Cleaning and recycling device
By designing a cleaning and recycling device, the shovel and heater scoop up the indium raw material and heat it into a liquid state, which then flows into the storage container through the receiving channel. This solves the problem of indium raw material accumulation and waste, and realizes the effective recycling and reuse of indium raw material.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ANHUI JINGXIN TECHNOLOGY CO LTD
- Filing Date
- 2025-04-11
- Publication Date
- 2026-04-28
AI Technical Summary
During the epitaxial growth of semiconductor materials, unreacted liquid indium raw materials flow down the furnace wall and accumulate, resulting in material waste, and there is a lack of effective cleaning and recycling devices.
Design a cleaning and recycling device, including a shovel, a heater, and a storage container. The shovel scoops up indium raw material and uses the heater to liquefy it, which then flows into the storage container through a receiving channel for recycling.
This technology enables the cleaning and recycling of indium raw materials below the indium furnace, avoiding material waste and reducing costs.
Smart Images

Figure CN224172927U_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the technical field of raw material recycling equipment, specifically relating to a cleaning and recycling device. Background Technology
[0002] In the epitaxial growth of semiconductor materials, indium is typically used as a core component or a key dopant to control material properties. However, during actual epitaxy, unreacted liquid indium often remains, flowing down the furnace wall and accumulating at the bottom of the furnace. To avoid this waste, a device is urgently needed to clean up the indium material at the bottom of the furnace and recycle it. Utility Model Content
[0003] Based on this, this application provides a cleaning and recycling device that can clean the indium raw materials below the indium furnace and realize the recycling of indium raw materials.
[0004] The technical solution proposed in this application is as follows:
[0005] A cleaning and recycling device, comprising:
[0006] Shovel parts;
[0007] Two sets of heaters are spaced apart on the shovel, and the two sets of heaters can surround the shovel to form a receiving channel. The receiving channel extends along the front-back direction of the shovel and can receive material. The heaters can heat the material in the receiving channel.
[0008] A storage container is connected to the rear end of the shovel, and the interior of the storage container is in communication with the receiving channel.
[0009] Using the aforementioned cleaning and recycling device, the shovel scoops up the indium raw material, which is then heated by a heater on the shovel, making it a highly fluid liquid. The liquid indium then flows through a receiving channel into a storage container, thus achieving the recycling of the indium raw material. In this way, the indium raw material below the indium furnace can be removed and cleaned, and it can also be recycled and reused through the storage container, avoiding waste and reducing raw material costs.
[0010] Furthermore, the cleaning and recycling device also includes an end plate, which is disposed at the rear end of the shovel, the storage container is connected to the end plate, and the end plate has a through-hole that communicates with the receiving channel and the interior of the storage container.
[0011] Furthermore, the cleaning and recycling device also includes a handle and a control module. The handle is connected to the end plate, and the control module is located on the handle and electrically connected to the heater.
[0012] Furthermore, the cleaning and recycling device also includes a display screen, which is disposed on the handle and electrically connected to the control module.
[0013] Furthermore, the cleaning and recycling device also includes two side plates, which are spaced apart on the shovel and connected to the end plate to form a shovel space with an opening facing the shovel head on the shovel. Two sets of heaters are located in the shovel space.
[0014] Furthermore, the end plate and the side plate are both covered with a heat insulation layer on the side opposite to the material shovel space.
[0015] Furthermore, the cleaning and recycling device also includes a protective plate, which is connected to the end plate and located above the receiving channel.
[0016] Furthermore, the storage container includes a body and a cover. The body is detachably connected to the end plate. The body has a receiving cavity communicating with the receiving channel and an observation port communicating with the receiving cavity. The cover is movably connected to the body, and the observation port can be opened and closed during the movement of the cover.
[0017] Furthermore, the end of each heater near the shovel head of the shovel component is inclined relative to the front-back direction of the shovel component to form a guide channel connecting the shovel head and the receiving channel.
[0018] Furthermore, the top surface of the heater is inclined relative to the horizontal direction, and the horizontal height gradually increases from the side near the receiving channel to the opposite side. Attached Figure Description
[0019] The accompanying drawings are provided to further understand this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof.
[0020] Figure 1 This is a schematic diagram of the structure of a cleaning and recycling device provided in an embodiment of this application.
[0021] Label Explanation:
[0022] 11. Shovel; 111. Shovel head; 12. Heater; 13. Storage container; 131. Body; 132. Cover; 141. Receiving channel; 142. Shovel space; 143. Guide channel; 15. End plate; 16. Side plate; 17. Protective plate; 18. Handle; 191. Control module; 192. Display screen. Detailed Implementation
[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.
[0024] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the equipment or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.
[0025] This application provides a cleaning and recycling device capable of cleaning indium raw materials below an indium furnace and simultaneously recycling them. Of course, this cleaning and recycling device can also be used for cleaning and recycling other materials, and is not limited thereto. The following description uses the cleaning and recycling of indium raw materials as an example.
[0026] like Figure 1 As shown, in one embodiment, the cleaning and recycling device includes a shovel 11, a heater 12, and a storage container 13. The shovel 11 has a shovel head 111, which is located at the front end of the shovel 11 in the front-rear direction and is used to shovel indium material onto the shovel 11. The heater 12 is disposed on the shovel 11 and is used to heat the indium material shoveled onto the shovel 11 to keep the indium material in a liquid state, thereby ensuring the indium material in the shovel 11 has fluidity. The storage container is connected to the shovel 11 and is capable of receiving the indium material on the shovel 11.
[0027] Furthermore, the cleaning and recycling device includes two sets of heaters 12, which are spaced apart on the shovel 11 and can form a receiving channel 141 on the shovel 11. The heaters 12 can heat the indium raw material in the receiving channel 141. The storage container 13 is connected to the rear end of the shovel 11 and the interior of the storage container 13 is in communication with the receiving channel 141.
[0028] Using the aforementioned cleaning and recycling device, the shovel 11 scoops up the indium raw material, which is then heated by the heater 12 on the shovel 11, making it a highly fluid liquid. The liquid indium then flows into the storage container 13 through the receiving channel 141, thus achieving the recycling of the indium raw material. In this way, the indium raw material below the indium furnace can be removed and cleaned, and it can also be recycled and reused through the storage container 13, avoiding waste and reducing raw material costs.
[0029] In one embodiment, the cleaning and recycling device further includes an end plate 15, which is disposed at the rear end of the shovel member 11. A storage container 13 is connected to the end plate 15, and the end plate 15 has a through-hole that communicates with the receiving channel 141 and the interior of the storage container 13. Further, the cleaning and recycling device also includes two side plates 16, which are spaced apart from the shovel member 11 and connected to the end plate 15, to enclose a shovel space 142 on the shovel member 11 with its opening facing the shovel head 111. That is, the two side plates 16 are connected to the same side of the end plate 15, and the side of the shovel space 142 facing away from the end plate 15 is the open side, and this side faces the shovel head 111. Two sets of heaters 12 are located within the shovel space 142. Therefore, it can be seen that after the cleaning and recycling device removes the indium raw material, the indium raw material is shoveled into the shovel space 142. Under the heating of the heater 12, the indium raw material is in a liquid state, and then flows into the storage container 13 through the receiving channel 141 for storage.
[0030] In one embodiment, the side of the end plate 15 and the side plate 16 facing away from the material shovel space 142 is covered with a heat insulation layer to prevent the operator from being burned. Optionally, the heat insulation layer may be an additional plate provided on the material side of the end plate 15 and the side plate 16, or a layer of heat-insulating rubber may be attached to the outer side of the end plate 15 and the side plate 16, which is not limited here.
[0031] In one embodiment, the top surface of the heater 12 is inclined relative to the horizontal direction, and its horizontal height gradually increases from the side near the receiving channel 141 to the opposite side, so that the indium material scooped into the scooping space 142 flows along the top surface flow channel 141 and then flows into the storage container 13 through the receiving channel 141. Preferably, the two sets of heaters 12 are respectively attached to the two side plates 16 to prevent the indium material from entering the gap between the heater 12 and the side plates 16.
[0032] In one embodiment, each heater 12 is inclined relative to the front-rear direction of the shovel head 111 at one end, forming a guide channel 143 connecting the shovel head 111 and the receiving channel 141. When the amount of indium raw material is small, the indium raw material entering the shovel head 111 can be easily guided directly into the receiving channel 141 through the guide channel 143.
[0033] In one embodiment, the cleaning and recycling device further includes a protective plate 17, which is connected to the end plate 15 and located above the receiving channel 141 to prevent the liquid indium material from splashing as it flows from the receiving channel 141 to the connection hole, thereby improving the safety of use.
[0034] In one embodiment, the cleaning and recycling device further includes a handle 18, which is connected to an end plate 15. Specifically... Figure 1 In the illustrated embodiment, both the handle 18 and the storage container 13 are connected to the side of the end plate 15 away from the shovel space 142, and the handle 18 is located above the storage container 13.
[0035] In one embodiment, the cleaning and recycling device further includes a control module 191, which is disposed on the handle 18 and electrically connected to the heater 12 for controlling the heating of the heater 12. Optionally, the control module 191 includes a control board, a power indicator light, and multiple control buttons connected to the control board, which can be used to control the start-up, shutdown, and heating level of the heater 12. Further, the cleaning and recycling device also includes a display screen 192, which is electrically connected to the control module 191 for displaying information such as the temperature and heating level of the heater 12. Operators can adjust the operation of the heater 12 based on the display results on the display screen 192.
[0036] In one embodiment, the storage container 13 includes a body 131 and a cover 132. The body 131 is detachably connected to the end plate 15. The body 131 has a receiving cavity communicating with a connection hole and an observation port communicating with the receiving cavity. The cover 132 is movably connected to the body 131, and the observation port can be opened and closed during the movement of the cover 132, so that the state of the indium material in the storage container 13 can be observed by opening the observation port. Specifically, the cover 132 is connected to the body 131 by a pull-out method. In addition, the material of the storage container 13 is preferably polytetrafluoroethylene (PTFE) to avoid reaction with the indium material while possessing high temperature resistance.
[0037] To facilitate understanding of the technical solution of this application, this document combines... Figure 1 The method of using the cleaning and recycling device in the above embodiments will be described as follows:
[0038] Hold the handle 18 to start the heater 12, and then use the scooping part 11 to scoop up the indium material. The indium material enters the scooping space 142, and the heater 12 raises the temperature to about 165°C. Under the heating action of the heater 12, the indium material is maintained or converted into a liquid state and then flows into the receiving channel 141. Next, it flows into the storage container 13 through the receiving channel 141.
[0039] It should be noted that the storage container 13 and the end plate 15 are detachably connected to allow for the reuse of the indium material within the storage container 13. Of course, the indium material within the storage container 13 can also be discharged through the observation port; this is not a restriction. Furthermore, the indium material flowing into the storage container 13 may solidify due to cooling, thus preventing backflow of the indium material. When discharge is required, the indium material within the storage container 13 can be reheated.
[0040] Although embodiments of this application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A cleaning and recycling device, characterized in that, include: Shovel parts; Two sets of heaters are spaced apart on the shovel, and the two sets of heaters can surround the shovel to form a receiving channel. The receiving channel extends along the front-back direction of the shovel and can receive material. The heaters can heat the material in the receiving channel. A storage container is connected to the rear end of the shovel, and the interior of the storage container is in communication with the receiving channel.
2. The cleaning and recycling device according to claim 1, characterized in that, It also includes an end plate, which is disposed at the rear end of the shovel, the storage container is connected to the end plate, and the end plate has a through hole that communicates with the receiving channel and the interior of the storage container.
3. The cleaning and recycling device according to claim 2, characterized in that, It also includes a handle and a control module. The handle is connected to the end plate, and the control module is located on the handle and electrically connected to the heater.
4. The cleaning and recycling device according to claim 3, characterized in that, It also includes a display screen, which is disposed on the handle and electrically connected to the control module.
5. The cleaning and recycling device according to claim 2, characterized in that, It also includes two side plates, which are spaced apart on the shovel and connected to the end plate to form a shovel space with the opening facing the shovel head on the shovel. Two sets of heaters are located in the shovel space.
6. The cleaning and recycling device according to claim 5, characterized in that, The end plate and the side plate are both covered with a heat insulation layer on the side away from the material shovel space.
7. The cleaning and recycling device according to claim 2, characterized in that, It also includes a protective plate, which is connected to the end plate and located above the receiving channel.
8. The cleaning and recycling device according to claim 2, characterized in that, The storage container includes a body and a cover. The body is detachably connected to the end plate. The body has a receiving cavity communicating with the receiving channel and an observation port communicating with the receiving cavity. The cover is movably connected to the body, and the observation port can be opened and closed during the movement of the cover.
9. The cleaning and recycling device according to claim 1, characterized in that, The end of each heater near the shovel head of the shovel component is inclined relative to the front-back direction of the shovel component to form a guide channel connecting the shovel head and the receiving channel.
10. The cleaning and recycling device according to claim 1, characterized in that, The top surface of the heater is inclined relative to the horizontal direction, and the horizontal height gradually increases from the side closest to the receiving channel to the opposite side.