Multifunctional electron beam heating sample table

Abstract

The utility model provides a multifunctional electron beam heating sample table, which comprises a base, an electron beam emitting device, an electron beam receiving device, a sample receiving device, a sample receiving device and a sample receiving device, and is characterized in that an accommodating space is arranged in the middle of the base; ceramic chips are arranged on the side wall and the bottom of the accommodating space, so that electron beams emitted by the electron beam emitting device are led out from the opening; the electric brush is electrically connected to the sample bearing device, and the electric brush is used for electrifying and heating the sample; and the low-temperature connecting piece is used for connecting a low-temperature device and the base, and the low-temperature device is used for cooling the base. According to the multifunctional electron beam heating sample table, the base is cooled to about 120 K through liquid nitrogen, then the sample support is cooled to about 130 K, and continuous temperature change of the temperature of the sample support between 130 K and 1300 K is achieved by combining the three modes of radiation heating, electron beam heating and liquid nitrogen cooling.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a multifunctional electron beam heated sample stage. Background Technology

[0002] In molecular beam epitaxy (MBE) experiments, different growth temperatures need to be selected depending on the growth system. Sample temperature control is required; sometimes cooling is necessary, and sometimes heating is required, depending on the experimental requirements. Before MBE growth, substrate pretreatment is often necessary, typically achieved by heating to a certain temperature to remove adsorbed impurities, gases, oxide layers, etc., from the substrate surface. Furthermore, sample analysis often requires changing the sample temperature for different experiments. To meet these needs, a sample stage capable of both cooling and heating is required. It should be able to achieve the lowest possible low temperature and the highest possible high temperature. Utility Model Content

[0003] To address some or all of the problems in the existing technology, this utility model provides a multifunctional electron beam heated sample stage, comprising:

[0004] A base, wherein a receiving space is arranged in the middle of the base, and an electron beam emitting device is arranged in the receiving space;

[0005] Ceramic plates are arranged on the sidewalls and bottom of the accommodating space so that the electron beam emitted by the electron beam emitting device can be led out through the opening;

[0006] A brush, electrically connected to a sample carrier, is used to heat the sample; and

[0007] A low-temperature connector is used to connect a low-temperature device to the base, and the low-temperature device is used to cool the base.

[0008] Furthermore, the brush is fixed to the base by a brush fixing molybdenum screw, and an insulating ceramic ring is arranged between the brush fixing molybdenum screw and the base.

[0009] Furthermore, the low-temperature connector is connected to the base via a contact copper block;

[0010] The cryogenic device includes a liquid nitrogen connecting copper block, a sapphire gasket, a liquid nitrogen cooling block, and a liquid nitrogen transmission pipe. The liquid nitrogen connecting copper block and the liquid nitrogen cooling block are connected by the sapphire gasket. Liquid nitrogen is introduced into the liquid nitrogen transmission pipe and passes sequentially through the liquid nitrogen cooling block, the sapphire gasket, the liquid nitrogen connecting copper block, the cryogenic connector, and the contact copper block, thereby cooling the base.

[0011] Furthermore, the multifunctional electron beam heated sample stage also includes:

[0012] A clamping tool is arranged above both sides of the accommodating space. The clamping tool is used to clamp the sample carrying device. The clamping tool includes a spring and a spring limiter. The spring is used to fix the sample carrying device, and the spring limiter is used to limit the opening angle of the spring.

[0013] A base for supporting the pedestal;

[0014] A heat insulation sheet, disposed between the base and the subbase, to insulate the base and subbase from each other; and

[0015] A base connector is used to fix the sample stage to an experimental platform or equipment.

[0016] Furthermore, the base, the heat insulation sheet, the base plate, and the base connector are arranged face to face in sequence;

[0017] A screw rod passes through and connects the base, the heat insulation sheet, and the base plate, and an insulating ceramic ring is arranged between the screw rod, the heat insulation sheet, and the base plate;

[0018] The base and the base connector are connected by screws.

[0019] Furthermore, the electron beam emitting device is a slender filament that is bent into multiple continuous S-shapes, and the filament is held and fixed by a filament fixing ceramic clamp;

[0020] One end of the filament is fixed to an insulating ceramic sheet, and the other end of the filament is arranged in an insulating ceramic tube and electrically connected to the filament terminal screw. The filament terminal screw is fixed by a molybdenum nut, and an insulating ceramic ring is arranged between the filament terminal screw and the base.

[0021] Furthermore, the sample support device is a flat support, which is a flat metal plate on which the sample is arranged. The material of the flat support is molybdenum.

[0022] Furthermore, the sample carrier is a DC-heated sample holder;

[0023] The DC-heated sample holder includes a DC holder base, an insulating ceramic ring, a molybdenum screw, a molybdenum gasket, a molybdenum sample pressing plate, a molybdenum sample base, a conductive block, and a brush contact plate.

[0024] The molybdenum screw passes through and connects the sample molybdenum sheet, the sample molybdenum base, the molybdenum gasket, and the brush contact plate;

[0025] The sample is held between the molybdenum sample press and the molybdenum sample base. The molybdenum sample base is electrically connected to the brush contact piece through the molybdenum pad or the conductive block. The brush contact piece is electrically connected to the brush.

[0026] Current is passed between the brushes, or between the brushes and the base, and the current is used to heat the sample.

[0027] Furthermore, the sample carrier is a sample holder with electron beam heating function;

[0028] The sample holder with electron beam heating function includes an electron beam holder base, a molybdenum screw, a molybdenum sample pressing plate, a molybdenum sample heating base, a brush contact plate, and a heating filament;

[0029] The sample molybdenum heating base is insulated from the electron beam support base and the molybdenum screw, and the two ends of the heating filament are electrically connected to the brush contact piece respectively;

[0030] The sample is held by the sample molybdenum pressing sheet and the sample molybdenum heating base. The sample is electrically connected to the electron beam support base through the sample molybdenum pressing sheet and the molybdenum screw. The brush contact piece is electrically connected to the brush.

[0031] A current is passed between the brushes, and under the action of the electric field, the electron beam generated by the heating filament bombards the molybdenum heating base of the sample, thereby heating the sample.

[0032] Furthermore, a positive voltage source is applied to the base and the sample carrier, and a negative voltage source is applied to the electron beam emitting device.

[0033] Compared with the prior art, the present invention has the following advantages:

[0034] 1. The multifunctional electron beam heating sample stage provided by this utility model cools the base to about 120K with liquid nitrogen, and then cools the sample holder to about 130K. By combining radiation heating, electron beam heating and liquid nitrogen cooling, the sample holder temperature can be continuously varied between 130K and 1300K.

[0035] 2. The multifunctional electron beam heating sample stage provided by this utility model forms an electric field between the filament and the sample holder, causing the thermionic electrons emitted by the filament to bombard the back of the sample holder under the action of the electric field, thereby achieving efficient heating and heating the sample holder to over 1500°C.

[0036] 3. The multifunctional electron beam heating sample stage provided by this utility model heats long strip-shaped samples directly by passing current through brushes, achieving rapid and efficient heating while having little impact on the vacuum. Attached Figure Description

[0037] To further illustrate the above and other advantages and features of the various embodiments of the present invention, a more specific description of the various embodiments of the present invention will be presented with reference to the accompanying drawings. It is understood that these drawings depict only typical embodiments of the present invention and are therefore not intended to limit its scope. In the drawings, for clarity, the same or corresponding parts will be indicated by the same or similar reference numerals.

[0038] Figure 1 A three-dimensional structural schematic diagram of a multifunctional electron beam heated sample stage according to an embodiment of the present invention is shown;

[0039] Figure 2 A cross-sectional structural schematic diagram of a multifunctional electron beam heated sample stage according to an embodiment of the present invention is shown.

[0040] Figure 3 A schematic diagram of the structure of a ceramic sheet and a ceramic tube according to an embodiment of the present invention is shown;

[0041] Figure 4 A schematic diagram of the structure of a cryogenic device according to an embodiment of the present invention is shown;

[0042] Figure 5 A three-dimensional structural schematic diagram of a multifunctional electron beam heated sample stage equipped with a first sample carrying device according to an embodiment of the present invention is shown.

[0043] Figure 6 A cross-sectional structural schematic diagram of a multifunctional electron beam heated sample stage with a second sample carrier device according to an embodiment of the present invention is shown.

[0044] Figure 7 A three-dimensional structural schematic diagram of a second sample carrying device according to an embodiment of the present invention is shown;

[0045] Figure 8 This invention provides a third-dimensional structural schematic diagram of a second sample carrier device according to an embodiment of the present invention.

[0046] Figure 9 A three-dimensional structural schematic diagram of a multifunctional electron beam heated sample stage equipped with a third sample carrier device according to an embodiment of the present invention is shown.

[0047] Figure 10 A three-dimensional structural schematic diagram of a third sample carrying device according to an embodiment of the present invention is shown; and

[0048] Figure 11 Another three-dimensional structural schematic diagram of a third sample carrier device according to an embodiment of the present invention is shown.

[0049] List of reference numerals

[0050] 11 Base, 12 Spring, 13 Spring limiter, 14 First screw, 15 Brush, 16 Brush fixing molybdenum screw, 17 Molybdenum flat washer, 18 First insulating ceramic ring, 19 Contact copper block, 20 Low temperature connector, 21 Filament, 22 Filament fixing ceramic, 23 Filament terminal screw, 24 First molybdenum nut, 25 Heat insulation sheet, 26 Base, 27 Base connector, 28 First screw, 29 First insulating ceramic sheet, 30 Second insulating ceramic sheet, 31 Insulating ceramic tube, 32 Second screw;

[0051] 201 Liquid nitrogen connecting copper block, 202 Sapphire gasket, 203 Third screw, 204 Second insulating ceramic ring, 205 Fourth screw, 206 Liquid nitrogen cooling block, 207 Liquid nitrogen transmission pipe;

[0052] 33 Flat support, 300 DC heating sample support, 3001 DC support base, 3002 DC support heat insulation ring, 3003 Second screw, 3004 Second molybdenum nut, 3005 Molybdenum gasket, 3006 First sample molybdenum pressing sheet, 3007 Sample molybdenum base, 3008 First ceramic gasket, 3009 First sample, 3010 First brush contact piece, 3011 Conductive block, 3012 Third insulating ceramic ring;

[0053] 400 Sample holder with electron beam heating function, 4001 Electron beam holder base, 4002 Electron beam holder heat insulation ring, 4003 Third screw, 4004 Third molybdenum nut, 4006 Second sample molybdenum pressing plate, 4007 Sample molybdenum heating base, 4008 Second ceramic gasket, 4009 Second sample, 4010 Second brush contact piece, 4011 Heating filament. Detailed Implementation

[0054] In the following description, the present invention is described with reference to various embodiments. However, those skilled in the art will recognize that the embodiments may be implemented without one or more specific details or with other alternatives and / or additional methods or components. In other instances, well-known structures or operations are not shown or described in detail so as not to obscure the inventive aspects of the present invention. Similarly, for illustrative purposes, specific numbers and configurations are set forth to provide a comprehensive understanding of embodiments of the present invention. However, the present invention is not limited to these specific details.

[0055] In this invention, unless otherwise specified, "arranged on" or "arranged above" does not exclude the possibility of an intermediate element between the two. Furthermore, "arranged on or above" merely indicates the relative positional relationship between two components, and in certain cases, such as when the product orientation is reversed, it can also be converted to "arranged below or under," and vice versa.

[0056] In this specification, references to "an embodiment" or "this embodiment" mean that a particular feature, structure, or characteristic described in connection with that embodiment is included in at least one embodiment of the present invention. The phrase "in one embodiment" appearing throughout this specification does not necessarily refer to all of the same embodiment.

[0057] It should be noted that the embodiments of this utility model use the terms "comprising", "including", "having", "containing" and / or "comprising", which, when used in this specification, indicate the presence of the stated features, elements and / or components, but do not exclude the presence or addition of one or more other features, elements, components and / or combinations thereof.

[0058] In this specification, unless otherwise specified, "first" and "second" are used only for distinguishing descriptions, do not contain differences in size, and should not be construed as indicating or implying relative importance.

[0059] In this specification, the quantifiers “multiple” and “more” refer to one or more elements.

[0060] This invention provides a multifunctional electron beam heating sample stage to meet the needs of both cooling and heating samples, and to achieve continuous temperature variation of the sample within a wide range.

[0061] The present invention will be further described below with reference to the accompanying drawings of the embodiments.

[0062] Figure 1 A three-dimensional structural schematic diagram of a multifunctional electron beam heated sample stage according to an embodiment of the present invention is shown. Figure 2 A cross-sectional structural schematic diagram of a multifunctional electron beam heated sample stage according to an embodiment of the present invention is shown. Figure 3A schematic diagram of the structure of the ceramic plate and ceramic tube according to an embodiment of the present invention is shown. As shown, the multifunctional electron beam heated sample stage includes a base 11, a spring 12, a spring limiter 13, a first screw 14, a brush 15, a brush fixing molybdenum screw 16, a molybdenum flat washer 17, a first insulating ceramic ring 18, a contact copper block 19, a low-temperature connector 20, a filament 21, a filament fixing ceramic 22, a filament terminal screw 23, a first molybdenum nut 24, a heat insulation sheet 25, a base 26, a base connector 27, a first screw 28, a first insulating ceramic plate 29, a second insulating ceramic plate 30, an insulating ceramic tube 31, and a second screw 32. As shown, all components of the multifunctional electron beam heated sample stage are fixed on the base 11. A receiving space is arranged in the middle of the base 11. An opening facing the sample-carrying device is located above the receiving space. An electron beam emitting device is arranged within the receiving space. First insulating ceramic sheets 29 are arranged on the left, right, or four sides of the receiving space, and a second insulating ceramic sheet 30 is arranged at the bottom of the receiving space, so that the electron beam emitted by the electron beam emitting device can be guided out through the opening. In one embodiment of this invention, the receiving space can be a square slot, a circular slot, or a slot of other shapes. In one embodiment of this invention, the receiving space can be arranged in the middle of the base, or at the edge of the base, or at the bottom of the base.

[0063] The brush 15 is electrically connected to the sample carrier and is used to heat the sample. The brush 15 is fixed to the base 11 by a brush fixing molybdenum screw 16, and a molybdenum flat washer 17 is arranged between the brush fixing molybdenum screw 16 and the brush 15. The brush fixing molybdenum screw 16, the base 11, and the contact copper block 19 are insulated from each other by a first insulating ceramic ring 18.

[0064] Clamping tools are arranged on both sides above the accommodating space. These tools are used to clamp the sample carrier and include a spring tab 12 and a spring tab limiter 13. The spring tab is used to fix the sample carrier. When the sample carrier is positioned above the accommodating space, the spring tab 12 is tensioned to press the sample carrier in place, preventing it from falling or sliding forward or backward. The spring tab limiter 13 is positioned above the spring tab to limit the opening angle of the spring tab 12, preventing excessive deformation and loss of elasticity during sample carrier placement. The spring tab 12 and the spring tab limiter 13 are fixed by a first screw 14. In one embodiment of this invention, the base 11 is made of molybdenum, the spring tab 12 is made of molybdenum, and the first screw 14 is made of molybdenum.

[0065] The base 26 supports the base 11. A heat insulation sheet 25 is arranged between the base 11 and the base 26 to provide thermal insulation and / or electrical insulation between them. A base connector 27 is used to fix the sample stage to an experimental platform or equipment. The base 11, heat insulation sheet 25, base 26, and base connector 27 are arranged face-to-face in sequence. In one embodiment of this invention, the heat insulation sheet 25 is made of molybdenum.

[0066] The first screw 28 passes through and connects the base 11, the heat insulation sheet 25, and the base 26. A first insulating ceramic ring 18 is arranged between the screw 28, the heat insulation sheet 25, and the base 26 to ensure mutual insulation. The base 26 and the base connector 27 are connected by a second screw 32.

[0067] like Figure 3 As shown, the electron beam emitting device is a slender filament 21 that is bent into multiple continuous S-shapes. The filament 21 is held and fixed by a filament fixing ceramic 22. One end of the filament 21 is fixed to the first insulating ceramic sheet 29, and the other end of the filament is arranged in the insulating ceramic tube 31 and electrically connected to the filament terminal screw 23. The filament terminal screw 23 is fixed by a first molybdenum nut 24, and an insulating ceramic ring is arranged between the filament terminal screw 23 and the base 11.

[0068] Figure 4 A schematic diagram of a cryogenic device according to an embodiment of the present invention is shown. Figure 4 As shown, the cryogenic connector 20 is used to connect the cryogenic device to the base 11, and the cryogenic device is used to cool the base 11. The cryogenic connector 20 is connected to the base 11 via a contact copper block 19. The cryogenic device includes a liquid nitrogen connecting copper block 201, a sapphire gasket 202, a third screw 203, a second insulating ceramic ring 204, a fourth screw 205, a liquid nitrogen cooling block 206, and a liquid nitrogen transmission pipe 207. The liquid nitrogen cooling block 206 is fixed to other components via the second insulating ceramic ring 204 and the fourth screw 205. The liquid nitrogen connecting copper block 201 is fixed together with the cryogenic connector 20 and the contact copper block 19 and installed on the base 11. The liquid nitrogen connecting copper block 201 and the liquid nitrogen cooling block 206 are connected together via the sapphire gasket 202 and simultaneously fixed together via the third screw 203. The sapphire gasket 202 is used to ensure good thermal conductivity between the liquid nitrogen connecting copper block 201 and the liquid nitrogen cooling block 206, while also providing insulation to ensure that the base 11 is insulated from ground. This is because the base 11 requires high voltage, and the liquid nitrogen transmission pipe 207 will be in contact with the cavity, thus grounding it.

[0069] Figure 5This diagram illustrates a three-dimensional structure of a multifunctional electron beam heated sample stage equipped with a first sample carrier according to an embodiment of the present invention. The first sample carrier is a common molybdenum sample holder, namely a flat holder 33. In one embodiment of the present invention, the flat holder 33 is a flat metal plate made of molybdenum. The flat holder 33 is positioned directly above the electron beam emitting device, i.e., the filament 21. When current is applied to the filament 21, the filament 21 heats up under the influence of the current. Since the filament 21 is placed directly under the flat holder 33, the heat emitted by the filament 21 is directly absorbed by the flat holder 33, thereby heating the flat holder 33. Since the filament 21 is arranged in the base 11, only half of the heat emitted is absorbed by the flat holder 33, and the other half is absorbed by the base 11, resulting in low heating efficiency. Furthermore, since the filament 21 is arranged in the filament fixing ceramic 22, when the temperature of the filament 21 is too high, the filament fixing ceramic 22 will melt, causing damage to the filament 21. Therefore, the heating power of the filament 21 has an upper limit. Using this heating method, the maximum heating temperature of the sample carrier is approximately 600°C.

[0070] While heating the filament 21, a positive voltage source (typically +800V) can be applied to the base 11, and a negative voltage source or grounding can be applied to the filament 21. Since the sample carrier is in direct contact with the base 11, it is also under a high positive voltage. Thus, with the filament 21 grounded and the sample carrier connected to high voltage, an electric field is formed between them. When the filament 21 is heated, thermionic electrons are emitted. Under the influence of the electric field, the thermionic electron beam bombards the back of the sample carrier, directly heating it. An electric field also exists between the filament 21 and the base 11. The first insulating ceramic sheet 29 and the second insulating ceramic sheet 30 arranged between the filament 21 and the base 11 prevent the thermionic electron beam from bombarding and heating the base 11. Direct electron beam heating of the sample carrier is concentrated and efficient; this heating method can heat the sample carrier to over 1000℃.

[0071] Liquid nitrogen is introduced into the liquid nitrogen transfer tube 207, cooling the liquid nitrogen cooling block 206 to liquid nitrogen temperature. This cooling effect, achieved through the liquid nitrogen cooling block 206, sapphire gasket 202, liquid nitrogen connecting copper block 201, cryogenic connector 20, and contact copper block 19, cools the base 11 to approximately 120K, thereby cooling the flat support 33 to approximately 130K. Simultaneously with cooling, radiant heating and electron beam heating are activated, reheating the sample support device to over 600K. By combining liquid nitrogen cooling, radiant heating, and electron beam heating, the temperature of the sample support device can be continuously varied between 130K and 1300K.

[0072] Figure 6A cross-sectional schematic diagram of a multifunctional electron beam heated sample stage with a second sample carrier device according to an embodiment of the present invention is shown. Figure 7 A three-dimensional structural schematic diagram of a second sample carrier device according to an embodiment of the present invention is shown. Figure 8 This diagram illustrates another perspective view of a second sample-carrying device according to an embodiment of the present invention. The second sample-carrying device is a DC-heated sample holder 300. The DC-heated sample holder 300 includes a DC holder base 3001, a DC holder heat insulation ring 3002, a second screw 3003, a second molybdenum nut 3004, a molybdenum gasket 3005, a first sample molybdenum pressing plate 3006, a sample molybdenum base 3007, a first ceramic gasket 3008, a first sample 3009, a first brush contact 3010, a conductive block 3011, and a third insulating ceramic ring 3012. The second screw 3003 passes through and connects the first sample molybdenum pressing plate 3006, the sample molybdenum base 3007, the molybdenum gasket 3005, and the first brush contact 3010. The first sample 3009 is held by the first sample molybdenum pressing plate 3006 and the sample molybdenum base 3007. The first brush contact 3010 is electrically connected to the brush 15. The molybdenum sample base 3007 on the right side of the DC-heated sample holder 300 is connected to the first brush contact 3010 via a molybdenum gasket 3005, thus the right side of the DC-heated sample holder 300 is electrically connected to the first brush contact 3010 on the right side. Simultaneously, the second screw 3003 on the right side is in direct electrical contact with the first brush contact 3010, thus the right side of the DC-heated sample holder 300 is in electrical contact with the DC holder base 3001. The left side of the DC-heated sample holder 300 is in electrical contact with the molybdenum sample base 3007 on the left side, and is in electrical contact with the first brush contact 3010 on the left side via a conductive block 3011. The first brush contact 3010 on the left side is held in place by the third insulating ceramic ring 3012 from both above and below, thus the left side of the first sample 3009 is insulated from the second screw 3003 on the left side.

[0073] A current is passed between the two brushes 15 on the left and right sides, or between the left brush 15 and the base 11. The current ultimately passes through the first sample 3009, thereby heating the first sample 3009. The first sample 3009 can be a strip-shaped silicon substrate. By directly passing a large current (e.g., 20A) through the first sample 3009, due to its inherent resistance, it will heat up to a higher temperature, removing the oxide layer on its surface. Since only the first sample 3009 itself is heated, the heating efficiency is high and the heating speed is fast. At the same time, the sample stage itself is not heated, minimizing the impact on the vacuum, and the cavity can maintain a good vacuum while heating the first sample 3009.

[0074] Figure 9A three-dimensional structural schematic diagram of a multifunctional electron beam heated sample stage equipped with a third sample carrier device according to an embodiment of the present invention is shown. Figure 10 A three-dimensional structural schematic diagram of a third sample carrier device according to an embodiment of the present invention is shown. Figure 11 This diagram illustrates another perspective view of a third type of sample carrier according to an embodiment of the present invention. The third type of sample carrier is a sample holder 400 with electron beam heating function. The sample holder 400 with electron beam heating function includes an electron beam holder base 4001, an electron beam holder heat insulation ring 4002, a third screw 4003, a third molybdenum nut 4004, a second sample molybdenum pressing plate 4006, a sample molybdenum heating base 4007, a second ceramic gasket 4008, a second sample 4009, a second brush contact plate 4010, and a heating filament 4011. The sample molybdenum heating base 4007 is a single piece. The sample molybdenum heating base 4007 is electrically connected to the electron beam holder base 4001 and the third screw 4003. The two ends of the heating filament 4011 are electrically connected to the second brush contact plate 4010. The second sample 4009 is held by the second sample molybdenum pressing plate 4006 and the sample molybdenum heating base 4007. The second sample 4009 is electrically connected to the electron beam support base 4001 through the second sample molybdenum pressing plate 4006 and the third screw 4003. The second brush contact piece 4010 is electrically connected to the brush 15.

[0075] A high voltage (e.g., 800V) is connected to the base 11, and the heating filament 4011 is energized through the second brush contact 4010. Simultaneously, the negative terminal of the power supply is grounded. Under the influence of the electric field, the electron beam generated by the heating filament 4011 bombards the molybdenum sample heating base 4007, heating it. The second sample 4009 is then heated through direct contact. Using an electron beam to heat the sample holder, compared to directly heating the sample stage, offers advantages such as more concentrated heating, a smaller heating area, and less impact on the vacuum. Furthermore, since the sample stage is continuously connected to the cooling copper block, heat is constantly dissipated during heating. Using an electron beam to heat the sample holder allows the sample to be heated to over 1500℃.

[0076] The multifunctional electron beam heated sample stage provided by this utility model cools the base to about 120K using liquid nitrogen, and then cools the sample holder to about 130K. By combining radiation heating, electron beam heating and liquid nitrogen cooling, the sample holder temperature can be continuously varied between 130K and 1300K. By forming an electric field between the base and the sample holder, the thermionic electrons emitted by the filament bombard the back of the sample holder under the action of the electric field, achieving efficient heating and heating the sample holder to over 1500℃. The long strip sample is heated by directly passing current through the brush, achieving rapid and efficient heating with minimal impact on the vacuum.

[0077] Although various embodiments of the present invention have been described above, it should be understood that they are presented by way of example only and not as limitations. It will be apparent to those skilled in the art that various combinations, modifications, and alterations can be made without departing from the spirit and scope of the present invention. Therefore, the breadth and scope of the present invention disclosed herein should not be limited to the exemplary embodiments disclosed above, but should be defined only according to the technical solutions and their equivalents.

Claims

1. A multi-functional electron beam heating sample stage, characterized by, include: A base, wherein a receiving space is arranged in the middle of the base, and an electron beam emitting device is arranged in the receiving space; Ceramic plates are arranged on the sidewalls and bottom of the accommodating space so that the electron beam emitted by the electron beam emitting device can be led out through the opening; An electric brush, which is electrically connected to a sample carrier, is used to heat the sample by applying electricity. as well as A low-temperature connector is used to connect a low-temperature device to the base, and the low-temperature device is used to cool the base.

2. The multifunctional electron beam heated sample stage according to claim 1, characterized in that, The brush is fixed to the base by a brush fixing molybdenum screw, and an insulating ceramic ring is arranged between the brush fixing molybdenum screw and the base.

3. The multifunctional electron beam heated sample stage according to claim 2, characterized in that, The low-temperature connector is connected to the base via a contact copper block; The cryogenic device includes a liquid nitrogen connecting copper block, a sapphire gasket, a liquid nitrogen cooling block, and a liquid nitrogen transmission pipe. The liquid nitrogen connecting copper block and the liquid nitrogen cooling block are connected by the sapphire gasket. Liquid nitrogen is introduced into the liquid nitrogen transmission pipe and passes sequentially through the liquid nitrogen cooling block, the sapphire gasket, the liquid nitrogen connecting copper block, the cryogenic connector, and the contact copper block, thereby cooling the base.

4. The multi-functional e-beam heating sample stage of claim 1, wherein, Also includes: A clamping tool is arranged above both sides of the accommodating space. The clamping tool is used to clamp the sample carrying device. The clamping tool includes a spring and a spring limiter. The spring is used to fix the sample carrying device, and the spring limiter is used to limit the opening angle of the spring. A base for supporting the pedestal; A heat insulation sheet is disposed between the base and the subbase to insulate the base and the subbase from each other. as well as A base connector is used to fix the sample stage to an experimental platform or equipment.

5. The multifunctional electron beam heated sample stage according to claim 4, characterized in that, The base, the heat insulation sheet, the base plate, and the base connector are arranged face to face in sequence. A screw rod passes through and connects the base, the heat insulation sheet, and the base plate, and an insulating ceramic ring is arranged between the screw rod, the heat insulation sheet, and the base plate; The base and the base connector are connected by screws.

6. The multifunctional electron beam heated sample stage according to claim 1, characterized in that, The electron beam emitting device is a slender filament that is bent into multiple continuous S-shapes, and the filament is held and fixed by a filament fixing ceramic clamp. One end of the filament is fixed to an insulating ceramic sheet, and the other end of the filament is arranged in an insulating ceramic tube and electrically connected to the filament terminal screw. The filament terminal screw is fixed by a molybdenum nut, and an insulating ceramic ring is arranged between the filament terminal screw and the base.

7. The multifunctional electron beam heated sample stage according to claim 1, characterized in that, The sample support device is a flat support, which is a flat metal plate. The sample is placed on the flat support, and the material of the flat support is molybdenum.

8. The multifunctional electron beam heated sample stage according to claim 1, characterized in that, The sample carrier is a DC heated sample holder; The DC-heated sample holder includes a DC holder base, an insulating ceramic ring, a molybdenum screw, a molybdenum gasket, a molybdenum sample pressing plate, a molybdenum sample base, a conductive block, and a brush contact plate. The molybdenum screw passes through and connects the sample molybdenum sheet, the sample molybdenum base, the molybdenum gasket, and the brush contact plate; The sample is held between the molybdenum sample press and the molybdenum sample base. The molybdenum sample base is electrically connected to the brush contact piece through the molybdenum pad or the conductive block. The brush contact piece is electrically connected to the brush. Current is passed between the brushes, or between the brushes and the base, and the current is used to heat the sample.

9. The multifunctional electron beam heated sample stage according to claim 1, characterized in that, The sample carrier is a sample holder with electron beam heating function; The sample holder with electron beam heating function includes an electron beam holder base, a molybdenum screw, a molybdenum sample pressing plate, a molybdenum sample heating base, a brush contact plate, and a heating filament; The sample molybdenum heating base is insulated from the electron beam support base and the molybdenum screw, and the two ends of the heating filament are electrically connected to the brush contact piece respectively; The sample is held by the sample molybdenum pressing sheet and the sample molybdenum heating base. The sample is electrically connected to the electron beam support base through the sample molybdenum pressing sheet and the molybdenum screw. The brush contact piece is electrically connected to the brush. A current is passed between the brushes, and under the action of the electric field, the electron beam generated by the heating filament bombards the molybdenum heating base of the sample, thereby heating the sample.

10. The multifunctional electron beam heated sample stage according to claim 1, characterized in that, A positive voltage source is applied to the base and the sample carrier, and a negative voltage source is applied to the electron beam emitting device.

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