Cleaning device for gas guide cylinder of single crystal furnace

Abstract

The utility model discloses a cleaning device for a gas guide cylinder of a single crystal furnace. The cleaning device comprises a cleaning part and a fixing part, wherein the cleaning part comprises a handle, a connecting rod with one end fixedly connected to the handle and a cleaning cutter fixedly connected to the other end of the connecting rod; the cleaning cutter is in a round cake shape and is coaxially and fixedly connected with the connecting rod; the fixing part comprises a fixing cylinder and a supporting cylinder; wherein the fixed barrel is in a cylindrical barrel shape; an annular boss is arranged on the inner circumferential surface of the bottom of the fixed cylinder; the upper end face of the supporting cylinder is coaxially and fixedly connected with the lower end face of the fixing cylinder. The fixing part can be used for stably placing and fixing the single crystal furnace gas guide cylinder, so that the inner wall of the single crystal furnace gas guide cylinder is prevented from being scratched when the cleaning cutter is in direct contact with the inner wall of the single crystal furnace gas guide cylinder for cleaning.

Description

Technical Field

[0001] This utility model relates to a cleaning device for the gas guide tube of a single crystal furnace. Background Technology

[0002] In the production of monocrystalline silicon, the gas guide tube is exposed to a high-temperature environment of 1600–1800℃ for extended periods, making it prone to the adhesion of sintered materials such as Si and SiO2 to its inner wall. The accumulation of these sintered materials not only affects the normal operation of the gas guide tube and reduces production efficiency but may also adversely impact the quality of the produced monocrystalline silicon. However, current industry methods for cleaning the gas guide tube have many problems. Existing cleaning methods mainly rely on manual tapping or using simple tools to vibrate and knock off the sintered materials. This method is not only inefficient but also prone to splattering of sintered materials during operation, posing a significant safety hazard due to the difficulty in controlling the tapping force and method. Furthermore, the difficulty in controlling the tapping force and method can easily cause physical damage to the gas guide tube, shortening its service life and creating substantial safety risks. Utility Model Content

[0003] In view of this, one objective of this utility model is to provide a single crystal furnace gas tube cleaning device. The fixing part of the single crystal furnace gas tube cleaning device can stably place and fix the single crystal furnace gas tube, thereby avoiding the cleaning blade from directly contacting the inner wall of the single crystal furnace gas tube and scratching the inner wall of the single crystal furnace gas tube during cleaning.

[0004] The present invention achieves the above objectives by adopting the following technical solution.

[0005] This utility model provides a single crystal furnace gas guide tube cleaning device, comprising:

[0006] Cleaning section and fixing section; among which,

[0007] The cleaning unit includes a handle, a connecting rod fixedly connected to one end of the handle, and a cleaning blade fixedly connected to the other end of the connecting rod;

[0008] The cleaning tool is disc-shaped and is coaxially and fixedly connected to the connecting rod; the diameter of the cleaning tool is smaller than the minimum inner diameter of the gas guide tube of the single crystal furnace.

[0009] The fixing part includes a fixing cylinder and a supporting cylinder; wherein, the fixing cylinder is cylindrical, and its inner diameter is larger than the maximum outer diameter of the single crystal furnace gas guide cylinder; an annular boss is provided on the bottom inner circumferential surface of the fixing cylinder; the inner diameter of the annular boss is smaller than the outer diameter of any end of the single crystal furnace gas guide cylinder.

[0010] The support cylinder is a frustum-shaped cylinder, with its upper end face coaxially and fixedly connected to the lower end face of the fixed cylinder. This design ensures that the fixed part can be stably placed on any platform or ground, and also helps to prevent sintered material from splashing when cleaning the gas guide tube of the single crystal furnace.

[0011] According to the single crystal furnace gas guide tube cleaning device of this utility model, preferably, the handle is cylindrical, with its middle part fixedly connected to one end of the connecting rod. The difference between the length of the handle and the outer diameter of the fixed cylinder can be greater than or equal to 25mm, preferably 25-40mm. This facilitates the handle resting on the fixed cylinder.

[0012] In this invention, both the handle and the connecting rod can be hollow structures, which can reduce the weight of the cleaning part, make it easier to clean the gas guide tube of the single crystal furnace, and save raw materials.

[0013] Both the handle and the connecting rod are preferably made of stainless steel with corrosion resistance and excellent mechanical properties, such as, but not limited to, at least one of 304, 316, 316L, Incoloy 825, and Incoloy 925 stainless steel, with at least one of 316, 316L, and Incoloy 925 stainless steel being preferred.

[0014] According to the single crystal furnace gas duct cleaning device of this utility model, preferably, the surface of the handle is an anti-slip surface. The anti-slip surface can be textured or raised on the surface of the handle. The texture or raised surface can be provided by direct engraving or by placing anti-slip stickers, preferably by engraving texture or raised surface on the handle.

[0015] In this invention, the cleaning tool is preferably a cemented carbide with high strength, wear resistance and high temperature resistance, such as, but not limited to, at least one of YG3, YG6, YG8, YT5, YT15, YW1 and YW2 alloys, preferably at least one of YG6, YG8, YT15 and YW2 alloys.

[0016] According to the single crystal furnace gas guide tube cleaning device of this utility model, preferably, a pair of fixing grooves are symmetrically arranged on the upper end surface of the fixing tube relative to the central axis of the fixing tube; the fixing grooves are arc-shaped and used to support the handle. In this utility model, the arc shape of the fixing grooves is preferably coaxial with the handle, which is beneficial to the fitting of the fixing grooves and the handle, so that the handle can be more stably placed on the fixing grooves.

[0017] According to the single crystal furnace gas guide tube cleaning device of this utility model, preferably, the outer edge of the cleaning blade is rounded, which can avoid the cleaning blade from scratching the inner wall of the single crystal furnace gas guide tube during the cleaning process, and also helps to enhance its hardness and wear resistance.

[0018] According to the single crystal furnace gas guide tube cleaning device of this utility model, preferably, the difference between the minimum inner diameter of the single crystal furnace gas guide tube and the diameter of the cleaning tool can be greater than or equal to 5mm, preferably 5 to 10mm.

[0019] According to the single crystal furnace gas guide tube cleaning device of this utility model, preferably, the difference between the inner diameter of the fixed tube and the maximum outer diameter of the single crystal furnace gas guide tube can be greater than or equal to 5mm, preferably 5 to 10mm.

[0020] According to the single crystal furnace gas guide tube cleaning device of this utility model, preferably, the difference between the outer diameter of any end of the single crystal furnace gas guide tube and the inner diameter of the annular boss can be greater than or equal to 8mm, preferably 8-12mm. The annular boss can stably fix the single crystal furnace gas guide tube in the fixing part, effectively preventing the gas guide tube from shaking or displacing during the cleaning process.

[0021] In this invention, the thickness of the fixing cylinder can be 6–15 mm, preferably 8–12 mm. Such a thin-walled structure can effectively reduce the weight of the device and improve its portability.

[0022] According to the single crystal furnace gas guide tube cleaning device of this utility model, preferably, the upper end face of the support tube and the lower end face of the fixed tube have the same dimensions. This can save raw materials while ensuring that the support tube achieves effective support.

[0023] Both the fixed cylinder and the support cylinder are preferably made of stainless steel with corrosion resistance and excellent mechanical properties, such as, but not limited to, at least one of 304, 316, 316L, Incoloy 825, and Incoloy 925 stainless steel, preferably at least one of 316, 316L, and Incoloy 925 stainless steel.

[0024] In this invention, the inner and outer surfaces of both the fixing cylinder and the supporting cylinder are preferably polished to make them smooth and burr-free, which helps to reduce wear and improve corrosion resistance.

[0025] According to the single crystal furnace gas guide tube cleaning device of this utility model, preferably, the fixing connection method between the handle and the connecting rod can be selected from at least one of threaded connection, welding, riveting, pin connection, and snap-fit ​​connection, and is more preferably at least one of threaded connection, welding, and snap-fit ​​connection. The fixing connection method between the connecting rod and the cleaning tool can be selected from at least one of threaded connection, welding, riveting, pin connection, and snap-fit ​​connection, and is more preferably at least one of threaded connection, welding, and snap-fit ​​connection.

[0026] According to the single crystal furnace gas guide tube cleaning device of the present invention, preferably, the fixing connection method between the fixed tube and the support tube can be selected from at least one of threaded connection, welding, riveting, pin connection, snap connection, and flange connection, and preferably at least one of welding, riveting, and flange connection.

[0027] This invention relates to a single-crystal furnace gas duct cleaning device. The movement of the handle, via a connecting rod, provides power and operational control to the cleaning blades, allowing the blades to directly contact the inner wall of the gas duct for cleaning. The fixing part of the device stably positions and secures the gas duct, preventing the cleaning blades from directly contacting and scratching the inner wall of the gas duct during cleaning. The cleaning part of this invention can be stably placed within the fixing part for easy storage. Attached Figure Description

[0028] Figure 1 This is a front view of the single crystal furnace gas guide tube cleaning device of this utility model;

[0029] Figure 2 This is a schematic diagram of the single crystal furnace gas guide tube cleaning device of this utility model;

[0030] Figure 3 This is a schematic axial cross-sectional view of the single crystal furnace gas guide tube cleaning device of this utility model;

[0031] Figure 4 This is a schematic diagram of the assembly of the single crystal furnace gas guide tube cleaning device of this utility model.

[0032] Figure Labels

[0033] 1-Cleaning section, 11-Handle, 12-Connecting rod, 13-Cleaning tool;

[0034] 2-Fixing part, 21-Fixing cylinder, 22-Supporting cylinder, 23-Annular boss, 24-Fixing groove. Detailed Implementation

[0035] The present invention will be further described below with reference to specific embodiments, but the scope of protection of the present invention is not limited thereto.

[0036] Example 1

[0037] In this embodiment, the gas guide tube of the single crystal furnace is cylindrical, with a minimum inner diameter of 140mm, a maximum outer diameter of 170mm, and outer diameters of 160mm at both ends.

[0038] like Figures 1-3 As shown, the single crystal furnace gas guide tube cleaning device of this utility model includes a cleaning part 1 and a fixing part 2. The cleaning part 1 includes a handle 11, a connecting rod 12 fixedly connected to the handle 11 at one end, and a cleaning cutter 13 fixedly connected to the other end of the connecting rod 12. The cleaning cutter 13 is disc-shaped and is coaxially fixedly connected to the connecting rod 12. The diameter of the cleaning cutter 13 is smaller than the minimum inner diameter of the single crystal furnace gas guide tube, and the difference between the minimum inner diameter of the single crystal furnace gas guide tube and the diameter of the cleaning cutter 13 is 6 mm.

[0039] The handle 11 is cylindrical, with its middle part fixedly connected to one end of the connecting rod 12. The difference between the length of the handle 11 and the outer diameter of the fixed cylinder 21 is 30 mm.

[0040] Both the handle 11 and the connecting rod 12 are hollow structures. Both the handle 11 and the connecting rod 12 are made of 316L stainless steel.

[0041] The surface of the handle 11 is machined with an anti-slip texture by a CNC milling machine, and the texture depth and spacing are uniform.

[0042] The cleaning tool 13 is made of YG8 alloy. The outer edge of the cleaning tool 13 has a smooth transition.

[0043] The handle 11 and the connecting rod 12 are fixedly connected by welding. The connecting rod 12 and the cleaning tool 13 are fixedly connected by welding.

[0044] The fixing part 2 includes a fixing cylinder 21 and a supporting cylinder 22. The fixing cylinder 21 is cylindrical, and its inner diameter is larger than the maximum outer diameter of the single crystal furnace gas guide cylinder. The difference between the inner diameter of the fixing cylinder 21 and the maximum outer diameter of the single crystal furnace gas guide cylinder is 6 mm. An annular boss 23 is provided on the inner circumferential surface of the bottom of the fixing cylinder 21. The inner diameter of the annular boss 23 is smaller than the outer diameter of any end of the single crystal furnace gas guide cylinder. The difference between the outer diameter of any end of the single crystal furnace gas guide cylinder and the inner diameter of the annular boss 23 is 10 mm. The thickness of the fixing cylinder is 10 mm.

[0045] The support cylinder 22 is a frustum-shaped cylinder, and its upper end face is coaxially and fixedly connected to the lower end face of the fixed cylinder 21. The upper end face of the support cylinder 22 and the lower end face of the fixed cylinder 21 have the same dimensions. Both the fixed cylinder 21 and the support cylinder 22 are made of 316L stainless steel.

[0046] The inner and outer surfaces of the fixed cylinder 21 and the support cylinder 22 are polished to make them smooth and burr-free.

[0047] The fixed cylinder 21 and the support cylinder 22 are fixedly connected by welding.

[0048] like Figure 2 As shown, a pair of fixing grooves 24 are symmetrically arranged on the upper end surface of the fixing cylinder 21 relative to the central axis of the fixing cylinder 21. The fixing grooves 24 are arc-shaped, and the arc shape of the fixing grooves 24 is coaxial with the handle 11.

[0049] like Figure 2 and 3As shown, when using the single crystal furnace gas duct cleaning device of this embodiment to clean the sintered material inside the single crystal furnace gas duct, the operator first fixes the single crystal furnace gas duct cleaning device to the work platform via the support cylinder 22 of the fixing part 2. Then, the operator holds the handle 11 to remove the cleaning part 1. Next, the single crystal furnace gas duct is inserted into the fixing cylinder 21 through the opening formed on the upper end face of the fixing cylinder 21, and one end of the single crystal furnace gas duct is placed on the annular boss 23 of the fixing cylinder 21. The operator holds the handle 11 to insert the cleaning part 1 into the single crystal furnace gas duct, so that the cleaning blade 13 contacts the sintered material on the inner wall of the single crystal furnace gas duct. By moving the handle 11 up and down, the power is transmitted to the cleaning blade 13 through the connecting rod 12, driving the cleaning blade 13 to clean the sintered material on the inner wall of the single crystal furnace gas duct.

[0050] if Figure 4 As shown, after the operator cleans the sintered material on the inner wall of the single crystal furnace gas guide tube, the single crystal furnace gas guide tube is taken out, the fixing part 2 is placed on the ground through the support tube 22, and then the cleaning part 1 is inserted into the fixing tube 21. The handle 11 is placed on the upper end face of the fixing tube 21 through the fixing groove 24 to complete the storage of the cleaning part 1.

[0051] This utility model is not limited to the above-described embodiments. Any modifications, improvements, or substitutions that can be conceived by those skilled in the art without departing from the essential content of this utility model shall fall within the scope of this utility model.

Claims

1. A single crystal furnace gas guide tube cleaning device, characterized by, include: Cleaning section and fixing section; among which, The cleaning unit includes a handle, a connecting rod fixedly connected to one end of the handle, and a cleaning blade fixedly connected to the other end of the connecting rod; The cleaning tool is disc-shaped and is coaxially and fixedly connected to the connecting rod; the diameter of the cleaning tool is smaller than the minimum inner diameter of the gas guide tube of the single crystal furnace. The fixing part includes a fixing cylinder and a supporting cylinder; wherein, the fixing cylinder is cylindrical, and its inner diameter is larger than the maximum outer diameter of the single crystal furnace gas guide cylinder; an annular boss is provided on the bottom inner circumferential surface of the fixing cylinder; the inner diameter of the annular boss is smaller than the outer diameter of any end of the single crystal furnace gas guide cylinder. The support cylinder is a frustum-shaped cylinder, and its upper end face is coaxially and fixedly connected to the lower end face of the fixed cylinder.

2. The single crystal furnace gas guide tube cleaning device according to claim 1, characterized by, The handle is cylindrical, with its middle part fixedly connected to one end of the connecting rod; the difference between the length of the handle and the outer diameter of the fixed cylinder is greater than or equal to 25mm.

3. The single crystal furnace gas guide tube cleaning device of claim 2, wherein, On the upper end face of the fixed cylinder, a pair of fixing grooves are symmetrically arranged relative to the central axis of the fixed cylinder; the fixing grooves are arc-shaped and are used to hold the handle.

4. The single crystal furnace gas guide tube cleaning device of claim 1, wherein, The outer edge of the cleaning tool has a smooth transition.

5. The single crystal furnace gas guide tube cleaning device of claim 1, wherein, The difference between the minimum inner diameter of the single crystal furnace gas guide tube and the diameter of the cleaning tool is greater than or equal to 5 mm.

6. The single crystal furnace gas guide tube cleaning apparatus of claim 1, wherein The difference between the inner diameter of the fixed cylinder and the maximum outer diameter of the single crystal furnace gas guide cylinder is greater than or equal to 5 mm; the difference between the outer diameter of any end of the single crystal furnace gas guide cylinder and the inner diameter of the annular boss is greater than or equal to 8 mm.

7. The single crystal furnace gas guide tube cleaning apparatus of claim 1, wherein The upper end face of the support cylinder has the same dimensions as the lower end face of the fixed cylinder.

8. The single crystal furnace gas guide tube cleaning apparatus of claim 1, wherein, The fixing connection method between the handle and the connecting rod is selected from at least one of threaded connection, welding, riveting, pin connection, and snap-fit ​​connection; the fixing connection method between the connecting rod and the cleaning tool is selected from at least one of threaded connection, welding, riveting, pin connection, and snap-fit ​​connection.

9. The single crystal furnace gas guide tube cleaning apparatus of claim 1, wherein The fixing connection method between the fixed cylinder and the support cylinder is selected from at least one of the following: threaded connection, welding, riveting, pin connection, snap-fit ​​connection, and flange connection.

10. The single crystal furnace gas guide tube cleaning apparatus of claim 1, wherein, The surface of the handle is a non-slip surface.

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