Removable probe card connection assembly

Abstract

The utility model relates to the technical field of semiconductor test, disclose detachable probe card connection assembly, including work table, the top of work table is provided with quick release mechanism, quick release mechanism is used for quick release, the top of work table is provided with clamping mechanism, clamping mechanism is used for clamping, quick release mechanism includes baffle no.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and in particular to a detachable probe card connection assembly. Background Technology

[0002] Probe cards are the interface between the chip under test and the testing machine in semiconductor wafer testing. They are core consumables for semiconductor testing. They are mainly used to perform preliminary electrical performance tests on chips before packaging, screen out defective chips, and then proceed with the subsequent packaging process. Probe card connection components are required when testing chips.

[0003] As a key auxiliary structure in the probe card system, the detachable probe card connection assembly plays a crucial role in enabling rapid, stable, and repeatable connection and disconnection between the probe card and the testing equipment, while ensuring the reliability of signal transmission during testing. In the existing installation process, due to human error or unreasonable structural design, it is difficult to guarantee the precise alignment between the probe and the chip or other components. For example, the axial accuracy between the test probe and the precision load sensor is difficult to guarantee. The new probe card microcantilever module has good mechanical stability and can maintain stable performance even in extreme high-temperature welding environments, ensuring that the probe card connection assembly can work normally under complex working conditions. However, the improved probe card connection assembly is difficult to disassemble. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a detachable probe card connection assembly, which aims to improve the problem of quick-release of probe card connection assemblies in the prior art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a detachable probe card connection assembly, including a workbench, a quick-release mechanism provided on the top of the workbench for quick release, and a clamping mechanism provided on the top of the workbench for clamping. The quick-release mechanism includes a second baffle plate, which is fixedly connected to the inner wall of the workbench. An iron column is fixedly connected to the inner wall of the second baffle plate. A second spring is fixedly connected to the bottom wall of the iron column. An iron block is fixedly connected to the bottom of the second spring. A detection device is provided on the top of the workbench. A fixing block is fixedly connected to the front side of the outer wall of the detection device. An iron rod is fixedly connected to the inside of the fixing block. An iron rod is fixedly connected to the middle of the outer wall of the first iron rod. The second iron rod is slidably connected to the inner wall of the first hollow column. An elliptical block is fixedly connected to the bottom wall of the first hollow column. A spring is provided at the bottom of the outer wall of the second iron rod. A baffle plate is fixedly connected to the bottom wall of the first spring. The baffle plate is fixedly connected to the inner wall of the semi-circular groove.

[0006] As a further description of the above technical solution: The clamping mechanism includes a housing 1, which is installed on the left side of the outer wall of the detection device. A support rod 1 is fixedly connected to the left side of the outer wall of the housing 1. A rotating rod is rotatably connected to the bottom right side of the outer wall of the support rod 1. A gripping rod is fixedly connected to the left side of the outer wall of the rotating rod. A support rod 2 is rotatably connected to the middle of the outer wall of the rotating rod. A spring 3 is fixedly connected to the upper end of the outer wall of the support rod 2. The spring 3 is fixedly connected to the support rod 1. The housing 2 is fixedly connected to the lower left side of the outer wall of the support rod 2. A fixing plate 1 is fixedly connected to the right side of the inner wall of the housing 2. A hollow column 2 is fixedly connected to the left side of the outer wall of the fixing plate 1. A spring 4 is provided on the inner wall of the hollow column 2. A fixing post is fixedly connected to the bottom wall of the spring 4. The fixing post and the hollow column 2 are slidably connected. A fixing plate 2 is fixedly connected to the left side of the outer wall of the fixing post. The fixing plate 2 is fixedly connected to the left side of the inner wall of the housing 2.

[0007] As a further description of the above technical solution: Anti-slip pads are fixedly connected to the lower ends of the outer walls of the four feet of the workbench, and corner protectors are fixedly connected to the four corners of the top wall of the workbench.

[0008] As a further description of the above technical solution: The workbench has a base plate fixedly connected to the left and right sides of its top wall, and the base plate has uprights fixedly connected to the front and rear sides of its top wall.

[0009] As a further description of the above technical solution: A display is fixedly connected to the front of the top wall of the workbench, and buttons are installed on the front of the outer wall of the display.

[0010] As a further description of the above technical solution: A sliding rod is fixedly connected to the upper rear side of the outer wall of the upright, and a slider is slidably connected to the middle of the outer wall of the sliding rod.

[0011] As a further description of the above technical solution: A sliding rod is fixedly connected to the upper rear side of the outer wall of the upright, and a slider is slidably connected to the middle of the outer wall of the sliding rod.

[0012] As a further description of the above technical solution: The bottom wall of the second slider is fixedly connected to a telescopic rod, and the bottom wall of the telescopic rod is fixedly connected to a suction cup.

[0013] This utility model has the following beneficial effects: 1. In this utility model, the quick-release mechanism is first fixed on the detection device. When pressure is applied downwards, the iron block will be squeezed inwards by the semi-circular groove. If the pressure is continued downwards, the iron block will be locked between the baffle and the semi-circular groove to achieve fixation. Then, the hollow column is pressed downwards. Since the iron rod is in a fixed state, the hollow column will drive the elliptical block to squeeze the spring downwards, so that it fits with the inner wall of the semi-circular groove. Then, the detection device is moved upwards to complete the quick disassembly.

[0014] 2. In this utility model, under the action of the spring, the clamping mechanism is in the unfolded state. Holding the first support rod pulls the rotating rod, and the rotating rod drives the second support rod to move inward, causing the outer shells one and two fixed on the first and second support rods to retract. Since the inner walls of the first and second outer shells are equipped with springs, when clamping an item, the inner walls of the two outer shells are squeezed, and the fixing plate two fixed inside the outer shell squeezes the fixing column. The fixing column squeezes the spring, which is installed on the inner wall of the hollow column two. The compression generates elastic force to achieve a stable clamping of the item. Attached Figure Description

[0015] Figure 1 This is a front view of the detachable probe card connection assembly proposed in this utility model; Figure 2 This is a perspective view of the detachable probe card connection assembly proposed in this utility model; Figure 3 This is a view showing the clamping mechanism of the detachable probe card connection assembly proposed in this utility model. Figure 4 This is a partial structural diagram of the clamping mechanism of the detachable probe card connection assembly proposed in this utility model; Figure 5 This is an exploded view of the quick-release mechanism of the detachable probe card connection assembly proposed in this utility model.

[0016] Legend: 1. Workbench; 2. Quick-release mechanism; 201. Hollow column one; 202. Elliptical block; 203. Iron rod one; 204. Iron rod two; 205. Spring one; 206. Baffle one; 207. Semicircular groove; 208. Baffle two; 209. Iron column; 210. Spring two; 211. Iron block; 3. Clamping mechanism; 301. Support rod one; 302. Rotating rod; 303. Spring three; 304. Support rod two; 305. Outer shell one 306. Outer shell II; 307. Fixing plate I; 308. Hollow column II; 309. Spring IV; 310. Fixing column; 311. Fixing plate II; 312. Handle; 4. Anti-slip pad; 5. Corner protector; 6. Base plate; 7. Slider I; 8. Suction cup; 9. Telescopic rod; 10. Slider II; 11. Slide rod I; 12. Detection device; 13. Button; 14. Display; 15. Upright pole; 16. Fixing block; 17. Slide rod II. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Reference Figure 1 , Figure 2 and Figure 5 An embodiment of this utility model is provided: a detachable probe card connection assembly, including a workbench 1, a quick-release mechanism 2 is provided on the top of the workbench 1 for quick release, and a clamping mechanism 3 is provided on the top of the workbench 1 for clamping. The quick-release mechanism 2 includes a second baffle 208, which is fixedly connected to the inner wall of the workbench 1. An iron column 209 is fixedly connected to the inner wall of the second baffle 208. A second spring 210 is fixedly connected to the bottom wall of the iron column 209. An iron block 211 is fixedly connected to the bottom of the second spring 210. A detection device 12 is installed on the top of the workbench 1. A fixing block 16 is fixedly connected to the front side of the outer wall of the detection device 12. An iron rod 203 is fixedly connected inside the fixing block 16. An iron rod 204 is fixedly connected to the middle of the outer wall of the iron rod 203. The iron rod 204 is slidably connected to the inner wall of the hollow column 201. An elliptical block 202 is fixedly connected to the bottom wall of workbench 1. A spring 205 is provided at the bottom of the outer wall of the iron rod 204. A baffle 206 is fixedly connected to the bottom wall of the spring 205. The baffle 206 is fixedly connected to the inner wall of the semi-circular groove 207. Anti-slip pads 4 are fixedly connected to the lower ends of the outer walls of the four feet of workbench 1. Corner guards 5 are fixedly connected to the four corners of the top wall of workbench 1. A display 14 is fixedly connected to the front side of the top wall of workbench 1. A button 13 is installed on the front side of the outer wall of display 14. The anti-slip pads 4 are used for anti-slip, the corner guards 5 are used to protect the corners of the table, the display 14 displays the status, and the button 13 is used for control. Specifically, the quick-release mechanism 2 is fixed to the detection device 12, and then pressed down. The iron block 211, under the squeezing action of the semi-circular groove 207, presses the spring 210 inward. Continuing to press the iron block 211 will lock it between the baffle 206 and the semi-circular groove 207, thus achieving fixation. Then, the hollow column 201 is pressed down. Since the iron rod 203 is fixed, the hollow column 201 will drive the elliptical block 202 downward, squeezing the spring 205 and fitting it with the inner wall of the semi-circular groove 207. Finally, the detection device 12 is moved upward to complete the quick disassembly. The anti-slip pad 4 is used for anti-slip, the corner protector 5 is used to protect the table corners, the display 14 is used to display the status, and the button 13 is responsible for the control function.

[0019] Reference Figure 1 , Figure 3 and Figure 4 The clamping mechanism 3 includes a housing 305, which is installed on the left side of the outer wall of the detection device 12. A support rod 301 is fixedly connected to the left side of the outer wall of the housing 305. A rotating rod 302 is rotatably connected to the bottom right side of the outer wall of the support rod 301. A gripping rod 312 is fixedly connected to the left side of the outer wall of the rotating rod 302. A support rod 304 is rotatably connected to the middle of the outer wall of the rotating rod 302. A spring 303 is fixedly connected to the upper end of the outer wall of the support rod 304 and is fixedly connected to the support rod 301. A housing 306 is fixedly connected to the lower left side of the outer wall of the support rod 304. A fixing plate 307 is fixedly connected to the right side of the inner wall of the housing 306. A gripping rod 312 is fixedly connected to the left side of the outer wall of the fixing plate 307. There is a hollow column 2 308, and a spring 4 309 is provided on the inner wall of the hollow column 2 308. A fixed column 310 is fixedly connected to the bottom wall of the spring 4 309. The fixed column 310 is slidably connected to the hollow column 2 308. A fixed plate 2 311 is fixedly connected to the left side of the outer wall of the fixed column 310. The fixed plate 2 311 is fixedly connected to the left side of the inner wall of the outer shell 2 306. A base plate 6 is fixedly connected to the left and right sides of the top wall of the workbench 1. A vertical rod 15 is fixedly connected to the front and rear sides of the top wall of the base plate 6. A sliding rod 11 is fixedly connected to the upper rear side of the outer wall of the vertical rod 15. A slider 1 7 is slidably connected to the middle of the outer wall of the sliding rod 11. The base plate 6 is responsible for fixing, the vertical rod 15 provides support, the sliding rod 11 provides a sliding track, and the slider 1 7 is responsible for sliding. Specifically, the base plate 6 is responsible for fixing, the upright 15 provides support, the slide bar 11 constructs a sliding track, and the slider 7 realizes the sliding function.

[0020] Reference Figure 1 , Figure 2 and Figure 3 A sliding rod 17 is fixedly connected to the left side of the outer wall of slider 1 7. A slider 10 is slidably connected to the middle of the outer wall of slider 17. A telescopic rod 9 is fixedly connected to the bottom wall of slider 10. A suction cup 8 is fixedly connected to the bottom wall of telescopic rod 9. Sliding rod 17 provides a sliding track, slider 10 is responsible for sliding, telescopic rod 9 is responsible for telescopic extension, and suction cup 8 is responsible for adsorption. Specifically, under the action of spring 303, clamping mechanism 3 is in an unfolded state. Holding support rod 1 301 and pulling support rod 312, support rod 312 drives support rod 2 304 to move inward, thereby causing outer shell 1 305 and outer shell 2 306 fixed on support rod 1 301 and support rod 2 304 to retract. Spring 4 309 is provided inside outer shell 1 305 and outer shell 2 306, so the inner walls of outer shell 1 305 and outer shell 2 306 will be squeezed during the clamping process. Then, fixing plate 2 311 fixed inside outer shell 1 305 and outer shell 2 306 squeezes fixing column 310, and fixing column 310 squeezes spring 4 309. Since spring 4 309 is installed on the inner wall of hollow column 2 308, the compressed spring forms elastic force to achieve clamping of the item. Slide rod 2 17 provides a sliding track, slider 2 10 is responsible for sliding, telescopic rod 9 undertakes the telescopic function, and suction cup 8 is responsible for adsorption.

[0021] Working principle: First, fix the quick-release mechanism 2 on the detection device 12, then press down. The iron block 211 will be squeezed inward by the semi-circular groove 207 and press the spring 210 inward. Continuing downward, the iron block 211 will be locked between the baffle 206 and the semi-circular groove 207 to achieve fixation. Then press down the hollow column 201. Because the iron rod 203 is fixed, the hollow column 201 will bring the elliptical block 202 down to squeeze the spring 205 and fit into the inner wall of the semi-circular groove 207, thereby moving the detection device 12 upward to complete the quick disassembly. Under the action of spring 303, clamping mechanism 3 is in the unfolded state. Hold support rod 1 301 and pull grip rod 312. Grip rod 312 drives support rod 2 304 to move inward, causing outer shell 1 305 and outer shell 2 306 fixed on support rod 1 301 and support rod 2 304 to retract. Since outer shell 1 305 and outer shell 2 306 are equipped with spring 4 309 inside, they will squeeze the inner wall of outer shell 1 305 and outer shell 2 306 when clamping. Then, fixing plate 2 311 fixed inside outer shell 1 305 and outer shell 2 306 squeezes fixing column 310. Fixing column 310 will squeeze spring 4 309. Spring 4 309 is installed on the inner wall of hollow column 2 308 and compresses the spring to form elastic force to clamp the item.

[0022] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A detachable probe card connection assembly, including a worktable (1), characterized in that: The top of the workbench (1) is provided with a quick-release mechanism (2), which is used for quick release. The top of the workbench (1) is provided with a clamping mechanism (3), which is used for clamping. The quick-release mechanism (2) includes a second baffle (208), which is fixedly connected to the inner wall of the workbench (1). An iron column (209) is fixedly connected to the inner wall of the second baffle (208). A second spring (210) is fixedly connected to the bottom wall of the iron column (209). An iron block (211) is fixedly connected to the bottom of the second spring (210). A detection device (12) is provided on the top of the workbench (1). A fixing block (16) is fixedly connected to the front side of the outer wall of the detection device (12). An iron rod 1 (203) is fixedly connected inside the core. An iron rod 2 (204) is fixedly connected to the middle of the outer wall of the iron rod 1 (203). The iron rod 2 (204) is slidably connected to the inner wall of the hollow column 1 (201). An elliptical block (202) is fixedly connected to the bottom wall of the hollow column 1 (201). A spring 1 (205) is provided at the bottom of the outer wall of the iron rod 2 (204). A baffle 1 (206) is fixedly connected to the bottom wall of the spring 1 (205). The baffle 1 (206) is fixedly connected to the inner wall of the semi-circular groove (207).

2. The detachable probe card connection assembly according to claim 1, characterized in that: The clamping mechanism (3) includes a housing (305), which is installed on the left side of the outer wall of the detection device (12). A support rod (301) is fixedly connected to the left side of the outer wall of the housing (305). A rotating rod (302) is rotatably connected to the bottom right side of the outer wall of the support rod (301). A grip rod (312) is fixedly connected to the left side of the outer wall of the rotating rod (302). A support rod (304) is rotatably connected to the middle of the outer wall of the rotating rod (302). A spring (303) is fixedly connected to the upper end of the outer wall of the support rod (304). The spring (303) is fixedly connected to the support rod (301). A second outer shell (306) is fixedly connected to the lower left side of the outer wall of the second outer shell (304). A first fixing plate (307) is fixedly connected to the right side of the inner wall of the second outer shell (306). A second hollow column (308) is fixedly connected to the left side of the outer wall of the first fixing plate (307). A fourth spring (309) is provided on the inner wall of the second hollow column (308). A fixing column (310) is fixedly connected to the bottom wall of the fourth spring (309). The fixing column (310) is slidably connected to the second hollow column (308). A second fixing plate (311) is fixedly connected to the left side of the outer wall of the second fixing column (310). The second fixing plate (311) is fixedly connected to the left side of the inner wall of the second outer shell (306).

3. The detachable probe card connection assembly according to claim 1, characterized in that: Anti-slip pads (4) are fixedly connected to the lower ends of the outer walls of the four feet of the workbench (1), and corner protectors (5) are fixedly connected to the four corners of the top wall of the workbench (1).

4. The detachable probe card connection assembly according to claim 1, characterized in that: The top wall of the workbench (1) is fixedly connected to the left and right sides of the bottom wall, and the top wall of the bottom wall (6) is fixedly connected to the front and rear sides of the bottom wall (6) with uprights (15).

5. The detachable probe card connection assembly according to claim 1, characterized in that: A display (14) is fixedly connected to the front side of the top wall of the workbench (1), and a button (13) is installed on the front side of the outer wall of the display (14).

6. The detachable probe card connection assembly according to claim 4, characterized in that: The upper rear side of the outer wall of the upright (15) is fixedly connected to a slide rod (11), and a slider (7) is slidably connected to the middle of the outer wall of the slide rod (11).

7. The detachable probe card connection assembly according to claim 6, characterized in that: The outer left side of the slider 1 (7) is fixedly connected to the slider 2 (17), and the middle part of the outer wall of the slider 2 (17) is slidably connected to the slider 2 (10).

8. The detachable probe card connection assembly according to claim 7, characterized in that: The bottom wall of the second slider (10) is fixedly connected to a telescopic rod (9), and the bottom wall of the telescopic rod (9) is fixedly connected to a suction cup (8).

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