Automatic leveling MPCVD sample stage and MPCVD equipment

Abstract

The utility model discloses an automatic leveling MPCVD sample stage and MPCVD equipment, and relates to the technical field of chemical vapor deposition, the automatic leveling MPCVD sample stage is supported by arranging at least three supporting footstands at the bottom of a sample stage bearing body, and the automatic leveling MPCVD sample stage is supported by arranging horizontal sensors at different positions of the sample stage bearing body through a horizontal detection unit. The horizontal state information of the sample table bearing body is detected in real time, the control unit is connected with the horizontal detection unit and the leveling execution unit and used for adjusting the height of the supporting footstand so that horizontal adjustment of the sample table bearing body can be achieved, automatic leveling of the sample table bearing body can be achieved in the whole process, manual operation is not needed, and the working efficiency is improved. The leveling efficiency and precision are greatly improved, horizontal state changes caused by factors such as equipment vibration can be monitored and adjusted in real time, it is guaranteed that the sample table is always in a horizontal state in the MPCVD technological process, and therefore it is guaranteed that the distance between a substrate and plasma is uniform and consistent.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition technology, and in particular to an automatically leveling MPCVD sample stage and MPCVD equipment. Background Technology

[0002] MPCVD (Microwave Plasma Chemical Vapor Deposition) uses a microwave source to generate microwaves, which, under the influence of the microwave field, excite the reactive gas into a plasma state. Plasma is an ionized gaseous substance composed of positive and negative ions generated after atoms and atomic groups have lost some electrons. The high temperature of the plasma allows the substrate to be heated to a certain temperature, enabling film deposition at a rate on the micrometer scale per hour.

[0003] In the MPCVD process, the levelness of the sample stage has a crucial impact on the deposition quality of the thin film on the substrate surface. If the sample stage is not level enough, the distance between the substrate and the plasma will be inconsistent, resulting in differences in deposition rate and film thickness at different locations on the substrate surface, which seriously affects the uniformity and quality of the film.

[0004] Currently, most existing MPCVD sample stages use manual leveling, which is not only cumbersome and inefficient, but also makes it difficult to guarantee leveling accuracy, failing to meet the requirements of high-precision thin film preparation. Furthermore, during long-term equipment operation, the level of the sample stage may change due to vibrations and other factors, and manual leveling cannot adjust it in a timely manner.

[0005] Therefore, there is an urgent need for an MPCVD sample stage that can automatically level to improve the quality and efficiency of thin film deposition. Utility Model Content

[0006] The purpose of this invention is to provide an automatically leveling MPCVD sample stage and MPCVD equipment to solve the problems of cumbersome manual leveling operation, low accuracy, and inability to adjust the horizontal state in real time in existing sample stages. This invention enables automatic, fast, and accurate leveling of the sample stage, thereby improving the uniformity and quality of thin film deposition on the substrate.

[0007] To address the aforementioned technical problems, this utility model provides an automatically leveling MPCVD sample stage, comprising a sample stage carrier, a level detection unit, a control unit, and a leveling execution unit. The sample stage carrier supports a substrate and is supported by at least three support feet at its bottom. The level detection unit uses level sensors positioned at different locations on the sample stage carrier to detect the level status of the sample stage carrier in real time. The control unit is connected to the level detection unit and the leveling execution unit and is used to adjust the height of the support feet to achieve level adjustment of the sample stage carrier.

[0008] Among them, multiple horizontal sensors will be evenly distributed on the outside of the sample stage support.

[0009] The leveling execution unit includes multiple electric lifting devices connected one-to-one with the support feet. The electric lifting devices are used to adjust the height of the support feet, thereby realizing the horizontal adjustment of the sample stage carrier. Alternatively, the leveling execution unit includes a displacement component and an electric lifting device. The displacement component is used to transfer the electric lifting device to the support feet where the height needs to be adjusted, and to adjust the height of the support feet through the electric lifting device.

[0010] It also includes a usability status indicator connected to the control unit, the control unit being used to output the current usability status of the sample stage carrier and display it through the usability status indicator.

[0011] The electric lifting device is an electric cylinder lifting device, an electric lead screw adjusting device, or an electric telescopic rod adjusting device.

[0012] The electric lead screw adjustment device includes a motor, a lead screw, and a nut assembly. The nut assembly is connected to the height adjustment part of the support foot. The motor drives the lead screw to rotate, causing the nut assembly, which is located on the rotating lead screw, to move on the lead screw, thereby driving the support foot to rise or fall.

[0013] It also includes a display connected to the level detection unit and the control unit, used to display the level status information of the sample stage carrier.

[0014] It also includes an adjustment duration setting unit connected to the control unit, used to input the total working time of the motor in a single execution of the control command by the leveling execution unit.

[0015] It also includes an adjustment sequence setting unit connected to the control unit, used to input the adjustment sequence of the support feet in the adjustment command executed by the leveling execution unit in a single operation.

[0016] In addition, embodiments of this application also provide an MPCVD apparatus, including an automatically leveled MPCVD sample stage as described above.

[0017] The automatically leveling MPCVD sample stage and MPCVD equipment provided in this embodiment of the invention have the following advantages compared with the prior art:

[0018] The automatically leveling MPCVD sample stage and MPCVD equipment provided in this embodiment are supported by at least three support feet at the bottom of the sample stage carrier. A level detection unit with level sensors at different positions on the sample stage carrier monitors the level status of the carrier in real time. A control unit connected to the level detection unit and the leveling execution unit adjusts the height of the support feet to achieve level adjustment of the sample stage carrier. The entire process achieves automatic leveling of the sample stage carrier without manual operation, greatly improving the efficiency and accuracy of leveling. It can monitor and adjust changes in level status caused by factors such as equipment vibration in real time, ensuring that the sample stage remains level throughout the MPCVD process. This ensures a uniform distance between the substrate and the plasma, improving the uniformity and quality of thin film deposition on the substrate, and facilitating the preparation of high-quality thin film materials. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 A schematic diagram of one embodiment of the automatically leveling MPCVD sample stage provided by this utility model;

[0021] Among them, 1-sample stage carrier, 2-support foot, 3-level sensor, 4-motor, 5-lead screw, 6-nut assembly, 7-belt, 8-control unit. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please refer to Figure 1 , Figure 1 This is a schematic diagram of one embodiment of the automatically leveling MPCVD sample stage provided by this utility model.

[0024] In one specific embodiment, the automatically leveling MPCVD sample stage includes a sample stage carrier 1, a level detection unit, a control unit 8, and a leveling execution unit. The sample stage carrier 1 is used to carry the substrate and is supported by at least three support feet 2 located at the bottom. The level detection unit detects the level status information of the sample stage carrier 1 in real time through level sensors 3 located at different positions on the sample stage carrier 1. The control unit 8 is connected to the level detection unit and the leveling execution unit, and is used to adjust the height of the support feet 2 to achieve level adjustment of the sample stage carrier 1.

[0025] The sample stage carrier is supported by at least three support feet 2 at its bottom. A horizontal sensor located at different positions on the sample stage carrier 1, connected to a horizontal detection unit, monitors the horizontal status of the sample stage carrier 1 in real time. A control unit, connected to the horizontal detection unit and the leveling execution unit, adjusts the height of the support feet 2 to achieve horizontal adjustment of the sample stage carrier 1. The entire process automatically levels the sample stage carrier 1 without manual operation, significantly improving the efficiency and accuracy of leveling. It can monitor and adjust for changes in horizontal status caused by equipment vibration and other factors in real time, ensuring that the sample stage remains horizontal throughout the MPCVD process. This ensures a uniform distance between the substrate and the plasma, improving the uniformity and quality of thin film deposition on the substrate, and facilitating the preparation of high-quality thin film materials.

[0026] During the specific leveling process, the control unit 8 calculates the horizontal deviation of the sample stage carrier 1 based on the horizontal status information, and sends a control command to the leveling execution unit based on the horizontal deviation. The leveling execution unit adjusts the height of the support feet 2 according to the control command, thereby realizing the horizontal adjustment of the sample stage carrier 1. Throughout the process, the horizontal detection unit monitors the horizontal status of the sample stage carrier 1 in real time and feeds the signal back to the control unit 8. The control unit 8 controls the leveling execution unit to automatically level the sample stage carrier 1 based on the signal analysis results.

[0027] This application does not limit the type or arrangement of the horizontal sensor 3. Preferably, the multiple horizontal sensors 3 are evenly distributed on the outside of the sample stage support 1.

[0028] Two horizontal sensors 3 are evenly distributed and installed on both sides of the sample stage support 1.

[0029] By evenly distributing multiple horizontal sensors 3 on the outside of the sample stage support 1, its efficiency and the stability of horizontal detection can be improved.

[0030] In this application, the height is adjusted by a leveling execution unit, and its structure is not limited.

[0031] In one embodiment, the leveling execution unit includes multiple electric lifting devices connected one-to-one with the support feet 2. The electric lifting devices are used to adjust the height of the support feet 2, thereby realizing the horizontal adjustment of the sample stage carrier 1. Alternatively, the leveling execution unit includes a displacement component and an electric lifting device. The displacement component is used to transfer the electric lifting device to the support feet 2 where the height needs to be adjusted, and to adjust the height of the support feet 2 through the electric lifting device.

[0032] By setting up an electric lifting device, the height of the support foot 2 can be adjusted one-to-one, or the height of all support feet 2 can be adjusted using only one electric lifting device through a displacement component, thereby improving control efficiency.

[0033] This application does not limit the structure of the displacement component. Rotating components such as gears can be used to realize the position transfer of the electric lifting device, or other components can be used.

[0034] To further improve efficiency, in one embodiment, the automatically leveling MPCVD sample stage also includes a usability status indicator connected to the control unit 8. The control unit 8 is used to output the current usability status of the sample stage carrier 1 and display it through the usability status indicator.

[0035] By setting up a usability status indicator component, the current usability status of the sample stage support 1 is displayed according to its current horizontal state. This allows staff to obtain real-time information on whether the platform is level and usable, improving efficiency and preventing situations where the equipment is in use while it is being adjusted, thus enhancing overall usability.

[0036] This application does not limit the type of status indicator component or the display method that can be used. Red and green indicator lights can be used for indication, or numbers, text, or other methods can be used for display.

[0037] In this application, an electric lifting device is used to adjust the height of the support foot 2. The structure and working method of the device are not limited. The electric lifting device can be an electric cylinder lifting device, an electric screw adjusting device, an electric telescopic rod adjusting device, or other electric lifting devices.

[0038] To improve stability during use, in one embodiment, the electric lead screw adjustment device includes a motor 4, a lead screw 5, and a nut assembly 6. The nut assembly 6 is connected to the height adjustment part of the support foot 2. The motor 4 is used to drive the lead screw 5 to rotate, so that the nut assembly 6, which is located on the lead screw 5, moves on the lead screw 5, thereby driving the support foot 2 to rise or fall.

[0039] By using a lead screw 5 structure for lifting and adjustment, a high degree of precision in adjusting the height of the support foot 2 can be achieved.

[0040] The structure of the motor 4, lead screw 5 and nut assembly 6 is not limited in this application, and the structure of the electric lead screw adjustment device includes, but is not limited to, the above-mentioned mechanisms.

[0041] To further improve management efficiency and achieve real-time display of the control process, in one embodiment, the automatically leveling MPCVD sample stage also includes a display connected to the level detection unit and the control unit 8, for displaying the level status information of the sample stage carrier 1.

[0042] The display shows the horizontal status information of the sample stage carrier 1 and the corresponding control commands. Control information can be obtained in real time during the real-time adjustment of the sample stage, thus improving management efficiency.

[0043] The structure and display method of the display are not shown in this application.

[0044] Since different processing procedures have different requirements for the precision of the control process and different control speeds, in one embodiment, the automatically leveling MPCVD sample stage also includes an adjustment duration setting unit connected to the control unit 8, which is used to input the total working time of the motor 4 in a single execution of the control command by the leveling execution unit.

[0045] By setting the adjustment duration setting unit to input the total working time of the motor 4 in a single execution of the control command by the leveling execution unit, the adjustment height within a unit of time can be refined. For example, if the same 5 mm height adjustment is completed within 5 seconds versus within 10 seconds, the adjustment of the rotation accuracy of the motor 4 can be more precise, making it easier to improve control accuracy.

[0046] This application does not limit the input method of the adjustment duration setting unit. It can be to refine the adjustment of each stage and set the adjustment duration for each stage.

[0047] In actual adjustments, there may be situations where multiple support feet 2 need to be adjusted. However, the order of adjustment, the speed of leveling, and the damage to the equipment may vary. In other words, if the adjustment method is incorrect, it may cause damage to the equipment.

[0048] Therefore, in order to improve the efficiency and safety of leveling, in one embodiment, the automatically leveling MPCVD sample stage further includes an adjustment sequence setting unit connected to the control unit 8, which is used to input the adjustment sequence of the support feet 2 in the control command executed by the leveling execution unit once.

[0049] By setting the adjustment sequence setting unit, the adjustment sequence of the support foot 2 in the single execution of the control command by the leveling execution unit can be input. During the automatic adjustment process of the control unit 8, the set adjustment sequence can be automatically executed, which will not cause equipment damage due to adjustment uncertainty and improve adjustment efficiency.

[0050] In one embodiment, the automatically leveling MPCVD sample stage includes a sample stage carrier 1, a level detection unit, a control unit 8, and a leveling execution unit.

[0051] The sample stage carrier 1 is used to support the substrate, and its bottom is provided with a number of support feet 2. The support feet 2 are connected to the sample stage carrier 1 through an adjustable height connection structure.

[0052] The horizontal detection unit includes multiple high-precision horizontal sensors 3, which are distributed on the surface or edge of the sample stage carrier 1 to detect the horizontal state of the sample stage carrier 1 in real time and transmit the detection signal to the control unit 8.

[0053] The control unit 8 is a processor with data processing and control functions, and it is electrically connected to the level detection unit and the leveling execution unit. The control unit 8 receives the detection signal from the level detection unit, analyzes and processes the signal, calculates the horizontal deviation of the sample stage support 1, and issues corresponding control commands to the leveling execution unit based on the calculation results.

[0054] The leveling unit includes multiple electric lifting devices, each connected to a support foot 2, used to adjust the height of the support foot 2 according to the instructions of the control unit 8, thereby achieving horizontal adjustment of the sample stage support 1. The electric lifting device includes a motor 4, a lead screw 5, and a nut assembly 6. The motor 4 drives the lead screw 5 to rotate, and the nut assembly 6 moves up and down on the lead screw 5, thereby causing the support foot 2 to rise or fall.

[0055] The horizontal detection unit monitors the horizontal status of the sample stage carrier 1 in real time and feeds the signal back to the control unit 8. The control unit 8 controls the leveling execution unit to automatically level the sample stage carrier 1 based on the signal analysis results, eliminating the need for manual operation and greatly improving the efficiency and accuracy of leveling.

[0056] The aforementioned device enables real-time monitoring and adjustment of horizontal state changes caused by factors such as equipment vibration, ensuring that the sample stage remains horizontal throughout the MPCVD process. This ensures a uniform distance between the substrate and the plasma, improving the uniformity and quality of thin film deposition on the substrate and facilitating the preparation of high-quality thin film materials.

[0057] The electric lifting device is used as the leveling actuator. It has a simple structure, is easy to implement, and has high control precision. It can quickly and accurately adjust the level of the sample stage, and has good practicality and reliability.

[0058] The installation and setup process is as follows:

[0059] Two high-precision level sensors 3 are evenly distributed on both sides of the sample stage support 1, ensuring comprehensive and accurate detection of the levelness of the sample stage support 1 through the viewing window. Four sets of components—motor 4, lead screw 5, and nut assembly 6—are evenly distributed around the perimeter of the sample stage support 1. The motor 4, lead screw 5, and nut assembly 6 of the electric lifting device are installed at the connection structure between the support foot 2 and the sample stage support 1, fixing the nut assembly 6 to the support foot 2. The motor 4 drives the lead screw 5 to rotate. The control unit is installed inside the control box of the MPCVD equipment and electrically connected to the level sensor 3 of the level detection unit and the motor 4 of the leveling execution unit via wires.

[0060] The work process is as follows:

[0061] After the substrate is placed on the sample stage carrier 1, the level sensor 3 of the level detection unit begins to detect the level status of the sample stage carrier 1 in real time and transmits the detected signal to the control unit. The control unit analyzes and processes the received signal to calculate the level deviation of the sample stage carrier 1 in various directions.

[0062] If the sample stage carrier 1 is detected to be out of level, the control unit sends a control command to the motor 4 of the corresponding electric lifting device based on the calculated level deviation. Upon receiving the command, the motor 4 drives the lead screw 5 to rotate, causing the nut assembly 6 to move up and down on the lead screw 5, thereby raising or lowering the support feet 2 to adjust the levelness of the sample stage carrier 1. During the adjustment process, the level detection unit continuously monitors the levelness of the sample stage carrier 1 and feeds back the real-time data to the control unit. The control unit continuously adjusts the action of the electric lifting device based on the feedback data until the sample stage carrier 1 reaches a level state. Throughout the MPCVD process, the level detection unit continuously monitors the levelness of the sample stage carrier 1 in real time. If a change in levelness is detected, the above leveling process is immediately repeated to ensure that the sample stage carrier 1 remains level at all times.

[0063] In addition, embodiments of this application also provide an MPCVD apparatus, including an automatically leveled MPCVD sample stage as described above.

[0064] Since the MPCVD equipment includes the automatically leveled MPCVD sample stage as described above, it has the same beneficial effects, which will not be elaborated upon in this application.

[0065] In summary, the automatically leveling MPCVD sample stage and MPCVD equipment provided in this embodiment of the invention are supported by at least three support feet at the bottom of the sample stage carrier. A level detection unit with level sensors at different positions on the sample stage carrier detects the level status of the sample stage carrier in real time. The control unit is connected to the level detection unit and the leveling execution unit to adjust the height of the support feet, thereby achieving level adjustment of the sample stage carrier 1. The entire process achieves automatic leveling of the sample stage carrier without manual operation, greatly improving the efficiency and accuracy of leveling. It can monitor and adjust changes in the level status caused by factors such as equipment vibration in real time, ensuring that the sample stage remains level throughout the MPCVD process. This ensures a uniform distance between the substrate and the plasma, improving the uniformity and quality of thin film deposition on the substrate, and facilitating the preparation of high-quality thin film materials.

[0066] The above provides a detailed description of the automatically leveling MPCVD sample stage and MPCVD equipment provided by this utility model. Specific examples have been used to illustrate the principles and implementation methods of this utility model. The descriptions of the embodiments above are merely for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. An automatically leveling MPCVD sample stage, characterized in that, The device includes a sample stage carrier, a level detection unit, a control unit, and a leveling execution unit. The sample stage carrier is used to support a substrate and is supported by at least three support feet located at the bottom. The level detection unit uses level sensors located at different positions on the sample stage carrier to detect the level status information of the sample stage carrier in real time. The control unit is connected to the level detection unit and the leveling execution unit and is used to adjust the height of the support feet to achieve level adjustment of the sample stage carrier.

2. The automatically leveling MPCVD sample stage as described in claim 1, characterized in that, Multiple horizontal sensors will be evenly distributed on the outside of the sample stage support.

3. The automatically leveling MPCVD sample stage as described in claim 1, characterized in that, The leveling execution unit includes multiple electric lifting devices connected one-to-one with the support feet. The electric lifting devices are used to adjust the height of the support feet to achieve horizontal adjustment of the sample stage carrier. Alternatively, the leveling execution unit includes a displacement component and an electric lifting device. The displacement component is used to transfer the electric lifting device to the support feet where height adjustment is required, and adjust the height of the support feet through the electric lifting device.

4. The automatically leveling MPCVD sample stage as described in claim 3, characterized in that, It also includes a usability status indicator connected to the control unit, the control unit being used to output the current usability status of the sample stage carrier and display it through the usability status indicator.

5. The automatically leveling MPCVD sample stage as described in claim 4, characterized in that, The electric lifting device is an electric cylinder lifting device, an electric lead screw adjusting device, or an electric telescopic rod adjusting device.

6. The automatically leveling MPCVD sample stage as described in claim 5, characterized in that, The electric lead screw adjustment device includes a motor, a lead screw, and a nut assembly. The nut assembly is connected to the height adjustment part of the support foot. The motor is used to drive the lead screw to rotate, so that the nut assembly set on the lead screw moves on the lead screw, thereby driving the support foot to rise or fall.

7. The automatically leveling MPCVD sample stage as described in any one of claims 1-6, characterized in that, It also includes a display connected to the level detection unit and the control unit, for displaying the level status information of the sample stage carrier.

8. The automatically leveling MPCVD sample stage as described in claim 7, characterized in that, It also includes an adjustment duration setting unit connected to the control unit, used to input the total working time of the motor in a single execution of the control command by the leveling execution unit.

9. The automatically leveling MPCVD sample stage as described in claim 8, characterized in that, It also includes an adjustment sequence setting unit connected to the control unit, used to input the adjustment sequence of the support feet in the adjustment command executed by the leveling execution unit in a single operation.

10. An MPCVD device, characterized in that, Includes the automatically leveling MPCVD sample stage as described in any one of claims 1-9.

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