Front door mechanical locking structure of wafer box adapter

Abstract

The utility model belongs to the technical field of semiconductor equipment accessories, and particularly relates to a front door mechanical locking structure of a wafer box adapter, which comprises an elastic lock rod assembly arranged on the wafer box adapter. The elastic lock rod assembly comprises a lock rod and an elastic piece, one end of the lock rod is located on the side close to the front door of the wafer box adapter, the other end of the lock rod is located on the side away from the front door of the wafer box adapter and located on a wafer loading system back plate close to the outer side of a wafer loading system door plate, and the elastic piece is arranged on the periphery of the lock rod. According to the utility model, through the arrangement of the elastic locking rod assembly, the front door of the wafer box adapter can be automatically locked through a pure mechanical structure when equipment works, so that the front door is effectively prevented from being opened by mistake at the moment, the cleanliness and safety of the equipment are effectively ensured, the front door can be automatically unlocked after the work is completed, electric and pneumatic structures are not needed, and the working efficiency is improved. The device is not influenced by power failure, is more reliable to use, is relatively simple in structure, and is relatively low in setting cost.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment accessories technology, specifically a mechanical locking structure for the front door of a wafer cassette adapter. Background Technology

[0002] Currently, some existing wafer cassette adapters with hinged, upward-opening front doors are installed on the load platform of the wafer loading system. The wafer cassette adapter moves towards the door panel of the wafer loading system under the action of the load platform, so that the equipment can transfer wafers from the wafer cassettes set on the wafer cassette adapter.

[0003] During operation, wafer cassette adapters typically use a door catch to assist in closing the door. However, the suction force of the door catch is insufficient compared to the pulling force required for personnel to open the door. Therefore, if personnel accidentally open the front door of the wafer cassette adapter while the equipment is running, it is difficult to prevent this. This results in the wafer transfer space not being sealed, posing a risk of injury and reduced process cleanliness. Utility Model Content

[0004] To address the aforementioned problems, the purpose of this utility model is to provide a mechanical locking structure for the front door of a wafer cassette adapter.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A mechanical locking structure for the front door of a wafer cassette adapter includes an elastic locking rod assembly, which is disposed on the wafer cassette adapter;

[0007] The elastic locking rod assembly includes a locking rod and an elastic element. One end of the locking rod is located on the side close to the front door of the wafer cassette adapter, and the other end of the locking rod is located on the side away from the front door of the wafer cassette adapter and on the back plate of the wafer loading system near the outside of the wafer loading system door panel. The elastic element is disposed on the outer periphery of the locking rod.

[0008] The wafer cassette adapter has a locking hole directly provided on the front door for use with one end of the locking rod, or the wafer cassette adapter has a locking block provided on the front door and a locking hole provided on the locking block for use with one end of the locking rod;

[0009] When the wafer cassette adapter moves toward the wafer loading system door panel, the locking lever moves away from the wafer loading system door panel, allowing one end of the locking lever to be inserted into a matching locking hole, thereby locking the front door of the wafer cassette adapter. At this time, the elastic element is in a compressed state. When the wafer cassette adapter moves away from the wafer loading system door panel, the locking lever moves toward the wafer loading system door panel under the restoring force of the elastic element and disengages from the matching locking hole, thereby unlocking the front door of the wafer cassette adapter.

[0010] When a locking hole is directly provided on the front door of the wafer cassette adapter to cooperate with one end of the locking rod, the locking hole is a blind hole facing the inside of the wafer cassette adapter.

[0011] When a locking block is provided on the front door of the wafer cassette adapter and a locking hole is provided on the locking block to cooperate with one end of the locking rod, the locking block is installed on the front door of the wafer cassette adapter by screws.

[0012] The axis of the locking rod is parallel to the direction of movement of the wafer cassette adapter.

[0013] The locking rod consists of a locking rod body and an adjusting contact piece connected together by threads. The locking rod body is located on the side closer to the front door of the wafer cassette adapter, and the adjusting contact piece is located on the side farther away from the front door of the wafer cassette adapter.

[0014] The elastic locking rod assembly also includes a limiting hole block. The elastic element is a hollow spring and is sleeved on the outer periphery of the locking rod. The limiting hole block is installed on the inner side of the wafer cassette adapter. A stepped through hole is opened inside the limiting hole block. One end of the locking rod passes through the stepped through hole. A limiting ring A is also provided on the locking rod. The end of the elastic element away from the front door of the wafer cassette adapter abuts against the limiting ring A, and the end of the elastic element near the front door of the wafer cassette adapter abuts against the inner side of the stepped through hole.

[0015] The elastic locking rod assembly also includes a guide block, which is installed on the inner side of the wafer cassette adapter and located on the side of the limiting hole block away from the front door of the wafer cassette adapter. The guide block has a guide hole for the locking rod to pass through, and the locking rod is provided with a limiting ring B and a limiting ring C on both sides of the guide block.

[0016] The inner side of the wafer cassette adapter is provided with a top block at one end via a pivot. The other end of the top block is located between the other end of the locking rod and the wafer loading system door panel, and is used to push the other end of the locking rod to move.

[0017] A limiting stop is provided on the inner side of the wafer box adapter and on the outer side of the top block.

[0018] The top block is equipped with a stop block for direct contact with the backplane of the wafer loading system, and the wafer cassette adapter is provided with a stop block through slot for the stop block to pass through.

[0019] The advantages and positive effects of this utility model are as follows:

[0020] This invention, through the setting of the elastic locking rod assembly, can automatically lock the front door of the wafer box adapter through a purely mechanical structure when the equipment is working, effectively preventing accidental opening at this time, thereby effectively ensuring the cleanliness and safety of the equipment. After the work is completed, the front door can also be automatically unlocked. Moreover, it does not require the use of electric or pneumatic structures, is not affected by power outages, is more reliable in use, has a relatively simple structure, and has a relatively low installation cost. Attached Figure Description

[0021] Figure 1 This is one of the structural schematic diagrams of this utility model;

[0022] Figure 2 This is the second structural schematic diagram of the present invention;

[0023] Figure 3 for Figure 2 Enlarged view of point A;

[0024] Figure 4 This is a schematic diagram of the wafer loading system corresponding to the wafer cassette adapter to which this utility model applies.

[0025] In the diagram: 1 is the locking rod, 101 is the main body of the locking rod, 102 is the adjusting contact, 2 is the elastic element, 3 is the locking block, 301 is the locking hole, 4 is the limiting hole block, 401 is the stepped through hole, 5 is the limiting ring A, 6 is the guide block, 7 is the limiting ring B, 8 is the limiting ring C, 9 is the rotating shaft, 10 is the top block, 11 is the limiting stop, and 12 is the stop block.

[0026] 001 is the wafer loading system, 0011 is the water platform, 0012 is the back panel of the wafer loading system, 0013 is the door panel of the wafer loading system, 002 is the wafer box adapter, 0021 is the stop through slot, and 003 is the front door of the wafer box adapter. Detailed Implementation

[0027] The following is in conjunction with the appendix Figure 1-4 The present invention will be described in further detail.

[0028] A mechanical locking structure for the front door of a wafer cassette adapter, such as Figure 1-3As shown, this embodiment includes an elastic locking lever assembly, which is disposed on the wafer cassette adapter 002. The wafer cassette adapter 002 itself and the connection structure between it and the wafer cassette adapter front door 003 are both existing technologies. A schematic diagram of the wafer loading system 001 applicable to this embodiment is shown below. Figure 4 As shown, the mounting structures of the water platform 0011, the wafer loading system backplate 0012, and the wafer loading system door plate 0013 are all existing technologies.

[0029] The elastic locking rod assembly includes a locking rod 1 and an elastic element 2. One end of the locking rod 1 is located on the side close to the front door 003 of the wafer cassette adapter, and the other end of the locking rod 1 is located on the side away from the front door 003 of the wafer cassette adapter and on the back plate 0012 of the wafer loading system, which is close to the outside of the door panel 0013 of the wafer loading system. The elastic element 2 is disposed on the outer periphery of the locking rod 1.

[0030] Specifically, such as Figure 1 and Figure 2 As shown, in this embodiment, a locking block 3 is provided on the front door 003 of the wafer cassette adapter by screws, and a locking hole 301 is provided on the locking block 3 to cooperate with one end of the locking rod 1. Alternatively, a blind hole facing the inside of the wafer cassette adapter 002 can be directly provided on the front door 003 of the wafer cassette adapter as the locking hole 301. The specific configuration of the locking hole 301 can be adjusted arbitrarily according to the actual operating conditions.

[0031] Specifically, in this embodiment, the axis of the locking lever 1 is parallel to the direction of movement of the wafer cassette adapter 002. For example... Figure 2 As shown, the locking lever 1 consists of a locking lever body 101 and an adjusting contact 102 connected together by threads. The locking lever body 101 is located on the side closer to the front door 003 of the wafer cassette adapter, while the adjusting contact 102 is located on the side farther away from the front door 003 of the wafer cassette adapter. This allows for fine-tuning of the length of the locking lever 1 according to the size of the applicable wafer cassette adapter 002, ensuring reliable locking performance. The specific structure of the locking lever 1 can also be adjusted arbitrarily according to actual operating conditions.

[0032] Specifically, such as Figure 2 and Figure 3As shown, in this embodiment, the elastic locking rod assembly also includes a limiting hole block 4. The elastic element 2 is a hollow spring, which is sleeved on the outer periphery of the locking rod 1. The limiting hole block 4 is installed on the inner side of the wafer cassette adapter 002, and the locking rod 1 is also located on the inner side of the wafer cassette adapter 002 to avoid external interference. A stepped through hole 401 is provided inside the limiting hole block 4. One end of the locking rod 1 passes through the stepped through hole 401. A limiting retaining ring A5 is also provided on the locking rod 1. The end of the elastic element 2 away from the front door 003 of the wafer cassette adapter abuts against the limiting retaining ring A5, and the end of the elastic element 2 near the front door 003 of the wafer cassette adapter abuts against the inner side of the stepped through hole 401. In use, the limiting retaining ring A5 is directly used to compress the limiting retaining ring A5. Other structural forms can also be reasonably adopted for the specific arrangement of the elastic element 2.

[0033] Specifically, such as Figure 2 As shown, in this embodiment, the elastic locking rod assembly also includes a guide block 6. The guide block 6 is installed inside the wafer cassette adapter 002 and located on the side of the limiting hole block 4 away from the front door 003 of the wafer cassette adapter. The guide block 6 has a guide hole for the locking rod 1 to pass through. The locking rod 1 passes through the guide hole and moves axially within the guide hole to ensure accurate and stable movement of the locking rod 1. Limiting rings B 7 and C 8 are respectively provided on both sides of the guide block 6 on the locking rod 1 to limit the movement stroke of the locking rod 1 and prevent the locking rod 1 from moving beyond the specified position.

[0034] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, a top block 10 is provided on the inner side of the wafer cassette adapter 002 via a rotating shaft 9. One end of the top block 10 can swing around the rotating shaft 9 and is located above the locking rod 1. The other end of the top block 10 is located between the other end of the locking rod 1 and the wafer loading system door panel 0013 and is used to push the other end of the locking rod 1 to move. A limiting stop 11 is provided on the inner side of the wafer cassette adapter 002 and on the outer side of the top block 10 to limit the swing angle of the top block 10 and prevent excessive swing. A stop 12 is installed on the top block 10 for direct contact with the wafer loading system back panel 0012. A stop through slot 0021 is correspondingly provided on the wafer cassette adapter 002 for the stop 12 to pass through. Through the cooperative arrangement of the top block 10, the rotating shaft 9, and the stop 12, it is easy to directly and reliably drive the locking rod 1 to move.

[0035] Working principle:

[0036] When the equipment is working, the load-bearing platform 0011 of the wafer loading system 001 drives the wafer cassette adapter 002 to move. When the wafer cassette adapter 002 moves towards the wafer loading system door panel 0013, the stop block 12 contacts the wafer loading system back plate 0012 near the outside of the wafer loading system door panel 0013 and is blocked by the wafer loading system back plate 0012. This causes the top block 10 connected to the stop block 12 to swing and push the locking rod 1 to move away from the wafer loading system door panel 0013, and one end of the locking rod 1 is inserted into the locking hole 301, thereby locking the front door 003 of the wafer cassette adapter. At this time, the elastic element 2 is in a compressed state.

[0037] After the equipment completes the wafer transfer, as the wafer cassette adapter 002 moves away from the wafer loading system door panel 0013, the stop block 12 gradually disengages from the wafer loading system back panel 0012. Under the restoring force of the elastic element 2, the locking rod 1 moves towards the wafer loading system door panel 0013 and disengages from the locking hole 301, thereby unlocking the front door 003 of the wafer cassette adapter.

Claims

1. A mechanical locking structure for the front door of a wafer cassette adapter, characterized in that: Includes a resilient locking lever assembly, which is disposed on the wafer cassette adapter (002); The elastic locking rod assembly includes a locking rod (1) and an elastic element (2). One end of the locking rod (1) is located on the side close to the front door (003) of the wafer cassette adapter, and the other end of the locking rod (1) is located on the side away from the front door (003) of the wafer cassette adapter and on the wafer loading system back plate (0012) close to the outside of the wafer loading system door panel (0013). The elastic element (2) is disposed on the outer periphery of the locking rod (1). The wafer box adapter front door (003) is directly provided with a locking hole (301) that is used to cooperate with one end of the locking rod (1), or the wafer box adapter front door (003) is provided with a locking block (3) and a locking hole (301) that is used to cooperate with one end of the locking rod (1) is provided on the locking block (3); When the wafer cassette adapter (002) moves toward the wafer loading system door panel (0013), the locking rod (1) moves away from the wafer loading system door panel (0013) and one end of the locking rod (1) is inserted into the locking hole (301) to lock the front door (003) of the wafer cassette adapter. At this time, the elastic element (2) is in a compressed state. When the wafer cassette adapter (002) moves away from the wafer loading system door panel (0013), the locking rod (1) moves towards the wafer loading system door panel (0013) under the restoring elastic force of the elastic member (2) and disengages from the locking hole (301) used in conjunction, thereby unlocking the front door (003) of the wafer cassette adapter.

2. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 1, characterized in that: When a locking hole (301) that is used to cooperate with one end of the locking rod (1) is directly opened on the front door (003) of the wafer cassette adapter, the locking hole (301) is a blind hole facing the inside of the wafer cassette adapter (002).

3. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 1, characterized in that: When a locking block (3) is provided on the front door (003) of the wafer cassette adapter and a locking hole (301) is provided on the locking block (3) to cooperate with one end of the locking rod (1), the locking block (3) is installed on the front door (003) of the wafer cassette adapter by screws.

4. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 1, characterized in that: The axis of the locking rod (1) is parallel to the direction of movement of the wafer cassette adapter (002).

5. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 1, characterized in that: The locking rod (1) is divided into a locking rod body (101) and an adjusting contact (102) connected together by threads. The locking rod body (101) is located on the side close to the front door (003) of the wafer cassette adapter, and the adjusting contact (102) is located on the side away from the front door (003) of the wafer cassette adapter.

6. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 1, characterized in that: The elastic locking rod assembly also includes a limiting hole block (4). The elastic element (2) is a hollow spring. The elastic element (2) is sleeved on the outer periphery of the locking rod (1). The limiting hole block (4) is installed on the inner side of the wafer cassette adapter (002). A stepped through hole (401) is opened inside the limiting hole block (4). One end of the locking rod (1) passes through the stepped through hole (401). A limiting ring A (5) is also provided on the locking rod (1). The end of the elastic element (2) away from the front door (003) of the wafer cassette adapter abuts against the limiting ring A (5). The end of the elastic element (2) close to the front door (003) of the wafer cassette adapter abuts against the inner side of the stepped through hole (401).

7. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 6, characterized in that: The elastic locking rod assembly also includes a guide block (6), which is installed on the inner side of the wafer cassette adapter (002) and located on the side of the limiting hole block (4) away from the front door (003) of the wafer cassette adapter. The guide block (6) has a guide hole for the locking rod (1) to pass through. The locking rod (1) is provided with a limiting ring B (7) and a limiting ring C (8) on both sides of the guide block (6).

8. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 6, characterized in that: The inner side of the wafer cassette adapter (002) is provided with a top block (10) via a pivot (9). The other end of the top block (10) is located between the other end of the locking rod (1) and the wafer loading system door panel (0013) and is used to push the other end of the locking rod (1) to move.

9. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 8, characterized in that: A limiting stop (11) is provided on the inner side of the wafer cassette adapter (002) and on the outer side of the top block (10).

10. The mechanical locking structure for the front door of a wafer cassette adapter according to claim 8, characterized in that: The top block (10) is equipped with a stop block (12) for direct contact with the backplane (0012) of the wafer loading system, and the wafer cassette adapter (002) is provided with a stop block through slot (0021) for the stop block (12) to pass through.

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