Heat treatment equipment with anti-oxidation processing function

Abstract

The utility model discloses heat treatment equipment with an anti-oxidation processing function, which comprises a machine table, a gas injection mechanism and a gas blowing mechanism, the machine table is rotatably connected with a positive electrode wheel, a first water tank is arranged on the machine table, a negative electrode wheel is rotatably connected in the first water tank, a through groove is formed in the gas injection mechanism, and the through groove penetrates out of the gas injection mechanism; a cavity communicated with the through groove is formed in the gas injection mechanism, a connecting pipeline is installed on the gas injection mechanism, the connecting pipeline is communicated with the cavity, a first gas nozzle is communicated with the connecting pipeline, the gas injection mechanism is located between the positive electrode wheel and the negative electrode wheel, a through pipe penetrates through the gas blowing mechanism, a gas groove is formed in the gas blowing mechanism, and a second gas nozzle is arranged on the gas blowing mechanism; the through pipe and the second air nozzle are communicated with the air groove, and the blowing mechanism is close to the cathode wheel. The utility model provides heat treatment equipment with an anti-oxidation processing function, which is used for carrying out anti-oxidation treatment and stress relief on metal wires before heat treatment quenching.

Description

Technical Field

[0001] This utility model relates to the field of metal heat treatment equipment, and in particular to a heat treatment equipment with anti-oxidation processing function. Background Technology

[0002] In semiconductor manufacturing processes, quenching of metal wires is a key heat treatment process to improve their mechanical properties such as hardness and strength. In existing technologies, conventional quenching processes typically involve directly heating the metal wires in an open heating furnace (such as a gas furnace or resistance furnace), followed by rapid cooling through media such as water cooling or oil cooling.

[0003] However, during the heating stage, the surface of the metal wire is directly exposed to an oxygen-containing space, causing the metal wire to undergo a violent oxidation reaction with oxygen, generating an oxide layer of uneven thickness. This results in uneven stress distribution, affecting the reliability and performance indicators of semiconductor products. Utility Model Content

[0004] The purpose of this invention is to provide a heat treatment device with anti-oxidation processing function, which performs anti-oxidation treatment and stress relief on metal wires before heat treatment quenching.

[0005] The technical solution adopted by the heat treatment equipment with antioxidant processing function disclosed in this utility model is:

[0006] The device includes a machine base, an air injection mechanism, and an air blowing mechanism. A positive electrode wheel is rotatably connected to the machine base, and a first water tank is provided on the machine base. A negative electrode wheel is rotatably connected to the first water tank. The air injection mechanism has a through groove extending out of the air injection mechanism. A chamber communicating with the through groove is provided in the air injection mechanism. A connecting pipe is installed on the air injection mechanism and communicates with the chamber. A first air nozzle is connected to the connecting pipe. The air injection mechanism is located between the positive and negative electrode wheels. A through pipe passes through the air blowing mechanism. An air groove is provided in the air blowing mechanism. A second air nozzle is provided in the air blowing mechanism. Both the through pipe and the second air nozzle communicate with the air groove. The air blowing mechanism is close to the negative electrode wheel.

[0007] As a preferred embodiment, the gas injection mechanism includes a housing and a cover plate. The housing is fixedly connected to the machine base. The through groove and the chamber are both located on the housing. The through groove extends out of the housing. The cover plate is rotatably connected to the housing. The cover plate is placed on one side of the housing and covers the through groove and the chamber.

[0008] As a preferred embodiment, a sealing strip is embedded on one side of the housing, the sealing strip is in contact with the cover plate, the inner wall of the through groove is covered with a heat insulation layer, and multiple contact posts are fixedly connected to both sides of the inner wall of the heat insulation layer.

[0009] As a preferred embodiment, the air blowing mechanism includes a bracket, an air guide seat, and a plug. The bracket is fixedly connected to the machine base, the air guide seat passes through the bracket, and a fixing member that contacts the bracket is fixedly connected to the air guide seat. The air groove is located at one end of the air guide seat, the second air nozzle is connected to the outside of the air guide seat, the plug is placed in the air groove, and there is a gap between the plug and the air groove. The through pipe passes through the air guide seat and the plug, and the air groove communicates with the middle of the through pipe through the gap.

[0010] As a preferred embodiment, the machine tool is equipped with two drive motors, and the output shafts of the two drive motors are respectively connected to the positive wheel and the negative wheel.

[0011] As a preferred embodiment, the machine tool is equipped with a second water tank, and the first water tank is equipped with a partition that separates the first water tank into a quenching zone and a drainage zone. The first water tank is equipped with a water supply device, the water inlet of which is connected to the second water tank, and the water outlet of which is connected to the quenching zone. The first water tank is equipped with a drain pipe that is connected to the drainage zone, and the water outlet of which is connected to the second water tank. The first water tank is equipped with a drain valve that is connected to the quenching zone, and the water outlet of which is connected to the second water tank.

[0012] As a preferred embodiment, the first water tank is provided with a mounting base, a sliding plate is slidably connected to the mounting base, a spring is provided on the mounting base, the two ends of the spring respectively contact the mounting base and the sliding plate, a contact wheel is rotatably connected to the sliding plate, and the contact wheel contacts the negative electrode wheel.

[0013] As a preferred embodiment, the machine base is provided with a first tensioning mechanism, and a first guide wheel and a guide wheel are rotatably connected to the machine base. The first tensioning mechanism is close to the positive electrode wheel, the first guide wheel is close to the gas injection mechanism, and the guide wheel is close to the positive electrode wheel. The first tensioning mechanism and the first guide wheel are located between the positive electrode wheel and the gas injection mechanism.

[0014] As a preferred embodiment, a second guide wheel is rotatably connected to the machine base, and the air blowing mechanism is located between the second guide wheel and the negative electrode wheel.

[0015] As a preferred embodiment, the machine base is provided with a second tensioning mechanism, which is close to the second guide wheel. Both the first and second tensioning mechanisms include a tensioning motor and a rocker arm. The tensioning motor is placed inside the machine base, one end of the rocker arm is fixedly connected to the output shaft of the tensioning motor, and the other end of the rocker arm is rotatably connected to the tensioning wheel.

[0016] The beneficial effects of the heat treatment equipment with antioxidant processing function disclosed in this utility model are:

[0017] When the metal wire completes the initial processing and enters the heat treatment stage, its travel path is set in the following order: first, it bypasses the positive electrode wheel, then passes through the through groove, chamber and connecting pipe of the gas injection mechanism in sequence, then passes through the through pipe of the gas blowing mechanism after passing through the negative electrode wheel, and finally connects with the external subsequent processing equipment.

[0018] During operation, when the external downstream processing equipment pulls the metal wire to move continuously, positive low-voltage current and negative low-voltage current are respectively connected to the positive wheel and the negative wheel. The metal wire between the two wheels is resistively heated by the Joule effect. At the same time, an antioxidant gas is quantitatively injected into the chamber through the first gas nozzle and the connecting pipe, so that a continuous gas film is formed on the surface of the moving metal wire. This pretreatment can significantly improve the antioxidant performance during subsequent water tank quenching.

[0019] When the metal wire is heated, an antioxidant gas is injected, which not only protects the surface integrity but also creates conditions for uniform cooling during subsequent quenching. The recrystallization of the metal wire during the heating stage eliminates the original stress, while the gentle cooling process of gas quenching avoids the introduction of new stress. The synergistic effect of the two ultimately achieves effective stress elimination.

[0020] When the quenched metal wire enters the air blowing mechanism's through-pipe, a high-pressure airflow is injected into the through-pipe through the second air nozzle and air groove. This airflow peels off the liquid film on the surface of the metal wire in a tangential turbulent manner, eliminating the risk of electrochemical corrosion and ensuring that the wire's dryness meets the processing requirements of downstream processing equipment. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a heat treatment device with antioxidant processing function according to this utility model.

[0022] Figure 2 This is a schematic diagram of the positive electrode structure of a heat treatment device with antioxidant processing function according to this utility model.

[0023] Figure 3 This is a schematic diagram of the gas injection mechanism of a heat treatment device with antioxidant processing function according to this utility model.

[0024] Figure 4 This utility model relates to a heat treatment device with antioxidant processing function. Figure 3 (Area A) Enlarged view.

[0025] Figure 5 This is a partial cross-sectional view of the gas injection mechanism of a heat treatment device with antioxidant processing function according to this utility model.

[0026] Figure 6 This is a first water tank cross-sectional view of a heat treatment device with antioxidant processing function according to this utility model.

[0027] Figure 7This is a cross-sectional view of the air blowing mechanism of a heat treatment device with anti-oxidation processing function according to this utility model.

[0028] Figure 8 This utility model relates to a heat treatment device with antioxidant processing function. Figure 7 (Area B) Enlarged view. Detailed Implementation

[0029] The present invention will be further described and illustrated below with reference to specific embodiments and the accompanying drawings:

[0030] Please refer to Figure 1 and Figure 2 .

[0031] This utility model discloses a heat treatment equipment with anti-oxidation processing function, including a machine base 1, an injection mechanism 2 and an blowing mechanism 5;

[0032] A positive electrode wheel 11 is rotatably connected to the machine base 1. A first tensioning mechanism 6 and a second tensioning mechanism 7 are provided on the machine base 1. The first tensioning mechanism 6 is close to the positive electrode wheel 11.

[0033] Furthermore, both the first tensioning mechanism 6 and the second tensioning mechanism 7 include a tensioning motor and a rocker arm 61; the tensioning motor is placed inside the machine base 1, one end of the rocker arm 61 is fixedly connected to the output shaft of the tensioning motor, and the other end of the rocker arm 61 is rotatably connected to a tensioning wheel 62.

[0034] The machine base 1 is rotatably connected to the first guide wheel 12 and the guide wheel 13. The tension wheel 62 of the first tensioning mechanism 6 is located between the positive electrode wheel 11 and the first guide wheel 12. The guide wheel 13 is close to the positive electrode wheel 11 and the guide wheel 13 is close to the external upstream processing equipment. The tension wheel 62 and the positive electrode wheel 11 of the first tensioning mechanism 6 are both located between the first guide wheel 12 and the guide wheel 13.

[0035] Please refer to Figures 1-5 .

[0036] The gas injection mechanism 2 includes a housing 21 and a cover plate 23. The housing 21 is fixedly connected to the machine base 1. A through groove 211 is opened inside the gas injection mechanism 2. The through groove 211 is located on the housing 21 and extends out of the housing 21. One end of the through groove 211 is close to the first guide wheel 12. The tension wheel 62 of the first tensioning mechanism 6 and the first guide wheel 12 are located between the positive electrode wheel 11 and the gas injection mechanism 2. The inner wall of the through groove 211 is covered with a heat insulation layer 212. The heat insulation layer 212 is configured to form a thermal resistance barrier for the heated metal wire. By reducing the heat conduction loss, the metal wire can maintain a better heat retention rate in the set temperature range. Multiple contact posts 213 are fixedly connected to both sides of the inner wall of the heat insulation layer 212. The contact posts 213 can isolate the high-temperature metal wire from contact with the heat insulation layer 212.

[0037] Furthermore, the gas injection mechanism 2 has a chamber 214, and the other end of the through groove 211 is connected to the chamber 214. A connecting pipe 22 is installed on the gas injection mechanism 2. One end of the connecting pipe 22 passes into the box 21 and is connected to the chamber 214. A first gas nozzle 221 is connected to the connecting pipe 22. The first gas nozzle 221 is used to connect to an external antioxidant gas filling device. A sealing strip 215 is embedded on one side of the box 21. The sealing strip 215 passes around the through groove 211 and the periphery of the chamber 214.

[0038] Furthermore, the cover plate 23 is rotatably connected to the box body 21. The cover plate 23 covers one side of the box body 21, and the cover plate 23 covers the through groove 211 and the chamber 214. The sealing strip 215 can improve the sealing performance of the cover plate 23 covering the through groove 211 and the chamber 214.

[0039] The housing 21 is equipped with a rotatable and closable cover 23. During the installation operation, the cover 23 is opened by rotating it to allow workers to accurately pass the metal wire through the through groove 211, the chamber 214 and the connecting pipe 22 according to the predetermined wire passage. After the operation is completed, the cover 23 is rotated in the opposite direction to close it, so that the housing 21 forms a sealed working chamber 214 to maintain thermal stability.

[0040] An external antioxidant gas filling device injects antioxidant gas into the chamber 214 through the first gas nozzle 221 and the connecting pipe 22, thereby forming a continuous gas film covering the surface of the moving metal wire in the chamber 214.

[0041] Please refer to Figure 1 and Figure 5 .

[0042] The machine 1 is equipped with a first water tank 3, and the negative electrode wheel 31 is rotatably connected inside the first water tank 3; the air injection mechanism 2 is located between the positive electrode wheel 11 and the negative electrode wheel 31, and the connecting pipe 22 is close to the negative electrode wheel 31.

[0043] Furthermore, the machine tool 1 is equipped with two drive motors, the output shafts of which are connected to the positive wheel 11 and the negative wheel 31 respectively. The two drive motors drive the positive wheel 11 and the negative wheel 31 to rotate respectively. The positive wheel 11 and the negative wheel 31 are connected to the positive low-voltage current and the negative low-voltage current respectively. When the metal wire is sleeved on the positive wheel 11 and the negative wheel 31, the metal wire between the two wheels is resistively heated by the Joule effect.

[0044] The first water tank 3 is equipped with a mounting base, on which a sliding plate is slidably connected. A spring is provided on the mounting base, with its two ends contacting the mounting base and the sliding plate respectively. The spring pushes the sliding plate to slide closer to the negative electrode wheel 31. A contact wheel 32 is rotatably connected to the sliding plate, with the outer side of the contact wheel 32 contacting the outer side of the negative electrode wheel 31. The contact wheel 32 and the negative electrode wheel 31 clamp the metal wire that passes around the outer side of the negative electrode wheel 31, preventing the metal wire from detaching from the outer side of the negative electrode wheel 31 in the water.

[0045] The machine 1 is equipped with a second water tank 4, which is located below the first water tank 3; the first water tank 3 is equipped with a partition 33, the height of which is lower than the edge of the first water tank 3, and the partition 33 divides the first water tank 3 into a quenching zone and a drainage zone.

[0046] Furthermore, the first water tank 3 is equipped with a water supply device 41. The water inlet of the water supply device 41 is connected to the second water tank 4, and the water outlet of the water supply device 41 is connected to the quenching zone. When the equipment is running, the water supply device 41 draws water from the second water tank 4 and continuously injects water into the quenching zone. The cold water and the hot water after the metal wire is quenched are mixed to reduce the water temperature in the quenching zone.

[0047] Furthermore, the first water tank 3 is equipped with a drain pipe 331 that communicates with the drainage area. The outlet of the drain pipe 331 is connected to the second water tank 4. The water supply device 41 continuously supplies water, causing the water carrying residual heat in the quenching zone to overflow into the drainage area. The drain pipe 331 guides the water in the drainage area into the second water tank 4 for static cooling. The first water tank 3 is equipped with a drain valve 332 that communicates with the quenching zone. The outlet of the drain valve 332 is connected to the second water tank 4. When the equipment stops running, the water supply mechanism is closed and the drain valve 332 is opened, which can drain the water in the first water tank 3, making it easier for workers to pass the metal wire around the negative electrode wheel 31.

[0048] Please refer to Figure 1 , Figure 7 and Figure 8 .

[0049] In this embodiment, two air blowing mechanisms 5 are preferably used. The two air blowing mechanisms 5 are arranged with their axes collinear. One of the air blowing mechanisms 5 is close to the negative electrode wheel 31. A positioning seat 56 is provided between one of the air blowing mechanisms 5 and the negative electrode wheel 31. The positioning seat 56 is fixedly connected to the machine base 1. A notch is provided on the positioning seat 56. After the metal wire passes around the negative electrode wheel 31, it passes through the notch on the positioning seat 56 and approaches one of the air blowing mechanisms 5.

[0050] Furthermore, the air blowing mechanism 5 includes a bracket 51, an air guide seat 52, and a plug 54; the bracket 51 is fixedly connected to the machine base 1, the air guide seat 52 passes through the bracket 51, and a fixing member 53 that contacts the bracket 51 is fixedly connected to the air guide seat 52, and the air guide seat 52 is limited on the bracket 51 by the fixing member 53; an air groove 521 is opened inside the air blowing mechanism 5, the air groove 521 is located at one end of the air guide seat 52, the bottom of the air groove 521 is conical, and the tip of the conical shape faces the first water tank 3; a second air nozzle 522 is provided on the air blowing mechanism 5, the second air nozzle 522 is fixedly connected to the outside of the air guide seat 52, the second air nozzle 522 passes into the air guide seat 52 and communicates with the air groove 521, and the second air nozzle 522 is used to connect to an external compressor; the plug 54 is placed in the air groove 521, the part of the plug 54 located in the air groove 521 is conical, and there is a gap between the plug 54 and the air groove 521;

[0051] Furthermore, a through pipe 55 passes through the air blowing mechanism 5, which passes through the air guide seat 52 and the plug 54. The through pipe 55 is located at the tip of the conical shape of the plug 54 and the tip of the conical shape of the air groove 521. The air groove 521 is connected to the middle of the through pipe 55 through a gap, and the axes of the two through pipes 55 are collinear.

[0052] The metal wire passes through two pipes 55 in sequence. When the quenched metal wire enters the pipe 55, the external compressor sprays high-pressure airflow into the pipe 55 through the second air nozzle 522 and the air groove 521. The liquid film on the surface of the metal wire is peeled off in a tangential turbulent manner, which not only eliminates the risk of electrochemical corrosion, but also ensures that the dryness of the wire meets the processing requirements of the downstream processing equipment. The high-pressure airflow is guided to the first water tank 3 through the pipe 55, so that the high-pressure airflow flushes the liquid into the first water tank 3.

[0053] A second guide wheel 14 is rotatably connected to the machine base 1. Two air blowing mechanisms 5 are located between the second guide wheel 14 and the negative electrode wheel 31, and another air blowing mechanism 5 is close to the second guide wheel 14. The tension wheel 62 of the second tensioning mechanism 7 is close to the second guide wheel 14, and the tension wheel 62 of the second tensioning mechanism 7 is close to the external downstream processing equipment.

[0054] Please refer to Figures 1-8 .

[0055] When the metal wire completes its initial processing in the upstream external processing equipment and enters the heat treatment stage, the metal wire is wound in the following order: First, the metal wire passes through the guide wheel 13, the positive electrode wheel 11, the tension wheel 62 of the first tensioning mechanism 6 and the first guide wheel 12 in sequence. Then, it passes through the through groove 211, the chamber 214 and the connecting pipe 22 of the air injection mechanism 2 in sequence. Next, it passes between the negative electrode wheel 31 and the contact wheel 32 and passes through the notch of the positioning seat 56 and the through pipes 55 of the two air blowing mechanisms 5 in sequence. Finally, it passes through the second guide wheel 14 and the tension wheel 62 of the second tensioning mechanism 7 to connect with the downstream external processing equipment. The metal wire is released by the upstream external processing equipment and retrieved by the downstream external processing equipment, which pulls the metal wire to move within the equipment.

[0056] This utility model provides a heat treatment device with anti-oxidation processing function. When the metal wire completes the preliminary processing and enters the heat treatment stage, its travel path is set in the following order: first, it bypasses the positive electrode wheel, then passes through the through groove, chamber and connecting pipe of the gas injection mechanism in sequence, then passes through the negative electrode wheel and passes through the through pipe of the air blowing mechanism, and finally connects with the external subsequent processing equipment.

[0057] During operation, when the external downstream processing equipment pulls the metal wire to move continuously, positive low-voltage current and negative low-voltage current are respectively connected to the positive wheel and the negative wheel. The metal wire between the two wheels is resistively heated by the Joule effect. At the same time, an antioxidant gas is quantitatively injected into the chamber through the first gas nozzle and the connecting pipe, so that a continuous gas film is formed on the surface of the moving metal wire. This pretreatment can significantly improve the antioxidant performance during subsequent water tank quenching.

[0058] When the metal wire is heated, an antioxidant gas is injected, which not only protects the surface integrity but also creates conditions for uniform cooling during subsequent quenching. The recrystallization of the metal wire during the heating stage eliminates the original stress, while the gentle cooling process of gas quenching avoids the introduction of new stress. The synergistic effect of the two ultimately achieves effective stress elimination.

[0059] When the quenched metal wire enters the air blowing mechanism's through-pipe, a high-pressure airflow is injected into the through-pipe through the second air nozzle and air groove. This airflow peels off the liquid film on the surface of the metal wire in a tangential turbulent manner, eliminating the risk of electrochemical corrosion and ensuring that the wire's dryness meets the processing requirements of downstream processing equipment.

[0060] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the essence and scope of the technical solutions of this utility model.

Claims

1. A heat treatment device with antioxidant processing function, characterized in that, include A machine platform, on which a positive electrode wheel is rotatably connected, and a first water tank is provided on the machine platform, with a negative electrode wheel rotatably connected inside the first water tank; The gas injection mechanism has a through groove inside, the through groove extends out of the gas injection mechanism, the gas injection mechanism has a chamber communicating with the through groove, a connecting pipe is installed on the gas injection mechanism, the connecting pipe is communicating with the chamber, a first air nozzle is connected to the connecting pipe, and the gas injection mechanism is located between the positive electrode wheel and the negative electrode wheel. An air blowing mechanism is provided, with a through pipe running through it, an air groove inside the air blowing mechanism, and a second air nozzle on it. Both the through pipe and the second air nozzle are connected to the air groove. The air blowing mechanism is located near the negative electrode wheel.

2. The heat treatment equipment with antioxidant processing function as described in claim 1, characterized in that, The gas injection mechanism includes a housing and a cover plate. The housing is fixedly connected to the machine base. The through groove and the chamber are both located on the housing. The through groove extends out of the housing. The cover plate is rotatably connected to the housing. The cover plate is placed on one side of the housing and covers the through groove and the chamber.

3. The heat treatment equipment with antioxidant processing function as described in claim 2, characterized in that, A sealing strip is embedded on one side of the box body, and the sealing strip contacts the cover plate. The inner wall of the through groove is covered with a heat insulation layer, and multiple contact posts are fixedly connected to both sides of the inner wall of the heat insulation layer.

4. The heat treatment equipment with antioxidant processing function as described in claim 3, characterized in that, The air blowing mechanism includes a bracket, an air guide seat, and a plug. The bracket is fixedly connected to the machine base. The air guide seat passes through the bracket. A fixing member that contacts the bracket is fixedly connected to the air guide seat. The air groove is located at one end of the air guide seat. The second air nozzle is connected to the outside of the air guide seat. The plug is placed in the air groove. There is a gap between the plug and the air groove. The through pipe passes through the air guide seat and the plug. The air groove is connected to the middle of the through pipe through the gap.

5. A heat treatment device with antioxidant processing function as described in any one of claims 1-4, characterized in that, The machine tool is equipped with two drive motors, and the output shafts of the two drive motors are respectively connected to the positive wheel and the negative wheel.

6. The heat treatment equipment with antioxidant processing function as described in claim 5, characterized in that, The machine tool is equipped with a second water tank. The first water tank is equipped with a partition that separates the first water tank into a quenching zone and a drainage zone. The first water tank is equipped with a water supply device. The water inlet of the water supply device is connected to the second water tank, and the water outlet of the water supply device is connected to the quenching zone. The first water tank is equipped with a drain pipe that is connected to the drainage zone, and the water outlet of the drain pipe is connected to the second water tank. The first water tank is equipped with a drain valve that is connected to the quenching zone, and the water outlet of the drain valve is connected to the second water tank.

7. The heat treatment equipment with antioxidant processing function as described in claim 6, characterized in that, The first water tank is equipped with a mounting base, on which a sliding plate is slidably connected. A spring is provided on the mounting base, with both ends of the spring contacting the mounting base and the sliding plate respectively. A contact wheel is rotatably connected to the sliding plate, and the contact wheel contacts the negative electrode wheel.

8. The heat treatment equipment with antioxidant processing function as described in claim 7, characterized in that, The machine base is provided with a first tensioning mechanism, and a first guide wheel and a guide wheel are rotatably connected on the machine base. The first tensioning mechanism is close to the positive electrode wheel, the first guide wheel is close to the gas injection mechanism, and the guide wheel is close to the positive electrode wheel. The first tensioning mechanism and the first guide wheel are located between the positive electrode wheel and the gas injection mechanism.

9. The heat treatment equipment with antioxidant processing function as described in claim 8, characterized in that, A second guide wheel is rotatably connected to the machine base, and the air blowing mechanism is located between the second guide wheel and the negative electrode wheel.

10. The heat treatment equipment with antioxidant processing function as described in claim 9, characterized in that, The machine base is provided with a second tensioning mechanism, which is close to the second guide wheel. Both the first and second tensioning mechanisms include a tensioning motor and a rocker arm. The tensioning motor is placed inside the machine base. One end of the rocker arm is fixedly connected to the output shaft of the tensioning motor, and the other end of the rocker arm is rotatably connected to the tensioning wheel.

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