Wafer clamp and flower basket

Abstract

The embodiment of the utility model provides a wafer clamp and a flower basket, and relates to the technical field of semiconductors. The wafer clamp provided by the utility model comprises a support frame and clamping pieces, a plurality of clamping pieces are arranged at the edge of the support frame at intervals, the plurality of clamping pieces are used for jointly abutting against the edge of a wafer, and the plurality of clamping pieces and the support frame jointly form two accommodating spaces which are respectively positioned on the two sides of the support frame. And the support frame is used for separating the wafers accommodated in the two accommodating spaces. The flower basket provided by the utility model comprises a flower basket body and the wafer clamp, wherein the wafer clamp can be inserted into the flower basket body along the first direction. According to the utility model, the processing effect of the wafers can be prevented from being influenced by the attachment of adjacent wafers in the basket.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically, to a wafer clamp and a flower basket. Background Technology

[0002] Wafers are the basic material for manufacturing semiconductor chips, and to meet the performance specifications of different semiconductor chips, wafers need to be processed to different thicknesses. As the wafer thickness decreases, the wafer becomes lighter, but its rigidity and strength decrease.

[0003] When ultrathin wafers are placed in a traditional basket for processing, they may warp and deform, causing adjacent wafers in the basket to stick together, which affects the subsequent processing results. Utility Model Content

[0004] The purpose of this utility model is to provide a wafer clamp and a basket that can prevent adjacent wafers in the basket from sticking together and affecting the wafer processing effect.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] In a first aspect, this utility model provides a wafer clamp, movably disposed within a basket along a first direction, the wafer clamp comprising:

[0007] Support frame;

[0008] The clamping member is provided in multiple parts, which are spaced apart on the edge of the support member. The multiple clamping members are used to jointly abut the edge of the wafer. The multiple clamping members and the support frame together form two receiving spaces located on both sides of the support frame, and the support frame is used to separate the wafers contained in the two receiving spaces.

[0009] In an optional embodiment, the clamping member includes a connecting portion and extension portions extending along both ends of the connecting portion, and the end of the support frame is connected to the connecting portion to form a slot on both sides of the support frame, the slot being used to receive and hold the wafer edge.

[0010] In an optional embodiment, at least three clamping members are provided. The support frame includes a first bracket and a second bracket perpendicular to the first bracket. Two clamping members are respectively connected to both ends of the first bracket. The second bracket has a first end and a second end. One of the clamping members is connected to the second end of the second bracket. The wafer can be inserted into the receiving space from the first end along a first direction.

[0011] In an alternative embodiment, the first end of the second bracket extends along the first direction and forms a gripping portion.

[0012] In an optional embodiment, the support frame further includes a fixing member detachably connected to a first end of the second bracket, the fixing member being used to abut against the wafer located within the receiving space to fix the wafer.

[0013] In an alternative embodiment, the plurality of clamping members are detachably connected to the support frame.

[0014] Secondly, the present invention provides a flower basket, including a flower basket body and a wafer jig as described in any of the foregoing embodiments, wherein the wafer jig is capable of being inserted into the flower basket body along the first direction.

[0015] Thirdly, the present invention provides a flower basket, including a flower basket body and a clamping assembly, wherein the clamping assembly includes a plurality of interconnected wafer clamps as described in any of the foregoing embodiments.

[0016] In an optional embodiment, the flower basket body has a receiving cavity, and the inner wall of the receiving cavity is provided with a plurality of guide grooves spaced apart along the first direction for receiving the clamping member.

[0017] In an optional embodiment, the flower basket further includes a limiting rod located above the receiving cavity. The limiting rod is movable relative to the flower basket body and has a first state and a second state. In the first state, the wafer jig can enter and exit the receiving cavity along the first direction. In the second state, the limiting rod simultaneously abuts against a plurality of support frames located within the receiving cavity.

[0018] The beneficial effects of the wafer fixture and flower basket provided in this embodiment of the present invention include:

[0019] By movably placing the wafer jig inside the basket and setting the wafer jig as a support frame and clamping components, multiple clamping components and the support frame form two receiving spaces for accommodating wafers. The two receiving spaces are separated by the support frame, so that when the wafer is accommodating the wafer through the wafer jig, the wafers in the two receiving spaces of the wafer jig will not stick to each other, thus improving the subsequent wafer processing effect. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This embodiment provides a top view of the flower basket in an optional embodiment;

[0022] Figure 2 This is a schematic diagram of the wafer fixture provided in this embodiment from a first-view perspective;

[0023] Figure 3 for Figure 2 Enlarged view of section A in the middle;

[0024] Figure 4 This is a schematic diagram of the wafer fixture provided in this embodiment from a second perspective.

[0025] Figure 5 A top view of the flower basket is provided in another alternative embodiment for this embodiment.

[0026] Icons: 100-Flower basket; 110-Flower basket body; 111-Receiving cavity; 120-Guide groove; 130-Limiting rod; 200-Wafer fixture; 210-Support frame; 211-First support; 212-Second support; 213-Holding part; 220-Clamping part; 221-Connecting part; 222-Extension part; 223-Slot; 240-Fixing part. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0029] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0030] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0031] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0032] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0033] Wafers are the fundamental material for fabricating semiconductor chips. To meet the performance specifications of different semiconductor chips, wafers need to be processed to varying thicknesses. As the wafer thickness decreases, its weight, rigidity, and strength decrease. For ultra-thin wafers, due to their relatively thinness, they are prone to warping. During processing in a traditional basket, ultra-thin wafers are subjected to stress and warp, causing adjacent wafers in the basket to easily stick together. This leads to increased wafer wear and insufficient contact between the sticking areas and the plating solution, resulting in poor plating quality and impacting the overall wafer processing outcome.

[0034] To address the problem that ultra-thin wafers are easily deformed when placed in a wafer basket, leading to adjacent wafers sticking together and affecting processing results, this utility model provides a wafer clamp and wafer basket. The following detailed description, through embodiments and accompanying drawings, outlines the overall structure, working principle, and technical effects of the wafer clamp and wafer basket provided by this utility model.

[0035] Please refer to Figure 1 On the one hand, this utility model provides a basket for storing ultra-thin wafers to facilitate wafer processing and prevent adjacent ultra-thin wafers from sticking together during ultra-thin wafer processing, thus affecting the processing effect. It is understood that the basket 100 provided by this utility model can also be used as a conventional basket 100 for the storage, transportation, and processing of wafers of conventional thickness.

[0036] The present invention provides a flower basket 100 including a flower basket body 110 and a wafer clamp 200. The flower basket body 110 is used to accommodate the wafer clamp 200, the wafer clamp 200 is used to accommodate the wafer, and the wafer clamp 200 can be inserted into the flower basket body 110 along a first direction.

[0037] On the other hand, please refer to Figures 1-4This invention provides a wafer clamp 200, which is applied to the aforementioned basket 100 and is movably disposed within the basket 100 along a first direction. In this embodiment, the wafer clamp 200 is used to accommodate ultra-thin wafers and to separate adjacent ultra-thin wafers to prevent them from sticking together during processing, thereby improving the processing effect of ultra-thin wafers. The ultra-thin wafers are placed in or removed from the basket 100 by placing the wafer clamp 200 containing the wafers into or out of the basket 100. It is understood that the wafer clamp 200 provided by this invention can also store ordinary wafers for storage, transport, and processing of conventional wafers.

[0038] The wafer jig 200 provided by this utility model includes a support frame 210 and clamping members 220. Multiple clamping members 220 are provided, spaced apart along the edge of the support frame 210. The multiple clamping members 220 and the support frame 210 together form two receiving spaces located on opposite sides of the support frame 210, used to accommodate wafers. When a wafer is clamped on the wafer jig 200 and located within the receiving space, the multiple clamping members 220 collectively support the edge of the wafer. Furthermore, the wafers located in the two receiving spaces are separated by the support frame 210 to prevent deformation and misalignment of the wafers in the two receiving spaces on the wafer jig 200.

[0039] By movably arranging the wafer jig 200 within the basket 100, and configuring the wafer jig 200 as a support frame 210 and clamping members 220, multiple clamping members 220 and the support frame 210 form two receiving spaces for accommodating wafers. The two receiving spaces are separated by the support frame 210. Therefore, when wafers are accommodated by the wafer jig 200, the wafers in the two receiving spaces of the wafer jig 200 will not stick together, improving the subsequent wafer processing effect. It should be noted that in this embodiment, four wafer jigs 200 are placed in one basket 100, and a preset distance is set between adjacent wafer jigs 200 to prevent wafers in adjacent wafer jigs 200 from sticking together.

[0040] Please refer to Figure 2 and Figure 3In this embodiment, the clamping member 220 includes a connecting portion 221 and an extension portion 222. The extension portion 222 is provided at both ends of the connecting portion 221, and the two extension portions 222 extend in the same direction, making the clamping member 220 concave in shape. The end of the support frame 210 is connected to the connecting portion 221, so that the support frame 210 and the two extension portions 222 respectively form slots 223 on both sides of the support frame 210. The slots 223 are used to accommodate the edge of the wafer. Through the cooperation of multiple clamping members 220, the edge of the wafer is placed in multiple slots 223 at the same time, thereby realizing the clamping of the wafer. When the wafer jig 200 accommodates two wafers, the two wafers are respectively located in the slots 223 on both sides of the support frame 210, and the two wafers are separated by the support frame 210 to prevent the two wafers on the wafer jig 200 from sticking together.

[0041] It is understood that in some optional embodiments, the clamping member 220 can also have a U-shaped or V-shaped structure, as long as the support frame 210 and the clamping member 220 are connected, and slots 223 for accommodating wafer edges can be formed on both sides of the clamping member 220. Preferably, the clamping member 220 and the wafer have point-to-surface contact to reduce the contact area between the wafer and the clamping member 220 and the support frame 210, thereby achieving a better processing effect.

[0042] Please refer to Figure 2 and Figure 4 In this embodiment, the support frame 210 includes a first support 211 and a second support 212, which are perpendicular to each other. At least three clamping members 220 are provided. Two clamping members 220 are respectively connected to the two ends of the first support 211, while the second support 212 has a first end and a second end, with one clamping member 220 connected to the second end of the second support 212. Thus, the clamping members 220 at both ends of the first support 211 and the clamping member 220 at the second end of the second support 212 together form a receiving space to accommodate the wafer. Simultaneously, since the first end of the second support 212 is open, the wafer can be inserted into the receiving space from the first end along a first direction.

[0043] To facilitate moving the wafer jig 200 into or removing it from the basket 100, please refer to... Figure 2 and Figure 4 In this embodiment, the first end of the second support 212 extends along the first direction and forms a gripping portion 213. When the wafer is placed in the receiving space, the gripping portion 213 protrudes from the wafer area, so that the operator can hold the gripping portion 213 to move the wafer jig 200 and the wafer located in the receiving space, thereby achieving the effect of facilitating the movement of the wafer jig 200.

[0044] Please refer to Figure 5 In some optional embodiments, the support frame 210 further includes a fixing member 240 detachably connected to the first end of the second bracket 212. The structure of the fixing member 240 is the same as that of the clamping member 220, thereby fixing the wafer in the receiving space in the first direction by the fixing member 240 abutting against the wafer, and thus fixing the wafer into the wafer jig 200. This is to prevent the wafer from floating up under the action of buoyancy when the wafer jig 200 is placed in the basket 100 for subsequent processing.

[0045] It is understood that, in some alternative embodiments, multiple clamping elements 220 are detachably connected to the support frame 210. By configuring multiple clamping elements 220 to be detachably connected to the support frame 210, it is convenient to mass-produce the components of the wafer fixture 200, and at the same time, it is convenient to clean and replace the clamping elements 220 when some of them are contaminated or damaged.

[0046] On the other hand, in some alternative embodiments, the present invention also provides another type of wafer chuck 100, which includes a wafer chuck body 110 and a clamping assembly. The clamping assembly includes a plurality of interconnected wafer clamps 200, and the clamping assembly is movably disposed within the wafer chuck body 110 along a first direction. The clamping assembly includes a plurality of wafer clamps 200, thereby enabling the simultaneous clamping and accommodating of multiple wafers, facilitating the simultaneous transfer of multiple wafers, and improving processing efficiency.

[0047] Please refer to Figure 1 and Figure 5 In some optional embodiments, the basket body 110 has a receiving cavity 111 for accommodating the wafer jig 200, and a plurality of guide grooves 120 for accommodating clamping members 220 are spaced apart along a first direction on the inner wall of the receiving cavity 111. When the wafer jig 200 is placed in the basket body 110, the clamping members 220 are held in place by the guide grooves 120, thereby achieving the holding and limiting of the clamping members 220 and preventing the wafer jig 200 from moving relative to each other within the basket body 110, which would cause the wafers to stick together.

[0048] Please refer to Figure 1In some alternative embodiments, the flower basket 100 further includes a limiting rod 130 located above the receiving cavity 111. The limiting rod 130 is movable relative to the flower basket body 110 and has a first state and a second state. When the limiting rod 130 is in the first state, the limiting rod 130 opens the opening of the receiving cavity 111, and the wafer jig 200 can enter and exit the receiving cavity 111 in a first direction. When the limiting rod 130 is in the second state, the limiting rod 130 blocks the opening of the receiving cavity 111, and the limiting rod 130 simultaneously abuts against a plurality of support frames 210 located within the receiving cavity 111. By setting a limiting rod 130, after several wafer jigs 200 are placed in the receiving cavity 111, the limiting rod 130 is moved to the second state, so that the limiting rod 130 simultaneously abuts against several support frames 210 in the receiving cavity 111, thereby simultaneously limiting and fixing several wafer jigs 200, and preventing the wafer jigs 200 from moving in the basket 100 during the wafer processing and affecting the processing effect.

[0049] In summary, the implementation principle of the wafer jig 200 and basket 100 provided by this utility model is as follows: the wafer jig 200 is movably set inside the basket 100, and the wafer jig 200 is configured as a support frame 210 and clamping members 220. Multiple clamping members 220 and the support frame 210 form two receiving spaces for accommodating wafers. The two receiving spaces are separated by the support frame 210. Thus, when the wafer is accommodated by the wafer jig 200, the wafers in the two receiving spaces of the wafer jig 200 will not stick together, thereby improving the subsequent wafer processing effect.

[0050] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A wafer fixture, characterized in that, The wafer fixture (200) is movable within the basket (100) along a first direction, and includes: Support frame (210); A plurality of clamping members (220) are provided, and the plurality of clamping members (220) are spaced apart on the edge of the support frame (210). The plurality of clamping members (220) are used to jointly abut the edge of the wafer. The plurality of clamping members (220) and the support frame (210) together form two receiving spaces located on both sides of the support frame (210), and the support frame (210) is used to separate the wafers contained in the two receiving spaces.

2. The wafer fixture according to claim 1, characterized in that, The clamping member (220) includes a connecting portion (221) and an extension portion (222) extending along both ends of the connecting portion (221). The end of the support frame (210) is connected to the connecting portion (221) to form a slot (223) on both sides of the support frame (210). The slot (223) is used to receive and hold the edge of the wafer.

3. The wafer fixture according to claim 1, characterized in that, At least three clamping members (220) are provided. The support frame (210) includes a first support (211) and a second support (212) perpendicular to the first support (211). Two clamping members (220) are respectively connected to the two ends of the first support (211). The second support (212) has a first end and a second end. One of the clamping members (220) is connected to the second end of the second support (212). The wafer can be inserted into the receiving space from the first end along the first direction.

4. The wafer fixture according to claim 3, characterized in that, The first end of the second bracket (212) extends along the first direction and forms a gripping portion (213).

5. The wafer fixture according to claim 3, characterized in that, The support frame (210) further includes a fixing member (240) detachably connected to the first end of the second bracket (212), the fixing member (240) being used to abut against the wafer located in the receiving space to fix the wafer.

6. The wafer fixture according to any one of claims 1-5, characterized in that, The plurality of clamping members (220) are detachably connected to the support frame (210).

7. A flower basket, characterized in that, It includes a basket body (110) and a wafer jig (200) as described in any one of claims 1-6, the wafer jig (200) being insertable into the basket body (110) along the first direction.

8. A flower basket, characterized in that, It includes a basket body (110) and a clamping assembly, the clamping assembly comprising a plurality of interconnected wafer clamps as described in any one of claims 1-6.

9. The flower basket according to claim 7 or 8, characterized in that, The flower basket body (110) has a receiving cavity (111), and a plurality of guide grooves (120) for receiving the clamping member (220) are spaced apart along the first direction on the inner wall of the receiving cavity (111).

10. The flower basket according to claim 9, characterized in that, The flower basket (100) also includes a limiting rod (130) located above the receiving cavity (111). The limiting rod (130) is movable relative to the flower basket body (110) and has a first state and a second state. In the first state, the wafer jig (200) can enter and exit the receiving cavity (111) along the first direction. In the second state, the limiting rod (130) simultaneously abuts against a plurality of support frames (210) located in the receiving cavity (111).

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