resistor R5 is electrically connected with the IN- end of the comparator LM393, used for providing a voltage threshold.

[0014] Further, the fault counting module adopts a model CD4020 counter, the counter comprising a CLK end, a RES end and Q1 end, Q2 end, Q3 end, the period adjustment module adopts a model 555 timer, the timer adopts a monostable mode, the early warning module is two LED lights LD1, LD2 and a loudspeaker SP, the CLK end of the counter is electrically connected with the output end of the fault detection module, the RES end of the counter is electrically connected with the output end OUT of the timer, the Q1 end and Q2 end of the counter are electrically connected with the anodes of the LED lights LD1 and LD2 respectively, the Q3 end of the counter is electrically connected with one end of the loudspeaker SP, the cathodes of the LED lights LD1 and LD2 and the other end of the loudspeaker SP are electrically connected with the ground end GND in parallel.

[0015] Compared with the prior art, the utility model has the advantages that:

[0016] The temperature detection module is evenly installed in the annealing furnace, the temperature of the annealing furnace lamp tube at different positions is detected, the temperature difference module selects the maximum voltage signal and the minimum voltage signal according to the voltage signal, judges whether the temperature distribution of the lamp tube is abnormal or not, and sends a temperature abnormal signal, the current detection module detects the current signal of the annealing furnace lamp tube and sends a current abnormal signal, the fault detection module converts the temperature abnormal signal and the current abnormal signal into a fault pulse signal, the fault counting module accumulates the number of times of the fault pulse signal within a period of time, and sends the result of the accumulated number of times to the early warning module in stages to display the monitoring result of the annealing furnace lamp tube.

[0017] Through the hardware multi-module collaborative design, the real-time monitoring accuracy and reliability of the RTP annealing furnace lamp tube state are significantly improved, the five-way temperature detector is combined with the maximum value / minimum value screening circuit, the abnormal temperature distribution in the furnace can be dynamically identified, the local overheating or failed lamp tube can be accurately positioned, the blind area of the traditional single-point detection is avoided, the current detection and temperature difference signal are combined into a comprehensive fault pulse through a logic gate, the multi-dimensional correlation analysis of the electric heating parameters is realized, the transient interference and the real aging trend are effectively distinguished, the full hardware fault counting module based on the counter and the timer can accumulate the number of times of the abnormality in a fixed period and trigger the hierarchical early warning, so that the lamp tube life can be predicted according to the stage alarm signal by the operation and maintenance personnel, the non-planned shutdown is reduced, the millisecond level response is realized through the pure electronic circuit, the stable operation can still be realized in the high temperature and electromagnetic interference environment, the process fluctuation risk is finally reduced, the lamp tube service life is prolonged, and the yield and economy of the semiconductor manufacturing are improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Fig. 1 This is a schematic diagram of the overall system structure of this utility model;

[0020] Fig. 2 This is a schematic diagram of the circuit structure of the temperature difference module in this utility model;

[0021] Fig. 3 This is a schematic diagram of the circuit structure of the period adjustment module and the fault counting module in this utility model.

[0022] In the diagram: Temperature detection module 10, Temperature difference module 20, Current detection module 30, Fault detection module 40, Fault counting module 50, Periodic adjustment module 60, Early warning module 70. Detailed Implementation

[0023] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can also refer to the internal connection of two components; and they can refer to a wireless connection or a wired connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0027] Example:

[0028] Please see Figs. 1-3 This utility model provides a technical solution:

[0029] A real-time monitoring and management system for lamp temperature in an RTP annealing furnace includes a temperature detection module 10, a temperature difference module 20, a current detection module 30, a fault detection module 40, a fault counting module 50, a cycle adjustment module 60, and an early warning module 70, wherein:

[0030] The temperature detection module 10 includes five K-type thermocouples of model MAX31855, which are evenly installed in the annealing furnace and electrically connected to the temperature difference module 20. The lamp tube is evenly divided into five parts, and the five temperature detectors are placed on the five parts of the corresponding lamp tube to detect the temperature at different positions of the lamp tube in the annealing furnace and convert it into a voltage signal to be sent to the temperature difference module 20.

[0031] The temperature difference module 20 is electrically connected to the fault detection module 40. It is used to determine whether the temperature distribution of the lamp tube is abnormal by filtering the maximum voltage signal and the minimum voltage signal based on the voltage signal sent by the temperature detection module 10, and to send a temperature abnormality signal to the fault detection module 40.

[0032] In this embodiment, the temperature difference module 20 includes 10 diodes D1-D10, an operational amplifier LM358, a differential amplifier AD620, a comparator LM393, and resistors R1-R5. The anodes of diodes D1-D15 are electrically connected to the output terminals of temperature detectors 1-5, respectively. The cathodes of diodes D1-D5 are connected in parallel and then electrically connected to the IN1+ terminal of the differential amplifier. The cathodes of diodes D6-D10 are electrically connected to the output terminals of temperature detectors 1-5, respectively. The anodes of diodes D5-D10 are connected in parallel and then electrically connected to the IN2+ terminal of the differential amplifier. The differential amplifier includes an IN1+ terminal, an IN1- terminal, an IN2+ terminal, an IN2- terminal, a VCC terminal, a GND terminal, an OUT1 terminal, and an OUT2 terminal. The IN1- terminal and the OUT1 terminal are connected in parallel and then electrically connected to the output terminals of the differential amplifier. One end of resistor R1 is electrically connected to the IN+ terminal of differential amplifier AD620. The IN1+ terminal is electrically connected to the OUT2 terminal. One end of resistor R2 is electrically connected to the IN- terminal of differential amplifier AD620. The other end of resistor R1 is electrically connected to one end of resistor R2, the GND terminal, and the ground terminal GND. The VCC terminal is electrically connected to the power supply terminal VCC. Differential amplifier AD620 includes IN+, IN-, and OUT terminals. Comparator LM393 includes IN+, IN-, and OUT terminals. The OUT terminal of differential amplifier AD620 is electrically connected to the IN+ terminal of comparator LM393. Resistors R3-R5 are connected in series between the power supply terminal VCC and the ground terminal GND. The sliding end of resistor R5 is electrically connected to the IN- terminal of comparator LM393 to provide the voltage threshold.

[0033] When the output voltage signals of the five temperature sensors pass through a competitive conduction network composed of Schottky diodes, for the detection of the maximum voltage signal, the anodes of all diodes are connected to the respective temperature signals, and the cathodes are connected in parallel to the IN1+ terminal of the operational amplifier LM358. When the voltage of a certain temperature signal is higher than the sum of the current operational amplifier's IN1+ terminal voltage and the forward voltage drop of the diode, its corresponding diode conducts, and the other diodes are reverse-biased and cut off because the cathode potential is pulled high. At this time, the IN1+ terminal voltage of the operational amplifier LM358 is raised to the voltage value of the conduction signal minus the single-tube voltage drop. The operational amplifier is configured as a voltage follower, and the IN1- terminal is directly connected to the output OUT1 terminal. Through negative feedback, the diode voltage drop is automatically compensated, so that the output voltage is exactly equal to the maximum value in the input signal. Similarly, the minimum value detection network connects the diode cathode to the temperature signal and the anode is connected in parallel to the non-inverting input terminal of another operational amplifier. The lowest voltage signal conducts the corresponding diode, and the operational amplifier output terminal obtains the minimum value after the voltage drop is offset by voltage follower.

[0034] The maximum and minimum value signals are then input to the two input terminals of the differential amplifier AD620. The IN- terminal of the differential amplifier is connected to the minimum value, and the IN+ terminal is connected to the maximum value. The output terminal generates a voltage difference between the two values. This voltage difference signal is connected to the window comparator LM393, whose IN+ terminal is connected to the voltage difference. The IN+ terminal is connected to a voltage threshold provided by a resistor network consisting of resistors R3-R5. When the voltage difference exceeds the threshold, the window comparator outputs a high level to trigger an alarm.

[0035] The entire process achieves rapid difference analysis of multiple temperature signals through hardware cascading of diode dynamic screening, operational amplifier real-time compensation, differential amplification, and threshold judgment, without the need for software intervention, significantly reducing system complexity, while ensuring reliable operation in high-temperature and high-noise environments.

[0036] The current detection module 30 uses a Hall effect current sensor of model ACS758LCB, which is electrically connected to the fault detection module 40 and installed on the power cable of the annealing furnace lamp. It is used to detect the current signal of the annealing furnace lamp and send an abnormal current signal to the fault detection module 40.

[0037] The fault detection module 40 uses an input OR gate module of model SN74HC32DR, which is electrically connected to the fault counting module 50. It is used to detect the received abnormal temperature signal and abnormal current signal, and convert the detection result into a fault pulse signal and send it to the fault counting module 50.

[0038] The fault counting module 50 is electrically connected to the early warning module 70 and is used to accumulate the number of fault pulse signals within a period of time, and send the result of the accumulated number of times to the early warning module 70 in stages.

[0039] The period adjustment module 60 is electrically connected to the fault counting module 50 and is used to generate a periodic time signal and send it to the fault counting module 50.

[0040] The early warning module 70 is used to display different early warning signals in stages, and to display the monitoring results of the annealing furnace lamps.

[0041] In this embodiment, the fault counting module 50 uses a CD4020 counter, which includes a CLK terminal, a RES terminal, and Q1, Q2, and Q3 terminals. The period adjustment module 60 uses a 555 timer in monostable mode. The early warning module 70 consists of two LEDs LD1 and LD2 and a speaker SP. The CLK terminal of the counter is electrically connected to the output terminal of the fault detection module 40, the RES terminal of the counter is electrically connected to the output terminal OUT of the timer, the Q1 and Q2 terminals of the counter are electrically connected to the anodes of the LEDs LD1 and LD2, respectively, and the Q3 terminal of the counter is electrically connected to one end of the speaker SP. The cathodes of the LEDs LD1 and LD2 and the other end of the speaker SP are connected in parallel and then electrically connected to the ground terminal GND.

[0042] The LD1 and LD2 are model L-7113IDT, and the speaker SP is a piezoelectric passive buzzer with model TDKPS1240P02BT.

[0043] When the system starts, the 555 timer is in a steady state, and its output OUT terminal remains low. At this time, the reset pin RES terminal of the counter is low, and the counter is in an enabled state. The fault pulse signal generated by the fault detection module 40 is input to the clock pin CLK terminal of the counter. Each time a fault occurs, the CLK terminal receives a rising edge signal, and the internal 14-bit binary counter increments, with its output pins Q1-Q3 sequentially jumping to a high level according to their binary weights. For example, Q1²^4 = 16 times, Q2²^5 = 32 times, and Q3²^6 = 64 times correspond to different warning thresholds for different stages.

[0044] During the cycle, the counter continuously accumulates the number of faults. When the count reaches a preset threshold, such as Q1 = 16 times, Q2 = 32 times, and Q3 = 64 times, the corresponding Q pin outputs a high level, triggering the tiered alarm of the warning module 70. For example, Q1 lights up LD1, Q2 lights up LD2, and Q3 triggers the buzzer. Once the cycle ends, the 555 output returns to a low level, the counter reset pin is released, and the counter starts accumulating the number of faults for the next cycle from zero. At the end of the cycle, the count is forcibly reset to zero regardless of the value, ensuring independent statistics for each cycle and avoiding interference from historical data.

[0045] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A real-time monitoring and management system for the temperature of lamps in an RTP annealing furnace, characterized in that: Temperature detection module (10) includes 5 temperature detectors, which are evenly installed in the annealing furnace and electrically connected to the temperature difference module (20). The temperature detectors are used to detect the temperature at different positions of the lamp tubes in the annealing furnace and convert them into voltage signals to be sent to the temperature difference module (20). Temperature difference module (20), which is electrically connected to fault detection module (40), is used to determine whether the lamp tube temperature distribution is abnormal by filtering the maximum voltage signal and the minimum voltage signal according to the voltage signal sent by the temperature detection module (10), and send a temperature abnormality signal to fault detection module (40). The current detection module (30) is electrically connected to the fault detection module (40) and is installed on the power cable of the annealing furnace lamp tube. It is used to detect the current signal of the annealing furnace lamp tube and send the current abnormal signal to the fault detection module (40). The fault detection module (40) is electrically connected to the fault counting module (50) and is used to detect the received abnormal temperature signal and abnormal current signal, and convert the detection result into a fault pulse signal and send it to the fault counting module (50). The fault counting module (50) is electrically connected to the early warning module (70) and is used to accumulate the number of fault pulse signals within a period of time, and send the result of the accumulated number of times to the early warning module (70) in stages. A period adjustment module (60) is electrically connected to a fault counting module (50) and is used to generate a periodic time signal to be sent to the fault counting module (50). The early warning module (70) is used to display different early warning signals in stages and to display the monitoring results of the annealing furnace lamp tubes.

2. The RTP annealing furnace lamp temperature real-time monitoring and management system according to claim 1, characterized in that: The temperature difference module (20) includes 10 diodes D1-D10, an operational amplifier LM358, a differential amplifier AD620, a comparator LM393, and resistors R1-R5. The anodes of diodes D1-D15 are electrically connected to the output terminals of temperature detectors 1-5, respectively. The cathodes of diodes D1-D5 are connected in parallel and electrically connected to the IN1+ terminal of the differential amplifier. The cathodes of diodes D6-D10 are electrically connected to the output terminals of temperature detectors 1-5, respectively. The anodes of diodes D5-D10 are connected in parallel and electrically connected to the IN2+ terminal of the differential amplifier. The differential amplifier includes IN1+, IN1-, IN2+, IN2-, VCC, GND, OUT1, and OUT2 terminals. The IN1- terminal and OUT1 terminal, and resistor R1-R5 are connected in parallel. One end of resistor R1 is electrically connected to the IN+ terminal of differential amplifier AD620. The IN1+ terminal is electrically connected to the OUT terminal. One end of resistor R2 is electrically connected to the IN- terminal of differential amplifier AD620. The other end of resistor R1 is electrically connected to one end of resistor R2, the GND terminal, and the ground terminal GND. The VCC terminal is electrically connected to the power supply terminal VCC. Differential amplifier AD620 includes IN+, IN-, and OUT terminals. Comparator LM393 includes IN+, IN-, and OUT terminals. The OUT terminal of differential amplifier AD620 is electrically connected to the IN+ terminal of comparator LM393. Resistors R3-R5 are connected in series between the power supply terminal VCC and the ground terminal GND. The sliding end of resistor R5 is electrically connected to the IN- terminal of comparator LM393 to provide the voltage threshold.

3. The RTP annealing furnace lamp temperature real-time monitoring and management system according to claim 1, characterized in that: The fault counting module (50) uses a CD4020 counter, which includes a CLK terminal, a RES terminal, and Q1, Q2, and Q3 terminals. The period adjustment module (60) uses a 555 timer, which is in monostable mode. The warning module (70) consists of two LEDs LD1 and LD2 and a speaker SP. The CLK terminal of the counter is electrically connected to the output terminal of the fault detection module (40). The RES terminal of the counter is electrically connected to the output terminal OUT of the timer. The Q1 and Q2 terminals of the counter are electrically connected to the anodes of the LEDs LD1 and LD2, respectively. The Q3 terminal of the counter is electrically connected to one end of the speaker SP. The cathodes of the LEDs LD1 and LD2 and the other end of the speaker SP are connected in parallel and then electrically connected to the ground terminal GND.

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