Boron diffusion heating furnace protection cover power connection device

Abstract

The utility model relates to a boron diffusion heating furnace protection cover power connection device which comprises a protection cover body and a connecting rod arranged in the middle of the upper end of the protection cover body, a power connection male head is arranged in the middle of the upper end of the connecting rod, a power connection female head is inserted into the power connection male head, and the power connection female head is inserted into the connecting rod at the same time. And a rotating plate is rotationally arranged on the outer side of the connecting rod, a fastening sleeve is arranged on the outer side of the rotating plate in a threaded sleeving mode, a fastening nut is arranged at the upper end of the fastening sleeve, the fastening nut is connected with an auxiliary rod through a fastening thread, and the auxiliary rod is fixedly arranged on the surface of the upper end of the power connection female head. According to the boron diffusion heating furnace protection cover power connection device, an auxiliary rod is moved, a power connection female head and a power connection male head are driven to be connected in an inserted mode, power supply support is provided for a connecting rod and a protection cover body under the electrical connection of the power connection female head and the power connection male head, and through arrangement of a plug-in ring cavity, the power connection male head and the power connection female head are connected in an inserted mode on the basis of power connection. And the plug-in limiting effect is achieved again.

Description

Technical Field

[0001] This utility model relates to the field of boron diffusion heating furnace technology, specifically to a protective cover electrical connection device for a boron diffusion heating furnace. Background Technology

[0002] Boron diffusion furnaces are specialized equipment used in semiconductor manufacturing, primarily for boron diffusion processes.

[0003] The upper part of the boron diffusion heating furnace is equipped with a protective cover for connecting to electricity. It is usually connected to an external power source through an electric wire. This means that its movement is limited by the length of the electric wire itself, making it difficult to move easily. Furthermore, when adjustments are needed to the protective cover or the electrical connection part, it is not easy to disassemble and adjust, which affects the ease of use.

[0004] Therefore, a power connection device for the protective cover of a boron diffusion heating furnace is proposed to solve the problems mentioned above. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a power connection device for the protective cover of a boron diffusion heating furnace, which enables the device to have a quick plug-in power connection while simultaneously securing it.

[0006] To achieve the above objectives, the present invention provides the following technical solution: including a protective cover and a connecting rod disposed at the middle of the upper end of the protective cover, wherein a male connector is disposed at the middle of the upper end of the connecting rod, a female connector is inserted into the male connector, and the female connector is simultaneously inserted into the interior of the connecting rod;

[0007] A rotating plate is rotatably mounted on the outside of the connecting rod. A fastening sleeve is threaded onto the outside of the rotating plate. A fastening nut is mounted on the upper end of the fastening sleeve. An auxiliary rod is connected to the fastening nut via a fastening thread. The auxiliary rod is fixedly mounted on the upper surface of the power connector.

[0008] Preferably, a plug-in ring cavity is formed between the inner wall of the upper middle part of the protective cover and the outer side of the male connector, the male connector is plugged into the inside of the female connector, and the female connector is plugged into the inside of the plug-in ring cavity.

[0009] Preferably, the outer arc-shaped surface of the connecting rod is uniformly provided with a rotating groove, and the lower horizontal portion of the rotating plate is rotatably disposed inside the rotating groove.

[0010] Preferably, a plug-in block is installed on the upper half of the inner side of the rotating plate, and the upper end face of the plug-in block is chamfered. The plug-in block is inserted into a plug-in slot, and the number of plug-in slots is the same as the number of plug-in blocks.

[0011] Preferably, the upper outer end of the rotating plate is chamfered to form a guide surface, and the outer side of the rotating plate is provided with an auxiliary thread, which is threaded to the inner wall of the fastening sleeve.

[0012] Preferably, both the fastening nut and the fastening sleeve are fitted onto the outside of the auxiliary rod, the fastening thread is provided on the outside of the auxiliary rod, and the fastening thread is threaded to the inner wall of the fastening nut.

[0013] Preferably, a positioning rod is provided on the upper surface of the connecting rod, and the positioning rod is inserted into a positioning hole, which is located on the lower surface of the auxiliary rod.

[0014] Compared with the prior art, this utility model provides an electrical connection device for the protective cover of a boron diffusion heating furnace, which has the following beneficial effects:

[0015] 1. The electrical connection device for the protective cover of the boron expansion heating furnace provides power support to the connecting rod and the protective cover by moving the auxiliary rod and driving the female and male electrical connectors to be plugged in.

[0016] 2. The electrical connection device of the boron expansion heating furnace protective cover, through the setting of the plug-in ring cavity, enables the male and female electrical connectors to have a plug-in limiting effect on the basis of plug-in connection, so that the auxiliary rod and the connecting rod have a multi-layer plug-in positioning effect when connected to electricity.

[0017] 3. The electrical connection device of the boron expansion heating furnace protective cover ensures the tightness of the connection between the fastening nut and the auxiliary rod, the fastening sleeve and the rotating plate, and the fastening nut and the fastening sleeve.

[0018] 4. The electrical connection device of the protective cover of the boron expansion heating furnace, based on the rotation limit of the rotating plate in the space inside the rotating groove, and limited by the contact limit between its lower surface and the lower surface of the inner wall of the rotating groove, restricts the outward rotation and expansion range of the rotating plate. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the electrical connection part of this utility model;

[0020] Figure 2 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 3 This is a schematic diagram of the rotating plate structure of this utility model;

[0022] Figure 4 This is a schematic diagram of the auxiliary rod structure of this utility model.

[0023] In the diagram: 1. Protective cover; 2. Connecting rod; 3. Male connector; 4. Auxiliary rod; 5. Female connector; 6. Positioning rod; 7. Positioning hole; 8. Rotating groove; 9. Rotating plate; 901. Insertion block; 902. Guide surface; 903. Auxiliary thread; 10. Fastening sleeve; 11. Fastening nut; 12. Fastening thread; 13. Insertion groove. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0025] Please see Figure 1 - Figure 4 The boron expansion heating furnace protective cover power connection device in this embodiment includes a protective cover body 1 and a connecting rod 2 disposed in the middle of the upper end of the protective cover body 1. A male power connector 3 is disposed in the middle of the upper end of the connecting rod 2, and a female power connector 5 is inserted into the male power connector 3. The female power connector 5 is also inserted into the interior of the connecting rod 2.

[0026] A rotating plate 9 is rotatably mounted on the outside of the connecting rod 2. A fastening sleeve 10 is threaded on the outside of the rotating plate 9. A fastening nut 11 is mounted on the upper end of the fastening sleeve 10. An auxiliary rod 4 is connected to the fastening nut 11 through a fastening thread 12. The auxiliary rod 4 is fixedly mounted on the upper surface of the power connector 5.

[0027] Among them, the protective cover 1 is a structure inherent in the boron diffusion heating furnace itself, and it is a well-known technology in the field. Therefore, it is not described in detail in the attached drawings and this example. Power is supplied by plugging the female connector 5 and the male connector 3 to achieve the effect of powering the device.

[0028] When power supply to the protective cover 1 is required, the auxiliary rod 4 is moved, and the female connector 5 and male connector 3 are connected. Through the electrical connection between the female connector 5 and male connector 3, power supply support is provided to the connecting rod 2 and the protective cover 1. By rotating the fastening nut 11 and the fastening sleeve 10, the connecting rod 2 is fixed to the auxiliary rod 4 while the rotating plate 9 is limited. Thus, the connecting rod 2 and the auxiliary rod 4 are fixed together by the rotating plate 9, ensuring the stability and reliability of the power supply to the connecting rod 2.

[0029] A plug-in ring cavity is formed between the inner wall of the upper middle part of the protective cover 1 and the outer side of the male connector 3. The male connector 3 is plugged into the inside of the female connector 5, and the female connector 5 is plugged into the inside of the plug-in ring cavity.

[0030] By setting up the plug-in ring cavity, the male connector 3 and the female connector 5 can have the effect of plugging in and limiting power on the basis of plugging in and connecting, so that the auxiliary rod 4 and the connecting rod 2 can have the effect of multi-layer plugging and positioning when connected to power, ensuring that their plugging is accurate and reliable.

[0031] The outer arc-shaped surface of the connecting rod 2 is evenly provided with rotating grooves 8, and the lower horizontal part of the rotating plate 9 is rotatably set inside the rotating grooves 8;

[0032] A plug-in block 901 is installed on the upper half of the inner side of the rotating plate 9, and the upper end face of the plug-in block 901 is chamfered. The plug-in block 901 is plugged into a plug-in slot 13, and the number of plug-in slots 13 is the same as the number of plug-in blocks 901.

[0033] The upper outer side of the rotating plate 9 forms a guide surface 902 by a chamfer. The outer side of the rotating plate 9 is provided with an auxiliary thread 903, which is threaded to the inner wall of the fastening sleeve 10.

[0034] Both the fastening nut 11 and the fastening sleeve 10 are sleeved on the outside of the auxiliary rod 4, and the fastening thread 12 is provided on the outside of the auxiliary rod 4. The fastening thread 12 is threaded to the inner wall of the fastening nut 11.

[0035] A positioning rod 6 is provided on the upper surface of the connecting rod 2, and a positioning hole 7 is inserted into the positioning rod 6. The positioning hole 7 is opened on the lower surface of the auxiliary rod 4.

[0036] Based on the rotation limit of the rotating plate 9 within the space of the rotating groove 8, it can be ensured that when the rotating plate 9 rotates, the range of outward rotation expansion of the rotating plate 9 is limited by the contact limit between its lower surface and the lower surface of the inner wall of the rotating groove 8. Based on the inclined setting of the guide surface 902, when it first contacts the inner wall of the fastening sleeve 10, the guide surface 902 is squeezed inward as the fastening sleeve 10 continues to move downward, and the insertion block 901 is inserted into the insertion groove 13, forming a mechanical positioning and locking effect. The fastening sleeve 10 limits the rotating plate 9 from the outside, providing a tight limit support for the inside and outside of the rotating plate 9, ensuring the tightness of the insertion of the auxiliary rod 4 and the connecting rod 2.

[0037] By rotating the fastening nut 11, it is tightened with the fastening thread 12, thereby positioning the fastening nut 11 on the outside of the auxiliary rod 4. Thus, with the fastening nut 11 and the auxiliary rod 4, the fastening sleeve 10 and the rotating plate 9, and the fastening nut 11 and the fastening sleeve 10, the fastening strength of the connection between them is guaranteed, so that the device can be plugged in for power supply and be fastened stably at the same time, which facilitates the quick and stable power connection of the device.

[0038] And with the positioning rod 6 and positioning hole 7 in place, it provides guidance for the power connection of the female connector 5 and the male connector 3, while ensuring the accurate contact position of the connecting rod 2 and the auxiliary rod 4, thereby ensuring the accuracy of the positioning of the rotating plate 9 and the plug block 901 and ensuring the stability of its positioning.

[0039] The installation method, connection method, or setting method disclosed in this embodiment are all common mechanical connections.

[0040] Any connection method that can achieve its beneficial effect can be implemented. In addition, all electrical components in this embodiment are electrically connected to the main controller and the power supply. The main controller can be a conventional known device such as a computer that plays a control role. Those skilled in the art can control the electrical components through simple programming. Moreover, the existing public power connection technology is also common knowledge in the field. Therefore, the specific structural composition and working principle will not be described in detail in this embodiment.

[0041] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0042] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A power connection device for a boron expansion heating furnace protective cover, comprising a protective cover body (1) and a connecting rod (2) disposed at the middle of the upper end of the protective cover body (1), characterized in that: A male connector (3) is provided at the middle of the upper end of the connecting rod (2), and a female connector (5) is inserted into the male connector (3). The female connector (5) is also inserted into the interior of the connecting rod (2). A rotating plate (9) is rotatably provided on the outside of the connecting rod (2). A fastening sleeve (10) is threaded on the outside of the rotating plate (9). A fastening nut (11) is provided on the upper end of the fastening sleeve (10). An auxiliary rod (4) is connected to the fastening nut (11) through a fastening thread (12). The auxiliary rod (4) is fixedly provided on the upper surface of the power connector (5).

2. The electrical connection device for the protective cover of a boron diffusion heating furnace according to claim 1, characterized in that: The upper middle inner wall of the protective cover (1) forms a plug-in ring cavity between the outer side of the male connector (3), the male connector (3) is plugged into the inside of the female connector (5), and the female connector (5) is plugged into the inside of the plug-in ring cavity.

3. The electrical connection device for the protective cover of a boron diffusion heating furnace according to claim 1, characterized in that: The outer arc surface of the connecting rod (2) is uniformly provided with a rotating groove (8), and the lower horizontal part of the rotating plate (9) is rotatably disposed inside the rotating groove (8).

4. The electrical connection device for the protective cover of a boron diffusion heating furnace according to claim 3, characterized in that: A plug-in block (901) is installed on the upper half of the inner side of the rotating plate (9), and the upper end face of the plug-in block (901) is chamfered. The plug-in block (901) is plugged into a plug-in slot (13), and the number of plug-in slots (13) is the same as that of the plug-in block (901).

5. The electrical connection device for the protective cover of a boron diffusion heating furnace according to claim 4, characterized in that: The upper outer side of the rotating plate (9) forms a guide surface (902) with a chamfer. The outer side of the rotating plate (9) is provided with an auxiliary thread (903), which is threaded to the inner wall of the fastening sleeve (10).

6. The electrical connection device for the protective cover of a boron diffusion heating furnace according to claim 5, characterized in that: The fastening nut (11) and the fastening sleeve (10) are both sleeved on the outside of the auxiliary rod (4), and the fastening thread (12) is provided on the outside of the auxiliary rod (4). The fastening thread (12) is threaded to the inner wall of the fastening nut (11).

7. The electrical connection device for the protective cover of a boron diffusion heating furnace according to claim 1, characterized in that: The upper surface of the connecting rod (2) is provided with a positioning rod (6), the positioning rod (6) is inserted into a positioning hole (7), and the positioning hole (7) is opened on the lower surface of the auxiliary rod (4).

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