Auxiliary device for contourgraph measurement

Abstract

The utility model relates to an auxiliary device for contourgraph measurement. The auxiliary device for contourgraph measurement comprises a base; the bearing assembly is rotationally connected to the base and used for containing products. The adjusting assembly is connected to the base; one end of the rotating part is rotatably connected to the side, close to the base, of the bearing assembly, the other end of the rotating part is movably connected to the adjusting assembly, and the rotating part rotates under the adjusting effect of the adjusting assembly and drives the bearing assembly to rotate so as to adjust the angle between the bearing assembly and the base. According to the auxiliary device for contourgraph measurement, the position of the rotating piece relative to the base is adjusted through the adjusting assembly, so that the angle between the base and the bearing assembly is adjusted, the position relation between a product placed on the bearing assembly and the contourgraph can be adjusted, and the contourgraph can obtain a larger measurement view angle during measurement; therefore, different measurement requirements are met, and the measurement effect and the measurement precision are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to an auxiliary device for profile meter measurement. BACKGROUND

[0002] The silicon / silicon carbide component used for semiconductor etching has high size precision requirement, and when measured by a profile meter, a jig needs to be used to fix the measured product to assist the profile meter in measuring the size of the product.

[0003] However, during the measurement process, due to the limited angle adjustment range of the profile meter, some areas of the test product (for example, the bottom chamfer of a small groove) cannot be measured, which affects the measurement effect. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the embodiments of the present application provide an auxiliary device for profile meter measurement to solve at least one problem in the background technology.

[0005] In a first aspect, the embodiments of the present application provide an auxiliary device for profile meter measurement, which comprises:

[0006] a base;

[0007] a bearing assembly rotatably connected to the base, the bearing assembly being used for placing a product;

[0008] an adjusting assembly connected to the base;

[0009] a rotating member, one end of which is rotatably connected to one side of the bearing assembly close to the base, and the other end of which is movably connected to the adjusting assembly, the rotating member being rotated under the adjusting action of the adjusting assembly and driving the bearing assembly to rotate, so as to adjust the angle between the bearing assembly and the base.

[0010] In combination with the first aspect of the present application, in an optional implementation, the bearing assembly comprises:

[0011] a bearing member, one end of which is rotatably connected to the base, and the product being placed on the other side of the bearing member away from the base;

[0012] a first positioning member, which is detachably connected to the bearing member and is used for positioning the product placed on the bearing member.

[0013] In combination with the first aspect of the present application, in an optional implementation, the bearing member is provided with a plurality of second positioning members matched with the first positioning member, and the first positioning member is detachably connected to the second positioning member.

[0014] In conjunction with the first aspect of this application, in an alternative embodiment, a plurality of the second positioning members are disposed on the carrier near its connection with the base.

[0015] In conjunction with the first aspect of this application, in an optional embodiment, the carrier further includes a first clearance portion for clearance of protrusions on the product.

[0016] In conjunction with the first aspect of this application, in an optional embodiment, the carrier component further includes:

[0017] A rotating mounting component is connected to the side of the support member near the base, and one end of the rotating component is rotatably connected to the rotating mounting component.

[0018] In conjunction with the first aspect of this application, in an alternative embodiment, the adjustment component includes:

[0019] A mounting bracket is attached to the base.

[0020] The first adjusting member is rotatably connected to the fixed base;

[0021] The second adjusting member matches the first adjusting member, and the second adjusting member is connected to one end of the rotating member;

[0022] Rotating the first adjusting member allows the second adjusting member to move relative to the first adjusting member, thereby causing the rotating member to rotate and adjusting the angle between the support member and the base.

[0023] In conjunction with the first aspect of this application, in an optional embodiment, the adjustment component further includes:

[0024] An adjustment handle is connected to the end of the first adjustment member. Rotating the adjustment handle causes the first adjustment member to rotate.

[0025] In conjunction with the first aspect of this application, in an alternative embodiment, the first adjusting member and the second adjusting member are threadedly engaged.

[0026] In conjunction with the first aspect of this application, in an optional embodiment, the base is provided with scale markings for corresponding to the second adjustment member at different positions.

[0027] The auxiliary device for profilometer measurement provided in this application has the following beneficial effects:

[0028] (1) The auxiliary device for profilometer measurement uses the adjustment component to adjust the position of the rotating part relative to the base, thereby adjusting the angle between the base and the support component, and thus adjusting the positional relationship between the product placed on the support component and the profilometer, and enabling the profilometer to obtain a larger measurement angle during measurement, so as to meet different measurement needs and improve the measurement effect and measurement accuracy.

[0029] (2) Multiple first positioning components can be detachably connected to second positioning components located at different positions on the carrier based on the different types and sizes of the measured products, so as to meet the measurement needs of different products, greatly reduce the need to replace different auxiliary devices to complete the measurement, and greatly improve the measurement efficiency.

[0030] (3) The auxiliary device for profilometry measurement has a first clearance part on the carrier to be suitable for irregularly shaped products to be measured; a second clearance part and a third clearance part are respectively provided on the base plate and the carrier to facilitate storage.

[0031] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0032] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0033] Figure 1 An overall side view of an auxiliary device for profilometry measurement provided in an embodiment of this application;

[0034] Figure 2 A three-dimensional structural schematic diagram of one state of an auxiliary device for profilometry measurement provided in an embodiment of this application;

[0035] Figure 3 A three-dimensional structural schematic diagram of another state of an auxiliary device for profilometer measurement provided in an embodiment of this application;

[0036] Figure 4 A partial side view of an auxiliary device for profilometry measurement provided in an embodiment of this application;

[0037] Figure 5 A bottom view of an auxiliary device for profilometry provided in an embodiment of this application;

[0038] Figure 6 This is a top view of a carrier in an auxiliary device for profilometry provided in an embodiment of this application.

[0039] Figure label:

[0040] 100. Auxiliary devices for profilometer measurement;

[0041] 10. Base; 110. Hollowed-out area; 120. Hinge; 130. Second clearance section;

[0042] 20. Bearing assembly; 210. Bearing component; 211. Bearing plate; 212. Second positioning component; 2121. Threaded slot; 213. First clearance part; 214. Third clearance part; 220. First positioning component; 221. Screw fixing bolt; 230. Rotary mounting component; 240. Mounting base;

[0043] 30. Adjustment component; 310. Fixed base; 320. First adjusting element; 321. Threaded rod; 330. Second adjusting element; 331. Nut; 340. Adjustment handle;

[0044] 40. Rotating components;

[0045] 50. Handle. Detailed Implementation

[0046] To make the technical solution and beneficial effects of this utility model more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0047] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this utility model and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this utility model.

[0048] In this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" can explicitly indicate that at least one of those features is included. In the description of this utility model, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.

[0049] In this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0050] In this utility model, unless otherwise explicitly defined, the terms "above," "on top of," "above," "over," "below," "below," "below," or "below" for "first feature above second feature" can refer to direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Furthermore, "above," "above," and "over" for "first feature above second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature below second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0051] Please refer to Figure 1 and Figure 2 This application provides an auxiliary device 100 for profilometry measurement. The auxiliary device 100 assists a measuring instrument in measuring a product. The measuring instrument is a profilometry, but other instruments can also be used. The auxiliary device 100 includes a base 10, a support assembly 20, an adjustment assembly 30, and a rotating component 40. In this embodiment, the product is silicon, silicon carbide, or other semiconductor etching materials with high dimensional accuracy requirements.

[0052] The support component 20 is rotatably connected to the base 10 and is used to place the product. The adjustment component 30 is mounted on the base 10. One end of the rotating component 40 is rotatably connected to the side of the support component 20 near the base 10, and the other end is movably connected to the adjustment component 30. The rotating component 40 rotates under the adjustment action of the adjustment component 30, and drives the support component 20 to rotate, so as to adjust the angle between the support component 20 and the base 10.

[0053] The above-mentioned auxiliary device 100 for profilometer measurement uses the adjustment component 30 to adjust the position of the rotating component 40 relative to the base 10 and drive the rotating component 40 to rotate, thereby adjusting the angle between the support component 20 and the base 10. This allows the positional relationship between the product placed on the support component 20 and the profilometer to be adjusted, thereby enabling the profilometer to obtain a larger measurement angle during measurement, to meet more measurement needs, and to improve the measurement effect and measurement accuracy.

[0054] For example, the chamfer of the small groove on the product can be measured by adjusting the angle between the carrier 210 and the base 10 to increase the measuring angle of the profilometer.

[0055] In one alternative embodiment, please refer to Figures 1 to 3 The support assembly 20 includes a support member 210 and a first positioning member 220. One end of the support member 210 is rotatably connected to the base 10, and the product is placed on the side of the support member 210 away from the base 10. The first positioning member 220 is detachably connected to the support member 210 and is used to position the product placed on the support member 210.

[0056] This can be understood as follows: the product is placed on the side of the carrier 210 away from the base 10, and the angle between the carrier 210 and the base 10 is adjusted by the adjustment component 30 and the rotating component 40 located between the carrier 210 and the base 10. In other words, the positional relationship between the product placed on the carrier 210 and the profiler is adjusted, thereby increasing the adjustment range of the profiler on the product.

[0057] In one optional embodiment, the support member 210 is connected to the base 10 by a hinge 120, but the connection is not limited to the hinge 120. The support member 210 is a support plate 211, which is rotatably connected to the base 10. The shape and size of the support plate 211 and the base 10 are matched. One edge of the support plate 211 is connected to one edge of the base 10 by a hinge 120, which can improve the overall structural simplicity of the profilometer measurement auxiliary device 100.

[0058] The material of the support plate 211 is FR4, but it is not limited to that. The FR4 material support plate 211 itself has low hardness and will not damage the products placed on the support plate 211.

[0059] In one alternative embodiment, please refer to Figure 2 and Figure 3 The carrier 210 is provided with a plurality of second positioning members 212 that match the first positioning member 220, and the first positioning member 220 is detachably connected to the second positioning member 212.

[0060] Multiple first positioning elements 220 can be detachably connected to second positioning elements 212 at different positions based on the type and size of the product being measured, in order to meet the measurement needs of different products. This can greatly reduce the need to change different profilometer measurement auxiliary devices 100 to complete the measurement, and greatly improve measurement efficiency.

[0061] In an optional embodiment, the second positioning member 212 is a threaded slot 2121 provided on the carrier member 210, and the first positioning member 220 is a screw retainer 221. The screw retainer 221 is rotatably connected to the threaded slot 2121, and its height protruding from the surface of the carrier member 210 can be adjusted by further rotation to meet the measurement needs of different products. Furthermore, the connection method between the threaded slot 2121 and the screw retainer 221 improves the connection strength between the first positioning member 220 and the carrier member 210, thereby increasing the capacity of the first positioning member 220 to support products of greater weight and expanding the applicability of the measurement.

[0062] In an optional embodiment, a plurality of second positioning elements 212 are disposed on the support element 210 near its connection with the base 10. When the angle between the support element 210 and the base 10 is large, the plurality of second positioning elements 212 can not only position the product on the support element 210, but also prevent the product from slipping off the support element 210, thereby improving the safety and stability of the measurement.

[0063] The specific positions, number, and sizes of the multiple second positioning members 212 provided on the carrier member 210 are not specifically limited in this embodiment of the application, and can be set according to specific needs and the size of the first positioning member 220.

[0064] In an optional embodiment, the carrier 210 is further provided with a first clearance portion 213, which is used to avoid protrusions on the product. Some products have protrusions on their surfaces. During the measurement process, products with protrusions are generally manually fixed by the measurer, which poses a risk of collision when the profilometer probe is used.

[0065] In this embodiment, a first clearance portion 213 is provided on the carrier 210. When the product is placed on the carrier 210, the protrusion on the surface of the product corresponds to the first clearance portion 213 on the carrier 210, which can ensure the stability of the product during the measurement process, thereby improving the measurement accuracy and measurement safety.

[0066] The first clearance portion 213 can be a clearance through hole or clearance groove, as long as it can achieve the clearance function for the protrusions of the product. This application embodiment does not specifically limit the first clearance portion 213.

[0067] In an optional embodiment, the support assembly 20 further includes a swivel mounting member 230, which is connected to the side of the support assembly 210 near the base 10, and one end of the swivel member 40 is rotatably connected to the swivel mounting member 230.

[0068] The support assembly 20 also includes a mounting base 240, which is mounted on the side of the support member 210 near the base 10, and a swivel mount 230 is mounted on the mounting base 240. One end of the swivel member 40 is sleeved on the swivel mount 230 so that it can rotate relative to the support member 210.

[0069] In one alternative embodiment, please refer to Figure 1 and Figure 4 The adjustment assembly 30 includes a fixed base 310, a first adjustment member 320, and a second adjustment member 330.

[0070] The fixed base 310 is connected to the base 10. The first adjusting member 320 is rotatably connected to the fixed base 310. The second adjusting member 330 matches the first adjusting member 320 and is connected to one end of the rotating member 40. Rotating the first adjusting member 320 allows the second adjusting member 330 to move relative to the first adjusting member 320; that is, the second adjusting member 330 moves along... Figure 4 The arrow shown moves relative to the first adjusting member 320 and drives the rotating member 40 to rotate, thereby adjusting the angle between the bearing member 210 and the base 10.

[0071] In this embodiment, the operator or the electric drive causes the first adjusting member 320 to rotate. The rotation of the first adjusting member 320 causes the second adjusting member 330 to move. The first adjusting member 320 is connected to a rotary motor, and the rotary motor drives the first adjusting member 320 to rotate.

[0072] When the first adjusting member 320 is rotated by the operator, an adjusting handle 340 is connected to the end of the first adjusting member 320 to improve the operator's ease of operation and efficiency. The adjusting handle 340 protrudes from the edge of the base 10 to facilitate the operator's rotation.

[0073] The first adjusting member 320 is a threaded rod 321, and the second adjusting member 330 is a nut 331 fitted on the threaded rod 321. The nut 331 matches the threaded rod 321. Rotating the threaded rod 321 allows the nut 331 to move relative to the threaded rod 321. Of course, the first adjusting member 320 and the second adjusting member 330 are not limited to this.

[0074] In an alternative embodiment, the base 10 is provided with scale markings (not shown in the figure) for corresponding to the second adjustment member 330 at different positions.

[0075] This can be understood as follows: the second adjustment component 330 corresponds to different scale markings, and the scale markings also correspond to the angle between the carrier component 210 and the base 10. By observing the scale markings corresponding to the second adjustment component 330, the operator can know the angle between the carrier component 210 and the base 10 without having to measure the angle between the carrier component 210 and the base 10 separately, thus improving the convenience of measurement.

[0076] In one alternative embodiment, please refer to Figure 1 and Figure 2 The profilometer measuring auxiliary device 100 also includes a handle 50, which may be one or two. The handle 50 is connected to the base 10 and makes it convenient for the operator to pick up the profilometer measuring auxiliary device 100.

[0077] In one alternative embodiment, please refer to Figure 5 The base 10 has multiple hollow areas 110 to reduce the weight of the base 10 and make it easier for operators to handle.

[0078] In one alternative embodiment, please refer to Figure 5 and Figure 6 The base 10 is provided with a second clearance part 130, which is used to avoid the rotating mounting part 230; the support member 210 is provided with a third clearance part 214, which is used to avoid the adjustment component 30, so as to reduce the angle between the support member 210 and the base 10, thereby reducing the space occupied by the profile measuring auxiliary device 100 when not in use.

[0079] The second clearance portion 130 and the third clearance portion 214 are clearance through holes or clearance grooves. In this embodiment, the second clearance portion 130 and the third clearance portion 214 are not specifically limited. The provision of clearance through holes or clearance grooves can further reduce the minimum angle between the support member 210 and the base 10, that is, further reduce the space occupied by the profile measuring auxiliary device 100 when stored.

[0080] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.

Claims

1. An auxiliary device for profilometry measurement, characterized in that, The auxiliary device for profilometry measurement includes: Base; A support assembly, rotatably connected to the base, is used to place the product. Adjustment components are connected to the base; A rotating component, one end of which is rotatably connected to the side of the bearing assembly near the base, and the other end of which is movably connected to the adjusting assembly, rotates under the adjusting action of the adjusting assembly, and drives the bearing assembly to rotate. The adjustment component includes: The first adjusting component is rotatably connected to the base; The second adjusting member matches the first adjusting member, and the second adjusting member is connected to one end of the rotating member; Rotating the first adjusting member allows the second adjusting member to move relative to the first adjusting member, thereby causing the rotating member to rotate and adjusting the angle between the supporting component and the base.

2. The auxiliary device for profilometer measurement according to claim 1, characterized in that, The carrier component includes: A carrier, one end of which is rotatably connected to the base, and the product is placed on the side of the carrier away from the base; The first positioning element is detachably connected to the carrier element and is used to position the product placed on the carrier element.

3. The auxiliary device for profilometry measurement according to claim 2, characterized in that, The carrier is provided with a plurality of second positioning elements that match the first positioning element, and the first positioning element is detachably connected to the second positioning element.

4. The auxiliary device for profilometer measurement according to claim 3, characterized in that, Multiple second positioning elements are disposed on the carrier near its connection with the base.

5. The auxiliary device for profilometry measurement according to claim 2, characterized in that, The support member is also provided with a first clearance part, which is used to avoid protrusions on the product.

6. The auxiliary device for profilometer measurement according to claim 2, characterized in that, The carrier component also includes: A rotating mounting component is connected to the side of the support member near the base, and one end of the rotating component is rotatably connected to the rotating mounting component.

7. The auxiliary device for profilometer measurement according to claim 6, characterized in that, The base is provided with a second clearance part, which is used to avoid the rotating mounting component; The support member is provided with a third clearance part, which is used to avoid the adjustment component.

8. The auxiliary device for profilometer measurement according to claim 1, characterized in that, The adjustment component further includes: An adjustment handle is connected to the end of the first adjustment member. Rotating the adjustment handle causes the first adjustment member to rotate.

9. The auxiliary device for profilometer measurement according to claim 1, characterized in that, The first adjusting member and the second adjusting member are threaded together; The first adjusting component is a threaded rod, and the second adjusting component is a nut.

10. The auxiliary device for profilometer measurement according to claim 1, characterized in that, The base is provided with scale markings, which correspond to the second adjustment member at different positions.

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