Sand blasting clamp of electrostatic chuck

Abstract

The utility model provides a sandblasting fixture of electrostatic chuck, which is used for fixing electrostatic chuck in the sandblasting process, the sandblasting fixture comprises a base, a plurality of replaceable upper covers and a plurality of bolts, the base is used for placing the electrostatic chuck, the base is provided with a plurality of circles of threaded hole groups, and the plurality of circles of threaded hole groups are respectively used for fixing the electrostatic chucks with different sizes; the plurality of upper covers are respectively matched with the electrostatic chucks with different sizes, the middle part of each upper cover is provided with a through hole of which the aperture is greater than that of the wafer bearing surface, and each upper cover is provided with a plurality of mounting holes which are in one-to-one correspondence with the threaded holes in the circle of threaded hole group; bolts penetrate through the mounting holes and are screwed into the corresponding threaded holes, and the upper cover tightly presses the annular step face of the electrostatic chuck so as to fix the electrostatic chuck. According to the technical scheme of the utility model, the problem that the electrostatic chuck floats up and down in the sand blasting operation is avoided, and the electrostatic chuck fixing device can adapt to the fixation of the electrostatic chucks with different sizes in the sand blasting action, and a clamp does not need to be independently designed for the electrostatic chuck with each size.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a sandblasting fixture for an electrostatic chuck. Background Technology

[0002] An electrostatic chuck, also known as an electrostatic chuck (ESC), is a type of clamp that uses electrostatic electrodes inside an insulator to generate electrostatic force to hold and hold objects such as wafers and glass panels. Electrostatic chucks can clamp and fix wafers without damaging them, and are core components of critical process equipment for etching, thin film deposition, ion implantation, and ashing.

[0003] Electrostatic chucks require precise positioning during refurbishment, especially in sandblasting protrusion reconstruction. Sandblasting is a process that uses compressed air to propel a high-speed stream of sand onto the substrate surface. To prevent the airflow from disturbing the positioning of the electrostatic chuck during sandblasting, higher requirements are placed on its stability. Existing technology uses cloth tape to attach the electrostatic chuck to a rubber-coated base. However, the cloth tape is easily penetrated by the airflow, causing the electrostatic chuck to float up and down under the influence of the airflow, resulting in poor product stability. Furthermore, when separating the cloth tape, a significant amount of sand flows out, and after cleaning up most of it, the remaining sand pollutes the work surface.

[0004] Therefore, it is necessary to propose a new electrostatic chuck sandblasting fixture.

[0005] The statements herein provide only background information relating to this invention and do not necessarily constitute prior art. Utility Model Content

[0006] The purpose of this utility model is to provide a sandblasting fixture for an electrostatic chuck, used to fix the electrostatic chuck during the sandblasting process, so as to solve the problem of poor fixation stability of cloth tape in the prior art, avoid the electrostatic chuck floating up and down during the sandblasting operation, and at the same time avoid the problem of sand material pollution to the work table environment caused by cloth tape.

[0007] To achieve the above objectives, in a first aspect, this utility model provides a sandblasting fixture for an electrostatic chuck, used to fix the electrostatic chuck during the sandblasting process. The electrostatic chuck includes a wafer bearing surface and an annular stepped surface surrounding the wafer bearing surface, the annular stepped surface being lower than the wafer bearing surface. The sandblasting fixture includes:

[0008] A base for holding the electrostatic chuck, the base having multiple sets of threaded holes for fixing electrostatic chucks of different sizes.

[0009] Multiple replaceable top covers, each of which is matched with an electrostatic chuck of different sizes. Each top cover has a through hole in the middle with a diameter larger than that of the wafer bearing surface. Each top cover has multiple mounting holes that correspond one-to-one with the threaded holes in a ring of threaded holes.

[0010] Multiple bolts pass through the mounting holes and are screwed into the corresponding threaded holes. The upper cover presses against the annular stepped surface of the electrostatic chuck to fix the electrostatic chuck.

[0011] Optionally, the multiple turns of the threaded hole group are concentrically distributed on the base.

[0012] Optionally, the number of turns of the threaded hole group is two, and the number of the top cover is two.

[0013] Optionally, the two sets of threaded holes are used to fix the 8-inch and 12-inch electrostatic chucks respectively, and the two top covers are matched with the 8-inch and 12-inch electrostatic chucks respectively.

[0014] Optionally, with the bolts tightened, the upper surface of the top cover is not higher than the wafer bearing surface of the electrostatic chuck.

[0015] Optionally, a silicone pad is provided between the lower surface of the upper cover and the annular stepped surface.

[0016] Optionally, each turn of the threaded hole group includes at least two pairs of threaded holes, and each pair of threaded holes is diagonally distributed.

[0017] Optionally, the base is also provided with two positioning pin holes, which cooperate with positioning pins provided on the sandblasting machine table to fix the position of the base.

[0018] Optionally, each turn of the threaded hole group includes five pairs of threaded holes.

[0019] Optionally, the base is made of stainless steel and the top cover is made of aluminum alloy.

[0020] Compared with the prior art, this utility model has at least the following advantages:

[0021] This utility model provides a sandblasting fixture for an electrostatic chuck, used to fix the electrostatic chuck during sandblasting. The electrostatic chuck includes a wafer bearing surface and an annular stepped surface surrounding the wafer bearing surface. The annular stepped surface is lower than the wafer bearing surface. The sandblasting fixture includes a base, multiple replaceable top covers, and multiple bolts. The base is used to place the electrostatic chuck, and the base has multiple sets of threaded holes, which are used to fix electrostatic chucks of different sizes. The multiple top covers are respectively matched with electrostatic chucks of different sizes. The top cover has a through hole in the center with a diameter larger than that of the wafer bearing surface. The top cover has multiple mounting holes that correspond one-to-one with the threaded holes in one set of threaded holes. The bolts pass through the mounting holes and are screwed into the corresponding threaded holes. The top covers press against the annular stepped surface of the electrostatic chuck to fix the electrostatic chuck. The technical solution of this utility model involves setting a threaded hole group on the base and setting mounting holes on the upper cover that correspond one-to-one with the threaded holes in the threaded hole group. The upper cover is installed on the base with bolts, so that the upper cover presses against the annular stepped surface of the electrostatic chuck to fix the electrostatic chuck. Compared with the existing technology that uses cloth tape to fix the electrostatic chuck, this avoids the problem of the electrostatic chuck floating up and down during sandblasting operations and avoids the environmental pollution of the workbench caused by the cloth tape. Furthermore, the sandblasting fixture for the electrostatic chuck provided by this utility model has multiple rings of threaded holes on the base for mounting electrostatic chucks of different sizes, and multiple upper covers that match electrostatic chucks of different sizes. This allows for the fixation of electrostatic chucks of different sizes during sandblasting, expanding the product's applicability and eliminating the need to design new fixtures for each size of electrostatic chuck. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a sandblasting fixture for an electrostatic chuck according to an embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of the structure of a sandblasting fixture for an electrostatic chuck according to an embodiment of the present invention.

[0024] Explanation of reference numerals in the attached figures:

[0025] 100 - Electrostatic chuck; 110 - Wafer carrier surface; 120 - Annular stepped surface; 200 - Base; 210 - Threaded hole group; 220 - Locating pin hole; 300 - Top cover; 310 - Through hole; 320 - Mounting hole. Detailed Implementation

[0026] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a further detailed explanation of the electrostatic chuck sandblasting fixture proposed in this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, intended only to facilitate and clearly illustrate the embodiments of this utility model. Please refer to the drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0027] Please see Figure 1 , Figure 1 This is a schematic diagram of the structure of a sandblasting fixture for an electrostatic chuck according to an embodiment of the present invention. The sandblasting fixture is used to fix the electrostatic chuck 100 during the sandblasting process. The electrostatic chuck 100 includes a wafer bearing surface 110 and an annular stepped surface 120 surrounding the wafer bearing surface 110. The annular stepped surface 120 is lower than the wafer bearing surface 110. The sandblasting fixture includes a base 200, multiple replaceable top covers 300, and multiple bolts (not shown).

[0028] The base 200 is used to hold the electrostatic chuck 100. Specifically, the base 200 supports the placement of electrostatic chucks 100 of various sizes, such as 8-inch, 12-inch, and larger sizes. The base 200 is provided with a multi-turn threaded hole group 210, which is used to fix the electrostatic chucks 100 of different sizes. Please refer to [link to relevant documentation]. Figure 1 , Figure 1 A ring of threaded holes 210 is marked with a dashed line. Multiple threaded holes located on the same dashed line represent a ring of threaded holes 210. Specifically, for example, the base 200 is provided with two rings of threaded holes 210. The inner ring of threaded holes 210 is used to fix an 8-inch electrostatic chuck 100, and the outer ring of threaded holes 210 is used to fix a 12-inch electrostatic chuck 100. Alternatively, the base 200 may be provided with more rings of threaded holes 210 to fix electrostatic chucks 100 of other sizes.

[0029] Multiple top covers 300 are respectively matched with electrostatic chucks 100 of different sizes. The top cover 300 has a through hole 310 in the middle with a diameter larger than that of the wafer bearing surface 110. The top cover 300 has multiple mounting holes 320 that correspond one-to-one with the threaded holes in the threaded hole group 210. The bolt passes through the mounting hole 320 and is screwed into the corresponding threaded hole. The top cover 300 presses against the annular stepped surface 110 of the electrostatic chuck 100 to fix the electrostatic chuck 100.

[0030] The electrostatic chuck sandblasting fixture provided in this embodiment has a threaded hole group 210 on the base 200 and mounting holes 320 on the upper cover 300 that correspond one-to-one with the threaded holes in the threaded hole group 210. The upper cover 300 is installed on the base 200 by bolts, so that the upper cover 300 presses against the annular stepped surface 110 of the electrostatic chuck 100 to fix the electrostatic chuck 100. Compared with the prior art of using cloth tape to fix the electrostatic chuck 100, this method avoids the problem of the electrostatic chuck 100 floating up and down during sandblasting operations and avoids the environmental pollution of the workbench caused by the cloth tape. Furthermore, in the sandblasting fixture of the electrostatic chuck 100 provided in this embodiment, since the base 200 is provided with multiple sets of threaded holes 210 for mounting electrostatic chucks 100 of different sizes, and multiple top covers 300 are respectively matched with electrostatic chucks 100 of different sizes, it can adapt to the fixing of electrostatic chucks 100 of different sizes in sandblasting operations, thus expanding the applicability of the product and eliminating the need to design new fixtures for each size of electrostatic chuck 100.

[0031] In some embodiments, please refer to Figure 1 The multiple threaded hole groups 210 are concentrically distributed on the base 200 to maximize the use of the base 200, reduce the volume and weight of the base 200, and facilitate operation.

[0032] In some embodiments, the number of turns of the threaded hole group 210 is two, and the number of the top cover 300 is two. For example, please refer to [link to relevant documentation]. Figure 1 and Figure 2 , Figure 1 The top cover 300 shown is compatible with the 8-inch electrostatic chuck 100. Figure 2 The top cover 300 shown can be matched with a 12-inch electrostatic chuck 100. In other embodiments, two sets of threaded holes 210 can be provided for fixing electrostatic chucks 100 of other sizes, and multiple replaceable top covers 300 that can be matched with electrostatic chucks 100 of other sizes can be provided.

[0033] Specifically, when the bolts are tightened, the upper surface of the upper cover 300 is not higher than the wafer bearing surface 110 of the electrostatic chuck 100. Preferably, the upper surface of the upper cover 300 is set to be basically level with the wafer bearing surface 110 of the electrostatic chuck 100 to prevent eddies from being generated on the wafer bearing surface 110 of the electrostatic chuck 100 due to the drop, which would cause uneven sandblasting depth in some areas.

[0034] More often, in some embodiments, a silicone pad is provided between the lower surface of the upper cover 300 and the annular stepped surface 110. The silicone pad is used for cushioning and can also be used to adjust the height relationship between the upper surface of the upper cover 300 and the wafer bearing surface 110 of the electrostatic chuck 100. For example, if the upper surface of the upper cover 300 is too low below the wafer bearing surface 110, the number of silicone pads can be increased to raise the height of the upper surface of the upper cover 300. If the upper surface of the upper cover 300 is too high above the wafer bearing surface 110, the number of silicone pads can be reduced or the silicone pads can be removed to lower the height of the upper surface of the upper cover 300.

[0035] In some embodiments, each threaded hole group 210 includes at least two pairs of threaded holes, and each pair of threaded holes is diagonally distributed, so that the upper cover 300 presses against the annular stepped surface 110, pressing the electrostatic chuck 100 onto the base 200, thus preventing the electrostatic chuck 100 from floating up and down during the sandblasting process.

[0036] In some embodiments, each turn of the threaded hole group 210 includes five pairs of threaded holes, two of which can be selected to insert bolts to press and fix the electrostatic chuck 100. Considering that the threaded holes may wear, other threaded holes in the same turn of the threaded hole group 210 can be used as spares. In addition, the overall weight of the base 200 can be reduced, making it easier to pick up and put down.

[0037] In some embodiments, the base 200 is further provided with two positioning pin holes 220, which cooperate with positioning pins provided on the sandblasting machine table to fix the position of the base 200.

[0038] Specifically, the base 200 is made of stainless steel, such as 3Cr13 stainless steel, and the top cover 300 is made of aluminum alloy, such as 6061 aluminum alloy.

[0039] The sandblasting fixture for the electrostatic chuck in this embodiment is used as follows: First, place the base 200 on a table, place the electrostatic chuck 100 in the center of the base 200, and place several silicone pads on the annular stepped surface 110. Then, cover the electrostatic chuck 100 with a corresponding size, making the upper surface of the upper cover 300 basically level with the wafer bearing surface 110 of the electrostatic chuck 100 (if the upper cover 300 is higher than the electrostatic chuck 100, replace or remove the silicone pads as appropriate). Rotate the upper cover 300 so that the mounting holes 320 are aligned with the threaded holes in the threaded hole group 210 on the base 200. Insert bolts into the mounting holes 320 of the upper cover 300 and tighten the bolts in sequence to ensure that the upper cover 300 does not wobble. After installation, move the sandblasting fixture with the electrostatic chuck 100 fixed on it to the sandblasting machine table, so that the positioning pin holes 220 on the base 200 correspond to the positioning pins on the sandblasting machine table. The sandblasting range is smaller than the base and larger than the electrostatic chuck by 100mm and the wafer bearing surface by 110mm. The overall weight is 7-10kg. The airflow will not cause the whole structure to float. After sandblasting, the air gun is easy to clean.

[0040] The sandblasting fixture for the electrostatic chuck 100 provided in this embodiment can quickly assemble the electrostatic chuck 100 before sandblasting, avoiding floating of the electrostatic chuck 100 during sandblasting operations and reducing environmental pollution caused by cloth tape adhesion and abrasive. Furthermore, by changing the upper cover 300, different sizes of electrostatic chuck 100 can be clamped, making it a highly efficient and convenient sandblasting positioning fixture.

[0041] In the description of this utility model, it should be understood that the terms "center," "height," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0042] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0043] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A sandblasting fixture for an electrostatic chuck, used to fix the electrostatic chuck during sandblasting, the electrostatic chuck comprising a wafer bearing surface and an annular stepped surface surrounding the wafer bearing surface, the annular stepped surface being lower than the wafer bearing surface, characterized in that, The sandblasting fixture includes: A base for holding the electrostatic chuck, the base having multiple sets of threaded holes for fixing electrostatic chucks of different sizes. Multiple replaceable top covers, each of which is matched with an electrostatic chuck of different sizes. Each top cover has a through hole in the middle with a diameter larger than that of the wafer bearing surface. Each top cover has multiple mounting holes that correspond one-to-one with the threaded holes in a ring of threaded holes. Multiple bolts pass through the mounting holes and are screwed into the corresponding threaded holes. The upper cover presses against the annular stepped surface of the electrostatic chuck to fix the electrostatic chuck.

2. The sandblasting fixture for the electrostatic chuck as described in claim 1, characterized in that, The multiple threaded holes are concentrically distributed on the base.

3. The sandblasting fixture for the electrostatic chuck as described in claim 1, characterized in that, The number of turns of the threaded hole group is two, and the number of the top cover is two.

4. The sandblasting fixture for the electrostatic chuck as described in claim 3, characterized in that, The two sets of threaded holes are used to fix the 8-inch and 12-inch electrostatic chucks respectively, and the two top covers are matched with the 8-inch and 12-inch electrostatic chucks respectively.

5. The sandblasting fixture for the electrostatic chuck as described in claim 1, characterized in that, With the bolts tightened, the upper surface of the top cover is not higher than the wafer bearing surface of the electrostatic chuck.

6. The sandblasting fixture for the electrostatic chuck as described in claim 5, characterized in that, A silicone pad is provided between the lower surface of the upper cover and the annular stepped surface.

7. The sandblasting fixture for the electrostatic chuck as described in claim 1, characterized in that, Each turn of the threaded hole group includes at least two pairs of threaded holes, and each pair of threaded holes is diagonally distributed.

8. The sandblasting fixture for the electrostatic chuck as described in claim 7, characterized in that, Each turn of the threaded hole group includes five pairs of threaded holes.

9. The sandblasting fixture for the electrostatic chuck as described in claim 1, characterized in that, The base is also provided with two positioning pin holes, which cooperate with the positioning pins provided on the sandblasting machine table to fix the position of the base.

10. The sandblasting fixture for the electrostatic chuck as described in claim 1, characterized in that, The base is made of stainless steel, and the top cover is made of aluminum alloy.

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