Vacuum chamber device

By designing a vacuum chamber, rising hole, falling hole, and side blowing hole in the vacuum chamber device, and using a gas supply assembly to blow in driving gas, the problem of low steel decarburization efficiency was solved, and the quality of steel treatment and production efficiency were improved.

CN224119037UActive Publication Date: 2026-04-14BEIJING SHOUGANG CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
BEIJING SHOUGANG CO LTD
Filing Date
2025-05-07
Publication Date
2026-04-14

AI Technical Summary

Technical Problem

The decarburization efficiency of molten steel in existing vacuum chamber devices is not high, which affects the quality of steel and production efficiency.

Method used

Design a vacuum chamber device comprising a vacuum chamber, an ascending hole, a descending hole, and a side blowing hole. Drive gas is blown into the side blowing hole through a gas supply assembly to ensure full contact between molten steel and gas, thereby improving decarburization efficiency. Furthermore, the gas drives the molten steel to circulate, enhancing the processing effect.

Benefits of technology

This improves the decarburization efficiency and flow circulation efficiency of molten steel, thereby enhancing the quality of steel and production efficiency.

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Abstract

According to the vacuum chamber device, a vacuum cavity of a vacuum chamber is columnar, a vacuum hole communicated with the vacuum cavity can be used for discharging gas in the vacuum cavity, an ascending hole and a descending hole are communicated to one end of the vacuum cavity side by side, the ascending hole can suck molten steel into the vacuum cavity, and the molten steel flows out of the descending hole after being treated in the vacuum cavity. The side wall of the vacuum cavity communicates with a row of side blowing holes, the row of side blowing holes are arranged at intervals in the circumferential direction of the vacuum cavity and located in the side, away from the descending hole, of the ascending hole, a plurality of gas supply ends, correspondingly communicating with the row of side blowing holes, of the gas supply assembly can blow driving gas into the side blowing holes, and the gas can be blown to molten steel entering the ascending hole; the contact area of the gas and the molten steel is increased to improve the molten steel treatment efficiency, the gas drives the molten steel to flow to the descending hole in the other side of the ascending hole, the molten steel treatment efficiency can be improved while the molten steel treatment quality is improved, the steel grade quality and the production efficiency are improved, and the technical problem that the steel grade quality and the production efficiency are not ideal enough is solved to a certain extent.
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Description

Technical Field

[0001] This application belongs to the field of refining equipment technology, specifically relating to a vacuum chamber device. Background Technology

[0002] Vacuum chamber devices are a type of smelting equipment used in the heat treatment industry. They can be applied in the RH vacuum refining process, where molten steel can be processed in the vacuum chamber of the device.

[0003] Currently, a driving gas is introduced into the vacuum chamber. This driving gas pushes the reducing gas in the vacuum chamber to come into contact with the molten steel, producing a carbon-oxygen reaction and achieving decarburization of the steel. However, the current decarburization efficiency of the molten steel is not high enough, which affects the quality of the steel and production efficiency, resulting in less than ideal steel quality and production efficiency. Utility Model Content

[0004] This application aims to at least partially solve the technical problem of unsatisfactory steel quality and production efficiency. To this end, this application provides a vacuum chamber device.

[0005] This application provides a vacuum chamber device, including:

[0006] A vacuum chamber is provided with a vacuum cavity and a vacuum hole, an ascending hole, a descending hole and a row of side blowing holes communicating with the vacuum cavity. The vacuum hole is used to discharge gas in the vacuum cavity. The vacuum cavity is columnar and the ascending hole and the descending hole are arranged side by side at one end of the vacuum cavity. The row of side blowing holes communicates with the side wall of the vacuum cavity and is arranged at intervals along the circumference of the vacuum cavity. The row of side blowing holes is located on the side of the ascending hole away from the descending hole.

[0007] The air supply assembly is provided with multiple air supply ends that are connected to a row of side blowing holes.

[0008] In some or more embodiments, in a row of side blowing holes, the angle between the extended axes of the two side blowing holes that are furthest apart is 120° to 150°, and the spacing between two adjacent side blowing holes is the same.

[0009] In some or more embodiments, the diameter of the side blow hole that discharges gas from the vacuum chamber is smaller than the diameter of the other end of the side blow hole.

[0010] In some or more embodiments, the distance between the side blowing hole and the end of the vacuum chamber that connects to the rising hole is greater than the distance between the side blowing hole and the other end of the vacuum chamber.

[0011] In some or all embodiments, the vacuum chamber is provided with two rows of side blowing holes, which are distributed along the axial direction of the vacuum chamber.

[0012] In some or more embodiments, the axial length of the vacuum chamber is (8.4) to (10.5) times the distance between the two rows of side blowholes.

[0013] In some or more embodiments, the cross-sections of the rising hole and the falling hole are both elliptical, with one end of the minor axis of the cross-section of the rising hole facing the falling hole.

[0014] In some or more embodiments, the diameter of the side blow hole is the same as the diameter of the riser hole.

[0015] In some or more embodiments, the gas supply assembly includes:

[0016] The gas supply carrier is equipped with a gas output terminal that can be controlled to open and close.

[0017] At least two main pipelines and regulating valves, one end of each main pipeline is connected to the gas output end, and the regulating valve is located on the main pipeline and integrates a flow meter;

[0018] Multiple branch pipes, one end of each of the multiple branch pipes being connected to the other end of two of the main pipes, and the other end of the multiple branch pipes being configured as multiple air supply ends corresponding to and connected to a row of side blowing holes.

[0019] In some or more embodiments, the branch pipe is a flexible hose, and the air supply assembly is further provided with multiple pipe joints corresponding to the multiple air supply ends, with each air supply end connected to the corresponding side blow hole through one of the pipe joints.

[0020] The beneficial effects provided by one or more embodiments of this application are as follows:

[0021] The vacuum chamber is cylindrical and has a vacuum hole that can be used to discharge the gas inside. The rising hole and the falling hole are connected side by side to one end of the vacuum chamber. When the vacuum chamber device is in use, the rising hole and the falling hole can be placed into the molten steel in the ladle. The gas inside the vacuum chamber is discharged through the vacuum hole to make the vacuum chamber negative pressure. The molten steel in the ladle can enter the vacuum chamber through the rising hole. After the molten steel comes into contact with the gas in the vacuum chamber and reacts, it flows out of the vacuum chamber through the falling hole. Furthermore, the sidewall of the vacuum chamber is connected to a row of side-blowing holes, which are arranged at intervals along the circumference of the vacuum chamber. All the side-blowing holes are located on the side of the rising hole away from the falling hole. When molten steel enters the vacuum chamber from the rising hole, the gas supply components and the multiple gas supply ends corresponding to the row of side-blowing holes can blow driving gas into the side-blowing holes. The driving gas is blown from the row of side-blowing holes towards the molten steel entering the rising hole, so that the gas in the vacuum chamber and the molten steel can fully contact each other, thereby improving the decarburization efficiency of the molten steel. While improving the decarburization efficiency of the molten steel, the driving gas can also drive the molten steel to flow to the falling hole on the other side of the rising hole, thereby improving the flow circulation efficiency of the molten steel. This improves the quality of molten steel treatment and the circulation efficiency of molten steel, thereby improving the quality of the final steel grade and production efficiency, and to a certain extent solving the technical problem of the unsatisfactory quality and production efficiency of the steel grade. Attached Figure Description

[0022] To enable those skilled in the art to more clearly understand this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0023] Figure 1 The diagram shows a structural view of a vacuum chamber device according to some or all embodiments of this application.

[0024] Figure 2 A cross-sectional view of a vacuum chamber apparatus according to some or all embodiments of this application is shown.

[0025] Figure 3 A partial structural schematic diagram of a vacuum chamber device in some or certain embodiments of this application is shown.

[0026] Explanation of reference numerals in the attached drawings: 1. Vacuum chamber; 11. Vacuum cavity; 12. Vacuum hole; 13. Rising hole; 14. Falling hole; 15. Side blowing hole; 16. Body; 161. Permeable brick; 162. Outer shell; 17. Rising pipe; 18. Falling pipe; 2. Gas supply assembly; 21. Gas supply end; 22. Gas supply carrier; 221. Gas output end; 23. Main pipe; 24. Branch pipe; 25. Control valve; 26. Regulating valve; 27. Pipe joint; α, Angle between the extended axes of the two side blowing holes furthest apart. Detailed Implementation

[0027] To enable those skilled in the art to more clearly understand this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0028] Furthermore, reference numerals and / or reference letters may be repeated in different examples in this application. Such repetition is for simplification and clarity purposes and does not in itself indicate a relationship between the various embodiments and / or settings discussed. In addition, this application provides examples of various specific processes and materials; however, those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0029] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0030] The present application will now be described in conjunction with the accompanying drawings:

[0031] Figure 1 This application shows structural views of a vacuum chamber device according to some or all embodiments. Figure 2 A cross-sectional view of a vacuum chamber apparatus according to some or all embodiments of this application is shown, with reference to... Figure 1 , 2 This application provides a vacuum chamber device, including:

[0032] Vacuum chamber 1 is provided with a vacuum cavity 11 and a vacuum hole 12, a rising hole 13, a falling hole 14 and a row of side blowing holes 15 that connect to the vacuum cavity 11. The vacuum hole 12 is used to discharge gas in the vacuum cavity 11. The vacuum cavity 11 is columnar and the rising hole 13 and the falling hole 14 are arranged side by side at one end of the vacuum cavity 11. The row of side blowing holes 15 connects to the side wall of the vacuum cavity 11 and is arranged at intervals along the circumference of the vacuum cavity 11. The row of side blowing holes 15 are all located on the side of the rising hole 13 away from the falling hole 14.

[0033] The air supply assembly 2 is provided with multiple air supply ends 21 that are connected to a row of side blowing holes 15.

[0034] The vacuum chamber 11 of the vacuum chamber 1 is cylindrical and the vacuum hole 12 connected to the vacuum chamber 11 can be used to discharge the gas in the vacuum chamber 11. The rising hole 13 and the falling hole 14 are connected side by side to one end of the vacuum chamber 11. When the vacuum chamber device is in use, the rising hole 13 and the falling hole 14 can be placed into the molten steel in the ladle. The gas in the vacuum chamber 11 is discharged through the vacuum hole 12 to make the vacuum chamber 11 negative pressure. The molten steel in the ladle can enter the vacuum chamber 11 through the rising hole 13. After the molten steel in the vacuum chamber 11 comes into contact with the gas and reacts, it flows out of the vacuum chamber 1 through the falling hole 14. Furthermore, the sidewall of the vacuum chamber 11 is connected to a row of side blowing holes 15. The row of side blowing holes 15 is arranged at intervals along the circumference of the vacuum chamber 11. The row of side blowing holes 15 is located on the side of the rising hole 13 away from the falling hole 14. When molten steel enters the vacuum chamber 11 from the rising hole 13, the gas supply component 2 and the multiple gas supply ends 21 corresponding to the row of side blowing holes 15 can blow driving gas into the side blowing holes 15. The driving gas is blown from the row of side blowing holes 15 towards the molten steel entering the rising hole 13, so that the gas in the vacuum chamber 1 is in full contact with the molten steel, thereby improving the decarburization efficiency of the molten steel. While improving the decarburization treatment efficiency of the molten steel, the driving gas can drive the molten steel to flow to the falling hole 14 on the other side of the rising hole 13, thereby improving the flow circulation efficiency of the molten steel. This improves the quality of molten steel treatment and the circulation efficiency of molten steel, thereby improving the quality of the final steel grade and production efficiency, and to a certain extent solving the technical problem of the unsatisfactory quality and production efficiency of the steel grade.

[0035] It should be noted that the row of side blowing holes 15 consists of multiple side blowing holes 15 arranged at intervals along the circumference of the vacuum chamber 11. The vacuum hole 12 of the vacuum chamber 1 can be used to connect with equipment such as a vacuum pump, and the vacuum pump draws gas from the vacuum chamber 1 through the vacuum hole 12. Figure 2 The side blow hole 15 is indicated by a dashed straight line.

[0036] In some or more embodiments, in a row of side blowing holes 15, the included angle between the extended lines of the axes of the two side blowing holes 15 with the furthest distance is 120° to 150°, and the distance between two adjacent side blowing holes 15 is the same.

[0037] The included angle between the extended axes of the two side blow holes 15 with the widest spacing is 120° to 150°. This allows for more thorough contact between the driving gas and the molten steel entering through the rising hole 13, which is beneficial for improving the treatment effect of the molten steel and thus improving the quality of the final steel grade. For ease of understanding, the included angle between the extended axes of the two side blow holes 15 with the widest spacing is marked as α in the attached figure.

[0038] In some or more embodiments, the included angle α between the extended axes of the two furthest side blowholes 15 can also be 140° to 148°. This results in better quality molten steel.

[0039] In some or more embodiments, the extended axis of each side-blowing hole 15 may intersect the axis of the vacuum chamber 11. This results in better treatment of molten steel.

[0040] In some or more embodiments, the diameter of the gas discharged from the vacuum chamber 11 by the side blowing hole 15 is smaller than the diameter of the other end of the side blowing hole 15. Therefore, when the driving gas is blown out from the side blowing hole 15, the flow rate of the driving gas increases at the end with the smaller diameter of the side blowing hole 15, making it easier for the driving gas to drive the molten steel flow. This results in a larger contact area between the molten steel and the gas, leading to better processing results.

[0041] In some embodiments, the distance between the side-blowing hole 15 and one end of the vacuum chamber 11 that connects to the rising hole 13 is greater than the distance between the side-blowing hole 15 and the other end of the vacuum chamber 11. The gas flowing out of the side-blowing hole 15 can directly contact the molten steel, increasing the contact area between the molten steel and the gas, thereby improving the steel processing efficiency.

[0042] In some or more embodiments, the distance between the side blowing hole 15 and one end of the vacuum chamber 11 that connects to the rising hole 13 can be 250-350 mm. Or it can be adjusted as needed.

[0043] Figure 3 This application shows a partial structural schematic diagram of a vacuum chamber device according to some embodiments or certain embodiments. (Refer to...) Figure 3 In some embodiments, the vacuum chamber 1 is provided with two rows of side blowing holes 15, which are distributed along the axial direction of the vacuum chamber 11. This can increase the contact area between the gas and the molten steel, which is beneficial to improving the processing efficiency of the molten steel and also to accelerating the circulation of the molten steel.

[0044] In some or more embodiments, the axial length of the vacuum chamber 11 is (8.4) to (10.5) times the distance between the two rows of side blowing holes 15. The driving gas is more concentrated, and the treatment effect on molten steel is also greatly improved.

[0045] In some embodiments, both the rising hole 13 and the falling hole 14 have elliptical cross-sections, with one end of the minor axis of the rising hole 13 facing the falling hole 14. The rising hole 13 can be located between the falling hole 14 and a row of side-blowing holes 15, and the two ends of the major axis of the rising hole 13 can correspond to the side-blowing holes 15 on both sides of the row of side-blowing holes 15. The gas entering the vacuum chamber 11 from the side-blowing holes 15 can have a larger contact area with the molten steel entering the vacuum chamber 11 from the rising hole 13, which is beneficial to improving the treatment effect and efficiency of the molten steel.

[0046] In some embodiments, the diameter of the side-blowing hole 15 is the same as the diameter of the rising hole 13. This facilitates preparation and improves the treatment effect of molten steel.

[0047] In some or all embodiments, the rising hole 13 may also be a circular hole or other shapes, and the diameter of the rising hole 13 and the diameter of the side blowing hole 15 may also be 4 mm, etc.

[0048] In some or more embodiments, the vacuum chamber 1 may include a body 16, an ascending pipe 17, and a descending pipe 18. The body 16 may be a cylindrical shape closed at both ends, with its inner hole forming a vacuum cavity 11. A vacuum hole 12 may be disposed at one end of the body 16. The ascending pipe 17 and the descending pipe 18 may be fixedly connected side-by-side to the other end of the body 16, with the ascending pipe 17 forming an ascending hole 13 communicating with the vacuum cavity 11, and the descending pipe 18 forming a descending hole 14 communicating with the vacuum cavity 11. This facilitates fabrication.

[0049] It should be noted that, Figure 1 From the perspective of the media, the ascender tube 17 blocks the descender tube 18.

[0050] In some or more embodiments, the body 16 of the vacuum chamber 1 may include a shell 162 with permeable bricks 161 and refractory bricks stacked on the inner wall of the shell 162. The permeable bricks 161 and refractory bricks are stacked to form a vacuum cavity 11. A steel pipe passes through the permeable bricks 161, and the pipe hole of the steel pipe can form a side blowing hole 15. The permeable bricks 161 may be cuboid in shape, and the length of the permeable bricks 161 may be 200-400 mm. The number of permeable bricks 161 in the body 16 can be set according to the number of side blowing holes 15, which may be 3-10. The number of side blowing holes 15 can be adjusted according to the size of the body 16.

[0051] In some or more embodiments, the gas supply assembly 2 may include:

[0052] The gas supply carrier 22 is equipped with a gas output terminal 221 that can be controlled to open and close.

[0053] There are at least two main pipes 23 and regulating valves 26. One end of each main pipe 23 is connected to the gas output end 221. The regulating valve 26 is located on the main pipe 23 and has an integrated flow meter (not shown in the figure).

[0054] Multiple branch pipes 24, one end of each branch pipe 24 is connected to the other end of two main pipes 23, and the other end of the branch pipes 24 is configured to be connected to multiple air supply ends 21 corresponding to a row of side blow holes 15.

[0055] This facilitates implementation and fabrication. The regulating valve 26 and the flow meter can work together to control the opening and closing of the branch pipe 24, as well as monitor and change the gas flow rate within the branch pipe 24. The controllability of the gas output terminal 221 can be achieved through the control valve 25.

[0056] It should be noted that the control valve 25 can be a mechanical valve or a hydraulic valve. The control valve 25 is installed on the branch pipe 24 to control the opening and closing of the branch pipe 24. The regulating valve 26 is installed on the branch pipe 24 to regulate the flow of the branch pipe 24. The flow meter integrated in the regulating valve 26 can detect the flow rate of the gas flowing through the corresponding branch pipe 24.

[0057] In some or all embodiments, there may be two main pipes 23, each main pipe 23 may be connected to four branch pipes 24, and the other end of each branch pipe 24 is connected to a side blowing hole 15, and the number of side blowing holes 15 may be eight.

[0058] In some or more embodiments, the branch pipe 24 is a flexible hose, and the air supply assembly 2 is also provided with multiple pipe joints 27 corresponding to multiple air supply ends 21. Each air supply end 21 is connected to the corresponding side blow hole 15 through a pipe joint 27. This is easy to manufacture and has low overall manufacturing and usage costs.

[0059] In some or more embodiments, the vacuum chamber device may also include a vacuum pump (not shown in the figure), the inlet of which can be connected to the vacuum port 12 via a suction pipe, and the gas in the vacuum chamber 11 is then extracted through the vacuum port 12. This facilitates the formation of a negative pressure in the vacuum chamber 1.

[0060] In some or more embodiments, the gas contained in the gas supply carrier 22 can be an inert gas such as argon, and the flow rate of the gas flowing through the side blowing hole 15 can be 500 Nl / min, and the pressure can be 1.2-1.5 MPa. This results in a better treatment effect on molten steel.

[0061] In some or more embodiments, during the steel refining process, the gas flow rate supplied by the gas carrier 22 to the vacuum chamber 1 can be increased and then decreased, for example, from 800 Nl / min to 3200 Nl / min, and then decreased from 3200 Nl / min to 800 Nl / min. This results in better steel treatment.

[0062] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model have been clearly and completely described above with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0063] Therefore, the above detailed description of the embodiments of the present invention disclosed in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0064] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0065] In the description of this utility model, it should be understood that the terms indicating orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0066] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0067] In this invention, unless otherwise expressly specified and limited, "above or below" the first feature may include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on" the first feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the first feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0068] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0069] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A vacuum chamber arrangement, characterized by include: A vacuum chamber is provided with a vacuum cavity and a vacuum hole, an ascending hole, a descending hole and a row of side blowing holes communicating with the vacuum cavity. The vacuum hole is used to discharge gas in the vacuum cavity. The vacuum cavity is columnar and the ascending hole and the descending hole are arranged side by side at one end of the vacuum cavity. The row of side blowing holes communicates with the side wall of the vacuum cavity and is arranged at intervals along the circumference of the vacuum cavity. The row of side blowing holes is located on the side of the ascending hole away from the descending hole. The air supply assembly is provided with multiple air supply ends that are connected to a row of side blowing holes.

2. The vacuum chamber arrangement according to claim 1, characterized in that In a row of side blowing holes, the angle between the extended axes of the two side blowing holes that are furthest apart is 120° to 150°, and the spacing between two adjacent side blowing holes is the same.

3. The vacuum chamber arrangement of claim 1, wherein The diameter of the side blow hole that discharges gas from the vacuum chamber is smaller than the diameter of the other end of the side blow hole.

4. Vacuum chamber arrangement according to any of claims 1 to 3, characterized in that The distance between the side blowing hole and the end of the vacuum chamber that connects to the rising hole is greater than the distance between the side blowing hole and the other end of the vacuum chamber.

5. The vacuum chamber apparatus according to any one of claims 1 to 3, characterized in that, The vacuum chamber is provided with two rows of side blowing holes, which are distributed along the axial direction of the vacuum chamber.

6. The vacuum chamber device according to claim 5, characterized in that, The axial length of the vacuum chamber is 8.4 to 10.5 times the distance between the two rows of side blowing holes.

7. The vacuum chamber apparatus according to any one of claims 1 to 3, characterized in that, Both the rising hole and the falling hole have elliptical cross-sections, with one end of the minor axis of the rising hole's cross-section facing the falling hole.

8. The vacuum chamber apparatus according to any one of claims 1 to 3, characterized in that, The diameter of the side-blowing hole is the same as the diameter of the rising hole.

9. The vacuum chamber apparatus according to any one of claims 1 to 3, characterized in that, The gas supply assembly includes: The gas supply carrier is equipped with a gas output terminal that can be controlled to open and close. At least two main pipelines and regulating valves, one end of each main pipeline is connected to the gas output end, and the regulating valve is located on the main pipeline and integrates a flow meter; Multiple branch pipes, one end of each of the multiple branch pipes being connected to the other end of two of the main pipes, and the other end of the multiple branch pipes being configured as multiple air supply ends corresponding to and connected to a row of side blowing holes.

10. The vacuum chamber device according to claim 9, characterized in that, The branch pipe is a flexible hose, and the air supply assembly is also provided with multiple pipe joints corresponding to the multiple air supply ends. Each air supply end is connected to the corresponding side blowing hole through one of the pipe joints.