Electrostatic chuck clamping jig

Abstract

The utility model relates to an electrostatic chuck clamping jig which comprises a supporting disc, a cavity is formed in the lower end of the supporting disc, a rectangular hole is formed in the supporting disc, an electrostatic chuck is placed on the supporting disc, a limiting assembly installed on the inner wall of the cavity is arranged in the rectangular hole, and the electrostatic chuck is fixed to the supporting disc under synchronous clamping of the limiting assembly. The three push plates are driven by the air cylinder to continuously move downwards, and the concentric-square-shaped frame is forced to move downwards. When the electrostatic chuck is clamped on the support disc, the concentric-square-shaped frame faces downwards, so that the gap between the adjusting block and the positioning blocks is gradually increased, the spring pushes the three positioning blocks to synchronously move towards the center point, the synchronous movement ensures that the electrostatic chuck can be uniformly and firmly clamped on the support disc, the positioning accuracy and stability are greatly improved, and the efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor processing, and relates to a static chuck clamping jig. BACKGROUND

[0002] A static chuck clamping jig with adjustable flatness is disclosed in a Chinese patent with application number 2023218769573, which includes a fixed base. A plurality of height adjustment components are arranged in a ring shape on the fixed base. The height adjustment components are connected to a support disc at the end away from the fixed base. An adjustment gap is left between the support disc and the fixed base. Each height adjustment component is arranged in the adjustment gap. The static chuck is placed at the end of the support disc away from the fixed base. In this technical solution, the static chuck is fixed by multiple threaded connections. Multiple positioning blocks need to be adjusted at one time, which affects the efficiency and causes limitations of this technical solution. SUMMARY

[0003] The utility model aims at providing a static chuck clamping jig that can solve the problems raised in the background art.

[0004] According to the technical solution provided by the utility model, a static chuck clamping jig includes a support disc. The lower end of the support disc forms a cavity. A rectangular hole and a static chuck are arranged on the support disc. A limiting assembly is arranged on the inner wall of the cavity in the rectangular hole. The static chuck is fixed to the support disc under the synchronous clamping of the limiting assembly.

[0005] Preferably, the limiting assembly includes a gas cylinder arranged on the upper wall of the cavity. The output end of the gas cylinder is provided with a push rod. The other end of the push rod is provided with a circular ring.

[0006] Preferably, a pull rod is arranged in the circular ring. The upper part of the pull rod is provided with a push plate.

[0007] Preferably, the limiting assembly further includes a support plate arranged on the inner wall of the cavity. A spring telescopic rod is arranged on the support plate. The upper end of the spring telescopic rod is provided with a back-shaped frame. The push plate is located in the back-shaped frame. The upper end of the back-shaped frame is provided with an adjusting block.

[0008] A matching positioning block is arranged above the adjusting block. A support frame is arranged on the positioning block. The support frame is connected to the support disc through the support frame. A spring is arranged on the positioning block. The other end of the spring is arranged on the support frame.

[0009] Preferably, a through hole is arranged at the lower end of the support frame. The upper end of the positioning block is arranged in an inclined manner. The upper part of the positioning block extends into the support frame.

[0010] Preferably, an inclined groove is arranged at the lower end of the positioning block. The inclined groove is matched with the upper end of the positioning block. The positive progress effect of the present application is that:

[0011] The electrostatic chuck clamping fixture provided in this embodiment of the invention has the following advantages:

[0012] 1. The cylinder drives three push plates to move downwards continuously, forcing the loop frame to move downwards as well. As the loop frame moves downwards, the gap between the adjusting block and the positioning block gradually increases. The spring pushes the three positioning blocks to move synchronously towards the center point. This synchronous movement not only ensures that the electrostatic chuck can be evenly and firmly clamped on the support plate, but also greatly improves the accuracy and stability of positioning, and secondly, improves efficiency. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the present invention.

[0014] Figure 2 This is a three-dimensional view of the support plate of this utility model.

[0015] Figure 3 This is a three-dimensional view of a portion of the limiting component of this utility model.

[0016] Figure 4 yes Figure 3 A cross-sectional view.

[0017] In the diagram: support plate 1; cavity 11; rectangular hole 12; electrostatic chuck 2; cylinder 3; push rod 31; ring 32; pull rod 4; push plate 41; support plate 5; spring telescopic rod 51; loop frame 52; support frame 53; spring 54; positioning block 55; adjusting block 56; inclined groove 57; limit rod 6. Detailed Implementation

[0018] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0019] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0020] like Figures 1-4As shown, this utility model is an electrostatic chuck clamping fixture, including a support plate 1, a cavity 11 formed at the lower end of the support plate 1, and three rectangular holes 12 circumferentially opened at equal intervals on the support plate 1; a concave hole is formed at the upper end of the support plate 1, and an electrostatic chuck 2 is placed in the concave hole. A limiting component installed on the inner wall of the cavity 11 is provided in the rectangular hole 12, and the electrostatic chuck 2 is fixed to the support plate 1 under the clamping of multiple limiting components.

[0021] The cylinder 3 drives the three push plates 41 to move downwards continuously, forcing the loop frame 52 to move downwards as well. As the loop frame 52 moves downwards, the gap between the adjusting block 56 and the positioning block 55 gradually increases. The spring 54 pushes the three positioning blocks 55 to move synchronously towards the center point. This synchronous movement not only ensures that the electrostatic chuck 2 can be evenly and firmly clamped on the support plate 1, but also greatly improves the accuracy and stability of positioning, and secondly improves efficiency.

[0022] The limiting assembly includes a cylinder 3 mounted on the upper wall of the cavity 11. The output end of the cylinder 3 is provided with a push rod 31, and the other end of the push rod 31 is provided with a ring 32.

[0023] A pull rod 4 is provided inside the ring 32, and a push plate 41 is provided on the upper part of the pull rod 4.

[0024] The limiting assembly also includes a support plate 5 installed on the inner wall of the cavity 11. The support plate 5 is provided with a spring telescopic rod 51. The upper end of the spring telescopic rod 51 is provided with a loop frame 52. The push plate 41 is located inside the loop frame 52. The upper end of the loop frame 52 is provided with an adjustment block 56.

[0025] A matching positioning block 55 is provided above the adjusting block 56. A support frame 53 is provided on the positioning block 55. The support frame 53 is connected to the support plate 1 through the support frame 53. A spring 54 is provided on the positioning block 55. The other end of the spring 54 is installed on the support frame 53.

[0026] The lower end of the support frame 53 has a through hole, and the upper end of the positioning block 55 is inclined and extends into the support frame 53.

[0027] The lower end of the positioning block 55 is provided with a slanted groove 57, which fits with the upper end of the positioning block 55.

[0028] First, the electrostatic chuck 2 is precisely placed into the pre-set recess on the support plate 1. Then, the cylinder 3 is activated. The reciprocating motion of the piston inside the cylinder 3 is converted into mechanical energy, pushing the three push rods 31 at its lower end to move downward synchronously and smoothly. These three push rods 31 not only ensure the uniformity of the action, but also enhance the stability and reliability of the entire device.

[0029] Since the pull rod 4 is located inside the ring 32 and is linked with the push rod 31, the pull rod 4 moves downward synchronously as the push rod 31 moves downward, which not only simplifies the mechanical structure but also improves the transmission efficiency.

[0030] The downward movement of the pull rod 4 further drives the push plate 41, which is closely connected to it, to move downward. As a key component, the push plate 41 ensures that the force can be transmitted smoothly and effectively. As the push plate 41 continues to move downward, it first contacts the inner wall of the loop frame 52 and gradually applies pressure, forcing the loop frame 52 to move downward as well.

[0031] The downward movement of the U-shaped frame 52 compresses the built-in spring telescopic rod 51, which serves as a buffer and energy storage mechanism. At the same time, the downward movement of the U-shaped frame 52 also triggers a chain reaction: it pulls the adjusting block 56 to gradually separate from the originally engaged positioning block 55. This process is one of the key steps in the fixing mechanism of the electrostatic chuck 4, which ensures that the subsequent positioning and clamping actions can be carried out smoothly.

[0032] As the gap between the adjusting block 56 and the positioning block 55 gradually increases, the spring 54 begins to exert its restoring force, pushing the three positioning blocks 55 to move synchronously towards the center point. This synchronous movement not only ensures that the electrostatic chuck 2 can be evenly and firmly clamped on the support plate 1, but also greatly improves the accuracy and stability of positioning.

[0033] Finally, when the positioning block 55 is fully in place and tightly adheres to and fixes the edge of the electrostatic chuck 2, the entire installation and fixing process is completed. This design not only improves work efficiency but also ensures the stability and safety of the electrostatic chuck during use, laying a solid foundation for subsequent processing or handling steps.

[0034] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this utility model, and the utility model is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of this utility model, and these modifications and improvements are also considered to be within the protection scope of this utility model.

Claims

1. An electrostatic chuck clamping fixture, characterized in that, Includes a support plate (1), the lower end of the support plate (1) forms a cavity (11), the support plate (1) has a rectangular hole (12) and an electrostatic chuck (2) is placed on it, the rectangular hole (12) is provided with a limiting component installed on the inner wall of the cavity (11), and the electrostatic chuck (2) is fixed to the support plate (1) under the synchronous clamping of the limiting component.

2. The electrostatic chuck clamping fixture as described in claim 1, characterized in that: The limiting assembly includes a cylinder (3) mounted on the upper wall of the cavity (11), with a push rod (31) at the output end of the cylinder (3) and a ring (32) at the other end of the push rod (31).

3. The electrostatic chuck clamping fixture as described in claim 2, characterized in that: A pull rod (4) is provided inside the ring (32), and a push plate (41) is provided on the upper part of the pull rod (4).

4. The electrostatic chuck clamping fixture as described in claim 3, characterized in that: The limiting assembly also includes a support plate (5) installed on the inner wall of the cavity (11), a spring telescopic rod (51) is provided on the support plate (5), a loop frame (52) is provided at the upper end of the spring telescopic rod (51), a push plate (41) is located inside the loop frame (52), and an adjustment block (56) is provided at the upper end of the loop frame (52). A matching positioning block (55) is provided above the adjusting block (56), and a support frame (53) is provided on the positioning block (55). The support frame (53) is connected to the support plate (1) through the support frame (53). A spring (54) is provided on the positioning block (55), and the other end of the spring (54) is installed on the support frame (53).

5. The electrostatic chuck clamping fixture as described in claim 4, characterized in that: The lower end of the support frame (53) has a through hole, and the upper end of the positioning block (55) is inclined and extends into the support frame (53).

6. The electrostatic chuck clamping fixture as described in claim 5, characterized in that: The lower end of the positioning block (55) is provided with a slanted groove (57), which fits with the upper end of the positioning block (55).

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