Sensitive oxygen sensor chip capable of preventing edge missing

By employing a multilayer diaphragm structure and buffer block design in the oxygen sensor chip, the problem of the detection electrode being easily damaged in the automotive exhaust environment has been solved, achieving higher detection accuracy and extended electrode life.

CN224152407UActive Publication Date: 2026-04-21ZHEJIANG XINCI INTELLIGENT TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ZHEJIANG XINCI INTELLIGENT TECH CO LTD
Filing Date
2025-05-19
Publication Date
2026-04-21

AI Technical Summary

Technical Problem

The detection electrodes of existing oxygen sensor chips are susceptible to gas impact in the automotive exhaust environment, leading to decreased accuracy, damage, and shortened lifespan.

Method used

It adopts a multi-layer membrane structure, including a buffer block and an oxygen pump electrode in the detection channel. The buffer block is equipped with a buffer protrusion and a strip block to reduce the impact of gas flow and enhance the contact between the gas and the electrode.

Benefits of technology

It improves the detection accuracy and lifespan of the detection electrode, reduces the impact of gas impact on the electrode, and enhances the protection effect of the electrode.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a sensitive oxygen sensor chip capable of preventing missing edges, and relates to the technical field of sensors. The sensitive oxygen sensor chip comprises a substrate, a second diaphragm, a third diaphragm, a fourth diaphragm, a fifth diaphragm, a sixth diaphragm and a panel which are sequentially stacked, the sixth diaphragm is provided with a detection channel, the fifth diaphragm is provided with an air channel, and the sensitive oxygen sensor chip further comprises a detection electrode and a reference electrode, the detection channel and the air channel are fixedly installed in the detection channel and the air channel respectively, at least three buffer blocks are fixedly arranged in the detection channel, at least two oxygen pumping electrodes are fixedly installed in the detection channel, and the two oxygen pumping electrodes are located between the two buffer blocks at the adjacent positions respectively; according to the utility model, the impact of gas on the oxygen pumping electrode and the detection electrode can be reduced, so that the detection precision of the detection electrode is more stable, the service life is longer, and the gas can be more fully contacted with the oxygen pumping electrode.
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Description

Technical Field

[0001] This utility model belongs to the field of sensor technology, specifically, it relates to a sensitive oxygen sensor chip that prevents edge loss. Background Technology

[0002] Oxygen sensor chips are core components of automotive emission control systems. They are primarily used to monitor the oxygen concentration in engine exhaust in real time and feed the data back to the electronic control unit (ECU). This allows for precise adjustment of the air-fuel ratio, ensuring the efficient purification of exhaust pollutants (such as CO, HC, and NOx) by the three-way catalytic converter. These chips typically use ceramic materials (such as zirconium oxide or titanium oxide) as the sensing element, combined with high-temperature co-fired ceramic (HTCC) technology, and integrate a heater to quickly reach operating temperature (approximately 300°C or higher), improving response speed during cold starts. Key characteristics include anti-aging properties, low power consumption, high temperature resistance (operating temperature range of -40°C to 1000°C), and resistance to chemical corrosion, making them suitable for harsh automotive exhaust environments.

[0003] Currently, oxygen sensor chips mainly consist of two channels that detect vehicle exhaust and ordinary air respectively. Each channel uses two detection electrodes to detect oxygen content data. Since the channel that detects vehicle exhaust comes into contact with the exhaust, it will be subject to a relatively significant gas impact. Over time, the detection accuracy of the electrode used to detect exhaust will be affected or even damaged and rendered ineffective. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a sensitive oxygen sensor chip with anti-missing edge that can overcome or at least partially solve the above problems.

[0005] To solve the above-mentioned technical problems, the basic concept of the technical solution adopted by this utility model is as follows:

[0006] A sensitive oxygen sensor chip with edge-protection capability includes a substrate, a second diaphragm, a third diaphragm, a fourth diaphragm, a fifth diaphragm, a sixth diaphragm, and a panel stacked sequentially. The sixth diaphragm has a detection channel, and the fifth diaphragm has an air channel. The chip also includes a detection electrode and a reference electrode, which are fixedly installed inside the detection channel and the air channel, respectively. At least three buffer blocks are fixedly installed inside the detection channel, and at least two oxygen pumping electrodes are fixedly installed inside the detection channel, with the two oxygen pumping electrodes located between two adjacent buffer blocks.

[0007] Preferably, a pair of common electrodes are fixedly disposed on the panel.

[0008] Furthermore, one end of the buffer block is provided with a buffer protrusion, which faces the air inlet end of the detection channel.

[0009] Furthermore, the cross-sectional shape of the buffer protrusion is triangular or isosceles trapezoidal, and the pointed conical end of the buffer protrusion faces the air inlet end of the detection channel.

[0010] Furthermore, strip blocks are fixedly connected to both the upper and lower ends of the buffer block, and the strip blocks are parallel to the detection channel.

[0011] Furthermore, the buffer block located in the middle of the detection channel is provided with two strip blocks, and a buffer channel is formed between the two strip blocks. The ends of the strip blocks located at both ends of the detection channel face the buffer channel.

[0012] Preferably, a heating wire is fixedly installed inside the third diaphragm.

[0013] Furthermore, the heating wire is shaped like the letter W.

[0014] By adopting the above technical solution, this utility model has the following beneficial effects compared with the prior art:

[0015] 1. This utility model can effectively reduce the impact force of gas flow by using three buffer blocks in the detection channel, thereby reducing the impact of gas on the pump oxygen electrode and the detection electrode, making the detection accuracy of the detection electrode more stable and its lifespan longer, and allowing the gas to have more sufficient contact with the pump oxygen electrode.

[0016] 2. This utility model can reduce the impact of airflow on the buffer block by using a triangular or isosceles trapezoidal buffer protrusion, and can make the gas pass through the detection channel more smoothly and gently, so that the subsequent oxygen pumping electrode and detection electrode are subjected to less impact, thereby improving the protection effect of the oxygen pumping electrode.

[0017] 3. This utility model can further buffer the airflow through the strip blocks. Since multiple strip blocks are arranged in an interlaced manner, the impact force of the airflow on the pump oxygen electrode and the detection electrode can be further reduced, and the airflow can make more sufficient contact with the pump oxygen electrode.

[0018] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings. Attached Figure Description

[0019] In the attached diagram:

[0020] Figure 1 This is a schematic diagram of the structure of a sensitive oxygen sensor chip with anti-edge edge loss proposed in this utility model;

[0021] Figure 2 This is a cross-sectional structural diagram of a sensitive oxygen sensor chip with anti-edge edge loss proposed in this utility model;

[0022] Figure 3 This invention proposes a sensitive oxygen sensor chip with anti-edge edge defects. Figure 2 Schematic diagram of part A in the middle;

[0023] Figure 4 This invention proposes a sensitive oxygen sensor chip with anti-edge edge defects. Figure 2 Schematic diagram of Part B in the middle section;

[0024] Figure 5 This is a schematic diagram of the buffer block structure of a sensitive oxygen sensor chip with edge-protection proposed in this utility model;

[0025] Figure 6 This is a schematic diagram of the heating wire structure of a sensitive oxygen sensor chip with edge-protection feature proposed in this utility model.

[0026] In the diagram: 1. Substrate; 2. Second diaphragm; 3. Third diaphragm; 4. Fourth diaphragm; 5. Fifth diaphragm; 6. Sixth diaphragm; 7. Panel; 8. Detection channel; 9. Air channel; 10. Detection electrode; 11. Oxygen pump electrode; 12. Buffer block; 13. Buffer protrusion; 14. Strip block; 15. Common electrode; 16. Buffer channel; 17. Heating wire; 18. Reference electrode. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. The following embodiments are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0028] Example: Refer to Figures 1-6 A sensitive oxygen sensor chip with edge-protection features includes a substrate 1, a second diaphragm 2, a third diaphragm 3, a fourth diaphragm 4, a fifth diaphragm 5, a sixth diaphragm 6, and a panel 7 stacked sequentially. The sixth diaphragm 6 has a detection channel 8, and the fifth diaphragm 5 has an air channel 9. A pair of common electrodes 15 for power supply and data transmission are fixedly disposed on the panel 7. A heating wire 17 for heating the entire chip is fixedly installed inside the third diaphragm 3. The heating wire 17 is W-shaped. The chip also includes a detection electrode 10 and a reference electrode 18, which are fixedly installed inside the detection channel 8 and the air channel 9, respectively. The detection electrode 10 in the detection channel 8 is used to detect automobile exhaust, while the reference electrode 18 in the air channel 9 is used to detect ordinary air. At least three buffer blocks 12 are fixedly disposed inside the detection channel 8, and at least two oxygen pumping electrodes 11 are fixedly disposed inside the detection channel 8. The oxygen pumping electrodes 11 are used to assist in delivering oxygen to the detection electrode 10, and the two oxygen pumping electrodes 11 are located between two adjacent buffer blocks 12.

[0029] Specifically, during use, vehicle exhaust gas can enter the detection channel 8 and eventually come into contact with the detection electrode 10 to complete the oxygen content detection. When the gas passes through the detection channel 8, the three buffer blocks 12 inside the detection channel 8 can effectively reduce the flow impact force of the gas, thereby reducing the impact of the gas on the oxygen pump electrode 11 and the detection electrode 10, making the detection accuracy of the detection electrode 10 more stable and its lifespan longer, and allowing the gas to have more sufficient contact with the oxygen pump electrode 11.

[0030] One end of the aforementioned buffer block 12 is provided with a buffer protrusion 13 to enhance the buffering effect. The buffer protrusion 13 faces the air inlet of the detection channel 8. The cross-sectional shape of the buffer protrusion 13 is triangular or isosceles trapezoidal, and the pointed cone end of the buffer protrusion 13 faces the air inlet of the detection channel 8.

[0031] Specifically, when the gas passes through the detection channel 8, it is first decelerated and buffered by the buffer block 12. The triangular or isosceles trapezoidal buffer protrusion 13 can reduce the impact of the airflow on the buffer block 12 and make the gas pass through the detection channel 8 more smoothly and gently, so that the subsequent oxygen pumping electrode 11 and detection electrode 10 are subjected to less impact, thereby improving the protection effect of the oxygen pumping electrode 11.

[0032] The buffer block 12 is fixedly connected to both the upper and lower ends with strip blocks 14. The strip blocks 14 are parallel to the detection channel 8. Two strip blocks 14 are provided on the buffer block 12 located in the middle of the detection channel 8. A buffer channel 16 is formed between the two strip blocks 14. The ends of the strip blocks 14 located at both ends of the detection channel 8 face the buffer channel 16.

[0033] Specifically, when the airflow passes through the upper and lower surfaces of the buffer block 12, the strip block 14 can further buffer the airflow. Since the ends of the strip blocks 14 at both ends face the buffer channel 16 between the two middle strip blocks 14, that is, multiple strip blocks 14 are staggered, the impact force of the airflow on the pump oxygen electrode 11 and the detection electrode 10 can be further reduced, and the airflow can be made to have more full contact with the pump oxygen electrode 11.

[0034] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-described technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A sensitive oxygen sensor chip with anti-edge edge defects, comprising a substrate (1), a second diaphragm (2), a third diaphragm (3), a fourth diaphragm (4), a fifth diaphragm (5), a sixth diaphragm (6), and a panel (7) stacked sequentially, characterized in that, The sixth diaphragm (6) is provided with a detection channel (8), and the fifth diaphragm (5) is provided with an air channel (9). It also includes: The detection electrode (10) and the reference electrode (18) are respectively fixedly installed inside the detection channel (8) and the air channel (9). The detection channel (8) is provided with at least three buffer blocks (12) and at least two oxygen pumping electrodes (11) are fixedly installed in the detection channel (8). The two oxygen pumping electrodes (11) are located between two buffer blocks (12) in adjacent positions.

2. The edge failure preventing sensitive oxygen sensor chip according to claim 1, wherein A pair of common electrodes (15) are fixedly disposed on the panel (7).

3. The edge failure preventing sensitive oxygen sensor chip according to claim 2, wherein One end of the buffer block (12) is provided with a buffer protrusion (13), which faces the air inlet end of the detection channel (8).

4. The edge failure preventing sensitive oxygen sensor chip according to claim 3, wherein The cross-sectional shape of the buffer protrusion (13) is triangular or isosceles trapezoidal, and the pointed cone end of the buffer protrusion (13) faces the air inlet end of the detection channel (8).

5. The edge failure preventing sensitive oxygen sensor chip according to claim 3, wherein Both ends of the buffer block (12) are fixedly connected to strip blocks (14), and the strip blocks (14) are parallel to the detection channel (8).

6. The edge failure preventing sensitive oxygen sensor chip according to claim 5, wherein Two strip blocks (14) are provided on the buffer block (12) located in the middle of the detection channel (8), and a buffer channel (16) is formed between the two strip blocks (14). The ends of the strip blocks (14) located at both ends of the detection channel (8) face the buffer channel (16).

7. The edge failure preventing sensitive oxygen sensor chip according to claim 1, wherein A heating wire (17) is fixedly installed inside the third diaphragm (3).

8. The edge failure preventing sensitive oxygen sensor chip according to claim 7, wherein The heating wire (17) is shaped like the letter W.