Thermocouple fixing device of diffusion furnace

Abstract

The utility model discloses a thermocouple fixing device of a diffusion furnace, which relates to the technical field of semiconductor manufacturing and comprises a mounting seat, a fixed seat is arranged on the mounting seat, and two movable seats are symmetrically arranged at two ends of the mounting seat; two pressing sleeve parts are symmetrically arranged at the two ends of the fixed seat; the bottoms of the two movable seats penetrate through the mounting seat and are provided with two fastening screws correspondingly, and fastening sleeves are arranged on the sides, close to the pressing sleeve component, of the movable seats. Through the above structure, the device can effectively fix the thermocouple, avoids the displacement of the thermocouple, prevents the temperature measurement precision from being affected, can select the pressing sleeve parts with different inner diameters according to the diameters of different thermocouples, achieves the quick replacement, facilitates the fixation of the thermocouples with different specifications, and improves the applicability of the device.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, specifically relates to a diffusion furnace's thermocouple fixing device. BACKGROUND

[0002] As the core equipment in the fields of semiconductor manufacturing, photovoltaic cell production and the like, the diffusion furnace directly influences product quality and process stability in the precision of temperature control. As the key component for temperature measurement of the diffusion furnace, the design rationality of the fixing device of the thermocouple directly relates to the accuracy and reliability of temperature measurement.

[0003] In order to guarantee the precision of temperature measurement, the current diffusion furnace generally adopts traditional processes such as welding and gluing to fix the thermocouple. However, under high-temperature working conditions, the fixing mode may cause problems such as metal embrittlement fracture or softening of the adhesive layer, which may all cause displacement of the thermocouple and further affect the precision of temperature measurement. Therefore, we propose a diffusion furnace thermocouple fixing device to solve the above-mentioned problems. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a diffusion furnace thermocouple fixing device to solve the problem that the current diffusion furnace generally adopts traditional processes such as welding and gluing to fix the thermocouple in order to guarantee the precision of temperature measurement. However, under high-temperature working conditions, the fixing mode may cause problems such as metal embrittlement fracture or softening of the adhesive layer, which may all cause displacement of the thermocouple and further affect the precision of temperature measurement.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] A diffusion furnace thermocouple fixing device, comprising a mounting seat, a fixing seat is arranged on the mounting seat, two movable seats are symmetrically arranged at both ends of the mounting seat, two compression sleeve components are symmetrically arranged at both ends of the fixing seat, two fastening screws are respectively arranged at the bottom of the two movable seats through the mounting seat, and a fastening sleeve is arranged on the side of the movable seat close to the compression sleeve component;

[0007] The outer side of one end of the fastening sleeve is hexagonal, and the diameter of the inner side of the fastening sleeve close to one end of the hexagonal gradually decreases to the diameter of the other end.

[0008] Further, the mounting seat comprises a mounting plate, two waist-shaped grooves are symmetrically arranged at both ends of the mounting plate, and two mounting blocks are fixedly connected to the both sides of the lower surface of the mounting plate.

[0009] Further, an installation hole is arranged on the fixing seat, the bottom of the fixing seat is fixedly connected to the upper surface of the mounting plate, a plurality of limiting grooves are uniformly arranged around the axis of the installation hole, and the bottom of the movable seat is slidingly connected to the mounting plate through the waist-shaped groove.

[0010] Further, the compression sleeve component includes a mounting shaft, a plurality of limit pins are uniformly and fixedly connected outside the mounting shaft around the axis, a fixed plate is fixedly connected to the other end of the mounting shaft, the mounting shaft is in sliding connection with the mounting hole, the plurality of limit pins are in sliding connection with the plurality of limit grooves respectively, a plurality of compression spring sheets are uniformly and fixedly connected to the other side of the fixed plate around the axis, the fixed plate is movably mounted with the fixed seat through screws, and the plurality of compression spring sheets are fixedly connected with the plurality of compression gaskets respectively.

[0011] Further, the compression sleeve component includes a mounting shaft, a plurality of limit pins are uniformly and fixedly connected outside the mounting shaft around the axis, a fixed plate is fixedly connected to the other end of the mounting shaft, the mounting shaft is in sliding connection with the mounting hole, the plurality of limit pins are in sliding connection with the plurality of limit grooves respectively, a plurality of compression spring sheets are uniformly and fixedly connected to the other side of the fixed plate around the axis, the fixed plate is movably mounted with the fixed seat through screws, and the plurality of compression spring sheets are fixedly connected with the plurality of compression gaskets respectively.

[0012] Further, the compression sleeve component includes a mounting shaft, a plurality of limit pins are uniformly and fixedly connected outside the mounting shaft around the axis, a fixed plate is fixedly connected to the other end of the mounting shaft, the mounting shaft is in sliding connection with the mounting hole, the plurality of limit pins are in sliding connection with the plurality of limit grooves respectively, a plurality of compression spring sheets are uniformly and fixedly connected to the other side of the fixed plate around the axis, the fixed plate is movably mounted with the fixed seat through screws, and the plurality of compression spring sheets are fixedly connected with the plurality of compression gaskets respectively.

[0013] Compared with the prior art, the utility model has the advantages that:

[0014] 1. The utility model discloses a thermocouple fixing device, which comprises a fixed seat, two movable seats, two fastening sleeves, two compression sleeve components and two fastening screws.

[0015] 2. The utility model discloses a plurality of limit pins on the mounting shaft are in sliding connection with the plurality of limit grooves on the mounting hole, so that the compression sleeve component can be fixed conveniently, different compression sleeve components with different inner diameters can be selected according to the diameters of different thermocouples, and the different specifications of thermocouples can be fixed conveniently, and the applicability of the device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the whole structure schematic diagram of the utility model;

[0017] Figure 2 It is the side sectional view installation structure schematic diagram of the utility model;

[0018] Figure 3 It is the fixed seat installation structure schematic diagram of the utility model;

[0019] Figure 4 It is the compression sleeve component installation structure schematic diagram of the utility model;

[0020] Reference numeral: 1, mounting seat; 101, mounting plate; 102, waist-shaped groove; 103, mounting block; 2, fixed seat; 201, mounting hole; 202, limiting groove; 3, movable seat; 4, compression sleeve component; 401, mounting shaft; 402, limiting pin; 403, fixed plate; 404, compression spring piece; 405, compression gasket; 5, fastening screw; 6, fastening sleeve. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0022] Please refer to Figures 1-4 The present application provides a technical solution: a thermocouple fixing device of a diffusion furnace, comprising a mounting seat 1, the mounting seat 1 is provided with a fixed seat 2, two movable seats 3 are symmetrically arranged at both ends of the mounting seat 1, two compression sleeve components 4 are symmetrically arranged at both ends of the fixed seat 2, two fastening screws 5 are arranged at the bottom of each movable seat 3 through the mounting seat 1, and a fastening sleeve 6 is arranged on one side of the movable seat 3 close to the compression sleeve component 4.

[0023] The outer side of one end of the fastening sleeve 6 is hexagonal, and the diameter of the inner side of the fastening sleeve 6 close to one end of the hexagonal gradually decreases to the diameter of the other end.

[0024] The mounting seat 1 comprises a mounting plate 101, two waist-shaped grooves 102 are symmetrically arranged at both ends of the mounting plate 101, and two mounting blocks 103 are fixedly connected to the both sides of the lower surface of the mounting plate 101. In this example, the waist-shaped grooves 102 are arranged to facilitate the smooth movement of the fastening sleeve 6 driven by the movable seat 3, thereby compressing the thermocouple.

[0025] The fixed seat 2 is provided with a mounting hole 201, the bottom of the fixed seat 2 is fixedly connected to the upper surface of the mounting plate 101, a plurality of limiting grooves 202 are uniformly arranged around the axis of the mounting hole 201, and the bottom of the movable seat 3 is slidingly connected to the mounting plate 101 through the waist-shaped groove 102.

[0026] The compression sleeve component 4 comprises a mounting shaft 401, a plurality of limiting pins 402 are uniformly and rotationally fixedly connected outside the mounting shaft 401 around an axis, the mounting shaft 401 is fixedly connected with a fixed plate 403 at the other end, the mounting shaft 401 is slidably connected with the mounting hole 201, the plurality of limiting pins 402 are respectively slidably connected with the plurality of limiting grooves 202, a plurality of compression spring sheets 404 are uniformly and rotationally fixedly connected to the other side of the fixed plate 403 around an axis, the fixed plate 403 is movably mounted with the fixed seat 2 through screws, and the plurality of compression spring sheets 404 are respectively fixedly connected with a plurality of compression gaskets 405 inside.

[0027] The inner side of the fastening sleeve 6 is rotationally connected with the inner side of the movable seat 3, and the inner side of the fastening sleeve 6 is threadedly connected with the outer side of the plurality of compression spring sheets 404.

[0028] The two fastening screws 5 are respectively threadedly connected with the bottoms of the two movable seats 3. In the example, the fastening screws 5 can be arranged to fix the movable seats 3 and further press against the fastening sleeve 6, thereby improving the stability of the device.

[0029] Working principle: the thermocouple is inserted through the two movable seats 3, the two fastening sleeves 6, the two compression sleeve components 4 and the fixed seat 2, the two fastening screws 5 are loosened, the fastening sleeve 6 is rotated on the plurality of compression spring sheets 404 by means of a wrench clamped into the hexagonal surface at one end of the fastening sleeve 6, in the process, the movable seat 3 is slid along the waist-shaped groove 102, the fastening sleeve 6 causes the plurality of compression spring sheets 404 to approach the inner thermocouple, thereby causing the plurality of compression gaskets 405 to compress the thermocouple, and then the two fastening screws 5 are tightened to fix the movable seats 3, thereby completing the fixation of the thermocouple.

[0030] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A thermocouple fixing device for a diffusion furnace, characterized by: The utility model provides a fixing device for the installation of the electric power equipment, including the mounting seat (1), be provided with fixed seat (2) on mounting seat (1), two movable seat (3) are provided with symmetry at mounting seat (1) both ends, two pressure tight sleeve parts (4) are provided with symmetry at fixed seat (2) both ends, two the fastening screw (5) of movable seat (3) bottom respectively is provided with two through mounting seat (1), and the fastening sleeve (6) is set up close to pressure tight sleeve part (4) one side of movable seat (3). The fastening sleeve (6) one end outside is hexagonal, and the diameter of the fastening sleeve (6) inside close to the hexagonal one end gradually reduces to the diameter of the other end.

2. The thermocouple fixing device for a diffusion furnace according to claim 1, characterized in that: The mounting seat (1) includes a mounting plate (101), two waist-shaped grooves (102) are symmetrically arranged at both ends of the mounting plate (101), and two mounting blocks (103) are fixedly connected to both sides of the lower surface of the mounting plate (101).

3. A thermocouple fixing device for a diffusion furnace according to claim 2, characterized in that: The fixed seat (2) is provided with a mounting hole (201), and the bottom of the fixed seat (2) is fixedly connected to the upper surface of the mounting plate (101). A plurality of limiting grooves (202) are uniformly arranged around the axis of the mounting hole (201). The bottom of the movable seat (3) is slidably connected to the mounting plate (101) through the waist-shaped groove (102).

4. The thermocouple fixing device of a diffusion furnace according to claim 3, characterized in that: The pressure tight sleeve part (4) includes a mounting shaft (401), a plurality of limiting pins (402) are uniformly and fixedly connected to the outer side of the mounting shaft (401) around the axis, a fixed plate (403) is fixedly connected to the other end of the mounting shaft (401), the mounting shaft (401) is slidably connected to the mounting hole (201), the plurality of limiting pins (402) are slidably connected to the plurality of limiting grooves (202), a plurality of pressure tight spring sheets (404) are uniformly and fixedly connected to the other side of the fixed plate (403) around the axis, the fixed plate (403) is movably installed on the fixed seat (2) through screws, and the plurality of pressure tight spring sheets (404) are fixedly connected to the plurality of pressure tight gaskets (405) inside, respectively.

5. A thermocouple fixing device for a diffusion furnace according to claim 4, characterized in that: The inner side of the smaller diameter end of the fastening sleeve (6) is rotatably connected to the inner side of the movable seat (3), and the inner side of the fastening sleeve (6) is threadedly connected to the outer side of the plurality of pressure tight spring sheets (404).

6. The thermocouple fixation device for a diffusion furnace according to claim 1, characterized in that: The two fastening screws (5) are threadedly connected to the bottoms of the two movable seats (3), respectively.

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