Laser device and laser processing device
By introducing collimation and focusing modules into the laser, a filamentary laser beam is formed, which solves the problem of low energy density in traditional lasers and improves the efficiency and quality of laser processing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- MAXPHOTONICS CORP
- Filing Date
- 2025-02-16
- Publication Date
- 2026-04-17
AI Technical Summary
In traditional lasers, the increase in energy density during beam transmission is limited, making it impossible to achieve efficient collimation and beam contraction, resulting in low processing efficiency.
The laser structure includes a beam output module, a collimation and beam contraction module, and a focusing module. By collimating and contracting the beam, a fine filamentary laser beam is formed, which satisfies a specific laser spot radius relationship, thereby improving energy density and effective working area.
It achieves high energy density and a longer effective working area for laser processing beams, improving processing speed and quality.
Smart Images
Figure CN224128826U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of laser processing technology, and in particular to a laser and a laser processing apparatus. Background Technology
[0002] Laser processing technology, with its advantages of non-contact processing, high precision, and good controllability, has been widely used in precision manufacturing, microelectronics, aerospace, and other fields. The optical path of a traditional laser typically consists of a laser source, a collimating lens, and a focusing lens. Its core objective is to focus the laser beam into a high-energy-density spot to achieve material processing, and it has important applications in laser cutting, welding, drilling, and other scenarios.
[0003] However, as modern manufacturing demands increasing processing efficiency and the ability to process complex structures, improvements in laser energy density are limited by the contradiction between the characteristics of the beam transmission process and the beam size. Conventional optical path structures with only collimating and focusing lenses do not support large-scale adjustment of the beam spot, limiting the potential for increasing laser power density at the focusing position.
[0004] Therefore, how to achieve efficient collimation and beam reduction of laser beams and improve energy density under the premise of low cost and low complexity remains a key technical challenge that restricts the efficiency of laser processing. Utility Model Content
[0005] In view of the shortcomings of the prior art described above, the purpose of this application is to provide a laser and a laser processing apparatus that can form a filament-shaped laser beam for processing, with a small laser spot diameter and a more reasonable distribution of the laser spot diameter in the laser transmission direction. At the same time, the laser beam has a high energy density, which can solve the technical problems of low output laser energy density and low processing efficiency of traditional lasers.
[0006] To achieve the above and other related objectives, this application provides a laser, which includes a light-emitting module, a collimating and beam-shrinking module, and a focusing module.
[0007] The light-emitting module is used to emit the initial laser beam;
[0008] The collimation and beam-shrinking module is positioned along the output direction of the initial laser beam. It is used to adjust the initial laser beam and form a collimated and beam-shrinking beam. After being focused by the focusing module, the collimated and beam-shrinking beam can form a laser beam for processing. The laser spot radius of the laser beam for processing satisfies the following relationship within a specific region of 0 < x < 2:
[0009] k*(0.0053*x2 + 0.0018*x + 0.0762)≤y<0.0048*x2 - 0.0026*x + 0.1175
[0010] Where x represents the longitudinal position of the beam, y represents the laser spot radius corresponding to the longitudinal position of the beam, the physical units of the longitudinal position and the laser spot radius corresponding to the longitudinal position of the beam are mm, and k is a correction coefficient, 0 <k≤1;
[0011] A focusing module is disposed at the output end of the collimation and beam contraction module.
[0012] As a preferred embodiment, the focusing module includes a focusing lens, wherein the radius of curvature of the incident surface of the focusing lens is greater than the radius of curvature of the exit surface of the focusing lens.
[0013] As a preferred embodiment, the collimation and beam-shrinking module includes a first lens and a second lens arranged sequentially along the initial laser beam emission direction. The first lens is used to change the spot diameter of the initial laser beam, and the second lens is used to collimate the beam output from the first lens to form a collimated and beam-shrinking beam.
[0014] As a preferred option, the first lens is a biconvex lens, which has convex surfaces at both ends of the optical path.
[0015] As a preferred option, the second lens is a biconcave lens, which has concave surfaces at both ends of the optical path.
[0016] As a preferred option, the focusing lens is a biconvex lens or a positive meniscus lens.
[0017] As a preferred embodiment, the surfaces of the first lens and / or the second lens are coated with an anti-reflective coating to improve the lens transmittance, and the anti-reflective coating has a preset damage resistance threshold.
[0018] As a preferred option, the beam waist diameter of the beam emitted from the self-focusing mirror is less than 0.21 mm.
[0019] As the preferred option, the correction coefficient k satisfies: 0.1 <k≤1。
[0020] As another aspect of this application, a laser processing apparatus is also proposed for laser processing of a workpiece, the laser processing apparatus comprising the laser of any of the above embodiments.
[0021] As described above, the laser and laser processing apparatus provided in this application can be used in fields including but not limited to laser cutting and laser welding. The laser includes a beam emission module, a collimation and beam-contraction module, and a focusing module. The beam emission module emits an initial laser beam; the collimation and beam-contraction module is positioned in the emission direction of the initial laser beam to adjust it and form a collimated and constricted beam; the focusing module focuses the collimated and constricted beam to obtain a laser beam directly usable for processing. The spot radius of this laser beam satisfies a specific functional relationship. The laser beam formed by the laser of this application, satisfying a specific functional relationship, has several advantages. First, during laser processing, it can form a very small spot diameter in the area to be processed, exhibiting a "filamentary" laser beam, achieving higher energy density and better focusing effect, thereby improving processing speed and quality. Second, compared to ordinary laser processing beams, the laser processing beam provided by the laser of this application has a longer effective working area, allowing for more focal points when searching for the focal point, greatly improving processing efficiency. Attached Figure Description
[0022] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.
[0023] Figure 1 This is a schematic diagram of the laser structure in an embodiment of this application;
[0024] Figure 2 A schematic diagram showing the energy density profiles of three laser beams used for processing;
[0025] Figure 3 This is a schematic line showing the distribution of the spot radius of the laser beam output in some embodiments of the laser of this application.
[0026] Among them, 10 is the light-emitting module; 11 is the first lens; 12 is the second lens; and 13 is the focusing module. Detailed Implementation
[0027] To facilitate understanding of this application, a more detailed description is provided below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is described as being "fixed" to another element, it can be directly on the other element, or one or more intermediate elements may exist between them. When an element is described as being "electrically connected" to another element, it can be directly connected to the other element, or one or more intermediate elements may exist between them. The terms "upper," "lower," "inner," "outer," "bottom," etc., used in this specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0028] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.
[0029] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.
[0030] Conventional lasers only have a collimating lens and a focusing lens in their internal optical path, and the resulting focused processing beam has a large divergence angle. This prevents the laser from effectively concentrating energy, resulting in low energy utilization and consequently low processing efficiency and quality. To overcome the shortcomings of the prior art, this application provides a laser, please refer to... Figure 1 The laser includes a beam-emitting module 10, a collimation and beam-contraction module, and a focusing module 13. The beam-emitting module emits an initial laser beam. The collimation and beam-contraction module is positioned in the emission direction of the initial laser beam and is used to adjust the initial laser beam and form a collimated and constricted beam. After being focused by the focusing module, the collimated and constricted beam forms a laser beam for processing. The laser spot radius of the laser beam for processing satisfies the following relationship within a specific region of 0 < x < 2:
[0031] k*(0.0053*x2 + 0.0018*x + 0.0762)≤y<0.0048*x2 - 0.0026*x + 0.1175
[0032] Among them, x represents the longitudinal position value of the light beam, y represents the laser spot radius value corresponding to the longitudinal position of the light beam. The physical unit of the longitudinal position and the laser spot radius corresponding to the longitudinal position of the light beam is mm. k is a correction coefficient, and 0 < k ≤ 1; a focusing module is provided at the output end of the collimation and beam reduction module.
[0033] Please refer to again Figure 2 , Figure 2 FIG. is a schematic diagram of the energy density profiles of three laser beams for processing. Among them, the left figure is a schematic diagram of the profile of a traditional laser beam. It can be clearly seen that the area of the profile regions on the upper and lower sides of the traditional laser beam is relatively large; the right figure is a schematic diagram of the profile of the laser beam (laser filament) of the present application. There will be no problem of a relatively large area on the upper and lower sides of the laser beam of the present application. Overall, the area distribution is reasonable, and the energy density will be relatively higher than that of the traditional laser beam. The spot radius is more evenly distributed in the laser transmission direction, and the energy density of the laser beam will be higher, which is beneficial to faster laser processing; the middle figure is a multi-focus laser beam. Although the energy density of this laser beam has been improved and the distribution of the spot radius has been improved (not as large as the change in the spot radius of the traditional beam), it is still not sufficient to meet the requirements of fast laser processing. In addition, Figure 2 The effective working area is also shown (indicated by a dotted line). It can be seen that the effective working area of the traditional beam on the left is the shortest, the multi-focus beam in the middle is the second, and the effective working area of the laser filament beam (the solution of the present application) on the right is the longest. The energy density of the laser beam in this effective working area of the laser filament beam on the right is relatively higher than that of the traditional beam, meeting the laser energy required for fast processing.
[0034] The following Table 1 and Table 2 list the distribution of the spot radius values corresponding to different longitudinal positions of the light beam, and at the same time list the distribution of the spot radius values corresponding to different longitudinal positions of the traditional conventional solution for comparison:
[0035] In addition, the actual experiments developed by the applicant show that by adopting the laser light speed solutions corresponding to the above-mentioned Examples 1 and 2, in the actual processing scenario, the processing speed is increased by more than 1.5 - 2 times that of the traditional conventional laser beam. Figure 3 The solid curve in Figure 2 is the schematic line of the laser beam profile and spot radius distribution of the left traditional conventional solution corresponding to Figure 2 The dashed curve is the schematic line of the laser beam profile and spot radius distribution of the laser filament solution corresponding to the right figure of Figure 2 . In comparison, the spot diameter formed at the waist of the laser filament solution is smaller than that of the traditional conventional solution, and the entire beam is narrower and longer along the longitudinal direction, which is beneficial to improving the processing speed and processing quality. In the actual processing process, Example 2 is preferably adopted. It can be understood that Figure 3 The changes and distribution of the beam spot diameter within a 5mm range before and after the longitudinal position of the beam are shown.
[0036] In the embodiments of this application, the light-emitting module 10 may be one or more of semiconductor light sources, solid-state light sources, and fiber laser light sources, thereby outputting laser light of at least one or more wavelengths.
[0037] In one embodiment, the focusing module 13 includes a focusing lens, the radius of curvature of the incident surface of the focusing lens being larger than the radius of curvature of the exit surface of the focusing lens. The surface with the smaller radius of curvature faces the collimating beam, and the surface with the larger radius of curvature faces the converging beam, so as to minimize spherical aberration and thereby improve the quality of the output laser beam used for processing. Optionally, to cooperate with the collimating and beam-shrinking module, the focusing lens provided in this embodiment is a biconvex spherical lens or a positive meniscus lens, in order to minimize the system cost and provide excellent focusing effect.
[0038] Please continue to refer to Figure 1 The collimation and beam-shrinking module includes a first lens 11 and a second lens 12 arranged sequentially along the initial laser beam emission direction. The first lens 11 and the second lens 12 are used to form a collimated and beam-shrinking beam. In one embodiment, the first lens 11 is a biconvex lens, which has convex surfaces at both ends in the optical path direction; the second lens 12 is a biconcave lens, which has concave surfaces at both ends in the optical path direction. The arrangement of the second lens 12 in the optical path can ultimately realize the specific laser beam output by the laser of this application.
[0039] Optionally, the surfaces of the first lens 11 and the second lens 12 are coated with an anti-reflection film to improve the lens transmittance. The anti-reflection film has a preset damage resistance threshold to maintain good shaping performance even under high-power laser output conditions.
[0040] In the embodiments of this application, the beam waist diameter of the light beam emitted from the focusing lens is less than 0.21 mm, where the beam waist diameter is the diameter of the laser spot corresponding to x=0.
[0041] As another aspect of this application, a laser processing apparatus is also proposed for laser processing of a workpiece, wherein the laser processing apparatus employs a laser as described in any of the above embodiments. It is understood that this laser processing apparatus is applicable to, but is not limited to, cutting and welding applications.
[0042] In summary, a laser and a laser processing device according to the present application change the traditional optical path, add a second lens, and finally change the laser spot radius distribution of the traditional laser beam in the laser transmission direction. The initial laser beam emitted from the light output module is adjusted by the collimation and beam reduction module to form a collimated and beam-reduced beam, and then the focusing module is used to focus the collimated and beam-reduced beam, and finally a thin-filament laser beam that can be directly used for processing and meets the specific requirements of the present application is obtained, realizing the efficient collimation and beam reduction of the laser beam and the improvement of the energy density, and improving the laser processing speed and efficiency. For the longitudinal position x of the beam, the following explanations are required. Refer to Figure 3 , the laser beam output by the laser for processing is symmetric along the longitudinal direction of the beam, and the symmetric center is defined as the longitudinal position x = 0 of the beam. For the two parts of x < 0 and x > 0, the spot radius is symmetrically distributed about the symmetric center. Figure 3 Although -5 ≤ x ≤ 5 is shown, the present application does not entirely focus on the entire region. The present application only focuses on the laser spot radius distribution in the region of 0 < x < 2. That is to say, for the region of 0 < x < 2, the laser spot radius value corresponding to the longitudinal position of the beam only needs to satisfy being equal to or greater than the above k*(0.010697x2 + 0.003502x + 0.10000), where 0 < k ≤ 1; and less than 0.009538x2 - 0.005221x + 0.234980, and the laser radius distribution is the protection scope required by the present application. Preferably, the correction coefficient k satisfies: 0.1 < k ≤ 1.
[0043] Moreover, the laser beam output from the laser of the present application has small divergence and low spot size change rate. When the lens has a temperature drift, the influence of the laser beam on the consistency of the processing section is also small. The laser of the present application solves the technical problems of low laser energy density and low processing efficiency in the prior art, which cannot achieve rapid laser processing and improve the processing efficiency, and has high practical application value.
[0044] The above embodiments are only illustrative of the principles and effects of the present application, and are not used to limit the present application. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present application should still be covered by the claims of the present application.
Claims
1. A laser, the laser comprising a light-emitting module, a collimating and beam-contracting module, and a focusing module, characterized in that, The light-emitting module is used to emit the initial laser beam; The collimation and beam-shrinking module is positioned along the output direction of the initial laser beam. It is used to adjust the initial laser beam and form a collimated and beam-shrinking beam. After being focused by the focusing module, the collimated and beam-shrinking beam can form a laser beam for processing. The laser spot radius of the laser beam for processing satisfies the following relationship within a specific region of 0 < x < 2: k*(0.0053*x 2 + 0.0018*x + 0.0762)≤y<0.0048*x 2 - 0.0026*x + 0.1175 Where x represents the longitudinal position of the beam, y represents the laser spot radius corresponding to the longitudinal position of the beam, the physical units of the longitudinal position and the laser spot radius corresponding to the longitudinal position of the beam are mm, and k is a correction coefficient, 0. <k≤1; A focusing module is disposed at the output end of the collimation and beam contraction module.
2. The laser of claim 1, wherein, The focusing module includes a focusing lens, wherein the radius of curvature of the incident surface of the focusing lens is greater than the radius of curvature of the exit surface of the focusing lens.
3. The laser of claim 1, wherein, The collimation and beam-shrinking module includes a first lens and a second lens arranged sequentially along the emission direction of the initial laser beam. The first lens is used to change the spot diameter of the initial laser beam, and the second lens is used to collimate the beam output from the first lens to form the collimated and beam-shrinking beam.
4. The laser of claim 3, wherein, The first lens is a biconvex lens, and the biconvex lens has convex surfaces at both ends in the optical path direction.
5. The laser of claim 3, wherein, The second lens is a biconcave lens, which has concave surfaces at both ends in the optical path direction.
6. The laser of claim 2, wherein, The focusing lens is a biconvex lens or a positive meniscus lens.
7. The laser of claim 3, wherein, The surface of the first lens and / or the second lens is coated with an anti-reflective coating to improve the lens transmittance, and the anti-reflective coating has a preset damage resistance threshold.
8. The laser of claim 2, wherein, The beam waist diameter of the beam emitted from the focusing lens is less than 0.21 mm.
9. The laser of claim 1, wherein, The correction factor k satisfies: 0.1 <k≤1。 10. A laser processing apparatus for performing laser processing on a workpiece, characterized in that, The laser processing apparatus includes a laser as described in any one of claims 1-8.