Doping device and single crystal furnace

Abstract

The utility model discloses a doping device and a single crystal furnace, and belongs to the technical field of single crystal furnaces, the doping device comprises: a housing having a first accommodating cavity; the feeding part comprises a connecting rod, a containing part and a first connecting part, the connecting rod is connected with the containing part and the first connecting part, and the first connecting part is located in the first containing cavity; and the driving piece is located outside the first containing cavity and used for being in linkage with the first connecting part and the connecting rod so as to drive the containing part to move in the axial direction of the shell. The doping device can be used in cooperation with the single crystal furnace, gas volatilized in the single crystal furnace due to the influence of high temperature can be prevented from entering the external environment through the opening, the loss of the amount of the supplemented doping agent can be avoided, the problem that the amount of the doping agent is uncontrollable due to volatilization of the doping agent is solved, and the doping effect of the single crystal furnace is improved. And the quality of the monocrystalline silicon is influenced due to the insufficient amount of the supplemented dopant, and the effectiveness and the accuracy of supplementary doping are ensured.

Description

Technical Field

[0001] This application belongs to the field of single crystal furnace technology, and specifically relates to a doping device and a single crystal furnace. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon using a graphite heater in an inert gas environment (mainly nitrogen and helium) and grows single crystals using the Czochralski method. When silicon crystals are prepared in a single crystal furnace, silicon material and dopant need to be added. If the amount of dopant is insufficient, some dopant needs to be added through an opening in the auxiliary furnace chamber. During the doping process, due to the high temperature inside the furnace, the dopant is prone to volatilization, resulting in a reduced amount of dopant added, and the amount of dopant added cannot be effectively controlled. Utility Model Content

[0003] The purpose of this utility model is to provide a doping device to overcome the technical problem that the dopant will volatilize into the outside during the doping process, resulting in a reduction in the amount of dopant and making it impossible to effectively control the doping dosage; another purpose of this application is to provide a single crystal furnace.

[0004] Technical solution: A doping device according to an embodiment of this application includes:

[0005] The outer casing has a first receiving cavity;

[0006] The feeding component includes a connecting rod, a holding part, and a first connecting part. The connecting rod connects the holding part and the first connecting part, and the first connecting part is located inside the first receiving cavity.

[0007] A driving component, located outside the first receiving cavity, is used to link the first connecting part and the connecting rod to drive the holding part to move along the axial direction of the outer shell.

[0008] In some embodiments, the drive member and the first connecting portion are magnetically connected.

[0009] In some embodiments, the doping device further includes:

[0010] A guide member is arranged around the outer casing, and the guide member is provided with a guide groove;

[0011] The driving component includes a pushing part and a second connecting part. The second connecting part is disposed between the housing and the guide member. The pushing part passes through the guide groove and is connected to the second connecting part.

[0012] In some embodiments, the guide groove includes a first groove and a second groove that are connected to each other, the first groove extending axially along the housing and the second groove extending circumferentially along the housing.

[0013] In some embodiments, the doping device includes:

[0014] A locking element is disposed on the guide element and rotatably connected to the guide element, the locking element being used to hook the drive element.

[0015] In some embodiments, the dimension of the first connecting part in the first direction is D, and the dimension of the connecting rod in the first direction is d, satisfying: D > d;

[0016] The doping device further includes:

[0017] A first support portion is located within the first receiving cavity and connected to the outer shell. The first support portion has a through hole communicating with the first receiving cavity. The through hole extends along the axial direction of the outer shell. The connecting rod passes through the through hole and is slidably connected to the first support portion.

[0018] In some embodiments, the connecting rod extends through the first connecting portion to a side away from the holding portion; the feeding component includes:

[0019] Multiple second support portions are located within the first receiving cavity and connected to the connecting rod. The multiple second support portions are slidably connected to the outer shell. At least one second support portion is disposed on the side of the first connecting portion facing the holding portion, and at least one second support portion is disposed on the side of the first connecting portion away from the holding portion.

[0020] In some embodiments, the doping device includes:

[0021] An extension member is connected to one end of the outer casing. The extension member has a third receiving cavity that communicates with the first receiving cavity. The extension direction of the third receiving cavity is the same as that of the first receiving cavity. The third receiving cavity is used to receive the holding part.

[0022] In some embodiments, the doping device further includes a sealing ring located on the side of the housing facing the holding portion and connected to the housing.

[0023] A single crystal furnace, comprising:

[0024] The main furnace body and the auxiliary furnace body are connected, and an isolation valve is provided between them;

[0025] The doping device described in any one of the above embodiments is detachably connected to the auxiliary furnace body, such that, in the connected state, the holding part of the doping device can be moved into the interior of the auxiliary furnace body.

[0026] Beneficial Effects: The doping device of this application embodiment includes: a housing having a first receiving cavity; a feeding component including a connecting rod, a holding portion, and a first connecting portion, the connecting rod connecting the holding portion and the first connecting portion, and the first connecting portion located within the first receiving cavity; and a driving component located outside the first receiving cavity, used to link the first connecting portion and the connecting rod to drive the holding portion to move axially along the housing. This doping device can be used in conjunction with a single crystal furnace. After the two are connected, the driving component can drive the holding portion to move circumferentially along the housing and to flip it via the first connecting portion and the connecting rod, facilitating the pouring of the dopant inside the holding portion into the interior of the single crystal furnace, without needing to pour the dopant from the top opening of the single crystal furnace. When the dopant is poured in, the opening is closed, preventing the gases volatilized by the dopant in the single crystal furnace due to high temperature from entering the external environment through the opening. This avoids the loss of the amount of supplemented dopant, improves the problem of uncontrollable dopant amount caused by dopant volatilization, and the problem of insufficient supplemented dopant affecting the quality of single crystal silicon, ensuring the effectiveness and accuracy of supplementary doping. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a front cross-sectional view of the doping device according to an embodiment of this application;

[0029] Figure 2 This is a perspective view of the doping device according to an embodiment of this application;

[0030] Figure 3 This is a front view of the feeding component in an embodiment of this application;

[0031] Figure 4 This is a side sectional view of the doping device in an embodiment of this application at the location of the driving member;

[0032] Figure 5 This is a front view of the doping device according to an embodiment of this application;

[0033] Figure 6 This is a front cross-sectional view of the doping device according to an embodiment of this application, wherein an extension member is connected to one end of the housing;

[0034] Figure 7 This is a schematic diagram of the connection between the single crystal furnace and the doping device in an embodiment of this application;

[0035] Reference numerals: 10-Outer shell; 11-First receiving cavity; 20-Feeding component; 21-Second receiving cavity; 22-First connecting part; 23-Connecting rod; 24-Holding part; 25-First support part; 251-Through hole; 26-Second support part; 30-Drive component; 31-Pushing part; 312-Actuating rod; 32-Second connecting part; 321-Base; 322-Connecting block; 323-Mounting groove; 40-Guide component; 41-Sliding groove; 42-Guide groove; 421-First groove; 422-Second groove; 50-Locking component; 60-Main furnace body; 70-Secondary furnace body; 71-Opening; 80-Isolation valve; 90-Extension component; 91-Third receiving cavity; 100-Sealing ring. Detailed Implementation

[0036] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0037] In the description of this application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, and "at least one" can mean one, two, or more, unless otherwise explicitly specified.

[0038] A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon using a graphite heater in an inert gas environment (mainly nitrogen and helium) and grows dislocation-free single crystals using the Czochralski method. When silicon crystals are prepared in a single crystal furnace, dopants need to be added. The dopants are introduced into the main furnace through an opening in the auxiliary furnace body. During this process, due to the high temperature inside the furnace (and also at the opening of the auxiliary furnace body), the dopants easily volatilize, reducing the amount that can be added. The volatilized gases are released into the external environment through the opening of the auxiliary furnace body, posing a hazard to the environment and nearby workers, making the doping process unsafe.

[0039] In view of the above, embodiments of this application provide a doping device to overcome at least one of the above-mentioned technical problems.

[0040] Please see Figure 1 and Figure 7 In this embodiment of the application, the doping device is used to connect to the auxiliary furnace body 70 of the single crystal furnace. The doping device includes: a shell 10, a feeding component 20 and a driving component 30.

[0041] The outer casing 10 has a first receiving cavity 11. The feeding component 20 includes a connecting rod 23, a holding portion 24, and a first connecting portion 22. The holding portion 24 has a second receiving cavity 21 for holding materials. The connecting rod 23 connects the holding portion 24 and the first connecting portion 22, and the first connecting portion 22 is located inside the first receiving cavity 11. The driving component 30 is at least partially located outside the first receiving cavity 11 and is used to link the first connecting portion 22 and the connecting rod 23 to drive the holding portion 24 to move along the axial direction X of the outer casing 10.

[0042] It is understood that this doping device can be used in conjunction with corresponding equipment for feeding materials into the equipment, such as a single crystal furnace. By connecting the two, dopant can be fed into the single crystal furnace through this device. The outer shell 10 of the doping device has a first receiving cavity 11, which communicates with the interior of the single crystal furnace. The connecting rod 23 and the first connecting part 22 can slide inside the first receiving cavity 11. The first connecting part 22 is always located inside the first receiving cavity 11. The first connecting part 22 is connected to the holding part 24 through the connecting rod 23. The first connecting part 22, the connecting rod 23, and the holding part 24 can all move along the axial direction X of the outer shell 10. The driving member 30 of the doping device is sleeved on the outside of the outer shell 10. The driving member 30 can be arranged around the outer shell 10 or on one side of the outer shell 10. The driving member 30 is connected to the first connecting part 22 on the feeding member 20. The driving member 30 can drive the first connecting part 22 to drive the connecting rod 23 and the holding part 24 to move along the axial direction X of the outer shell 10. For example, the driving component 30 is magnetically connected to the first connecting portion 22 on the feeding component 20, and the magnetic force drives the first connecting portion 22 to move along the axial direction X of the outer shell 10. The driving component 30 can be configured as a ring-shaped structure, surrounding the outer side of the outer shell 10 and corresponding to the position of the first connecting portion 22 for easy magnetic connection with the first connecting portion 22. Alternatively, it can be located on one side of the outer shell 10 and magnetically connected to the first connecting portion 22, both of which can drive the first connecting portion 22 to move. Of course, the driving component 30 can not only be connected to the first connecting part 22 by magnetic attraction, but can also penetrate the outer shell 10 and be directly connected to the first connecting part 22 in the first receiving cavity 11. Since the first connecting part 22 needs to be moved by the driving component 30, this direct connection method requires good sealing measures, such as setting a flexible sealing sleeve (rubber or silicone material) between the driving component 30 and the outer shell 10. The sealing sleeve can be extended and folded to facilitate the movement of the driving component 30 in the corresponding direction. It can also prevent the first receiving cavity 11 from being connected to the external environment, prevent the material to be added from evaporating and dissipating into the external environment through the first receiving cavity 11; and prevent the gas in the external environment from entering the interior of the single crystal furnace through the first receiving cavity 11.

[0043] When used in conjunction with a single crystal furnace, the doping device can have a through hole on one side of the auxiliary furnace body 70 of the single crystal furnace. One end of the outer shell 10 of the doping device can be installed at the through hole on one side of the auxiliary furnace body 70 via a connecting structure (such as a flange, snap-fit, etc.), thereby connecting the internal space of the auxiliary furnace body 70 with the first receiving cavity 11. The connection between the doping device and the auxiliary furnace body 70 can be made using a sealing structure (such as a sealing ring) to ensure the airtightness of the connection. After connecting the two parts, the first connecting part 22 on the feeding part 20 can be moved along the axial direction X of the outer shell 10 by the driving component 30. The first connecting part 22 can drive the connecting rod 23 and the holding part 24 to move in the same direction, so that the holding part 24 moves into the internal space of the auxiliary furnace body 70. The holding part 24 can be a spoon-shaped structure, or a notch can be provided on the side of the holding part 24 away from the connecting rod 23. When the holding part 24 moves along the axial direction X of the outer shell 10, the dopant contained inside can fly out under the action of inertia and enter the interior of the main furnace body 60 to complete the doping work. When the driving component 30 drives the first connecting part 22 to move along the axial direction X of the outer shell 10 to a specific position, the driving component 30 can also drive the first connecting part 22 to flip, so that the first connecting part 22 drives the holding part 24 to flip through the connecting rod 23, so that the dopant contained in the holding part 24 is poured into the interior of the main furnace body 60. Therefore, the holding part 24 can move along the axial direction X of the outer shell 10, and the dopant leaves the interior of the holding part 24 under the action of inertia; or it can move along the axial direction X of the outer shell 10 to the corresponding position, and then drive the holding part 24 to flip by the drive member 30, so that the dopant inside falls into the interior of the main furnace body 60.

[0044] like Figure 7 As shown, when adding dopant, the isolation valve 80 between the auxiliary furnace body 70 and the main furnace body 60 can be closed first to isolate their internal spaces and prevent the high temperature inside the main furnace body 60 from affecting the auxiliary furnace body 70. Then, the top opening 71 of the auxiliary furnace body 70 can be opened (e.g., Figure 7As shown, opening 71 is located at the top of the auxiliary furnace body 70, and the bottom of the auxiliary furnace body 70 is connected to the main furnace body 60. During redoping, the dopant to be replenished can be placed into the holding part 24 of the auxiliary furnace body 70 through opening 71. The first connecting part 22, connecting rod 23, and holding part 24 are moved by the driving component 30, causing the holding part 24 to move along the axial direction X of the outer shell 10 into the interior of the auxiliary furnace body 70. The dopant to be replenished is then poured into the holding part 24 at one end of the feeding component 20 through opening 71. After the dopant is placed inside the holding part 24, the opening 71 of the auxiliary furnace body 70 is closed to prevent foreign objects from falling into the interior of the main furnace body 60 through the opening 71 during single-crystal silicon production. Next, the interior of the auxiliary furnace body 70 is evacuated, and the first receiving cavity 11, which is connected to the interior of the auxiliary furnace body 70, is also evacuated. This reduces the impact of other gases on the production process and also reduces the resistance when the first connecting part 22, connecting rod 23, and holding part 24 move, thus facilitating the movement of the feeding part 20 driven by the drive component 30. Then, the isolation valve 80 between the auxiliary furnace body 70 and the main furnace body 60 is opened, allowing the internal spaces of the auxiliary furnace body 70 and the main furnace body 60 to connect. The drive component 30 is moved, causing the feeding part 20 to move, such as flipping, so that the dopant inside the holding part 24 can be poured into the main furnace body 60, completing the supplementary doping work in the monocrystalline silicon production process. Alternatively, before connecting the doping device to the auxiliary furnace body 70, the dopant can be placed in the holding section 24 of the doping device first, and then the doping device can be connected to the auxiliary furnace body 70. This eliminates the need to open the opening 71 of the auxiliary furnace body 70. The interior of the auxiliary furnace body 70 can be directly evacuated to a vacuum state. Then, the isolation valve 80 between the auxiliary furnace body 70 and the main furnace body 60 can be opened. By operating and controlling the doping device from outside the auxiliary furnace body 70, the dopant in the holding section 24 can enter the main furnace body 60 from the auxiliary furnace body 70, saving the step of pouring the dopant into the holding section 24 from the opening 71 of the auxiliary furnace body 70. Preferably, the holding part 24 can be moved to the center of the auxiliary furnace body 70, facilitating the relatively uniform delivery of dopant from the inside of the auxiliary furnace body 70 to the inside of the main furnace body 60. This avoids the holding part 24 being too close to the furnace wall of the auxiliary furnace body 70, preventing interference with the furnace wall during rotation, and also preventing the dopant spilled from the holding part 24 during rotation from being blocked by the furnace wall and not being evenly distributed. When the doping device is not in use, the holding part 24 can be positioned as close as possible to the inner wall of the auxiliary furnace body 70 to avoid affecting the formation of single crystal silicon. The outer shell 10 can even be made long enough so that the first receiving cavity 11 can completely accommodate the first connecting part 22, the connecting rod 23, and the holding part 24. This allows the first connecting part 22, the connecting rod 23, and the holding part 24 to be completely housed inside the first receiving cavity 11 when the doping device is not in use, thereby avoiding any impact on the formation of single crystal silicon.

[0045] During the above operation, the isolation valve 80 and the opening 71 can be repeatedly opened and closed, allowing the holding section 24 to repeatedly add material to the main furnace body 60. When dopant is added to the main furnace body 60, the dopant is isolated from the outside environment. Even if it volatilizes due to high temperature, it will not escape to the outside and can still react with the materials inside the furnace. This prevents the volatile gases generated during the process from escaping into the external environment through the opening 71 of the auxiliary furnace body 70, thus avoiding harm to the environment and surrounding personnel and improving the safety of the doping process. It also ensures that the amount of dopant added to the single crystal furnace does not change, allowing for relatively accurate control of the doping amount. This effectively controls the resistivity of the produced single crystal silicon during the production process, preventing a reduction in the amount of dopant added, which would lead to a decrease in the quality of the single crystal silicon produced. It also improves the problem of uncontrollable dopant amount caused by dopant volatilization, ensuring the effectiveness and accuracy of doping.

[0046] The first connecting portion 22 on the driving component 30 and the feeding component 20 can be connected magnetically. This connection method eliminates the need for direct contact between the two, facilitating multi-directional movement of the first connecting portion 22 on the feeding component 20 by the driving component 30. Since the driving component 30 does not need to penetrate into the interior of the first receiving cavity 11, there is no need to create holes or slots in the outer shell 10, thus ensuring the airtightness of the outer shell 10. This allows for the vacuuming of the interconnected first receiving cavity 11 and the auxiliary furnace body 70 during the doping process, reducing the possibility of leakage in the outer shell 10. The magnetic connection also prevents gas in the first receiving cavity 11 from dissipating into the external environment through the outer shell 10, thus avoiding harm to the environment and surrounding personnel and improving safety during the doping process.

[0047] Please see Figure 1 , Figure 2 and Figure 4 In conjunction with the above embodiments, in some embodiments, the doping device further includes a guide 40.

[0048] A guide member 40 is disposed around and connected to the housing 10, and a guide groove 42 is provided on the guide member 40. The drive member 30 includes a pushing part 31 and a second connecting part 32. The second connecting part 32 is disposed between the housing 10 and the guide member 40, and the pushing part 31 passes through the guide groove 42 and is connected to the second connecting part 32.

[0049] It is understood that the guide member 40 is disposed around and connected to the housing 10, and a sliding groove 41 is formed between the guide member 40 and the housing 10. The sliding groove 41 has an annular structure and is disposed around the housing 10. The second connecting part 32 on the drive member 30 can be disposed inside the sliding groove 41, so that the second connecting part 32 can rotate and move along the axial direction X of the housing 10 inside the sliding groove 41. Preferably, the second connecting part 32 is magnetically connected to the first connecting part 22, so that the first connecting part 22 can move as the second connecting part 32 moves. The first connecting part 22 and the second connecting part 32 can both be magnets, or one can be a magnet and the other can be a metal that can be magnetically connected to a magnet. A guide groove 42 is also provided on the guide member 40. The push part 31 on the drive member 30 can pass through the guide groove and connect with the second connecting part 32. According to the extension trajectory of the guide groove 42, the movement trajectory of the push part 31 is limited, and its movement direction is guided. Thus, the push part 31 can drive the second connecting part 32 to move in a specific direction, and can also drive the first connecting part 22, the connecting rod 23 and the holding part 24 to move in a specific direction, such as translation or rotation.

[0050] The second connecting part 32 may include a base 321 and a connecting block 322, the connecting block 322 being magnetically connected to the first connecting part 22. The base 321 may be configured as a ring structure, surrounding the outer shell 10, and having the same shape as the sliding groove 41, facilitating sliding within the sliding groove 41. The base 321 may be provided with a mounting groove 323 surrounding the outer shell 10, this mounting groove 323 being an integral ring structure. The connecting block 322 may also be configured as an integral ring structure and installed inside the mounting groove 323; alternatively, multiple mounting grooves 323 may be provided on the base 321, arranged at intervals around the outer shell 10 (e.g., ...). Figure 4 It should be noted that the two connecting blocks 322 in the figure are located at the top and bottom of the outer shell 10 respectively, and are also arranged around the outer shell 10. The connecting blocks 322 can also be composed of multiple block structures, and multiple connecting blocks 322 can be set inside the corresponding mounting slots 323, so that multiple corresponding block structure connecting blocks 322 are arranged around the outer shell 10. Preferably, the base 321 is provided with mounting slots 323 on both sides in the first direction Y, and each mounting slot 323 is provided with block-shaped connecting blocks 322 inside. At the same time, the first connecting part 22 is set as a cuboid structure (its length can be 36mm, its width can be 28mm, and its height can be 22mm), so that the two sides of the first connecting part 22 in the first direction Y are relatively close to the corresponding connecting blocks 322 (e.g., Figure 4As shown), the first connecting part 22 and the corresponding connecting block 322 are always magnetically attracted. With this arrangement, the stability of the feeding part 20 can be improved during the process of the driving member 30 driving the feeding part 20 (the top surface of the first connecting part 22 always faces the top connecting block 322, and the bottom surface of the first connecting part 22 always faces the bottom connecting block 322, which can improve the accuracy of the driving member 30 in controlling the first connecting part 22, avoid the first connecting part 22 from easily rotating, and improve its stability). This makes the actions of the driving member 30 and the first connecting part 22 consistent. When the driving member 30 flips, it can synchronously drive the first connecting part 22 to flip. When the driving member 30 stops flipping, the first connecting part 22 can also stop flipping in time, reducing the risk of the first connecting part 22 rotating on its own under the action of other external forces.

[0051] A pushing part 31 is also provided on the driving member 30. The pushing part 31 can be configured as a rod-shaped structure. The pushing part 31 passes through the guide groove 42 to the outside of the guide member 40. The operator can use the pushing part 31 to drive the entire second connecting part 32 to flip or move along the axial direction X of the outer shell 10, so that the second connecting part 32 drives the first connecting part 22 to move in the same direction.

[0052] Please see Figure 2 and Figure 5In conjunction with the above embodiments, in some embodiments, the guide groove 42 includes a first groove 421 and a second groove 422 that are connected. Both the first groove 421 and the second groove 422 are connected to the sliding groove 41. The first groove 421 extends along the axial direction X of the outer shell 10, and the second groove 422 extends along the circumferential direction of the outer shell 10. It can be understood that the extension direction of the guide groove 42 may be partly along the axial direction X of the outer shell 10 and partly along the circumferential direction of the outer shell 10. When the driving member 30 slides inside the first groove 421, it can drive the feeding member 20 to move in the same direction, so that a part of the feeding member 20 can extend or enter the interior of the first receiving cavity 11, thereby moving the holding part 24 on the feeding member 20 to a suitable position. When the driving member 30 slides from the interior of the first groove 421 to the interior of the second groove 422, since the second groove 422 extends along the circumferential direction of the outer shell 10, the driving member 30 can drive the feeding member 20 to rotate, thereby causing the holding part 24 to rotate, facilitating the pouring out of the dopant contained inside. If the driving component 30 moves at a high speed inside the second groove 422, the rotation speed of the holding part 24 will also increase. When the dopant inside the holding part 24 is poured out, it will be more dispersed, allowing the dopant to be evenly poured into the main furnace body 60 and fully react with other materials. This is beneficial for improving the uniformity of silicon rod resistance and the efficiency of solid-phase doping, thereby improving the quality of single-crystal silicon. If a pushing part 31 is provided on the driving component 30, the pushing part 31 can slide inside the first groove 421 and the second groove 422, thereby causing the pushing part 31 to drive the second connecting part 32 to move in a specific direction or rotate.

[0053] Please see Figure 2 In conjunction with the above embodiments, in some embodiments, the doping device includes a locking member 50. The locking member 50 is disposed on the guide member 40 and rotatably connected to the guide member 40, and the locking member 50 is used to hook the drive member 30.

[0054] It is understandable that the locking element 50 is located on the outside of the guide element 40. Preferably, the locking element 50 can be located near the guide groove 42. There can be one or more locking elements, which facilitates locking the drive element 30 in a certain position to prevent it from moving randomly. This also prevents the feeding element 20 from moving, improves its stability, and facilitates the addition of dopants inside the holding part 24. One end of the locking element 50 can be rotatably connected to the guide element 40 via a rotating shaft to facilitate the rotation of the locking element 50. The other end of the locking element 50 can be configured as a hook-shaped structure, U-shaped structure, etc. When the pushing part 31 on the drive element 30 moves to a certain position, the other end of the locking element 50 can hook the pushing part 31 to block and limit it, thereby locking it and preventing the pushing part 31 from continuing to move inside the guide groove 42, thus improving the stability of the drive element 30.

[0055] Please see Figure 1 and Figure 3 In conjunction with the above embodiments, in some embodiments, the dimension of the first connecting part 22 in the first direction Y is D, and the dimension of the connecting rod 23 in the first direction Y is d, satisfying: D > d;

[0056] The doping device also includes a first support portion 25, which is located in the first receiving cavity 11 and connected to the outer shell 10. The first support portion 25 has a through hole 251 communicating with the first receiving cavity 11. The through hole 251 extends along the axial direction X of the outer shell 10. The connecting rod 23 passes through the through hole 251 and is slidably connected to the first support portion 25.

[0057] It is understood that the dimension D of the first connecting part 22 in the first direction Y is generally between 20mm and 24mm (inclusive), and the dimension d of the connecting rod 23 in the first direction Y is generally between 6mm and 10mm (inclusive). The first direction Y intersects the axial direction X, and preferably, the first direction Y and the axial direction X are perpendicular to each other. The dimension of the first connecting part 22 in the first direction Y is larger than the dimension of the connecting rod 23 in the first direction Y, allowing the connecting rod 23 to pass through the interior of the first connecting part 22 along the axial direction X. Since the first connecting part 22 is located at one end of the connecting rod 23, and their dimensions in the first direction Y are different, the connecting rod 23 may tilt during movement along the axial direction X (one end of the connecting rod 23 is higher, and the other end is lower), which will reduce the stability of the connecting rod 23 during movement and may cause the dopant in the holding part 24 to leak before reaching the designated position. Therefore, a first support part 25 needs to be provided on the doping device to support the connecting rod 23. The first support part 25 is disposed inside the first receiving cavity 11. The connecting rod 23 can pass through the through hole 251 thereon and can slide or rotate along the axial direction X of the outer shell 10 inside the through hole 251. The first support part 25 can provide a certain degree of support and guidance for the connecting rod 23, so that the connecting rod 23 always moves along the axial direction X of the outer shell 10 without tilting. Multiple ball bearings can also be disposed inside the through hole 251. The multiple ball bearings are arranged around the connecting rod 23 and connected to the first support part 25. The multiple ball bearings are in rolling contact with the connecting rod 23, which can reduce the frictional resistance when the connecting rod 23 moves and facilitate its movement.

[0058] Please see Figure 1 In conjunction with the above embodiments, in some embodiments, the connecting rod 23 extends through the first connecting portion 22 to the side away from the holding portion 24; the feeding component 20 includes a plurality of second support portions 26.

[0059] Multiple second support portions 26 are located inside the first receiving cavity 11 and connected to the connecting rod 23. Multiple second support portions 26 are slidably connected to the outer shell 10. At least one second support portion 26 is disposed on the side of the first connecting portion 22 facing the holding portion 24, and at least one second support portion 26 is disposed on the side of the first connecting portion 22 away from the holding portion 24.

[0060] It is understandable that at least one second support portion 26 can be provided on each side of the first connecting portion 22. The radial dimension of the second support portion 26 is also larger than the radial dimension of the connecting rod 23, so that the connecting rod 23 can pass through the interior of the second support portion 26 along the axial direction X and be fixedly connected to the second support portion 26. The second support portion 26 can be slidably connected to the outer shell 10, that is, it can slide relative to the outer shell 10. The second support portion 26 is supported by the outer shell 10 and can slide inside the first receiving cavity 11 without affecting the movement of the connecting rod 23 and the first connecting portion 22. At the same time, the second support portions 26 on both sides of the first connecting portion 22 can also support the first connecting portion 22 and the connecting rod 23, ensuring that they always move along the axial direction X of the outer shell 10 without tilting. This prevents the second receiving cavity 21 on the holding portion 24 from tilting when receiving the dopant, and prevents the dopant inside the second receiving cavity 21 from spilling out.

[0061] Please see Figure 6 In conjunction with the above embodiments, in some embodiments, the doping device includes an extension 90.

[0062] The extension member 90 is connected to one end of the outer casing 10. The extension member 90 has a third receiving cavity 91 that communicates with the first receiving cavity 11. The extension direction of the third receiving cavity 91 is the same as that of the first receiving cavity 11. The third receiving cavity 91 is used to receive the holding part 24.

[0063] It is understandable that an extension member 90 is provided at one end of the outer shell 10 to connect the outer shell 10 to the auxiliary furnace body 70. A sealing structure can be provided at the connection point between the two for sealing. The extension member 90 can be a cylindrical structure, and its internal third receiving cavity 91 is connected to the first receiving cavity 11 of the outer shell 10, and the two extend in the same direction, so that the connecting rod 23 can move along the axial direction X of the outer shell 10 inside the third receiving cavity 91 and the first receiving cavity 11. If the length of the connecting rod 23 is too long and cannot be completely retracted into the first receiving cavity 11, the connecting rod 23 and the holding part 24 will always be partially located inside the auxiliary furnace body 70, which may interfere with other structures inside the auxiliary furnace body 70 (e.g., it may affect the opening and closing of the isolation valve 80). When the monocrystalline silicon produced inside the main furnace body 60 is taken out through the auxiliary furnace body 70, the connecting rod 23 and the holding part 24 may obstruct the taking-out mechanism. Therefore, by setting the extension part 90 (the extension part 90 can also be set as an integral structure with the outer shell 10), the length of the main body of the doping device can be increased to a certain extent. When shrinking the connecting rod 23 and the holding part 24, the holding part 24 can be completely moved out of the interior of the auxiliary furnace body 70 and put into the interior of the third receiving cavity 91, so as to avoid the holding part 24 and the connecting rod 23 from affecting other structures and the production of single crystal silicon.

[0064] Please see Figure 5 and Figure 7 In conjunction with the above embodiments, in some embodiments, the doping device further includes a sealing ring 100, which is located on the side of the housing 10 facing the holding portion 24 and is connected to the housing 10.

[0065] Understandably, a sealing ring 100 is also provided on the doping device. This ring is typically made of ceramic, metal, or high-temperature resistant rubber and is located on the side of the outer shell 10 facing the holding section 24. The outer shell 10 is generally cylindrical, and the sealing ring 100 is annular, perfectly fitting the opening on one side of the outer shell 10 for easy connection. During use, the doping device is generally connected to the auxiliary furnace body 70 on the single crystal furnace via one side of the outer shell 10. In this case, the sealing ring 100, positioned between the outer shell 10 and the auxiliary furnace body 70, provides a seal at the connection point, facilitating the evacuation of the auxiliary furnace body 70 and the outer shell 10 into a vacuum state. This also prevents leakage of dopants volatilized from the auxiliary furnace body 70, improving the safety of the structure.

[0066] Please see Figure 7In this embodiment, the single-crystal furnace includes a main furnace body 60, a secondary furnace body 70, and the doping device described above. The main furnace body 60 and the secondary furnace body 70 are connected, and an isolation valve 80 is provided between them. The isolation valve 80 isolates the internal spaces of the main furnace body 60 and the secondary furnace body 70 to prevent mutual interference. The doping device is detachably connected to the secondary furnace body 70 (e.g., via flanges, bolts, etc.) and is also sealed (a sealing ring 100 on one side of the doping device housing 10 seals the connection point between the two, preventing the interior of the secondary furnace body 70 from communicating with the external environment and preventing external gases from entering the interior of the secondary furnace body 70 through the connection point, thus affecting the processing of single-crystal silicon). When the doping device and the secondary furnace body 70 are connected, the holding part 24 of the doping device can be moved into the interior of the secondary furnace body 70, allowing the dopant in the holding part 24 to be poured from the secondary furnace body 70 into the main furnace body 60, completing the doping process.

[0067] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0068] The doping apparatus and single crystal furnace provided in the embodiments of this application have been described in detail above, and specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A doping device, characterized in that, include: The outer shell (10) has a first receiving cavity (11); The feeding component (20) includes a connecting rod (23), a holding part (24) and a first connecting part (22), wherein the connecting rod (23) connects the holding part (24) and the first connecting part (22), and the first connecting part (22) is located in the first receiving cavity (11); A drive unit (30) is located outside the first receiving cavity (11) and is used to link the first connecting part (22) and the connecting rod (23) to drive the holding part (24) to move along the axial direction (X) of the outer shell (10); A guide (40) is arranged around the housing (10), and a locking member (50) is provided on the guide (40). The locking member (50) is rotatably connected to the guide (40) and is used to hook the drive member (30).

2. The doping device according to claim 1, characterized in that, The driving component (30) and the first connecting part (22) are magnetically connected.

3. The doping device according to claim 1, characterized in that, The doping device further includes: The guide member (40) is provided with a guide groove (42); The driving member (30) includes a pushing part (31) and a second connecting part (32). The second connecting part (32) is disposed between the housing (10) and the guide member (40). The pushing part (31) passes through the guide groove (42) and is connected to the second connecting part (32).

4. The doping device according to claim 3, characterized in that, The guide groove (42) includes a first groove (421) and a second groove (422) that are connected to each other. The first groove (421) extends along the axial (X) direction of the outer shell (10), and the second groove (422) extends along the circumferential direction of the outer shell (10).

5. The doping apparatus according to claim 1, characterized in that, The first connecting part (22) has a dimension D in the first direction (Y), and the connecting rod (23) has a dimension d in the first direction (Y), satisfying that: D > d; The doping device further includes: The first support part (25) is located inside the first receiving cavity (11) and connected to the outer shell (10). The first support part (25) has a through hole (251) communicating with the first receiving cavity (11). The through hole (251) extends along the axial direction (X) of the outer shell (10). The connecting rod (23) passes through the through hole (251) and is slidably connected to the first support part (25).

6. The doping apparatus according to claim 1, characterized in that, The connecting rod (23) extends through the first connecting portion (22) to a side away from the holding portion (24); the feeding component (20) includes: Multiple second support portions (26) are located inside the first receiving cavity (11) and connected to the connecting rod (23). Multiple second support portions (26) are slidably connected to the outer shell (10). At least one second support portion (26) is disposed on the side of the first connecting portion (22) facing the holding portion (24), and at least one second support portion (26) is disposed on the side of the first connecting portion (22) away from the holding portion (24).

7. The doping apparatus according to claim 1, characterized in that, The doping device includes: An extension member (90) is connected to one end of the outer shell (10). The extension member (90) has a third receiving cavity (91) communicating with the first receiving cavity (11). The extension direction of the third receiving cavity (91) is the same as the extension direction of the first receiving cavity (11). The third receiving cavity (91) is used to receive the holding part (24).

8. The doping apparatus according to claim 1, characterized in that, The doping device further includes a sealing ring (100) located on the side of the housing (10) facing the holding portion (24) and connected to the housing (10).

9. A single crystal furnace, characterized in that, include: The main furnace body (60) and the auxiliary furnace body (70) are connected and an isolation valve (80) is provided between them. The doping device according to any one of claims 1 to 8, wherein the doping device is detachably connected to the sub-furnace body (70) such that, in the connected state, the holding part (24) of the doping device can be moved into the sub-furnace body (70).

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