Monocrystalline silicon graphite heater
By using heating coils and foot plate connectors of the same thickness in the graphite heater, the problems of easy breakage and high cost of graphite heaters are solved, resulting in a longer service life and lower maintenance costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-05
- Publication Date
- 2026-04-14
AI Technical Summary
Existing graphite heaters are prone to breakage and failure at the joints or have high production costs, making it difficult to control production costs while reducing the risk of breakage.
Heating coils and foot plates of the same thickness are spliced together using graphite or carbon-carbon materials. The joints are fastened with bolts. Curved joints and through grooves are designed to achieve positioning and limiting, ensuring uniform resistance and connection stability.
It improves the overall resistance uniformity of the heater, reduces the risk of breakage, extends its service life, and allows it to continue to be used simply by replacing the connector after breakage, thus reducing maintenance costs.
Smart Images
Figure CN224119156U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of Czochralski single crystal silicon, and more precisely to a single crystal silicon graphite heater. Background Technology
[0002] The Czochralski (CZ) method for growing single-crystal silicon involves bringing a rotating seed crystal into contact with molten polycrystalline silicon in a quartz crucible. At the solid-liquid interface between the seed crystal and the melt, the melt gradually crystallizes onto the seed crystal, transforming into a solid phase. As the seed crystal is slowly pulled up, single-crystal silicon of the desired shape is produced. The single-crystal furnace is the production equipment for CZ single-crystal silicon, and the graphite heater is the most important thermal field component in the furnace, playing a role in melting the polycrystalline silicon material and controlling the single-crystal growth temperature. Therefore, it is necessary to improve the performance and service life of the graphite heater.
[0003] Most existing graphite heaters consist of a heating coil (the main heating structure) and a foot plate (for carrying current and supporting the heater), assembled together. This assembled structure reduces processing losses in isostatically pressed graphite, thus lowering production costs. However, the joint between the heating coil and the foot plate is typically thinned for easier connection, resulting in higher stress at the joint compared to other areas. Over time, heat accumulation at this joint can lead to breakage. Currently, there are also one-piece graphite heaters, which offer a more uniform stress distribution and are less prone to breakage compared to the assembled structure, but these result in greater raw material loss during production.
[0004] In summary, existing graphite heaters suffer from problems such as easy breakage and failure or high production costs. There is a need in the field for a graphite heater that is less prone to breakage and has lower repair costs after breakage. Utility Model Content
[0005] In view of this, the purpose of this utility model is to provide a single-crystal silicon graphite heater, which is composed of heating coils and foot plates of the same thickness spliced together by connecting bodies of graphite or carbon materials, so as to extend the service life at a lower cost.
[0006] To achieve the above objectives, this utility model provides a single-crystal silicon graphite heater, comprising a heating coil, several connecting bodies, and several foot plates. The bottom of the heating coil has an even number of uniformly and symmetrically distributed curved connecting portions. The foot plates are aligned with the curved connecting portions one by one, and the foot plates are connected to the curved connecting portions through the connecting bodies. The heating coil and the foot plates have the same thickness.
[0007] Preferably, the bottom of the heating coil has four evenly distributed curved connecting parts, wherein two of the curved connecting parts spaced apart from each other are connected to the foot plate through the connecting body, and the other two curved connecting parts are reserved; the connecting body is fastened to the curved connecting parts and the foot plate by a number of bolts.
[0008] Preferably, the connecting body has a through groove in the middle that extends through the top and bottom, the curved connecting part passes through the top of the through groove, and the foot plate passes through the bottom of the through groove; the front and rear sides of the connecting body each have a plurality of upper connecting holes and lower connecting holes that penetrate and connect the through groove, the upper connecting holes are located in the upper half of the connecting body, and the lower connecting holes are located in the lower half of the connecting body.
[0009] Preferably, the curved surface connecting part has a plurality of upper through holes, and the upper through holes are respectively aligned with the upper connecting holes.
[0010] Preferably, the upper connecting hole has an upper positioning hole with a diameter larger than the upper connecting hole, and the lower connecting hole has a lower positioning hole with a diameter larger than the lower connecting hole.
[0011] Preferably, the inner two sides of the through groove have a set of upper positioning grooves and a set of lower positioning grooves, the upper positioning grooves extending downward from the top of the through groove and the lower positioning grooves extending upward from the bottom of the through groove.
[0012] Preferably, the curved surface connecting portion has an upper positioning member on each side, the upper positioning member being aligned with the upper positioning groove and the upper positioning member being slidably connected to the upper positioning groove.
[0013] Preferably, the bottom of the foot plate has a support foot, the support foot has an electrode hole, and the upper part of the foot plate has several through holes, which are aligned with the lower connecting hole.
[0014] Preferably, the upper sides of the foot plate are respectively provided with lower positioning members, the lower positioning members are aligned with the lower positioning groove, and the lower positioning members are slidably connected to the lower positioning groove.
[0015] Preferably, the lengths of the upper positioning groove and the lower positioning groove are 80-100mm.
[0016] Compared with the prior art, the advantages of the monocrystalline silicon graphite heater disclosed in this utility model are as follows: the heating coil and foot plate of the monocrystalline silicon graphite heater have the same thickness, resulting in smaller resistance variation, better overall resistance uniformity, and better heater performance; the monocrystalline silicon graphite heater connects the heating coil and foot plate through a connector, eliminating the need to thin the connection area, reducing the risk of breakage, and extending the heater's service life; after prolonged use, only the connector of the monocrystalline silicon graphite heater will break, and it can be used again by replacing the connector, resulting in lower maintenance and replacement costs. Attached Figure Description
[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 This is a schematic diagram of the structure of a single-crystal silicon graphite heater according to this application.
[0019] Figure 2 This is a schematic diagram of the structure of the curved surface connection.
[0020] Figure 3 This is a schematic diagram of the connector structure.
[0021] Figure 4 This is a top cross-sectional view of the connecting body.
[0022] Figure 5 This is a side cross-sectional view of the connector.
[0023] Figure 6 This is a schematic diagram of the footplate structure. Detailed Implementation
[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0025] like Figure 1 and Figure 2 As shown, this application discloses a single-crystal silicon graphite heater comprising a heating coil 1, several connecting bodies 2, and several foot plates 3. The bottom of the heating coil 1 has an even number of uniformly and symmetrically distributed curved connecting portions 10. The foot plates 3 are aligned with the curved connecting portions 10 one by one, and the foot plates 3 are connected to the curved connecting portions 10 through the connecting bodies 2. The heating coil 1 is used to heat the crucible, the foot plates 3 are used to connect the electrode bolts inside the single-crystal furnace, and the connecting bodies 2 serve as supports and conduction. Preferably, the heating coil 1 and the foot plates 3 have the same thickness, resulting in a smaller resistance change at the connection point and better overall resistance uniformity of the single-crystal silicon graphite heater. Connecting the heating coil 1 and the foot plates 3 through the connecting bodies 2 can avoid the risk of breakage due to thinning at the connection point without significantly increasing costs, thus helping to improve the service life of the single-crystal silicon graphite heater. After prolonged use, only the connecting bodies 2 will break; simply replacing the connecting bodies 2 allows for continued use, resulting in lower maintenance and replacement costs.
[0026] Preferably, the bottom of the heating coil 1 has four evenly distributed curved connecting parts 10, of which two curved connecting parts 10 are spaced apart from each other and connected to the foot plate 3 via a connecting body 2, while the other two curved connecting parts 10 are reserved. The connecting body 2 is fastened to the curved connecting parts 10 and the foot plate 3 by a number of bolts 4. Furthermore, the curved connecting parts 10 are generally arc-shaped with a central angle of 9°.
[0027] The curved connecting part 10 has several upper through holes 11. After the bolt 4 penetrates the connecting body 2, it connects with the upper through holes 11 to achieve a tight connection between the connecting body 2 and the curved connecting part 10. The curved connecting part 10 has upper positioning parts 12 on its sides. The curved connecting part 10 engages with the connecting body 2 through the upper positioning parts 12, which serve to position and limit the connection.
[0028] See Figures 3 to 5 The connecting body 2 has a through groove 20 extending through the top and bottom of the middle section. The curved connecting part 10 passes through the top of the through groove 20, and the foot plate 3 passes through the bottom of the through groove 20. The front and rear surfaces of the connecting body 2 each have several upper connecting holes 21 and lower connecting holes 22 that penetrate and connect to the through groove 20. The upper connecting holes 21 are located in the upper half of the connecting body 2, and the lower connecting holes 22 are located in the lower half of the connecting body 2. The upper through holes 11 are aligned with the upper connecting holes 21. The inner sides of the through groove 20 have a set of upper positioning grooves 201 and a set of lower positioning grooves 202. The upper positioning grooves 201 extend downward from the top of the through groove 20, and the lower positioning grooves 202 extend upward from the bottom of the through groove 20. The upper positioning member 12 is aligned with the upper positioning groove 201, and the upper positioning member 12 is slidably connected to the upper positioning groove 201. Furthermore, the connector 2 is an arc shape with a central angle of 9°, and is made of graphite or carbon-carbon material. The lengths of the upper positioning groove 201 and the lower positioning groove 202 are preferably 80-100mm.
[0029] The upper connecting hole 21 has an upper positioning hole with a diameter larger than the upper connecting hole 21 on the outside, and the lower connecting hole 22 has a lower positioning hole 221 with a diameter larger than the lower connecting hole 22 on the outside, so as to accommodate the tail of the bolt 4 and prevent stripping of the bolt 4 and severe protrusion of the tail of the bolt 4 when it is installed.
[0030] See Figure 6 The foot plate 3 has an L-shaped structure, with the upper part being an arc with a central angle of 9°. The bottom of the foot plate 3 has a support leg 33, and the support leg 33 has an electrode hole 331, which connects to the electrode column inside the single crystal furnace. The upper part of the foot plate 3 has several through holes 31, which are aligned with the lower connecting hole 22. The upper sides of the foot plate 3 each have a lower positioning member 32, which is aligned with the lower positioning groove 202 and is slidably connected to it.
[0031] When assembling the monocrystalline silicon graphite heater, first place the heating coil 1 on the disassembly trolley with the upper through hole 11 close to the ground; then connect the connector 2 upwards to the heating coil 1, slide the upper positioning part 12 into the upper positioning groove 201, adjust the upper through hole 11 to align with the upper connecting hole 21, and the operator screws in the bolts 4 back and forth to fix it without shaking; connect the foot plate 3 upwards to the connector 2, slide the lower positioning part 32 into the lower positioning groove 202, adjust the through hole 31 to align with the lower connecting hole 22, and the operator screws in the bolts 4 back and forth to fix it without shaking; after installing the other foot plate 3 in the same way, the overall installation is completed.
[0032] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A single crystal silicon graphite heater characterized by, The device includes a heating coil, several connecting bodies, and several foot plates. The bottom of the heating coil has an even number of evenly and symmetrically distributed curved connecting parts. The foot plates are aligned with the curved connecting parts one by one, and the foot plates are connected to the curved connecting parts through the connecting bodies. The heating coil and the foot plates have the same thickness.
2. The single crystal silicon graphite heater of claim 1, wherein, The bottom of the heating coil has four evenly distributed curved connecting parts, two of which are spaced apart from each other and connected to the foot plate through the connecting body, while the other two curved connecting parts are reserved; the connecting body is fastened to the curved connecting parts and the foot plate by several bolts.
3. The single crystal silicon graphite heater of claim 2, wherein, The connector has a through groove in the middle that runs through the top and bottom. The curved connecting part passes through the top of the through groove, and the foot plate passes through the bottom of the through groove. The front and rear sides of the connector each have a plurality of upper connecting holes and lower connecting holes that penetrate and connect the through groove. The upper connecting holes are located in the upper half of the connector, and the lower connecting holes are located in the lower half of the connector.
4. The single crystal silicon graphite heater of claim 3, wherein, The curved surface connecting part has several upper through holes, and the upper through holes are respectively aligned with the upper connecting holes.
5. The single crystal silicon graphite heater of claim 3, wherein, The upper connecting hole has an upper positioning hole with a diameter larger than the upper connecting hole on its outside, and the lower connecting hole has a lower positioning hole with a diameter larger than the lower connecting hole on its outside.
6. The single crystal silicon graphite heater of claim 3, wherein, The inner two sides of the through groove have a set of upper positioning grooves and a set of lower positioning grooves. The upper positioning grooves extend downward from the top of the through groove, and the lower positioning grooves extend upward from the bottom of the through groove.
7. The single crystal silicon graphite heater of claim 6, wherein, The curved surface connecting part has an upper positioning member on each side, the upper positioning member is aligned with the upper positioning groove and the upper positioning member is slidably connected to the upper positioning groove.
8. The single crystal silicon graphite heater of claim 6, wherein, The foot plate has a support foot at the bottom, and the support foot has an electrode hole. The upper part of the foot plate has several through holes, which are aligned with the lower connecting hole.
9. The single crystal silicon graphite heater of claim 6, wherein, The upper sides of the foot plate are respectively provided with lower positioning members, which are aligned with the lower positioning groove and are slidably connected to the lower positioning groove.
10. The single crystal silicon graphite heater of claim 6, wherein, The lengths of the upper positioning groove and the lower positioning groove are 80-100mm.