Air floatation guide rail with airflow uniform distribution device

Abstract

The utility model relates to the technical field of air floatation guide rails, and discloses an air floatation guide rail with an airflow uniform distribution device, which comprises a guide rail body, a sleeve penetrates through and is fixedly connected with the rear end of the guide rail body, limiting blocks are fixedly connected with two sides of the front end of the inner wall of the sleeve, and a piston penetrates through and is slidably connected with the middle of the inner wall of the sleeve. The rear end of the piston is fixedly connected with a threaded sleeve, the rear end of the inner wall of the sleeve is fixedly connected with a first spring, one end of the first spring is fixedly connected with the piston, the rear end of the sleeve penetrates through and is rotationally connected with a lead screw, and one end of the lead screw is fixedly connected with a driving gear. According to the utility model, through the cooperation of the limiting block, the piston, the threaded sleeve, the lead screw, the driving gear, the driven gear, the first spring, the rotating shaft, the rotating assembly and the fixing plate, the air film is enabled to keep pressure uniformity within the full-length range of the guide rail, the consistency of supporting force borne by each part of a load is ensured, and inclination or unbalance loading caused by non-uniform stress is prevented.

Description

Technical Field

[0001] This utility model relates to the field of air-floating guide rail technology, specifically an air-floating guide rail with a uniform airflow distribution device. Background Technology

[0002] Air-bearing guideways are precision guideway systems that utilize the principle of gas static pressure to achieve contactless motion. An external air source introduces compressed gas into the cavity between the guideway and the slider, forming a pressure- and thickness-specific gas film on their surfaces. This suspends the slider above the guideway, transforming traditional mechanical contact friction into fluid friction between gas molecules. This non-contact motion method significantly reduces the coefficient of friction, effectively minimizing wear and vibration, and dramatically improving motion accuracy and stability. It also offers advantages such as lubrication-free operation, contamination resistance, and long lifespan, making it widely applicable in fields with extremely high requirements for motion precision and cleanliness, such as semiconductor manufacturing, precision machining, and optical instruments.

[0003] In existing technologies, the common method to achieve uniform airflow distribution is to install a porous flow divider or pressure equalization groove structure inside the guide rail cavity. After the external air source is input through the air inlet, the concentrated airflow is first dispersed into multiple small airflows through the evenly distributed fine channels on the porous flow divider, or the pressure equalization grooves opened on the cavity wall are used to create a buffer and pressure stabilizing area for the airflow within the grooves, and then the airflow overflows evenly through the jet nozzle at the top of the guide rail, thereby achieving an initial uniform distribution of airflow on the guide rail surface.

[0004] When airflow passes through a perforated plate or pressure equalization groove, a significant pressure drop occurs due to abrupt changes in cross-section and frictional resistance. Especially in high-velocity or long-distance transmission scenarios, the terminal airflow pressure may not meet the requirements for air film formation, affecting the suspension stability of the guide rail and making it impossible to efficiently and uniformly distribute the airflow. To address these issues, an air-bearing guide rail with an airflow uniform distribution device is proposed. Utility Model Content

[0005] The purpose of this invention is to provide an air-bearing guide rail with an airflow uniform distribution device, which solves the problem of the inability to efficiently and uniformly distribute airflow in the prior art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an air-bearing guide rail with a uniform airflow distribution device, comprising a guide rail body, a sleeve that is fixedly connected to the rear end of the guide rail body, limit blocks that are fixedly connected to both sides of the front end of the inner wall of the sleeve, a piston that is slidably connected to the middle of the inner wall of the sleeve, a threaded sleeve that is fixedly connected to the rear end of the piston, a first spring that is fixedly connected to the rear end of the inner wall of the sleeve, and one end of the first spring that is fixedly connected to the piston, a lead screw that is rotatably connected to the rear end of the sleeve, a drive gear that is fixedly connected to one end of the lead screw, a fixing plate that is fixedly connected to the top of the rear end of the guide rail body, a rotating shaft that is rotatably connected to the front end of the inner wall of the fixing plate, a driven gear that is fixedly connected to one end of the rotating shaft, and the driven gear and the drive gear are meshed together, a rotating component that is provided at the other end of the rotating shaft, and brackets that are fixedly connected to both sides of the front end of the inner wall of the guide rail body, and anti-blocking components that are provided on the inner wall of the brackets.

[0007] By adopting the above technical solution, the rotating component includes multiple balls and connecting rods. The rotation of the rotating shaft can drive the rotating component to rotate synchronously. The rotation of the balls can open or close the airflow at the through hole. The threaded sleeve can only rotate 90° at the lead screw.

[0008] As a further description of the above technical solution: the anti-blocking component includes a rotating rod, which is rotatably connected to one side of the bracket, a propeller is fixedly connected to one end of the rotating rod, and a bevel gear set is fixedly connected to the middle of the outer ring of the rotating rod.

[0009] By adopting the above technical solution, the propeller can be made to rotate by the impact of airflow.

[0010] As a further description of the above technical solution: a connecting rod is fixedly connected to the rear end of the bevel gear set.

[0011] By adopting the above technical solution, the driven bevel gear can drive the connecting rod to rotate.

[0012] As a further description of the above technical solution: a turntable is fixedly connected to the rear end of the connecting rod, and fixed rods are fixedly connected to both sides of the rear end of the bracket.

[0013] By adopting the above technical solution, the turntable has a special shape, which facilitates the compression of the limit rod.

[0014] As a further description of the above technical solution: a second spring is fixedly connected to the inner wall of the fixing rod, and a limit rod is fixedly connected to one end of the second spring.

[0015] By adopting the above technical solution, the limiting rod is compressed and then retracts into the fixed rod by the second spring.

[0016] As a further description of the above technical solution: a sealing frame is slidably connected through one side of the guide rail body, and a filter screen is provided on the inner wall of the sealing frame.

[0017] By adopting the above technical solution, the connection between the sealing frame and the guide rail body is in a sealed state.

[0018] As a further description of the above technical solution: a slider is provided on the top of the guide rail body, and the top of the guide rail body is provided with evenly distributed through holes.

[0019] By adopting the above technical solution, the airflow inside the guide rail cavity can be easily discharged through the through hole.

[0020] As a further description of the above technical solution: the front end of the guide rail body is connected to an air inlet.

[0021] By adopting the above technical solution, high-pressure gas can be easily injected into the inside of the guide rail body through the air inlet.

[0022] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0023] 1. The present invention provides an air-bearing guide rail with an airflow uniform distribution device. Firstly, through the cooperation of the limiting block, piston, threaded sleeve, lead screw, drive gear, driven gear, first spring, rotating shaft, rotating assembly, and fixed plate, the air film maintains pressure uniformity throughout the entire length of the guide rail, ensuring that the supporting force on each part of the load is consistent and preventing tilting or off-center loading caused by uneven force. The uniformity of the air film can ensure the straightness and flatness of the worktable when it moves. The compression and expansion of the airflow offsets some of the vibration energy, making the system run more smoothly. It is especially suitable for precision machining or measuring equipment.

[0024] 2. The air-bearing guide rail with a uniform airflow distribution device provided by this utility model, through the cooperation of the bracket, rotating rod, propeller, bevel gear set, connecting rod, turntable, fixing rod, second spring, limiting rod, sealing frame and filter screen, can activate the anti-clogging mechanism without manual intervention, realize the continuous cleaning of the filter screen, always maintain smooth airflow filtration, timely remove impurities from the surface and pores of the filter screen, reduce the squeezing and erosion of the filter screen by impurities, effectively extend the service life of the filter screen, and reduce the frequency and cost of filter screen replacement. Attached Figure Description

[0025] Figure 1 This is a perspective view of the present utility model;

[0026] Figure 2 This is a perspective cross-sectional view of the sleeve of this utility model;

[0027] Figure 3This is a three-dimensional cross-sectional view of the guide rail of this utility model;

[0028] Figure 4 This is a sectional perspective view of the bracket of this utility model.

[0029] Legend:

[0030] 1. Guide rail body; 2. Slider; 3. Air inlet; 4. Through hole; 5. Sleeve; 6. Limiting block; 7. Piston; 8. Threaded sleeve; 9. Lead screw; 10. Drive gear; 11. Driven gear; 12. First spring; 13. Rotating shaft; 14. Rotating assembly; 15. Bracket; 16. Rotating rod; 17. Propeller; 18. Bevel gear set; 19. Connecting rod; 20. Turntable; 21. Fixed rod; 22. Second spring; 23. Limiting rod; 24. Sealing frame; 25. Filter screen; 26. Fixing plate. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] To further understand the contents of this utility model, a detailed description of this utility model will be provided with reference to the accompanying drawings.

[0033] Reference Figure 1 This utility model discloses an air-bearing guide rail with a uniform airflow distribution device, comprising a guide rail body 1, the guide rail being the core frame, forming an airflow cavity inside, supporting a slider 2 and providing an airflow passage, a slider 2 being provided on the top of the guide rail body 1, the slider 2 carrying a load, and being suspended on the top of the guide rail by an air film to achieve contactless, low-friction movement, a uniformly distributed through hole 4 being provided on the top of the guide rail body 1, the through hole 4 being the air jet port on the top of the guide rail, the airflow overflowing uniformly through the through hole 4, forming a stable air film between the slider 2 and the guide rail, and an air inlet 3 being connected through and fixedly connected to the front end of the guide rail body 1.

[0034] Reference Figure 2A sleeve 5 is fixedly connected to the rear end of the guide rail body 1. Limiting blocks 6 are fixedly connected to both sides of the front end of the inner wall of the sleeve 5. The limiting blocks 6 restrict the forward movement of the piston 7 to prevent it from leaving the transmission range of the lead screw 9. A piston 7 is slidably connected to the middle of the inner wall of the sleeve 5. The piston 7 slides inside the sleeve 5 and transmits linear motion to the threaded sleeve 8 under the push of air pressure. The threaded sleeve 8 is fixedly connected to the rear end of the piston 7. A first spring 12 is fixedly connected to the rear end of the inner wall of the sleeve 5, and one end of the first spring 12 is fixedly connected to the piston 7. A lead screw 9 is rotatably connected to the rear end of the sleeve 5. The lead screw 9 cooperates with the threaded sleeve 8 to convert linear motion into rotation. The movement drives the drive gear 10 to rotate. One end of the lead screw 9 is fixedly connected to the drive gear 10. The top of the rear end of the guide rail body 1 is fixedly connected to the fixed plate 26. The front end of the inner wall of the fixed plate 26 is rotatably connected to the rotating shaft 13. One end of the rotating shaft 13 is fixedly connected to the driven gear 11. The driven gear 11 drives the rotating shaft 13 to rotate. The driven gear 11 is meshed with the drive gear 10. The other end of the rotating shaft 13 is provided with a rotating component 14. The ball rotates with the rotating shaft 13 to open or close the jet nozzle and control the airflow. The front ends of the inner wall of the guide rail body 1 are fixedly connected to both sides of the bracket 15. The inner wall of the bracket 15 is provided with an anti-blocking component.

[0035] Reference Figure 3 and Figure 4 The anti-blocking component includes a rotating rod 16, which is rotatably connected to one side of the bracket 15. The rotating rod 16 transmits the rotational power of the propeller 17 to the bevel gear set 18. One end of the rotating rod 16 is fixedly connected to the propeller 17. The propeller 17 rotates under the impact of airflow, driving the rotating rod 16 to rotate and triggering the anti-blocking action. The bevel gear set 18 is fixedly connected to the middle of the outer ring of the rotating rod 16. The bevel gear set 18 contains two bevel gears, and the two bevel gears are meshed with each other. The rear end of the bevel gear set 18 is fixedly connected to a connecting rod 19, and the rear end of the connecting rod 19 is fixedly connected to a turntable 20. The turntable 20 is connected to... Through an eccentric structure or cam design, the limiting rod 23 is periodically extended and retracted by compression. Fixed rods 21 are fixedly connected to both sides of the rear end of the bracket 15. A second spring 22 is fixedly connected to the inner wall of the fixed rod 21. The second spring 22 provides elastic force, so that the limiting rod 23 pops out quickly after being compressed, impacting the filter screen 25. One end of the second spring 22 is fixedly connected to the limiting rod 23. A sealing frame 24 is slidably connected through one side of the guide rail body 1. The sealing frame 24 is installed on one side of the guide rail to form a sealed space, which fixes the filter screen 25 and prevents airflow leakage. The filter screen 25 is provided on the inner wall of the sealing frame 24.

[0036] Working principle: External air is input into the guide rail cavity through air inlet 3. The air pressure pushes piston 7 to move inside the pipe. Piston 7 converts linear motion into rotational motion through the threaded sleeve 8 and lead screw 9, driving drive gear 10 to rotate. Drive gear 10 meshes with driven gear 11, further transmitting rotational power, causing the ball in rotating assembly 14 to rotate. After the ball rotates, the air outlet at the top of the guide rail is opened, and the airflow in the cavity is ejected upward through the opening, initially forming an air film between the guide rail and slider 2. When the air pressure is removed or adjustment is required, the first spring 12 provides a reverse force to return piston 7 to its original position, driving lead screw 9 and gear to reverse, causing the ball to close or reset, realizing airflow interruption control and piston 7 position reset, preparing for the next airflow adjustment, allowing the airflow to overflow evenly at the top of the guide rail, forming an air film of stable thickness and pressure, supporting stable load suspension, reducing friction and vibration. External airflow through the air inlet... Air inlet 3 enters the guide rail body 1. The airflow first contacts the filter screen 25 inside the sealing frame 24. The filter screen 25 can filter impurities in the airflow, playing a preliminary purification role. When the filter screen 25 is blocked, because the air inlet 3 corresponds to the middle position of the filter screen 25, when there are too many impurities, the middle position of the filter screen 25 will be blocked. The airflow will flow from both sides of the filter screen 25. The airflow impacts the propellers 17 on both sides, driving the rotating rod 16 to rotate. The rotating rod 16 causes the connecting rod 19 to rotate through the bevel gear set 18, which in turn drives the turntable 20 to rotate. During the rotation of the turntable 20, through the special structure of the turntable 20, the rotation of the turntable 20 causes the limiting rod 23 to be pressed and retracted into the fixed rod 21. Then, the pressure is released by the second spring 22, causing the limiting rod 23 to pop out. The pop-out of the limiting rod 23 impacts the filter screen 25, thereby realizing vibration anti-blocking of the filter screen 25, preventing blockage, and ensuring smooth airflow into the subsequent structure.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An air-bearing guide rail with a uniform airflow distribution device, comprising a guide rail body (1), characterized in that: A sleeve (5) is connected through and fixedly connected to the rear end of the guide rail body (1). Limiting blocks (6) are fixedly connected to both sides of the front end of the inner wall of the sleeve (5). A piston (7) is connected through and slidably connected to the middle of the inner wall of the sleeve (5). A threaded sleeve (8) is fixedly connected to the rear end of the piston (7). A first spring (12) is fixedly connected to the rear end of the inner wall of the sleeve (5), and one end of the first spring (12) is fixedly connected to the piston (7). A lead screw (9) is connected through and rotatably connected to the rear end of the sleeve (5). One end of the lead screw (9) is fixedly connected to... There is a drive gear (10), and a fixed plate (26) is fixedly connected to the top of the rear end of the guide rail body (1). A rotating shaft (13) is rotatably connected through the front end of the inner wall of the fixed plate (26). A driven gear (11) is fixedly connected to one end of the rotating shaft (13), and the driven gear (11) meshes with the drive gear (10). A rotating component (14) is provided at the other end of the rotating shaft (13). A bracket (15) is fixedly connected to both sides of the front end of the inner wall of the guide rail body (1), and an anti-blocking component is provided on the inner wall of the bracket (15).

2. The air-bearing guide rail with a uniform airflow distribution device according to claim 1, characterized in that: The anti-blocking component includes a rotating rod (16), which is connected to one side of the bracket (15) and rotates through it. A propeller (17) is fixedly connected to one end of the rotating rod (16), and a bevel gear set (18) is fixedly connected to the middle of the outer ring of the rotating rod (16).

3. The air-bearing guide rail with a uniform airflow distribution device according to claim 2, characterized in that: The rear end of the bevel gear set (18) is fixedly connected to a connecting rod (19).

4. The air-bearing guide rail with a uniform airflow distribution device according to claim 3, characterized in that: The rear end of the connecting rod (19) is fixedly connected to a turntable (20), and the rear ends of the bracket (15) are fixedly connected to two sides of a fixing rod (21).

5. The air-bearing guide rail with a uniform airflow distribution device according to claim 4, characterized in that: A second spring (22) is fixedly connected to the inner wall of the fixing rod (21), and a limit rod (23) is fixedly connected to one end of the second spring (22).

6. The air-bearing guide rail with a uniform airflow distribution device according to claim 1, characterized in that: A sealing frame (24) is slidably connected through one side of the guide rail body (1), and a filter screen (25) is provided on the inner wall of the sealing frame (24).

7. The air-bearing guide rail with a uniform airflow distribution device according to claim 1, characterized in that: The top of the guide rail body (1) is provided with a slider (2), and the top of the guide rail body (1) is provided with evenly distributed through holes (4).

8. The air-bearing guide rail with a uniform airflow distribution device according to claim 1, characterized in that: An air inlet (3) is connected through and fixedly connected to the front end of the guide rail body (1).

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