Flatness detection equipment

Abstract

The utility model discloses flatness detection equipment, which belongs to the technical field of flatness detection and comprises a base. The base is provided with a multi-point-position supporting mechanism used for conducting point-position adjustment one by one to stably support a workpiece. A plurality of protruding blocks are fixedly installed on the periphery of the base, and each protruding block of the base is provided with a multi-point-position supporting mechanism. A flatness detection mechanism which is used for ensuring that the workpiece placing plane is parallel to the detection equipment mounting plane and can be used for detection is mounted on the multi-point supporting mechanism; the multi-point supporting mechanism comprises a first mounting assembly, a flatness adjusting assembly and a supporting assembly. The protruding block and the flatness adjusting assembly are both connected with the first installation assembly. By means of the mode, mechanical vibration can be avoided in the flatness detection process, the detection plane is parallel to the detection equipment installation plane, and detection errors caused by the fact that the detection plane is not parallel to the detection equipment installation plane are avoided.

Description

Technical Field

[0001] This invention relates to the field of flatness testing technology, specifically to a flatness testing device. Background Technology

[0002] Flatness testing equipment is a high-precision instrument used to accurately measure the flatness of object surfaces, and is widely used in fields such as machinery manufacturing, semiconductors, and optical components. Its core principle is to collect surface data through laser interferometers, optical sensors, or contact probes, and then analyze and calculate the flatness deviation value.

[0003] Chinese patent CN209877868U discloses a flatness testing device, including a testing box. An installation plate is arranged inside the testing box. Several evenly distributed first electric push rods are fixedly installed on the bottom of the inner wall of the testing box. The output ends of the first electric push rods are fixedly connected to the bottom of the installation plate. A clamping component is provided on the upper surface of the installation plate. A testing mechanism is arranged above the installation plate. This utility model is a flatness testing device that, by setting guide holes, pressure sensors, and testing probes, achieves convenient flatness testing of objects. It is low-cost and has a wide range of applications, solving the problem that most current high-precision flatness testing devices use laser detection, which is expensive and costly. However, this device still has the following problems:

[0004] The device is driven by a motor during the inspection process. However, for some high-precision workpieces, the flatness inspection requires extremely fine error, and the error caused by motor vibration is relatively large, making it unsuitable for the inspection of some high-precision workpieces.

[0005] Based on this, the present invention designs a flatness detection device to solve the above problems. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the existing technology, the present invention provides a flatness detection device.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A flatness testing device, including a base;

[0009] The base is equipped with a multi-point support mechanism that can be adjusted point by point to provide stable support for the workpiece.

[0010] Multiple protrusions are fixedly installed around the base, and a multi-point support mechanism is installed on each protrusion of the base.

[0011] The multi-point support mechanism is equipped with a flatness detection mechanism to ensure that the workpiece placement plane is parallel to the installation plane of the detection equipment and to enable detection.

[0012] The multi-point support mechanism includes an installation component one, a flatness adjustment component, and a support component; both the protrusion and the flatness adjustment component are connected to the installation component one; both the flatness adjustment component and the support component are connected to the flatness detection mechanism; the support component is connected to the flatness adjustment component; the installation component one is used to install the flatness adjustment component, the flatness adjustment component is used to adjust the support height of the support component, and the support component is used to install and support the workpiece;

[0013] Furthermore, the mounting component includes a mounting base; the lower end of the mounting base is fixedly connected to the protrusion; the mounting base has a threaded hole; the mounting base is connected to the flatness adjustment component through the threaded hole.

[0014] Furthermore, the flatness adjustment component includes a bolt and a fixing post; the bolt is threadedly connected to the mounting base through a threaded hole; the upper end of the bolt is fixedly connected to the fixing post; and the fixing post is connected to the support component.

[0015] Furthermore, the support component includes a tapered tip, the upper end of a fixed column is fixedly connected to the tapered tip, the fixed column has an installation groove, and the fixed column is connected to the flatness detection mechanism through the installation groove.

[0016] Furthermore, the flatness detection mechanism includes a second limiting installation component, a detection moving component, a detection component fixing component, and a flatness detection component; the mounting groove and the detection moving component are both connected to the second limiting installation component; the detection moving component and the detection component fixing component are connected; the detection component fixing component and the flatness detection component are connected; the second limiting installation component is used to install the detection moving component and limit the sliding of the detection moving component; the detection moving component is used to install the detection component fixing component and drive the detection component fixing component to slide in a limited manner; the detection component fixing component is used to fix the flatness detection component; the flatness detection component is used to detect the flatness of the workpiece.

[0017] Furthermore, the second limiting installation component includes an installation plate and an installation block; the installation plate has a limiting slide groove corresponding to the installation slot, and the installation plate is slidably connected to the fixed column through the limiting slide groove and the installation slot; the installation block is slidably connected to the installation plate; the installation block is connected to the detection and movement component.

[0018] Furthermore, the detection moving component includes a slider and a fixed rod; a second limiting groove is provided at the upper end of the mounting block, and the slider is slidably connected to the mounting block through the second limiting groove; the lower end of the fixed rod is fixedly connected to the slider; and the upper end of the fixed rod is connected to the detection component fixing component.

[0019] Furthermore, the flatness detection component includes a clamping block, a screw, and a digital dial indicator; the two clamping blocks are symmetrically distributed front and back, the right end of the clamping block is connected to the detection component fixing component, the front clamping block is threadedly connected to the screw, the rear clamping block is rotatably connected to the screw, and the digital dial indicator is slidably connected to the clamping block through a sliding groove opened on the inner side of the right end of the two clamping blocks.

[0020] Compared with the prior art, the advantages of this utility model are as follows: 1. This utility model can avoid mechanical vibration during the flatness detection process and make the detection plane parallel to the installation plane of the detection equipment, thus avoiding detection errors caused by the non-parallelism between the detection plane and the installation plane of the detection equipment;

[0021] 2. This utility model can realize the individual adjustment of multiple points supporting the workpiece for testing, making the adjustment of the device by the operator simpler, and it can conveniently place workpieces with special configurations, ensuring flatness while reducing operator errors. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This utility model provides a three-dimensional planarity testing device. Figure 1 ;

[0024] Figure 2 This is a front view of a flatness testing device according to the present invention;

[0025] Figure 3 This utility model provides a three-dimensional planarity testing device. Figure 2 ;

[0026] Figure 4 This utility model provides a three-dimensional planarity testing device. Figure 3 .

[0027] The labels in the diagram represent:

[0028] 1. Base; 2. Multi-point support mechanism; 21. Mounting component one; 211. Mounting seat; 212. Threaded hole; 22. Flatness adjustment component; 221. Bolt one; 222. Fixing column; 23. Support component; 231. Tapered center; 232. Mounting groove; 3. Flatness detection mechanism; 31. Limiting mounting component two; 311. Mounting plate; 312. Mounting block; 313. Limiting slide groove one; 32. Detection movement component; 321. Limiting slide groove two; 322. Slider; 323. Fixing rod; 33. Detection piece fixing component; 331. Table holder; 332. Bolt two; 34. Flatness detection component; 341. Clamping fixing block; 342. Screw; 343. Digital display dial indicator; 4. Workpiece; 5. Protrusion. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0030] The terms "left," "right," "front," "back," "up," and "down" used in the following description refer to the orientation from the perspective of the front view.

[0031] Example 1: In some embodiments, please refer to the accompanying drawings. Figures 1-4 A flatness testing device includes a base 1 on which a multi-point support mechanism 2 is installed for providing stable support to a workpiece 4 by adjusting each point.

[0032] Multiple protrusions 5 are fixedly installed around the base 1, and a multi-point support mechanism 2 is installed on each protrusion 5 of the base 1.

[0033] The multi-point support mechanism 2 is equipped with a flatness detection mechanism 3 to ensure that the placement plane of the workpiece 4 is parallel to the installation plane of the detection equipment and to detect flatness.

[0034] like Figure 2As shown, the multi-point support mechanism 2 includes an installation component 21, a flatness adjustment component 22, and a support component 23; both the protrusion 5 and the flatness adjustment component 22 are connected to the installation component 21; both the flatness adjustment component 22 and the support component 23 are connected to the flatness detection mechanism 3; the support component 23 is connected to the flatness adjustment component 22; the installation component 21 is used to install the flatness adjustment component 22, the flatness adjustment component 22 is used to adjust the support height of the support component 23, and the support component 23 is used to install and support the workpiece 4;

[0035] In this utility model, the operator places the base 1 on the testing table, and then changes the support height of the support component 23 by adjusting the flatness adjustment component 22 on the mounting component 21. When the heights of multiple flatness adjustment components 22 are consistent, the support heights of all support components 23 are also consistent. At this time, each protrusion of the workpiece 4 is placed on the support component 23, so that the workpiece 4 is placed flat. Then, the flatness detection mechanism 3 makes the sliding plane of the detection equipment parallel to the plane of placement when the detection equipment slides to detect, so as to avoid detection errors caused by the detection plane and the installation plane of the detection equipment not being parallel.

[0036] The mounting component 21 includes a mounting base 211; the lower end of the mounting base 211 is fixedly connected to the protrusion 5; a threaded hole 212 is provided on the mounting base 211; the mounting base 211 is connected to the flatness adjustment component 22 through the threaded hole 212.

[0037] The flatness adjustment component 22 includes a bolt 221 and a fixing post 222; the bolt 221 is threadedly connected to the mounting base 211 through the threaded hole 212; the upper end of the bolt 221 is fixedly connected to the fixing post 222; the fixing post 222 is connected to the support component 23.

[0038] The support component 23 includes a tapered tip 231, the upper end of a fixed column 222 is fixedly connected to the tapered tip 231, the fixed column 222 is provided with an installation groove 232, and the fixed column 222 is connected to the flatness detection mechanism 3 through the installation groove 232;

[0039] In this utility model, after the operator places the base 1 on the testing table, the operator moves the fixing column 222 up or down inside the mounting base 211 by turning the bolt 221. The moving of the fixing column 222 up or down causes the tapered tip 231 to move up or down until all the top heights of the tapered tips 231 are consistent. Then the workpiece 4 is placed on the top of the tapered tip 231, so that each convex plate of the workpiece 4 abuts against a tapered tip 231; thus adjusting the flatness of the workpiece 4.

[0040] like Figure 2As shown, the flatness detection mechanism 3 includes a limiting installation component 21, a detection moving component 32, a detection piece fixing component 33, and a flatness detection component 34; the mounting groove 232 and the detection moving component 32 are both connected to the limiting installation component 21; the detection moving component 32 is connected to the detection piece fixing component 33; the detection piece fixing component 33 is connected to the flatness detection component 34; the limiting installation component 21 is used to install the detection moving component 32 and limit the sliding of the detection moving component 32; the detection moving component 32 is used to install the detection piece fixing component 33 and drive the detection piece fixing component 33 to slide in a limited manner; the detection piece fixing component 33 is used to fix the flatness detection component 34; the flatness detection component 34 is used to detect the flatness of the workpiece.

[0041] The second limiting installation component 31 includes a mounting plate 311 and a mounting block 312; the mounting plate 311 has a limiting slide groove 313 corresponding to the mounting groove 232, and the mounting plate 311 is slidably connected to the fixed column 222 through the limiting slide groove 313 and the mounting groove 232; the mounting block 312 is slidably connected to the mounting plate 311; the mounting block 312 is connected to the detection and movement component 32.

[0042] The detection moving component 32 includes a slider 322 and a fixing rod 323; the upper end of the mounting block 312 is provided with a limiting groove 321, and the slider 322 is slidably connected to the mounting block 312 through the limiting groove 321; the lower end of the fixing rod 323 is fixedly connected to the slider 322; the upper end of the fixing rod 323 is connected to the detection component fixing component 33.

[0043] The test piece fixing assembly 33 includes a frame 331 and a bolt 332. The frame 331 is slidably connected to the fixing rod 323. The right end of the frame 331 and the upper end of the fixing rod 323 are threadedly connected to the bolt 332. The left end of the frame 331 is connected to the flatness testing assembly 34.

[0044] The flatness detection component 34 includes a clamping and fixing block 341, a screw 342, and a digital dial indicator 343. The two clamping and fixing blocks 341 are symmetrically distributed front and back. The right end of the clamping and fixing block 341 is fixedly connected to the dial indicator frame 331. The front clamping and fixing block 341 is threadedly connected to the screw 342, and the rear clamping and fixing block 341 is rotatably connected to the screw 342. The digital dial indicator 343 is slidably connected to the clamping and fixing block 341 through a sliding groove opened on the inner side of the right end of the two clamping and fixing blocks 341.

[0045] In this utility model, when the operator adjusts multiple tapered tips 231, the mounting plate 311 slides against the fixed post 222 via the limiting slide groove 313 to avoid movement of the tapered tips 231, reducing bending or folding of the mounting plate 311 caused by height differences between the tapered tips 231. After the tapered tips 231 are adjusted and the workpiece 4 is placed on the tapered tips 231, the bolt 332 is first tightened to fix the bracket 331 and the fixing rod 323, and then the mounting block 312 slides against the mounting plate 311 via the slide groove. Connect the dial indicator 343 and then slide it so that the lower end of the dial indicator 343 abuts against the workpiece 4. Then, turn the screw 342 to bring the two clamping blocks 341 closer together to clamp and fix the dial indicator 343 at the same height. Then, slide the dial indicator 343 back and forth along the mounting plate 311 and slide it left and right along the limiting slide groove 321 to achieve the sliding plane of the dial indicator 343 being parallel to the plane on which it is placed during sliding detection, thus avoiding detection errors caused by the non-parallelism between the detection plane and the mounting plane of the dial indicator 343.

[0046] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A flatness testing device, comprising a base (1), characterized in that: It also includes a multi-point support structure (2) and a flatness testing structure (3); The base (1) is equipped with a multi-point support mechanism (2) that can be adjusted point by point to provide stable support for the workpiece (4). The base (1) is fixedly installed with multiple protrusions (5) around its perimeter, and a multi-point support mechanism (2) is installed on each protrusion (5) of the base (1). The multi-point support mechanism (2) is equipped with a flatness detection mechanism (3) to ensure that the workpiece (4) placement plane is parallel to the detection equipment installation plane and can be detected. The multi-point support mechanism (2) includes an installation component (21), a flatness adjustment component (22), and a support component (23); the protrusion (5) and the flatness adjustment component (22) are both connected to the installation component (21); the flatness adjustment component (22) and the support component (23) are both connected to the flatness detection mechanism (3); the support component (23) is connected to the flatness adjustment component (22); the installation component (21) is used to install the flatness adjustment component (22), the flatness adjustment component (22) is used to adjust the support height of the support component (23), and the support component (23) is used to install and support the workpiece (4).

2. The flatness testing device according to claim 1, characterized in that, The mounting component 1 (21) includes a mounting base (211); the lower end of the mounting base (211) is fixedly connected to the protrusion (5); a threaded hole (212) is provided on the mounting base (211); the mounting base (211) is connected to the flatness adjustment component (22) through the threaded hole (212).

3. The flatness testing device according to claim 2, characterized in that, The flatness adjustment component (22) includes a bolt (221) and a fixing post (222); the bolt (221) is threadedly connected to the mounting base (211) through a threaded hole (212); the upper end of the bolt (221) is fixedly connected to the fixing post (222); the fixing post (222) is connected to the support component (23).

4. The flatness testing device according to claim 3, characterized in that, The support component (23) includes a tapered tip (231), the upper end of a fixed column (222) is fixedly connected to the tapered tip (231), and the fixed column (222) is provided with an installation groove (232). The fixed column (222) is connected to the flatness detection mechanism (3) through the installation groove (232).

5. The flatness testing device according to claim 4, characterized in that, The flatness detection mechanism (3) includes a limiting installation component two (31), a detection moving component (32), a detection component fixing component (33), and a flatness detection component (34); the mounting groove (232) and the detection moving component (32) are both connected to the limiting installation component two (31); the detection moving component (32) is connected to the detection component fixing component (33); the detection component fixing component (33) is connected to the flatness detection component (34); the limiting installation component two (31) is used to install the detection moving component (32) and limit the sliding of the detection moving component (32); the detection moving component (32) is used to install the detection component fixing component (33) and drive the detection component fixing component (33) to limit the sliding; the detection component fixing component (33) is used to fix the flatness detection component (34); the flatness detection component (34) is used to detect the flatness of the workpiece.

6. The flatness testing device according to claim 5, characterized in that, The second limiting installation component (31) includes a mounting plate (311) and a mounting block (312); the mounting plate (311) has a limiting slide groove (313) corresponding to the mounting groove (232) one by one, and the mounting plate (311) is slidably connected to the fixed column (222) through the limiting slide groove (313) and the mounting groove (232); the mounting block (312) is slidably connected to the mounting plate (311); the mounting block (312) is connected to the detection and movement component (32).

7. The flatness testing device according to claim 6, characterized in that, The detection moving component (32) includes a slider (322) and a fixing rod (323); the upper end of the mounting block (312) is provided with a limiting groove (321), and the slider (322) is limited and slidably connected to the mounting block (312) through the limiting groove (321); the lower end of the fixing rod (323) is fixedly connected to the slider (322); the upper end of the fixing rod (323) is connected to the detection component fixing component (33).

8. The flatness testing device according to claim 5, characterized in that, The flatness detection component (34) includes a clamping and fixing block (341), a screw (342), and a digital dial indicator (343). The two clamping and fixing blocks (341) are symmetrically distributed front and back. The right end of the clamping and fixing block (341) is connected to the detection component fixing component (33). The front clamping and fixing block (341) is threadedly connected to the screw (342), and the rear clamping and fixing block (341) is rotatably connected to the screw (342). The digital dial indicator (343) is limited and slidably connected to the clamping and fixing block (341) through the sliding groove opened on the inner side of the right end of the two clamping and fixing blocks (341).

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