Diffusion furnace tube cleaning equipment

Abstract

The utility model relates to diffusion furnace tube cleaning equipment. The box comprises a box body and a cover plate, the cover plate is installed on the box body, the box is structurally characterized by further comprising a lifting assembly and a rolling assembly, the lifting assembly is installed on the box body, and the rolling assembly is installed on the lifting assembly; the lifting assembly comprises a driving lifting bracket and a driven lifting bracket, the driving lifting bracket and the driven lifting bracket are installed on the two sides of the inner wall of the box body in a lifting mode respectively, the driving lifting bracket and the driven lifting bracket are each connected with a lifting sleeve, and the lifting sleeves are connected with piston rods of air cylinders. The rolling assembly comprises a motor, a driving gear, a rolling shaft and a rolling gear, a motor shaft of the motor is connected with the driving gear, one end of the rolling shaft is inserted into the driven lifting bracket, the other end of the rolling shaft is fixed to the rolling gear, and the driving gear is meshed with the rolling gear.

Description

Technical Field

[0001] This utility model relates to a diffusion furnace tube cleaning device. Background Technology

[0002] Diffusion furnaces are crucial equipment in the front-end processes of semiconductor production lines, used for diffusion, oxidation, annealing, alloying, and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices, and optical fibers. To improve semiconductor manufacturing quality, the quartz diffusion furnace tubes need to be cleaned. Current technologies often employ manual immersion for cleaning diffusion furnace tubes, which suffers from low cleaning efficiency, incomplete cleaning, and inconvenience in removing the tubes after cleaning. Utility Model Content

[0003] The purpose of this invention is to overcome the above-mentioned deficiencies in the existing technology and to provide a diffusion furnace tube cleaning device with a reasonable structural design.

[0004] The technical solution adopted by this utility model to solve the above problems is as follows: The diffusion furnace tube cleaning equipment includes a box and a cover plate, the cover plate being installed on the box. Its structural feature is that it also includes a lifting assembly and a rolling assembly. The lifting assembly is installed on the box, and the rolling assembly is installed on the lifting assembly. The lifting assembly includes an active lifting bracket and a passive lifting bracket. The active lifting bracket and the passive lifting bracket are respectively installed on both sides of the inner wall of the box in a liftable manner. Each of the active lifting bracket and the passive lifting bracket is connected to a lifting sleeve, and the lifting sleeve is connected to the piston rod of the cylinder.

[0005] Furthermore, the rolling assembly includes a motor, a drive gear, a roller, and a rolling gear. The motor shaft of the motor is connected to the drive gear. One end of the roller is inserted into the driven lifting bracket, and the other end of the roller is fixed to the rolling gear. The drive gear meshes with the rolling gear.

[0006] Furthermore, the bottom of the box is provided with support legs and a drain pipe.

[0007] Furthermore, a positioning plate is provided on the cover plate, and a positioning groove is provided on the positioning plate. A positioning rod is provided on the box body, and the positioning rod is located in the positioning groove. A positioning cap is installed on the positioning rod, and the positioning cap is in contact with the positioning plate.

[0008] Furthermore, a handle is provided on the cover plate.

[0009] Compared with the prior art, the present invention has the following advantages: When cleaning diffusion furnace tubes, the diffusion furnace tubes can be placed below the liquid surface by the lifting component, and the diffusion furnace tubes can be rolled by the rolling component, so as to clean the diffusion furnace tubes more thoroughly. After cleaning, the diffusion furnace tubes can be easily removed. When opening the cover, the positioning cap can also be used to position the diffusion furnace tubes, making it convenient to pick up and put down the diffusion furnace tubes. Attached Figure Description

[0010] Figure 1 This is a three-dimensional structural schematic diagram of the diffusion furnace tube cleaning equipment according to an embodiment of this utility model.

[0011] Figure 2 yes Figure 1 A magnified structural diagram of part A in the diagram.

[0012] Figure 3 This is a three-dimensional structural schematic diagram of the diffusion furnace tube cleaning equipment according to an embodiment of this utility model.

[0013] Figure 4 This is a three-dimensional structural schematic diagram of the diffusion furnace tube cleaning equipment according to an embodiment of this utility model.

[0014] In the diagram: 1. Box body; 2. Cover plate; 3. Lifting assembly; 4. Rolling assembly.

[0015] 11. Outriggers; 12. Drainage pipe

[0016] Positioning plate 21, positioning groove 22, positioning rod 23, positioning cap 24, handle 25.

[0017] Cylinder 31, lifting sleeve 32, active lifting bracket 33, driven lifting bracket 34

[0018] Motor 41, drive gear 42, roller 43, rolling gear 44. Detailed Implementation

[0019] The present invention will be further described in detail below with reference to the accompanying drawings and through embodiments. The following embodiments are explanations of the present invention, but the present invention is not limited to the following embodiments.

[0020] Example.

[0021] See Figures 1 to 4As shown in the accompanying drawings, the structures, proportions, sizes, etc., depicted in this specification are merely for illustrative purposes to aid those skilled in the art and to provide a clear understanding. They are not intended to limit the scope of this invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, provided they do not affect the effectiveness or purpose of this invention, should still fall within the scope of the technical content disclosed in this invention. Furthermore, the use of terms such as "upper," "lower," "left," "right," "middle," and "one" in this specification is solely for clarity and not intended to limit the scope of this invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this invention.

[0022] The diffusion furnace tube cleaning equipment in this embodiment includes a housing 1, a cover plate 2, a lifting assembly 3, and a rolling assembly 4. The cover plate 2 is installed on the housing 1, the lifting assembly 3 is installed on the housing 1, and the rolling assembly 4 is installed on the lifting assembly 3. The bottom of the housing 1 is provided with support legs 11 and a drain pipe 12.

[0023] The lifting assembly 3 in this embodiment includes an active lifting bracket 33 and a driven lifting bracket 34. The active lifting bracket 33 and the driven lifting bracket 34 are respectively installed on both sides of the inner wall of the housing 1 in a liftable manner. Each of the active lifting bracket 33 and the driven lifting bracket 34 is connected to a lifting sleeve 32, and the lifting sleeve 32 is connected to the piston rod of the cylinder 31.

[0024] The rolling assembly 4 in this embodiment includes a motor 41, a drive gear 42, a roller 43, and a rolling gear 44. The motor shaft of the motor 41 is connected to the drive gear 42. One end of the roller 43 is inserted into the driven lifting bracket 34, and the other end of the roller 43 is fixed to the rolling gear 44. The drive gear 42 meshes with the rolling gear 44.

[0025] In this embodiment, a positioning plate 21 is provided on the cover plate 2, a positioning groove 22 is provided on the positioning plate 21, a positioning rod 23 is provided on the box body 1, the positioning rod 23 is located in the positioning groove 22, a positioning cap 24 is installed on the positioning rod 23, the positioning cap 24 is in contact with the positioning plate 21, and a handle 25 is provided on the cover plate 2.

[0026] Specifically, when using the diffusion furnace tube cleaning equipment, the cover plate 2 can be opened, the diffusion furnace tube can be placed in the space formed by multiple rollers 43, and the cover plate 2 can be closed. The rotation of the motor 41 can drive the rollers 43 to rotate, so that the diffusion furnace tube is rolling to thoroughly clean the diffusion furnace tube. After cleaning, the cylinder 31 pushes the active lifting bracket 33 and the driven lifting bracket 34 upward to make the diffusion furnace tube leave the liquid surface. After opening the cover plate 2, the diffusion furnace tube can be taken out. When opening the cover plate 2, the positioning cap 24 is turned to disengage the positioning cap 24 from the positioning plate 21. When the positioning cap 24 contacts the positioning plate 21, the position of the cover plate 2 can be fixed.

[0027] Furthermore, it should be noted that the specific embodiments described in this specification may differ in the shape and name of their components. The above description is merely illustrative of the structure of this utility model. All equivalent or simple variations made based on the structure, features, and principles described in this utility model are included within the protection scope of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, as long as they do not deviate from the structure of this utility model or exceed the scope defined by the claims, all of which should fall within the protection scope of this utility model.

Claims

1. A diffusion furnace tube cleaning apparatus comprising a box (1) and a cover plate (2) mounted on the box (1), characterized in that: It also includes a lifting assembly (3) and a rolling assembly (4). The lifting assembly (3) is installed on the housing (1), and the rolling assembly (4) is installed on the lifting assembly (3). The lifting assembly (3) includes an active lifting bracket (33) and a driven lifting bracket (34). The active lifting bracket (33) and the driven lifting bracket (34) are respectively installed on both sides of the inner wall of the housing (1) in a lifting manner. The active lifting bracket (33) and the driven lifting bracket (34) are each connected to a lifting sleeve (32). The lifting sleeve (32) is connected to the piston rod of the cylinder (31).

2. The diffusion furnace tube cleaning apparatus of claim 1, wherein: The rolling assembly (4) includes a motor (41), a drive gear (42), a roller (43) and a rolling gear (44). The motor shaft of the motor (41) is connected to the drive gear (42). One end of the roller (43) is inserted into the driven lifting bracket (34), and the other end of the roller (43) is fixed to the rolling gear (44). The drive gear (42) meshes with the rolling gear (44).

3. The diffusion furnace tube cleaning apparatus of claim 1, wherein: The bottom of the box (1) is provided with support legs (11) and drain pipe (12).

4. The diffusion furnace tube cleaning apparatus of claim 1, wherein: A positioning plate (21) is provided on the cover plate (2), a positioning groove (22) is provided on the positioning plate (21), a positioning rod (23) is provided on the box body (1), the positioning rod (23) is located in the positioning groove (22), a positioning cap (24) is installed on the positioning rod (23), and the positioning cap (24) is in contact with the positioning plate (21).

5. The diffusion furnace tube cleaning apparatus of claim 1, wherein: The cover plate (2) is provided with a handle (25).

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