Vacuum cavity with sealing gate valve

Abstract

The utility model relates to the field of vacuum equipment, in particular to a vacuum cavity with a sealing gate valve, which comprises a base and a vacuum cavity, an adjusting groove is arranged on the upper end face of the base, an adjusting lead screw is rotatably mounted on the right end face in the adjusting groove through a bearing, and an adjusting motor is mounted on the left end face of the adjusting lead screw. A fixing pipe is mounted at the inner side end of the vacuum cavity; an adjusting pipe is mounted at the inner side end of the fixing pipe in a sliding fit manner; a first gate valve is mounted on the outer side wall of the adjusting pipe; a connecting rod is mounted at the bottom of the outer side wall of the adjusting pipe; the adjusting lead screw structure is adopted, the distance between the vacuum cavities is shortened, the gas circulation time is shortened, the production efficiency is improved, and the first gate valve is opened, so that exhaust treatment can be carried out on the multiple vacuum cavities.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment, specifically to a vacuum chamber with a sealing valve. Background Technology

[0002] Organic light-emitting diodes (OLEDs), also known as organic electroluminescent displays, are widely used due to their thinness, lightness, and energy efficiency. OLED substrates require efficient transport within a vacuum chamber during manufacturing.

[0003] The existing vacuum chambers are fixedly connected, which makes it inconvenient to adjust the position between the chambers according to the needs, resulting in high processing costs and poor stability of the device during operation. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a vacuum chamber with a sealing valve, including a base and a vacuum chamber. The upper end face of the base is provided with an adjustment groove. An adjustment screw is rotatably mounted on the right end face of the adjustment groove through a bearing. An adjustment motor is mounted on the left end face of the adjustment screw. First sliders are symmetrically mounted on the outer side wall of the adjustment screw. A vacuum chamber is mounted on the upper end face of the first slider. A fixed tube is mounted on the inner end of the vacuum chamber. An adjustment tube is mounted on the inner end of the fixed tube through a sliding fit. A first valve is mounted on the outer side wall of the adjustment tube. A connecting rod is mounted on the bottom of the outer side wall of the adjustment tube.

[0005] Preferably, an upper tube is installed on the upper end face of the vacuum chamber, a connecting hose is installed on the upper end face of the upper tube, a second valve is installed on the outer wall of the upper tube, a front tube is installed at the front end of the outer wall of the vacuum chamber, and a third valve is installed on the outer wall of the front tube.

[0006] Preferably, a collar is installed on the outer wall of the connecting hose, a top seat is installed on the inner end of the collar, a connecting frame is symmetrically installed on the front and rear ends of the top seat, and multiple balls are installed on the inner wall of the collar along its circumferential direction.

[0007] Preferably, a fixing rod is installed on the upper end of the outer side wall of the fixing tube, and the upper end face of the fixing rod is connected to the bottom of the top seat by a sliding fit.

[0008] Preferably, the upper end of the base is symmetrically equipped with side seats, and the inner end of the side seats is connected to the outer wall of the vacuum cavity by a sliding fit.

[0009] The technical effects and advantages of this utility model are as follows:

[0010] 1. The present invention adopts an adjusting screw structure, which shortens the distance between vacuum chambers, shortens the gas flow time, and improves production efficiency. The opening of the first valve enables exhaust treatment of multiple vacuum chambers.

[0011] 2. In this utility model, a fixing rod is used to limit and fix the fixing tube, ensuring the stability of the fixing tube when the gas flows, and the side seat ensures the stability of the vacuum chamber when it moves left and right. Attached Figure Description

[0012] Figure 1 This is a front view of a vacuum chamber structure with a sealing valve provided in an embodiment of this application;

[0013] Figure 2 This is a front cross-sectional view of a vacuum chamber with a sealing valve provided in an embodiment of this application;

[0014] Figure 3 This is a top cross-sectional view of a vacuum chamber with a sealing valve provided in an embodiment of this application;

[0015] Figure 4 This is a left cross-sectional view of a vacuum chamber with a sealing valve provided in an embodiment of this application;

[0016] Figure 5 This application provides a vacuum chamber with a sealing valve as described in its embodiments. Figure 2 A magnified view of a portion of region A in the middle;

[0017] In the diagram: 1. Base; 2. Vacuum chamber; 11. Adjusting screw; 12. Adjusting motor; 13. Fixed tube; 14. Adjusting tube; 15. First valve; 16. Upper tube; 17. Connecting hose; 18. Second valve; 19. Front tube; 21. Third valve; 22. Collar; 23. Top seat; 24. Ball bearing; 25. Fixed rod; 26. Side seat. Detailed Implementation

[0018] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical applications of the present invention, and to enable those skilled in the art to understand the present invention and design various embodiments with various modifications suitable for a particular purpose.

[0019] Please see Figures 1-5This embodiment provides a vacuum chamber with a sealing valve, including a base 1 and a vacuum chamber 2. The upper end face of the base 1 is provided with an adjustment groove. An adjustment screw 11 is rotatably mounted on the right end face of the adjustment groove via a bearing. An adjustment motor 12 is mounted on the left end face of the adjustment screw 11. A first slider is symmetrically mounted on the outer side wall of the adjustment screw 11. A vacuum chamber 2 is mounted on the upper end face of the first slider. A fixed tube 13 is mounted on the inner end of the vacuum chamber 2. An adjustment tube 14 is mounted on the inner end of the fixed tube 13 via a sliding fit. A first valve 15 is mounted on the outer side wall of the adjustment tube 14. A connecting rod is mounted on the bottom of the outer side wall of the adjustment tube 14. During operation, the left and right threads of the adjustment screw 11 are symmetrical but opposite in direction. The adjustment motor 12 starts, driving the adjustment screw 11 to rotate, thereby moving the vacuum chamber 2 inward, shortening the distance between the vacuum chambers 2, shortening the gas flow time, and improving production efficiency. The first valve 15 opens, enabling exhaust treatment of multiple vacuum chambers 2.

[0020] The upper end face of the vacuum chamber 2 is equipped with an upper tube 16, a connecting hose 17 is installed on the upper end face of the upper tube 16, a second valve 18 is installed on the outer side wall of the upper tube 16, a front tube 19 is installed at the front end of the outer side wall of the vacuum chamber 2, and a third valve 21 is installed on the outer side wall of the front tube 19. During operation, the third valve 21 is opened, and gas enters through the front tube 19. The second valve 18 is opened, and gas is discharged through the upper tube 16 and then enters the connecting hose 17.

[0021] A collar 22 is installed on the outer wall of the connecting hose 17, and a top seat 23 is installed on the inner end of the collar 22. A connecting frame is symmetrically installed on the front and rear ends of the top seat 23. Multiple balls 24 are installed on the inner wall of the collar 22 along its circumferential direction. During operation, when the vacuum chamber 2 moves inward and outward, the connecting hose 17 slides up and down in the collar 22. The use of the ball 24 structure reduces the wear on the outer wall of the connecting hose 17 and ensures the service life of the device. The front of the front tube 19 is equipped with a hose to ensure the stability of the movement of the vacuum chamber 2.

[0022] A fixing rod 25 is installed on the upper end of the outer wall of the fixing tube 13. The upper end face of the fixing rod 25 is connected to the bottom of the top seat 23 by a sliding fit. During operation, the fixing rod 25 plays a role in limiting and fixing the fixing tube 13, ensuring the stability of the fixing tube 13 when gas flows.

[0023] The base 1 has symmetrically installed side seats 26 on the front and back of the upper end. The inner end of the side seat 26 is connected to the outer wall of the vacuum chamber 2 by a sliding fit. During operation, the side seat 26 structure is used to ensure the stability of the vacuum chamber 2 when moving left and right.

[0024] In actual operation, the adjusting screw 11 has symmetrical threads on the left and right sides with opposite directions. The adjusting motor 12 starts and drives the adjusting screw 11 to rotate, thereby moving the vacuum chamber 2 inward, shortening the distance between the vacuum chambers 2, shortening the gas flow time, and improving production efficiency. The first gate valve 15 opens, enabling exhaust treatment of multiple vacuum chambers 2.

[0025] Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of this utility model without creative effort should fall within the protection scope of this utility model. Structures, devices, and operating methods not specifically described and explained in this utility model, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A vacuum chamber with a sealed gate valve, comprising a base (1) and a vacuum chamber (2), characterized in that, The upper end face of the base (1) is provided with an adjustment groove. An adjustment screw (11) is installed on the right end face of the adjustment groove through a bearing. An adjustment motor (12) is installed on the left end face of the adjustment screw (11). A first slider is symmetrically installed on the outer side wall of the adjustment screw (11). A vacuum chamber (2) is installed on the upper end face of the first slider.

2. A vacuum chamber with a sealed gate valve according to claim 1, characterized in that A fixed tube (13) is installed on the inner end of the vacuum chamber (2). An adjusting tube (14) is installed on the inner end of the fixed tube (13) by means of sliding fit. A first gate valve (15) is installed on the outer wall of the adjusting tube (14). A connecting rod is installed at the bottom of the outer wall of the adjusting tube (14).

3. A vacuum chamber having a sealed gate valve as claimed in claim 1, characterized in that The upper end face of the vacuum chamber (2) is equipped with an upper tube (16), a connecting hose (17) is installed on the upper end face of the upper tube (16), a second valve (18) is installed on the outer side wall of the upper tube (16), a front tube (19) is installed at the front end of the outer side wall of the vacuum chamber (2), and a third valve (21) is installed on the outer side wall of the front tube (19).

4. A vacuum chamber having a sealed gate valve according to claim 3, wherein, A collar (22) is installed on the outer wall of the connecting hose (17), a top seat (23) is installed on the inner end of the collar (22), and a connecting frame is symmetrically installed on the front and rear ends of the top seat (23).

5. A vacuum chamber having a sealed gate valve according to claim 4, wherein, The inner wall of the collar (22) is fitted with a plurality of balls (24) along its circumferential direction.

6. A vacuum chamber having a sealed gate valve as claimed in claim 2, characterized in that A fixing rod (25) is installed on the upper end of the outer wall of the fixing tube (13), and the upper end face of the fixing rod (25) is connected to the bottom of the top seat (23) by a sliding fit.

7. A vacuum chamber having a sealed gate valve as claimed in claim 1, characterized in that The base (1) has side seats (26) symmetrically installed on the front and back of the upper end. The inner end of the side seat (26) is connected to the outer wall of the vacuum chamber (2) by a sliding fit.

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