Probe contact stability enhancing device for probe station
By designing a probe clamping assembly, the problems of probe offset and damage during rotational detection were solved, achieving adaptive adjustment and stable contact of the probe, and enhancing the stability and reliability of the probe station.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI JUNYUANDA ELECTRONIC TECH CO LTD
- Filing Date
- 2025-03-03
- Publication Date
- 2026-04-17
AI Technical Summary
Existing probe stations are prone to probe displacement during rotational testing, and rigid clamping methods can easily damage the probes, lacking adaptability and stability.
A probe clamping assembly was designed, including a clamping plate, a lateral adjustment post, a contact strip, and a floating adjustment mechanism. The probe is adaptively adjusted and stably fixed through elastic connecting pieces and guide posts, reducing damage to the probe.
This improves the stability and adaptability of the probe during rotational detection, reduces damage to the probe surface, and ensures stable contact between the probe and electronic devices.
Smart Images
Figure CN224137330U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of probe station technology, specifically a device for enhancing probe contact stability on a probe station. Background Technology
[0002] A probe station is a specialized device used for testing and measuring microelectronic devices such as semiconductor devices and integrated circuit chips. A probe station typically includes a platform with a movable probe holder and probe tips. These probes are used to precisely contact the leads or surfaces of the device under test (DUT) according to a specific layout and coordinates, enabling the testing and measurement of performance parameters such as electrical properties, dimensions, and temperature. Probe stations are commonly used in the research, development, and production of microelectronic devices and can be used in laboratory or manufacturing environments. Various types of tests, such as resistance, capacitance, current, and magnetic properties, can be performed using probe stations to evaluate device performance and quality. The design and precision of the probe station are crucial to the accuracy and repeatability of test results. Probe stations typically possess micron-level positioning accuracy and stability, ensuring precise contact between the probes and the leads or surfaces of the DUT. Probe stations can also be equipped with temperature control systems to conduct tests under different temperature conditions, evaluating the device's performance and stability at varying temperatures. The probes are a crucial component of the probe station; they are a set of elongated metal probes connected to the probe holder, typically used to contact, test, and measure the electrical properties, dimensions, and other parameters of microelectronic devices.
[0003] However, existing probe stations and probes suffer from the following problems during use: While probes mounted on probe holders offer good adjustability and flexibility, most require manual adjustment. Since the electronic devices under test placed on the stage sometimes require rotational testing, the probes in contact with the devices during rotation may be affected by external forces, causing probe position displacement. For example, uneven surfaces on the electronic devices can act on the probes during rotation, resulting in poor contact. Furthermore, the probe mounting method lacks adaptability. Additionally, probe holders mostly use rigid contact to hold and fix probes, which can easily damage them due to excessive clamping force. Therefore, corresponding technical solutions are needed to address these problems. Utility Model Content
[0004] The purpose of this invention is to provide a probe station probe contact stability enhancement device, which solves the problem that although probes mounted on probe holders have good adjustability and flexibility, most of them require manual adjustment. Since the electronic devices to be tested placed on the stage sometimes need to be rotated for testing, the probes in contact with the electronic devices may be affected by external forces during the rotation adjustment process, causing the probe position to shift. For example, the surface of the electronic device is uneven, which acts on the probe during rotation, resulting in poor contact between the probe and the electronic device. The probe installation method lacks adaptability. In addition, the probe holders mostly use rigid contact to clamp and fix the probes, and the clamping force is too large, which can easily damage the probes.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a probe station probe contact stability enhancement device, comprising a probe holder and a probe clamping assembly installed at the end of the probe holder. The probe clamping assembly includes a first clamping plate, a second clamping plate, a base plate, a transverse adjustment column, and a contact strip. The first clamping plate and the second clamping plate are symmetrically distributed. The first clamping plate is fixed to the base plate, and a sliding groove is formed on the base plate. A slider is installed at the right end of the second clamping plate, and the slider is slidably disposed within the sliding groove. A probe through-hole is formed on the inner side of the first clamping plate, and a threaded opening is formed at the upper left corner. The transverse adjustment column is threadedly inserted into the threaded opening. An inset opening is formed at the upper left corner of the second clamping plate, and the inner end of the transverse adjustment column is rotatably disposed within the inset opening. The contact strip is embedded inside the second clamping plate and symmetrically distributed with the probe slot. A floating adjustment mechanism is provided at the connection between the probe holder and the probe clamping assembly. The floating adjustment mechanism includes an elastic connecting piece and four sets of guide posts symmetrically arranged on both sides of the elastic connecting piece. One end of the elastic connecting piece is connected to the end of the probe holder and the other end is connected to the base plate. The guide post includes a fixing block, a guide block, a connecting rod, and a return spring. The fixing block is fixed to one side of the base plate. The guide block is fixed to the probe holder. The connecting rod passes through the guide block and its lower end is connected to the fixing block. The return spring is sleeved on the upper end of the connecting rod. The lower end of the return spring is connected to the guide block and its upper end is connected to the top of the connecting rod.
[0006] In a preferred embodiment of this utility model, the lateral adjustment column includes a handle and a rod fixed to the handle, with a rotating ball fixed to the inner end of the rod, and the rotating ball being rotatably disposed within the inner opening.
[0007] In a preferred embodiment of this invention, the contact strip has a columnar structure and is made of rubber material. The surface of the contact strip is processed with several sets of contact bumps, and the contact bumps abut against the probe.
[0008] In a preferred embodiment of the present invention, the elastic connecting piece includes a metal spring sheet and a deformation groove formed on the surface of the metal spring sheet, and several sets of the deformation grooves are distributed in a stacked manner.
[0009] In a preferred embodiment of this invention, the top of the connecting rod is hemispherical and connected to the return spring.
[0010] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0011] 1. This utility model improves the existing probe installation method. While retaining the original probe holder, a probe clamping component is provided at the front end of the probe holder. The probe clamping component can improve the stability of probe clamping and reduce damage to the probe surface during the clamping process. In addition, a floating adjustment mechanism is provided between the probe clamping component and the probe holder. During the testing of electronic devices, the probe can adaptively float and adjust according to the surface condition of the electronic devices to ensure the stability of the contact between the probe and the electronic devices.
[0012] 2. The probe mounting structure designed in this utility model can greatly improve the stability of the probe during use and reduce damage to the probe during clamping. Attached Figure Description
[0013] Figure 1 This is an overall structural diagram of the present invention;
[0014] Figure 2 This is a structural diagram of the probe clamping assembly described in this utility model.
[0015] In the diagram: 1. Probe holder; 2. Probe clamping assembly; 3. Clamping plate one; 4. Clamping plate two; 5. Base plate; 6. Lateral adjustment column; 7. Contact strip; 8. Slide groove; 9. Slider; 10. Probe through groove; 12. Threaded opening; 13. Embedded opening; 14. Elastic connecting piece; 15. Fixing block; 16. Guide block; 17. Connecting rod; 18. Return spring; 19. Handle; 20. Rod body; 21. Rotating ball; 22. Contact protrusion; 23. Metal spring; 24. Deformation groove. Detailed Implementation
[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0017] Please see Figure 1-2This utility model provides a technical solution: a probe station probe contact stability enhancement device, including a probe holder 1 and a probe clamping assembly 2 installed at the end of the probe holder 1. The probe holder 1 is a conventional probe holder 1 structure available on the market. The probe clamping assembly 2 includes a first clamping plate 3, a second clamping plate 4, a base plate 5, a transverse adjustment column 6, and a contact strip 7. The first clamping plate 3 and the second clamping plate 4 are symmetrically distributed. The first clamping plate 3 is fixed to the base plate 5, and a sliding groove 8 is provided on the base plate 5. A slider 9 is installed on the right end of the second clamping plate 4, and the slider 9 is slidably disposed in the sliding groove 8. A probe through groove 10 is provided on the inner side of the first clamping plate 3, and a threaded opening 12 is provided at the upper left corner. The transverse adjustment column 6 is threaded into the threaded opening 12. An inset opening 13 is provided at the upper left corner of the second clamping plate 4, and the inner end of the transverse adjustment column 6 is rotatably disposed in the inset opening 13. Inside, the contact strip 7 is embedded in the inner side of the clamping plate 4 and is symmetrically distributed with the probe through slot 10. A floating adjustment mechanism is provided at the connection between the probe holder 1 and the probe clamping assembly 2. The floating adjustment mechanism includes an elastic connecting piece 14 and four sets of guide posts symmetrically arranged on both sides of the elastic connecting piece 14. One end of the elastic connecting piece 14 is connected to the end of the probe holder 1 and the other end is connected to the base plate 5. The guide post includes a fixing block 15, a guide block 16, a connecting rod 17 and a reset spring 18. The fixing block 15 is fixed to one side of the base plate 5. The guide block 16 is fixed on the probe holder 1. The connecting rod 17 passes through the guide block 16 and its lower end is connected to the fixing block 15. The reset spring 18 is sleeved on the upper end of the connecting rod 17. The lower end of the reset spring 18 is connected to the guide block 16 and its upper end is connected to the top of the connecting rod 17.
[0018] Further improvements, such as Figure 2 As shown, the horizontal adjustment column 6 includes a handle 19 and a rod 20 fixed to the handle 19. A rotating ball 21 is fixed to the inner end of the rod 20. The rotating ball 21 is rotatably set in the inner cavity 13. By turning the handle 19, the rod 20 is driven to rotate, thereby driving the clamp 4 to adjust its position.
[0019] Further improvements, such as Figure 2 As shown, the contact strip 7 has a columnar structure and is made of rubber material. Several sets of contact bumps 22 are machined on the surface of the contact strip 7. The contact bumps 22 abut against the probe. The contact bumps 22 on the contact strip 7 act on the probe and squeeze and fix the probe, thereby reducing damage to the probe surface.
[0020] Further improvements, such as Figure 1 As shown, the elastic connecting piece 14 includes a metal spring piece 23 and a deformation groove 24 formed on the surface of the metal spring piece 23. Several sets of deformation grooves 24 are distributed in a stacked manner. This design facilitates the deformation adjustment of the elastic connecting piece 14.
[0021] Specifically, the top of the connecting rod 17 has a hemispherical structure and is connected to the return spring 18, which facilitates pulling down the connecting rod 17 through the return spring 18.
[0022] In use: When it is necessary to fix the probe, insert the probe into the probe slot 10 and turn the handle 19 to drive the rod 20 to rotate, thereby driving the clamping plate 4 to adjust its position, so that the clamping plate 4 moves towards the clamping plate 3 and clamps and fixes the probe. The contact protrusion 22 on the contact strip 7 acts on the probe and squeezes and fixes the probe, reducing damage to the probe surface. The end of the probe contacts the surface of the electronic device. When the electronic device is rotated and adjusted, the reset spring 18 pulls the connecting rod 17 and acts on the probe clamping assembly 2 and the probe. The probe can adaptively contact the electronic device to ensure the stability of the contact.
[0023] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0024] Furthermore, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include at least one of those features.
[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0026] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A probe station probe contact stability enhancement device, comprising a probe holder (1) and a probe clamping assembly (2) mounted on the end of the probe holder (1), characterized in that: The probe clamping assembly (2) includes a clamping plate one (3), a clamping plate two (4), a base plate (5), a transverse adjustment column (6), and a contact strip (7). The clamping plate one (3) and the clamping plate two (4) are symmetrically distributed. The clamping plate one (3) is fixed on the base plate (5). The base plate (5) has a sliding groove (8). The right end of the clamping plate two (4) is equipped with a slider (9). The slider (9) is slidably disposed in the sliding groove (8). The inner side of the clamping plate one (3) has a probe through groove (10) and a threaded opening (12) at the upper left corner. The transverse adjustment column (6) is threaded into the threaded opening (12). The upper left corner of the clamping plate two (4) has an inset opening (13). The inner end of the transverse adjustment column (6) is rotatably disposed in the inset opening (13). The contact strip (7) is embedded in the inner side of the clamping plate two (4) and is symmetrically distributed with the probe through groove (10). The probe A floating adjustment mechanism is provided at the connection between the card holder (1) and the probe clamping assembly (2). The floating adjustment mechanism includes an elastic connecting piece (14) and four sets of guide posts symmetrically arranged on both sides of the elastic connecting piece (14). One end of the elastic connecting piece (14) is connected to the end of the probe card holder (1) and the other end is connected to the base plate (5). The guide post includes a fixing block (15), a guide block (16), a connecting rod (17) and a reset spring (18). The fixing block (15) is fixed to one side of the base plate (5). The guide block (16) is fixed on the probe card holder (1). The connecting rod (17) passes through the guide block (16) and its lower end is connected to the fixing block (15). The reset spring (18) is fitted into the upper end of the connecting rod (17). The lower end of the reset spring (18) is connected to the guide block (16) and its upper end is connected to the top of the connecting rod (17).
2. The probe station probe contact stability enhancement apparatus of claim 1, wherein: The horizontal adjustment column (6) includes a handle (19) and a rod (20) fixed to the handle (19). A rotating ball (21) is fixed to the inner end of the rod (20), and the rotating ball (21) is rotatably disposed in the inner opening (13).
3. The probe station probe contact stability enhancement apparatus of claim 1, wherein: The contact strip (7) has a columnar structure and is made of rubber material. The surface of the contact strip (7) is processed with several sets of contact bumps (22), and the contact bumps (22) abut against the probe.
4. The probe station probe contact stability enhancement apparatus of claim 1, wherein: The elastic connecting piece (14) includes a metal spring (23) and a deformation groove (24) formed on the surface of the metal spring (23), and several sets of the deformation grooves (24) are distributed in a stacked manner.
5. The probe station probe contact stability enhancement apparatus of claim 1, wherein: The top of the connecting rod (17) is hemispherical and connected to the return spring (18).