Vertical probe card with anti-drop structure

Abstract

The utility model discloses a perpendicular probe card with prevent structure, belongs to perpendicular probe card field. The device includes the connecting plate of setting between the base plate and the fixed plate, and the connecting plate limits the distance between the base plate and the fixed plate, and the probe sliding distance is limited, and the inside of connecting plate is provided with a plurality of sliding connecting blocks, and two support springs are arranged in the inside of connecting block, and the flexible plate of support spring end portion contacts with the connecting portion of probe, and the inside of fixed plate is provided with the sliding arc plate support and limits the card block position, and when arc plate contacts with card block, can limit card block position, and when arc plate does not contact with card block, sliding connecting block makes flexible plate and connecting plate separate, and can draw out probe from the fixed plate position, and the fixed block of sliding is set again on the surface of base plate, and the fixed assembly is set between fixed block and base plate, and further limit probe position, make probe and wafer contact, and do not move in the base plate one side, guarantee the stability when using probe.

Description

Technical Field

[0001] This utility model relates to the field of vertical probe cards, and in particular to a vertical probe card with an anti-detachment structure. Background Technology

[0002] The vertical probe card is a probe card specifically designed for multi-die testing. Its core structure is that the probes are arranged vertically with the substrate, making it suitable for testing small-pitch, high-frequency chips.

[0003] Existing vertical probe cards with anti-detachment structures typically fix the probe tip to the substrate surface. They use a fixing plate and protective tube to limit the probe's movement range during use and protect the probe. However, vertical probe cards generally consist of multiple probes arranged in a regular pattern. The probes are confined between the substrate and the fixing plate. During use, it is difficult to avoid damage to one or more probes. Since the probes are fixed between the two plate components, it is difficult to replace or repair individual probes. In this case, the entire vertical probe card needs to be replaced, which results in a certain waste of resources.

[0004] In summary, when existing vertical probe cards with anti-detachment structures use two plate components to limit the probe's movement area and prevent it from falling off, the two plate components increase the difficulty of replacing or repairing individual probes, leading to the problem that if a single probe inside the vertical probe card is damaged, the entire vertical probe card needs to be replaced. Utility Model Content

[0005] This invention provides a vertical probe card with an anti-detachment structure, which solves the problem in the prior art where vertical probe cards with an anti-detachment structure have two plate components to limit the probe's movement area and prevent it from falling off. In such cases, the two plate components increase the difficulty of replacing or repairing individual probes, leading to the need to replace the entire vertical probe card if a single probe inside the vertical probe card is damaged.

[0006] A vertical probe holder with an anti-detachment structure includes a base plate and a fixing plate for defining several probe positions. Each probe includes a connecting portion and a locking block. An expansion mechanism is provided between the base plate and the fixing plate, the expansion mechanism comprising:

[0007] A connecting plate is fixedly disposed between a base plate and a fixed plate. Several connecting blocks are slidably disposed inside the connecting plate. Two support springs are fixedly connected inside each connecting block. A flexible plate is fixedly connected to the end of each support spring, and the flexible plate contacts the connecting part. Several arc plates are slidably connected inside the fixed plate. The cross-section of each arc plate is semi-circular, and the arc plates contact and support the locking block.

[0008] A fixing block is slidably disposed inside the connecting block and the substrate, and a fixing component for defining the probe position is disposed between the fixing block and the substrate.

[0009] Optionally, the fixing component includes several through slots formed on the surface of the substrate, the probes are all slidably disposed inside the through slots, several elastic plates are fixedly connected to the edges of the through slots, the elastic plates are arranged in a ring array at the edges of the through slots, and several conical slots are formed on the surface of the fixing block, the side of the conical slot away from the substrate is adapted to the probe, and the surface of the elastic plate is in contact with the conical slot.

[0010] Optionally, a plurality of sliding rods are fixedly connected to the surface of the fixing block, and sliding grooves are provided inside the base plate and the connecting plate. The sliding rods are adapted to the sliding grooves, and a sliding spring is fixedly connected between the sliding rods and the sliding grooves.

[0011] Optionally, a limiting plate is slidably connected to the surface of the fixing block, and a limiting shaft is fixedly connected to the end of the limiting plate. Corner grooves are provided on the surfaces of both the fixing block and the base plate, and the corner grooves are adapted to the limiting shaft.

[0012] Optionally, the corner groove is a semi-open groove, and the ends of the two corner grooves are fitted together.

[0013] Optionally, a plurality of connecting tubes are fixedly connected to the side of the substrate near the fixing plate, the edges of the connecting tubes all coincide with the edges of the through groove, a connecting spring is fixedly connected to the surface of the connecting tube, and the other end of the connecting spring contacts the locking block.

[0014] Optionally, each of the connecting pipes has a connecting groove on its surface, and the connecting groove is adapted to the connecting block.

[0015] Optionally, each of the connecting blocks has an extension rod and a fitting rod fixedly connected to its surface, and a connecting frame is fixedly connected between several of the extension rods. The connecting frame is slidably disposed inside the connecting plate; the surface of the fitting rod is in contact with the surface of the connecting groove.

[0016] Optionally, a drive frame is fixedly connected between several of the arc plates, and the drive frame is slidably disposed inside the connecting plate.

[0017] Optionally, a drive rod is fixedly connected between the drive frame and the connecting frame, and a drive shaft is slidably connected inside the connecting plate, with the drive shaft threadedly connected to the drive rod.

[0018] This utility model provides a vertical probe holder with an anti-detachment structure, including a connecting plate disposed between a substrate and a fixing plate. The connecting plate defines the distance between the substrate and the fixing plate, thereby limiting the probe sliding distance. Several sliding connecting blocks are disposed inside the connecting plate, and two support springs are disposed inside the connecting blocks. Flexible plates at the ends of the support springs can contact the connecting part of the probe. When the probe is used and undergoes lateral movement, the two support springs can buffer and disperse the force on the probe. A sliding arc plate is disposed inside the fixing plate, supporting and defining the position of the locking block. When the arc plate contacts the locking block, it defines the locking block position. When the arc plate does not contact the locking block, the sliding connecting block disengages the flexible plate from the connecting plate, allowing the probe to be pulled out from the fixing plate position for replacement. The fixing plate position restricts the probe position through the arc plate and the locking blocks. A sliding fixing block is further disposed on the substrate surface, and a fixing component is disposed between the fixing block and the substrate to further define the probe position, ensuring that the probe remains stationary on one side of the substrate after contacting the wafer, thus guaranteeing probe stability during use. Attached Figure Description

[0019] Figure 1 A schematic diagram of a vertical probe card structure with an anti-detachment feature provided by this utility model;

[0020] Figure 2 A three-dimensional structural view of the fixing component provided by this utility model;

[0021] Figure 3 A three-dimensional sectional view of the arc plate provided by this utility model;

[0022] Figure 4 Provided by this utility model Figure 3 Enlarged view of the local structure at point A;

[0023] Figure 5 An exploded three-dimensional view of the flexible plate provided by this utility model.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Substrate; 2. Fixing plate;

[0026] 31. Connecting plate; 32. Connecting block; 33. Supporting spring; 34. Flexible plate; 35. Arc plate; 36. Fixing block;

[0027] 41. Elastic plate; 42. Conical groove; 43. Sliding rod; 44. Sliding spring; 45. Limiting plate; 46. Limiting shaft; 47. Corner groove;

[0028] 51. Connecting pipe; 52. Connecting spring; 53. Connecting groove;

[0029] 61. Extension rod; 62. Adhesive rod; 63. Connecting frame; 64. Drive frame; 65. Drive rod; 66. Drive shaft. Detailed Implementation

[0030] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.

[0031] like Figures 1 to 5 As shown, the present invention provides a vertical probe card with an anti-detachment structure, including a base plate 1 and a fixing plate 2 for defining the positions of a plurality of probes, wherein the probes include a connecting part and a locking block;

[0032] It should be noted that the probe structure is the same as the internal probe structure of the patent title: A Vertical Probe Card with Anti-detachment Structure (Patent Publication No.: CN221572654U), including a needle tail, a connecting part, a needle head, a card block, and a ball (not shown in the figure).

[0033] An expansion mechanism is provided between the substrate 1 and the fixing plate 2, the expansion mechanism comprising:

[0034] A connecting plate 31 is fixedly disposed between a base plate 1 and a fixing plate 2. A plurality of connecting blocks 32 are slidably disposed inside the connecting plate 31. Two support springs 33 are fixedly connected inside each connecting block 32. A flexible plate 34 is fixedly connected to the end of each support spring 33, and the flexible plate 34 contacts the connecting part. A plurality of arc plates 35 are slidably connected inside the fixing plate 2. The cross-section of each arc plate 35 is semi-circular, and the arc plates 35 contact and support the locking block.

[0035] A fixing block 36 is slidably disposed inside the connecting block 32 and the substrate 1, and a fixing component for defining the probe position is disposed between the fixing block 36 and the substrate 1.

[0036] In summary, the present invention provides a vertical probe clip with an anti-detachment structure, comprising a connecting plate 31 disposed between a substrate 1 and a fixing plate 2. The connecting plate 31 defines the distance between the substrate 1 and the fixing plate 2, thereby defining the probe sliding distance. The connecting plate 31 contains a plurality of sliding connecting blocks 32, and each connecting block 32 contains two support springs 33. Flexible plates 34 at the ends of the support springs 33 can contact the connecting portion of the probe. When the probe is used and undergoes lateral movement, the two support springs 33 can buffer and disperse the force on the probe. Furthermore, a sliding arc plate is disposed inside the fixing plate 2. 35. The arc plate 35 supports and limits the position of the locking block. When the arc plate 35 is in contact with the locking block, it can limit the position of the locking block. When the arc plate 35 is not in contact with the locking block, the sliding connecting block 32 can be used to separate the flexible plate 34 from the connecting plate 31, so that the probe can be pulled out from the fixed plate 2 position for probe replacement. The fixed plate 2 position limits the position of the probe through the arc plate 35 and the locking block. A sliding fixed block 36 is set on the surface of the substrate 1. A fixing component is set between the fixed block 36 and the substrate 1 to further limit the position of the probe, so that after the probe contacts the wafer, it will not move on one side of the substrate 1, ensuring the stability of the probe during use.

[0037] In some specific embodiments, the fixing component includes several through slots formed on the surface of the substrate 1. The probes are all slidably disposed inside the through slots. Several elastic plates 41 are fixedly connected to the edges of the through slots. The elastic plates 41 are arranged in a circular array at the edges of the through slots. Several conical slots 42 are formed on the surface of the fixing block 36. The side of the conical slots 42 away from the substrate 1 is adapted to the probes. The surfaces of the elastic plates 41 are in contact with the conical slots 42. The elastic plates 41 are provided so that they can converge under the action of the conical slots 42, causing the surfaces of the elastic plates 41 to be in contact with the probes, thereby limiting the position of the probes.

[0038] In a further embodiment, a plurality of sliding rods 43 are fixedly connected to the surface of the fixing block 36, and sliding grooves are provided inside the base plate 1 and the connecting plate 31. The sliding rods 43 are adapted to the sliding grooves, and a sliding spring 44 is fixedly connected between the sliding rods 43 and the sliding grooves.

[0039] In a further embodiment, a limiting plate 45 is slidably connected to the surface of the fixing block 36, and a limiting shaft 46 is fixedly connected to the end of the limiting plate 45. Corner grooves 47 are provided on the surfaces of both the fixing block 36 and the base plate 1. The corner grooves 47 are adapted to the limiting shaft 46. The corner grooves 47 are semi-open grooves, and the ends of the two corner grooves 47 are in contact.

[0040] In some specific implementations, a plurality of connecting tubes 51 are fixedly connected to the side of the substrate 1 near the fixing plate 2. The edges of the connecting tubes 51 coincide with the edges of the through grooves. A connecting spring 52 is fixedly connected to the surface of the connecting tubes 51, and the other end of the connecting spring 52 contacts the locking block.

[0041] In some specific implementations, the surface of the connecting pipe 51 is provided with a connecting groove 53, which is adapted to the connecting block 32;

[0042] In some specific implementations, each of the connecting blocks 32 is fixedly connected to an extension rod 61 and a fitting rod 62, and a connecting frame 63 is fixedly connected between a plurality of the extension rods 61. The connecting frame 63 is slidably disposed inside the connecting plate 31; the surface of the fitting rod 62 is in contact with the surface of the connecting groove 53.

[0043] In some specific implementations, a drive frame 64 is fixedly connected between several of the arc plates 35, and the drive frame 64 is slidably disposed inside the connecting plate 31;

[0044] In a further embodiment, a drive rod 65 is fixedly connected between the drive frame 64 and the connecting frame 63, and a drive shaft 66 is slidably connected inside the connecting plate 31, with the drive shaft 66 threadedly connected to the drive rod 65.

[0045] The working principle of this utility model:

[0046] When the probe needs to be replaced or repaired, first rotate the drive shaft 66 to make the drive rod 65 slide inside the connecting plate 31. The drive rod 65 slides, which drives the drive frame 64 and the connecting frame 63 to slide. The drive frame 64 and the connecting frame 63 drive the arc plate 35 and the extension rod 61 to slide. The extension rod 61 pulls the connecting block 32 to slide, which makes the flexible plate 34 disengage from the connecting part. Then rotate the limiting plate 45 to make the limiting shaft 46 slide the corner groove 47, which pulls the fixing block 36 to disengage from the base plate 1. The probe can then be pulled out from the position of the fixing plate 2.

[0047] The above-disclosed embodiments are only a few specific examples of the present utility model. However, the embodiments of the present utility model are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the protection scope of the present utility model.

Claims

1. A vertical probe holder with an anti-detachment structure, comprising a base plate (1) for defining the positions of a plurality of probes and a fixing plate (2), wherein the probes include a connecting portion and a locking block; characterized in that, An expansion mechanism is provided between the substrate (1) and the fixing plate (2), the expansion mechanism comprising: A connecting plate (31) is fixedly disposed between a base plate (1) and a fixing plate (2). Several connecting blocks (32) are slidably disposed inside the connecting plate (31). Two support springs (33) are fixedly connected inside each connecting block (32). A flexible plate (34) is fixedly connected to the end of each support spring (33). The flexible plate (34) contacts the connecting part. Several arc plates (35) are slidably connected inside the fixing plate (2). The cross-section of the arc plate (35) is semi-circular. The arc plate (35) contacts and supports the card block. A fixing block (36) is slidably disposed inside the connecting block (32) and the substrate (1), and a fixing component for defining the probe position is disposed between the fixing block (36) and the substrate (1).

2. A vertical probe card with an anti-detachment structure as described in claim 1, characterized in that, The fixing component includes several through slots formed on the surface of the substrate (1). The probes are all slidably disposed inside the through slots. Several elastic plates (41) are fixedly connected to the edges of the through slots. The elastic plates (41) are arranged in a ring array at the edges of the through slots. Several conical slots (42) are formed on the surface of the fixing block (36). The side of the conical slot (42) away from the substrate (1) is adapted to the probe. The surface of the elastic plate (41) is in contact with the conical slot (42).

3. A vertical probe card with an anti-detachment structure as described in claim 1, characterized in that, The surface of the fixed block (36) is fixedly connected with a plurality of sliding rods (43). The base plate (1) and the connecting plate (31) are both provided with sliding grooves. The sliding rods (43) are adapted to the sliding grooves. A sliding spring (44) is fixedly connected between the sliding rods (43) and the sliding grooves.

4. A vertical probe card with an anti-detachment structure as described in claim 1, characterized in that, The fixed block (36) is slidably connected to a limiting plate (45), and the end of the limiting plate (45) is fixedly connected to a limiting shaft (46). The fixed block (36) and the substrate (1) are both provided with corner grooves (47), and the corner grooves (47) are adapted to the limiting shafts (46).

5. A vertical probe card with an anti-detachment structure as described in claim 4, characterized in that, The corner groove (47) is a semi-open groove, and the ends of the two corner grooves (47) are fitted together.

6. A vertical probe card with an anti-detachment structure as described in claim 1, characterized in that, A plurality of connecting tubes (51) are fixedly connected to the side of the substrate (1) near the fixing plate (2). The edges of the connecting tubes (51) coincide with the edges of the through grooves. A connecting spring (52) is fixedly connected to the surface of the connecting tubes (51). The other end of the connecting spring (52) contacts the locking block.

7. A vertical probe card with an anti-detachment structure as described in claim 6, characterized in that, The surface of each connecting pipe (51) is provided with a connecting groove (53), which is adapted to the connecting block (32).

8. A vertical probe card with an anti-detachment structure as described in claim 1, characterized in that, The surface of each connecting block (32) is fixedly connected with an extension rod (61) and a fitting rod (62), and a connecting frame (63) is fixedly connected between several of the extension rods (61). The connecting frame (63) is slidably disposed inside the connecting plate (31); the surface of the fitting rod (62) is in contact with the surface of the connecting groove (53).

9. A vertical probe card with an anti-detachment structure as described in claim 8, characterized in that, A drive frame (64) is fixedly connected between several of the arc plates (35), and the drive frame (64) is slidably disposed inside the connecting plate (31).

10. A vertical probe card with an anti-detachment structure as described in claim 9, characterized in that, A drive rod (65) is fixedly connected between the drive frame (64) and the connecting frame (63), and a drive shaft (66) is slidably connected inside the connecting plate (31). The drive shaft (66) is threadedly connected to the drive rod (65).

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