Bionic friction-increasing pad capable of being quickly replaced

By using a biomimetic friction pad and adjustment components connected by magnets, the problem of inconvenient replacement of traditional friction pads is solved, achieving the effects of rapid replacement and stable wafer operation.

CN224165093UActive Publication Date: 2026-04-24WUXI FANDER WAAL TECHNOLOGY CO LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
WUXI FANDER WAAL TECHNOLOGY CO LTD
Filing Date
2025-04-30
Publication Date
2026-04-24

AI Technical Summary

Technical Problem

Traditional methods of fixing friction pads are time-consuming, labor-intensive, and inconvenient to replace, affecting the stability of wafer operations and the product defect rate.

Method used

The biomimetic friction pads, which are magnetically connected, can be quickly replaced by the attraction between magnet one and magnet two, and can be combined with adjustment components to adapt to different wafer sizes.

Benefits of technology

This improves the efficiency of friction pad replacement, ensures the stability and accuracy of wafer operations, and reduces the workload of operators.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of bionics and engineering, and discloses a bionic friction-increasing pad capable of being quickly replaced, which comprises a placing frame I, a placing frame II is arranged on the right side of the placing frame I, adjusting components are arranged on the inner sides of the placing frame I and the placing frame II, and taking plates are arranged on the front sides of the placing frame I and the placing frame II; a mounting assembly is arranged in the taking plate, and wafers are placed in the first placing frame and the second placing frame; and the adjusting assembly comprises a fixing base, the fixing base is arranged on the inner side of the first placing frame and the inner side of the second placing frame, a sliding plate is slidably connected to the interior of the fixing base, a connecting rod is fixedly connected to the sliding plate, and a sliding groove is formed in the fixing base. In the utility model, when the bionic friction-increasing pad is replaced, the assembly with the magnet II and the friction-increasing pad is taken down, the new assembly is aligned with the magnet I, and the replacement is quickly completed by utilizing magnetic attraction, so that the complexity of the traditional replacement mode is avoided, and the replacement efficiency is improved.
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Description

Technical Field

[0001] This utility model relates to the fields of bionics and engineering technology, and in particular to a bionic friction-enhancing pad that can be quickly replaced. Background Technology

[0002] In the delicate and critical field of semiconductor manufacturing, wafer processing is the core link in the entire industry process. The precision and stability of each step directly determine the quality and performance of the final product.

[0003] In the essential operation of handling wafers, friction pads are commonly installed on the pick-up plate to ensure that the wafers can be firmly gripped and transferred. This increases the friction between the pick-up plate and the wafer, reduces operational errors caused by factors such as sliding and displacement, and thus ensures the stability of equipment operation and processing accuracy.

[0004] Traditional friction pad fixing methods mostly involve bolt connections or adhesive bonding. When using bolt connections, replacing the friction pad requires unscrewing and tightening the bolts one by one, which is time-consuming and labor-intensive. Frequent disassembly can also cause bolt stripping, affecting the lifespan of the device. While adhesive bonding is simpler to install, replacing it requires cleaning up residual adhesive, which is very troublesome and may damage the board during the cleaning process. In addition, the friction-enhancing effect of traditional friction pads decreases after a period of use, but the inconvenience of replacement forces operators to continue using them, which in turn affects the stability of wafer operations and increases the product defect rate.

[0005] Therefore, a biomimetic friction-enhancing pad that can be quickly replaced is provided to solve the problems mentioned in the background art. Utility Model Content

[0006] To overcome the above shortcomings, this utility model provides a quick-replaceable biomimetic friction-enhancing pad, aiming to improve upon the existing technology where traditional friction-enhancing pad fixing methods mostly involve bolt connections or adhesive bonding. When using bolt connections, replacing the friction-enhancing pad requires unscrewing and tightening the bolts one by one, which is time-consuming and laborious. Frequent disassembly can easily lead to bolt stripping, affecting the service life of the device. While adhesive bonding is simpler to install, replacing it requires cleaning up residual adhesive, which is very troublesome and may damage the board during the cleaning process. At the same time, the friction-enhancing effect of traditional friction-enhancing pads decreases after a period of use, but due to the inconvenience of replacement, operators have to continue using them, which in turn affects the stability of wafer operations and increases the product defect rate.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a quick-replaceable biomimetic friction-enhancing pad, comprising a placement frame one, a placement frame two disposed on the right side of the placement frame one, an adjustment component disposed on the inner side of the placement frame one and the placement frame two, and a pick-up plate disposed on the front side of the placement frame one and the placement frame two; an installation component disposed inside the pick-up plate, and a wafer disposed inside the placement frame one and the placement frame two; the adjustment component includes a fixing seat disposed inside the placement frame one and the placement frame two, a sliding plate slidably connected inside the fixing seat, a connecting rod fixedly connected to the sliding plate, a sliding groove being formed inside the fixing seat, a limit block being disposed on the connecting rod, a connecting seat disposed inside the placement frame one and the placement frame two, and a telescopic rod slidably connected inside the connecting seat.

[0008] Furthermore, the mounting assembly includes a magnet one, which is mounted on the retrieval plate, and a magnet two is disposed on the upper side of the magnet one, on which a biomimetic friction pad is fixedly mounted.

[0009] Furthermore, both the first and second placement racks have placement slots inside, and the wafer is slidably connected inside the placement slots.

[0010] Furthermore, magnet one and magnet two are magnetically connected.

[0011] Furthermore, the side of the sliding plate away from the fixed seat is fixedly connected to the inner side of the first and second placement racks, and the side of the telescopic rod away from the connecting seat is connected to the inner side of the first and second placement racks.

[0012] Furthermore, the connecting rod is slidably connected inside the groove.

[0013] Furthermore, the limiting block is threaded onto the connecting rod.

[0014] Furthermore, the fixing seat is located directly above the connecting seat.

[0015] This utility model has the following beneficial effects:

[0016] In this invention, when wafers of different sizes need to be placed, the operator pushes the sliding plate inside the fixed seat, causing the connecting rod to move synchronously in the slide groove. After reaching the designated position, the limiting block is connected by a thread and its position on the connecting rod is adjusted to limit the sliding range of the sliding plate. At the same time, the telescopic rod inside the connecting seat extends and retracts with the adjustment of the spacing between the placement racks, precisely adjusting the spacing between placement racks one and two to accommodate different wafers.

[0017] In this invention, when picking up a wafer, the biomimetic friction pad on the picking plate increases the friction with the wafer, ensuring stable and accurate operation. Magnet one on the picking plate is magnetically connected to magnet two above it. When replacing the biomimetic friction pad, the component with magnet two and friction pad is removed, and the new component is aligned with magnet one. The replacement is completed quickly by using magnetic attraction, avoiding the cumbersome traditional replacement method and improving replacement efficiency. Attached Figure Description

[0018] Figure 1 This is a perspective view of a quick-replaceable biomimetic friction-enhancing pad proposed in this utility model.

[0019] Figure 2 This is a schematic diagram of the internal structure of the fixing seat of a quick-replaceable biomimetic friction-enhancing pad proposed in this utility model.

[0020] Figure 3 This is a schematic diagram of the bottom structure of a quick-replaceable biomimetic friction-enhancing pad proposed in this utility model.

[0021] Figure 4 This is a schematic diagram of the installation component structure of a quick-replaceable biomimetic friction-enhancing pad proposed in this utility model.

[0022] Legend:

[0023] 1. Placement rack one; 2. Placement rack two; 3. Placement slot; 4. Adjustment component; 41. Fixing base; 42. Sliding plate; 43. Connecting rod; 44. Slide groove; 45. Limiting block; 46. Connecting base; 47. Telescopic rod; 5. Wafer; 6. Mounting component; 61. Magnet one; 62. Magnet two; 63. Bionic friction pad; 7. Pick-up plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Reference Figure 1 , Figure 2 and Figure 3This utility model provides an embodiment of a quick-replaceable biomimetic friction pad, comprising a placement frame 1, a placement frame 2 on the right side of the placement frame 1, an adjustment component 4 on the inner side of the placement frame 1 and the placement frame 2, and a pick-up plate 7 on the front side of the placement frame 1 and the placement frame 2; an installation component 6 is disposed inside the pick-up plate 7, and a wafer 5 is placed inside the placement frame 1 and the placement frame 2; the adjustment component 4 includes a fixing base 41, which is disposed inside the placement frame 1 and the placement frame 2, a sliding plate 42 is slidably connected inside the fixing base 41, a connecting rod 43 is fixedly connected to the sliding plate 42, and a groove is formed inside the fixing base 41. 44. Connecting rod 43 is slidably connected inside slide groove 44. Limiting block 45 is provided on connecting rod 43. Limiting block 45 is threadedly connected to connecting rod 43. Connecting seat 46 is provided inside placement frame 1 and placement frame 2. Telescopic rod 47 is slidably connected inside connecting seat 46. The side of sliding plate 42 away from fixed seat 41 is fixedly connected to the inside of placement frame 1 and placement frame 2. The side of telescopic rod 47 away from connecting seat 46 is connected to the inside of placement frame 1 and placement frame 2. Placement slot 3 is opened inside both placement frame 1 and placement frame 2. Wafer 5 is slidably connected inside placement slot 3. Fixed seat 41 is located on the upper side of connecting seat 46.

[0026] When placing wafers 5 of different sizes, the operator pushes the sliding plate 42 to slide it inside the fixed base 41. The sliding plate 42 drives the connecting rod 43 to move synchronously inside the slide groove 44. When it moves to the designated position, the limiting block 45 is threaded onto the connecting rod 43, and its position on the connecting rod 43 is flexibly adjusted, thereby effectively limiting the sliding range of the sliding plate 42. At the same time, the telescopic rod 47 inside the connecting base 46 will extend and retract accordingly with the adjustment of the distance between the placement rack 1 and the placement rack 2, which can precisely adjust the distance between the placement rack 1 and the placement rack 2 so that it can perfectly adapt to wafers 5 of different sizes, thereby ensuring that the wafers 5 can be stably placed in the placement grooves 3 inside the placement rack 1 and the placement rack 2. When placing the wafers 5, the operator slowly slides the wafers 5 along the placement grooves 3 until the wafers 5 reach the appropriate position. When it is necessary to remove the wafers 5, the operator can easily operate by using the removal plate 7.

[0027] Reference Figure 1 , Figure 2 and Figure 4 The mounting component 6 includes a magnet 61, which is mounted on the pick-up plate 7. A magnet 62 is provided on the upper side of the magnet 61. A bionic friction pad 63 is fixedly mounted on the magnet 62. The magnet 61 and the magnet 62 are magnetically connected.

[0028] When handling wafer 5, the biomimetic friction pad 63 effectively increases the friction between the wafer 5 and the wafer 5, thereby preventing unnecessary sliding or displacement of the wafer 5 during placement or handling, and effectively ensuring the stability and accuracy of the operation. Magnet 61 is also installed on the handling plate 7, and magnet 62 is set above it and is tightly connected to magnet 61 by magnet. When it is necessary to replace the biomimetic friction pad 63, the operator only needs to easily remove the component with magnet 62 and biomimetic friction pad 63 from magnet 61, and then accurately align the new component with magnet 62 and biomimetic friction pad 63 with magnet 61. By utilizing the strong magnetic attraction between magnet 61 and magnet 62, the replacement of biomimetic friction pad 63 can be completed quickly and conveniently, avoiding the cumbersome operation process brought about by traditional bolt connection or glue pasting replacement methods, and greatly improving the replacement efficiency of biomimetic friction pad 63.

[0029] Working principle: When using this device, if wafers 5 of different sizes need to be placed, the sliding plate 42 in the fixed base 41 is pushed to slide in the slide groove 44, which drives the connected rod 43 to move. By rotating the limiting block 45 threadedly connected to the connecting rod 43, the sliding range of the sliding plate 42 can be limited to prevent it from falling off the fixed base 41. At the same time, the telescopic rod 47 in the connecting base 46 extends and retracts with the adjustment of the placement rack spacing, thereby precisely adjusting the spacing between placement rack 1 and placement rack 2 to ensure that the wafer 5 can be stably placed in the placement rack. In slot 3, the operator slowly slides the wafer 5 into the slot. When picking it up, a pick-up plate 7 is used. The biomimetic friction pad 63 on the pick-up plate 7 increases the friction with the wafer 5 to prevent it from sliding or shifting. Magnet 1 61 and magnet 2 62 on the pick-up plate 7 are magnetically connected. When replacing the biomimetic friction pad 63, the biomimetic friction pad 63 is removed, and the new biomimetic friction pad 63 with magnet 2 62 is aligned with magnet 1 61. The replacement is completed quickly by using magnetic attraction, avoiding the cumbersome traditional method and improving the replacement efficiency.

[0030] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A quick-change biomimetic friction pad is installed on a pick-up plate (7), the pick-up plate (7) is located on the front side of a first placement rack (1) and a second placement rack (2), the second placement rack (2) is located on the right side of the first placement rack (1), and an adjustment component (4) is located on the inner side of the first placement rack (1) and the second placement rack (2); an installation component (6) is located inside the pick-up plate (7), and a wafer (5) is placed inside the first placement rack (1) and the second placement rack (2); The adjustment component (4) includes a fixed seat (41), which is disposed inside the first placement frame (1) and the second placement frame (2). A sliding plate (42) is slidably connected inside the fixed seat (41), and a connecting rod (43) is fixedly connected to the sliding plate (42). A sliding groove (44) is provided inside the fixed seat (41), and a limit block (45) is provided on the connecting rod (43). A connecting seat (46) is provided inside the first placement frame (1) and the second placement frame (2), and a telescopic rod (47) is slidably connected inside the connecting seat (46). The component is characterized by: The mounting assembly (6) includes a magnet (61) mounted on a pick-up plate (7), and a magnet (62) is provided on the upper side of the magnet (61), and a bionic friction pad (63) is fixedly mounted on the magnet (62).

2. The quick-replaceable biomimetic friction-enhancing pad according to claim 1, characterized in that: The placement rack one (1) and the placement rack two (2) are both provided with placement slots (3), and the wafer (5) is slidably connected inside the placement slots (3).

3. The quick-replaceable bionic friction-enhancing pad according to claim 1, characterized in that: The first magnet (61) and the second magnet (62) are magnetically connected.

4. The quick-replaceable bionic friction-enhancing pad according to claim 1, characterized in that: The sliding plate (42) is fixedly connected to the inner side of the first placement frame (1) and the second placement frame (2) on the side away from the fixed seat (41), and the telescopic rod (47) is connected to the inner side of the first placement frame (1) and the second placement frame (2) on the side away from the connecting seat (46).

5. The quick-replaceable bionic friction-enhancing pad according to claim 1, characterized in that: The connecting rod (43) is slidably connected inside the groove (44).

6. The quick-replaceable bionic friction-enhancing pad according to claim 1, characterized in that: The limiting block (45) is threaded onto the connecting rod (43).

7. The quick-replaceable bionic friction-enhancing pad according to claim 1, characterized in that: The fixing seat (41) is located on the upper side of the connecting seat (46).