Leak detection device for end part of magnetron sputtering coating equipment

Abstract

The utility model relates to the technical field of sealing performance inspection of magnetron sputtering coating equipment, in particular to a leak detection device for an end part of magnetron sputtering coating equipment. The leak detection device for the end part of the magnetron sputtering coating equipment comprises a gas pipe and a water pipe, the gas pipe is communicated with the water pipe, one end of the gas pipe is communicated with a helium source, and the other end of the gas pipe is communicated with a gas path of the end part; the other end of the water pipe is communicated with the waterway of the end part; a first control valve is arranged on the gas pipe, located at the downstream end of the joint of the water pipe and the gas pipe and used for controlling connection and disconnection of the gas path and the water path, and the helium source is used for providing positive pressure for the gas pipe. Through the arrangement of the gas pipe, the water pipe, the first control valve and the helium source, the leak detection efficiency can be improved, time and labor are saved, no extra vacuumizing equipment needs to be additionally arranged in the prior art to obtain vacuum conditions, and therefore the purpose of saving cost is achieved.

Description

Technical Field

[0001] This utility model relates to the field of sealing performance testing technology for magnetron sputtering coating equipment, and in particular to a leak detection device for end components of magnetron sputtering coating equipment. Background Technology

[0002] Currently, ensuring the stability of the cathode operation is crucial during the operation of magnetron sputtering coating equipment. The end-cap component is the core component that drives the rotation of the cathode target and feeds in electrical energy. If a vacuum leak occurs in the end-cap component, it can affect the quality of the coated product, or even cause the entire magnetron sputtering coating equipment line to shut down and batches of products to be scrapped. Therefore, the sealing performance of the end-cap component is the foundation for the stable operation of magnetron sputtering coating equipment.

[0003] Typically, the rotation of the cathode target is driven by the end component. During the maintenance of the target changing equipment in the coating line, the end component needs to be regularly maintained and leak tested.

[0004] In existing technologies, industry professionals typically use vacuum negative pressure leak detection to test the sealing performance of end components. The specific method involves using a pump to connect a vacuum test chamber, installing the end component inside, and then evacuating the chamber to a certain vacuum level. This allows for routine leak detection of the end component and assessment of its sealing performance, determining whether the assembled end component is ready for use. However, existing leak detection devices require a certain vacuum condition before leak detection, which is time-consuming, labor-intensive, and inefficient, requiring additional vacuum equipment and increasing costs.

[0005] Therefore, there is an urgent need to design a leak detection device for the end components of magnetron sputtering coating equipment to solve the above technical problems. Utility Model Content

[0006] The purpose of this invention is to provide a leak detection device for the end component of a magnetron sputtering coating equipment, which can improve leak detection efficiency, save time and effort, and reduce costs.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] This utility model provides a leak detection device for an end component of a magnetron sputtering coating equipment, comprising: a gas pipe and a water pipe, wherein the gas pipe and the water pipe are connected, and one end of the gas pipe is connected to a helium source, and the other end of the gas pipe is connected to the gas path of the end component; one end of the water pipe is connected to the gas pipe, and the other end of the water pipe is connected to the water path of the end component; a first control valve is provided on the gas pipe, the first control valve is located downstream of the connection between the water pipe and the gas pipe, the first control valve is used to control the opening and closing of the gas path and the water path, and the helium source is used to provide positive pressure to the gas pipe.

[0009] As an optional technical solution for a leak detection device for the end component of a magnetron sputtering coating equipment, the water pipe includes a first water pipe and a second water pipe, the end component is provided with a first interface and a second interface, and the leak detection device for the end component of the magnetron sputtering coating equipment also includes a three-way valve.

[0010] One end of the first water pipe is connected to the first interface, and the other end is connected to port a of the three-way valve. One end of the second water pipe is connected to the second interface, and the other end is connected to port b of the three-way valve. Port c of the three-way valve is connected to the air pipe.

[0011] As an optional technical solution for a leak detection device for the end component of a magnetron sputtering coating equipment, a second control valve is also provided on the air pipe. The second control valve is located at the upstream end of the connection between the water pipe and the air pipe, and is used for pressure maintenance and venting of the air pipe.

[0012] As an optional technical solution for a leak detection device for end components of magnetron sputtering coating equipment, both the first control valve and the second control valve are configured as ball valves.

[0013] As an optional technical solution for a leak detection device for the end component of a magnetron sputtering coating equipment, a pressure gauge is also installed on the gas pipe, and the pressure gauge is located upstream of the second control valve.

[0014] As an optional technical solution for a leak detection device for end components of magnetron sputtering coating equipment, the end of the gas pipe near the helium source is connected to a quick-connect coupling.

[0015] As an optional technical solution for a leak detection device for the end component of a magnetron sputtering coating equipment, a sealing cap is connected to one end of the air pipe near the end component, and the sealing cap is fixed to the end component by a fixing clamp.

[0016] As an optional technical solution for a leak detection device for the end component of a magnetron sputtering coating equipment, the leak detection device for the end component of the magnetron sputtering coating equipment further includes a motor, which is drivenly connected to the conveyor belt of the end component, and the motor is used to drive the conveyor belt to rotate.

[0017] As an optional technical solution for a leak detection device for the end component of a magnetron sputtering coating equipment, the leak detection device for the end component of the magnetron sputtering coating equipment further includes a connecting plate and a fixing member. The connecting plate is mounted on the end component through the fixing member, and the motor is mounted on the connecting plate.

[0018] As an optional technical solution for a leak detection device for the end component of a magnetron sputtering coating equipment, the leak detection device for the end component of a magnetron sputtering coating equipment further includes a bracket, the bracket is mounted on the connecting plate, and the motor is mounted on the bracket.

[0019] The beneficial effects of this utility model include at least the following:

[0020] This invention provides a leak detection device for end components of a magnetron sputtering coating equipment. The device includes an air pipe and a water pipe, which are connected. One end of the air pipe is connected to a helium source, and the other end is connected to the air path of the end component. One end of the water pipe is connected to the air pipe, and the other end is connected to the water path of the end component. A first control valve is installed on the air pipe, located downstream of the connection between the water pipe and the air pipe. The first control valve controls the opening and closing of the air and water paths. The helium source provides positive pressure to the air pipe. This leak detection device for end components of a magnetron sputtering coating equipment uses a positive pressure method for leak detection. The arrangement of the air pipe, water pipe, first control valve, and helium source improves leak detection efficiency, saves time and effort, and eliminates the need for additional vacuum equipment as in existing technologies, thus achieving cost savings. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0022] Figure 1 A schematic diagram of the structure of the end component and the leak detection device for the end component of the magnetron sputtering coating equipment provided in the embodiments of this utility model;

[0023] Figure 2 This is a schematic diagram of the end component provided in an embodiment of the present utility model.

[0024] Figure Labels

[0025] 10. End component; 11. First interface; 12. Second interface;

[0026] 100. Air pipe; 110. Second control valve; 120. Pressure gauge; 130. Quick-connect coupling; 140. Sealing cap; 150. Fixing clamp; 200. First water pipe; 300. Second water pipe; 400. Three-way valve; 410. Port a; 420. Port b; 430. Port c; 500. Motor; 600. Connecting plate; 700. Fixture; 800. Bracket; 900. Conveyor belt. Detailed Implementation

[0027] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0028] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0030] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0031] like Figures 1-2As shown, this embodiment provides a leak detection device for the end component of a magnetron sputtering coating equipment. The leak detection device for the end component of the magnetron sputtering coating equipment mainly includes an air pipe 100 and a water pipe, which are connected. One end of the air pipe 100 is connected to a helium source (not shown in the figure), and the other end is connected to the air passage of the end component 10. One end of the water pipe is connected to the air pipe 100, and the other end is connected to the water passage of the end component 10. A first control valve (not shown in the figure) is provided on the air pipe 100. The first control valve is located downstream of the connection between the water pipe and the air pipe 100. The first control valve is used to control the opening and closing of the air and water passages, and the helium source is used to provide positive pressure to the air pipe 100.

[0032] Based on the above design, the leak detection device for the end component of the magnetron sputtering coating equipment in this embodiment uses a positive pressure method to detect the end component 10. That is, a pressure limiting valve is installed on the helium source, and the gas pipe 100 is bleed through the pressure limiting valve, so that both the water path and the gas path in the end component 10 are in a positive pressure state, which facilitates the detection of its sealing performance.

[0033] Specifically, before testing, the operator connects the air hose 100 and the water hose, then connects one end of the air hose 100 to a helium source and opens the first control valve, allowing helium to enter the air path of the end component 10 along the air hose 100 and the water path of the end component 10 along the water hose. The operator then uses a conventional leak detector, activating its suction gun mode, and places the detector's nozzle at various locations on the end component 10 for detection. When a leak is detected, the leak detector will sound an alarm and flash an indicator light, alerting the operator to the presence of a leak in the end component 10. It should be noted that the leak detector described above is a component of existing technology. Leak detectors have both suction gun and vacuum modes. Since this embodiment uses a positive pressure method to detect leaks in the end component 10, the suction gun mode of the leak detector is used. This embodiment does not elaborate on the specific structure and working principle of the leak detector.

[0034] Since the first control valve in this embodiment is located downstream of the connection between the water pipe and the air pipe 100, the operator can control the opening and closing of the first control valve to connect and disconnect the water and air paths of the end component 10. Specifically, when the leak detector detects a leak, the operator closes the first control valve, thereby disconnecting the water and air paths of the end component 10, which facilitates checking the sealing performance of the leak detection water and air paths one by one.

[0035] It should be noted that the end component 10 is a component in the magnetron sputtering coating equipment, and its specific structure will not be described in detail in this embodiment.

[0036] Compared with existing technologies, the leak detection device for the end component of the magnetron sputtering coating equipment in this embodiment uses a positive pressure method to detect leaks in the end component 10. The setup of the air pipe 100, water pipe, first control valve, and helium source improves leak detection efficiency, saves time and labor, and eliminates the need for additional vacuum equipment as in existing technologies, thus saving costs. Furthermore, this leak detection device for the end component of the magnetron sputtering coating equipment connects the air and water circuits and uses a positive pressure method for leak detection, further improving efficiency. The first control valve controls the connection and disconnection of the air and water circuits, ensuring the accuracy of leak detection by operators when leaks occur in the end component 10.

[0037] like Figure 1 As shown, in this embodiment, the water pipes include a first water pipe 200 and a second water pipe 300. The end component 10 is provided with a first interface 11 and a second interface 12. The leak detection device for the end component of the magnetron sputtering coating equipment also includes a three-way valve 400. One end of the first water pipe 200 is connected to the first interface 11, and the other end is connected to port a 410 of the three-way valve 400. One end of the second water pipe 300 is connected to the second interface 12, and the other end is connected to port b 420 of the three-way valve 400. Port c 430 of the three-way valve 400 is connected to the air pipe 100. The three-way valve 400 improves the reliability and airtightness of the connection between the first water pipe 200, the second water pipe 300, and the air pipe 100, preventing air leakage. It should be noted that in this embodiment, both the first water pipe 200 and the second water pipe 300 are circulated with helium gas at a certain pressure, which facilitates the sealing test of the water passages in the end component 10.

[0038] like Figure 1 As shown, in this embodiment, a second control valve 110 is also provided on the air pipe 100. The second control valve 110 is located upstream of the connection between the water pipe and the air pipe 100, and is used for maintaining pressure and venting the air pipe 100. A pressure gauge 120 is also provided on the air pipe 100, located upstream of the second control valve 110. When the helium source supplies air to the air pipe 100, the operator observes the pressure value on the pressure gauge 120. When the pressure value reaches five kilograms, the first control valve is closed.

[0039] Optionally, both the first control valve and the second control valve 110 in this embodiment can be configured as ball valves. Of course, operators can also configure the first control valve and the second control valve 110 as other control valves with on / off functions according to actual needs, which will not be elaborated further here.

[0040] like Figure 1As shown, in this embodiment, a quick-connect fitting 130 is connected to the end of the gas tube 100 near the helium source. The quick-connect fitting 130 is connected to the pipeline of the helium source. The quick-connect fitting 130 improves the convenience of connecting the gas tube 100 to the helium source, thereby improving work efficiency.

[0041] Alternatively, the helium source can be a helium storage tank, helium cylinder, etc.

[0042] like Figure 1 As shown, in this embodiment, a sealing cap 140 is connected to one end of the air tube 100 near the end component 10. The sealing cap 140 is fixed to the end component 10 by a fixing clamp 150, thereby improving the sealing performance of the connection between the air tube 100 and the end component 10 and avoiding the risk of air leakage during the test.

[0043] like Figure 1 As shown, in this embodiment, the leak detection device for the end component of the magnetron sputtering coating equipment also includes a motor 500. The motor 500 is driven to connect to the conveyor belt 900 of the end component 10. The motor 500 is used to drive the conveyor belt 900 to rotate, which enables dynamic sealing performance testing of the end component 10. This achieves dual testing of the static and dynamic sealing performance of the end component 10, thereby improving the accuracy of the sealing performance test of the end component 10.

[0044] like Figure 1 As shown, the leak detection device for the end component of the magnetron sputtering coating equipment also includes a connecting plate 600 and a fixing member 700. The connecting plate 600 is installed on the end component 10 through the fixing member 700. The motor 500 is arranged above the connecting plate 600, thereby improving the stability and reliability of the motor 500 installation and improving the accuracy of the sealing performance test of the end component 10.

[0045] Optionally, the fastener 700 in this embodiment can be a bolt, which facilitates the assembly and disassembly of the connecting plate 600.

[0046] Furthermore, the leak detection device for the end component of the magnetron sputtering coating equipment in this embodiment also includes a bracket 800, which is mounted on the connecting plate 600. The motor 500 is mounted on the bracket 800, so that the motor 500 can be raised to a certain height, which is beneficial for driving the connection with the conveyor belt 900 of the end component 10.

[0047] Obviously, the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

[0048] Note that in the description of this specification, the references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A leak detection device for end piece components of a magnetron sputter coating apparatus, characterized in that include: A gas pipe (100) and a water pipe are connected, with one end of the gas pipe (100) connected to a helium source and the other end of the gas pipe (100) connected to the gas passage of the end component (10); one end of the water pipe is connected to the gas pipe (100) and the other end of the water pipe is connected to the water passage of the end component (10); a first control valve is provided on the gas pipe (100), the first control valve is located at the downstream end of the connection between the water pipe and the gas pipe (100), the first control valve is used to control the opening and closing of the gas passage and the water passage, and the helium source is used to provide positive pressure to the gas pipe (100).

2. The leak detection device for the end part of a magnetron sputter coating apparatus according to claim 1, wherein The water pipe includes a first water pipe (200) and a second water pipe (300). The end component (10) is provided with a first interface (11) and a second interface (12). The leak detection device for the end component of the magnetron sputtering coating equipment also includes a three-way valve (400). One end of the first water pipe (200) is connected to the first interface (11), and the other end is connected to port a (410) of the three-way valve (400). One end of the second water pipe (300) is connected to the second interface (12), and the other end is connected to port b (420) of the three-way valve (400). Port c (430) of the three-way valve (400) is connected to the air pipe (100).

3. The leak detection device for the end part of a magnetron sputter coating apparatus according to claim 1, wherein The air pipe (100) is also provided with a second control valve (110), which is located at the upstream end of the connection between the water pipe and the air pipe (100). The second control valve (110) is used for pressure maintenance and air exhaust of the air pipe (100).

4. The leak detection device for the end part of a magnetron sputter coating apparatus according to claim 3, wherein Both the first control valve and the second control valve (110) are configured as ball valves.

5. The leak detection device for the end part of a magnetron sputter coating apparatus according to claim 3, wherein A pressure gauge (120) is also provided on the air pipe (100), and the pressure gauge (120) is located at the upstream end of the second control valve (110).

6. The leak detection device for the end part of a magnetron sputter coating apparatus according to claim 1, wherein The end of the gas tube (100) near the helium source is connected to a quick-connect fitting (130).

7. The leak detection device for the end part of a magnetron sputter coating apparatus according to claim 1, wherein The end of the trachea (100) near the end component (10) is connected to a sealing cap (140), and the sealing cap (140) is fixed to the end component (10) by a fixing clamp (150).

8. The leak detection device for the end part of a magnetron sputter coating apparatus according to claim 1, wherein The leak detection device for the end component of the magnetron sputtering coating equipment also includes a motor (500), which is drivenly connected to the conveyor belt (900) of the end component (10), and the motor (500) is used to drive the conveyor belt (900) to rotate.

9. The leak detection device for the end block of a magnetron sputter coating apparatus according to claim 8, wherein The leak detection device for the end component of the magnetron sputtering coating equipment further includes a connecting plate (600) and a fixing member (700). The connecting plate (600) is mounted on the end component (10) via the fixing member (700), and the motor (500) is mounted on the connecting plate (600).

10. The leak detection device for the end block of a magnetron sputter coating apparatus according to claim 9, wherein The leak detection device for the end component of the magnetron sputtering coating equipment also includes a bracket (800), which is mounted on the connecting plate (600), and the motor (500) is mounted on the bracket (800).

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