Scorpion poison hair imitating omni-directional sensing micro flow velocity sensor

Abstract

The utility model relates to the technical field of bionic sensors, in particular to a scorpion poison hair imitating omni-directional sensing micro flow velocity sensor, which comprises a sensor substrate, a hairy transduction sensing structure, a sensitivity / bandwidth adjusting block and a data acquisition output unit, and the free end of the hairy transduction sensing structure is connected to the movable end of the sensitivity / bandwidth adjusting block; the sensor base comprises a substrate, a limiting guide groove and a threading hole are formed in the substrate, and the sensitivity / bandwidth adjusting block is embedded in the limiting guide groove in a sliding manner; the hairy transduction sensing structure comprises a precursor, the tail end of the precursor is integrally connected with a poison hair imitating cantilever beam, a stress concentration area of the precursor is provided with a piezoresistive strain unit, and the piezoresistive strain unit is connected with a data acquisition output unit through a flat cable plug and a wire; the problems that the sensitivity and the bandwidth of an existing bionic cilium sensor are mutually restricted, and a self-adaptive adjusting mechanism is lacked are solved.

Description

Technical Field

[0001] This utility model relates to the field of biomimetic sensor technology, specifically an omnidirectional microflow velocity sensor that mimics the hairs of a scorpion. Background Technology

[0002] For the measurement of microvelocities or supersonic fluids, traditional methods require indirect test data combined with simulation calculations, which suffers from computational complexity and poor versatility. Inspired by biological sensing structures such as scorpion bristles, ciliated microvelocities sensors significantly improve sensitivity and resolution by mimicking arthropod hairs and fish lateral line organs. These sensors utilize ciliated structures to convert fluid vibrations into mechanical deformations, and then output electrical signals through piezoresistive and capacitive effects, providing a new technical approach for microvelocity detection.

[0003] However, the sensitivity and operating bandwidth of existing biomimetic cilia sensors are contradictory. High sensitivity often comes at the cost of bandwidth, making it difficult to maintain stable performance over a large range. Therefore, existing biomimetic cilia sensor structures lack a biomimetic control mechanism for the dynamic morphology of scorpion hairs, and cannot achieve adaptive adjustment of sensitivity and bandwidth.

[0004] Therefore, it is necessary to invent an omnidirectional microfluidic sensor that mimics scorpion hairs to solve the above problems. Utility Model Content

[0005] To address the problems of sensitivity and bandwidth being mutually constrained and lacking an adaptive adjustment mechanism in existing biomimetic hair sensors, this invention provides an omnidirectional sensing microflow sensor that mimics scorpion hairs.

[0006] This utility model is achieved using the following technical solution:

[0007] A microfluidic sensor with scorpion-like hairs includes a sensor substrate, a hair-like transducer sensing structure, a sensitivity / bandwidth adjustment block, and a data acquisition and output unit. The free end of the hair-like transducer sensing structure is integrally connected to the movable end of the sensitivity / bandwidth adjustment block.

[0008] The sensor substrate includes a substrate, and a limiting guide groove and a wire hole are formed on the upper surface of the substrate. The sensitivity / bandwidth adjustment block is slidably embedded in the limiting guide groove.

[0009] The hair-like transducer sensing structure includes a precursor, with a simulated gu hair cantilever beam integrally connected to the tail end of the precursor, a temperature compensation sensor set at the tail end of the simulated gu hair cantilever beam, and a piezoresistive strain unit set in the stress concentration area of ​​the precursor.

[0010] The stress concentration regions are obtained through finite element analysis, and there are 4 stress concentration regions for each precursor. The piezoresistive strain unit of each stress concentration region is connected to the data acquisition and output unit through a ribbon cable plug and wires.

[0011] The data acquisition and output unit is a Wheatstone bridge formed by interconnecting four piezoresistive strain gauge units on the same precursor with wires.

[0012] Furthermore, the substrate is circular, with six limiting guide grooves arranged in a circular array on the substrate. The angle between the center lines of adjacent limiting guide grooves is 60°, and the number of through holes is the same as the number of limiting guide grooves.

[0013] Furthermore, the precursor is in the form of a straight beam or a curved beam.

[0014] This invention features a reasonable and reliable structural design. By adjusting the sliding sensitivity / bandwidth adjustment block to change the buckling morphology of the precursor, transforming it from a two-dimensional precursor state to a three-dimensional configuration, the stiffness of the hair-like transducer sensing structure is dynamically adjusted, thereby regulating the characteristic frequency and achieving synergistic optimization of sensitivity and bandwidth. This means that while maintaining a high-sensitivity mode, the low-frequency detection range is expanded. This mechanism simulates the morphological changes of scorpion bristles under different stress states, from "vertical" to "collapsed," realizing a biomimetic control function for sensor sensitivity and bandwidth to achieve adaptive environmental response. Simultaneously, the piezoresistive strain units set in the four stress concentration areas of the hair-like transducer sensing structure output electrical signals through a Wheatstone bridge circuit, achieving efficient conversion of minute air vibration signals into electrical signals, greatly improving the sensor's sensitivity. Furthermore, a temperature compensation sensor is arranged in the tail region of the hair-like cantilever beam to effectively eliminate errors caused by temperature drift, improving long-term operational stability and measurement accuracy. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model.

[0016] Figure 2 This is a schematic diagram of the sensor substrate in this utility model.

[0017] Figure 3 This is a schematic diagram of the hair-like transducer sensing structure in this utility model.

[0018] Figure 4 This is a schematic diagram of the hair-like transducer sensing structure in the form of a straight beam in this utility model.

[0019] Figure 5 This is a schematic diagram of the hair-like transducer sensing structure in the form of a curved beam in this utility model.

[0020] Figure 6This is a finite element analysis diagram of the stress distribution of the sensitivity / bandwidth adjustment block in this utility model when it is displaced along the direction of the limiting guide groove.

[0021] Figure 7 This is a circuit diagram of the data acquisition and output unit in this utility model.

[0022] Figure 8 This is a schematic diagram of the buckling and deformation process of the hair-like transducer sensing structure in this utility model.

[0023] In the figure: 1. Sensor substrate; 2. Hair-like transducer sensing structure; 3. Sensitivity / bandwidth adjustment block; 4. Data acquisition and output unit; 1.1. Substrate; 1.2. Transmitter limiting guide groove; 1.3. Wire hole; 2.1. Precursor; 2.2. Hair-like cantilever beam; 2.3. Piezoresistive strain unit. Detailed Implementation

[0024] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model. Example 1

[0025] An omnidirectional microfluidic sensor mimicking scorpion bristles, as shown in the attached image. Figure 1 As shown, it includes a sensor substrate 1, six hair-like transducer sensing structures 2, six sensitivity / bandwidth adjustment blocks 3, and a data acquisition and output unit 4. The free ends of the six hair-like transducer sensing structures 2 are all integrally connected to the movable ends of the six sensitivity / bandwidth adjustment blocks 3.

[0026] As attached Figure 2 As shown, the sensor substrate 1 includes a circular substrate 1.1. The upper surface of the substrate 1.1 is provided with 6 limiting guide grooves 1.2 and 6 wire through holes 1.3. The 6 limiting guide grooves 1.2 are evenly distributed in a circular array on the substrate 1.1. The included angle between the center lines of adjacent limiting guide grooves 1.2 is 60°. 6 sensitivity / bandwidth adjustment blocks 3 are slidably embedded in the 6 limiting guide grooves 1.2 in a one-to-one correspondence.

[0027] The sensitivity and bandwidth of this omnidirectional sensing microflow sensor are adjusted by changing the relative position of the sensitivity / bandwidth adjustment block 3 in the corresponding limiting guide groove 1.2.

[0028] As attached Figure 3 ~Appendix Figure 4As shown, each hair-like transducer sensing structure 2 includes a precursor 2.1, each precursor 2.1 is in the shape of a straight beam, and a hair-like cantilever beam 2.2 is integrally connected to the tail end of each precursor 2.1. A temperature compensation sensor is installed at the tail end of each hair-like cantilever beam 2.2. Each precursor 2.1 has four stress concentration regions identified through finite element analysis, as shown in the attached figure. Figure 6 As shown in the figure, the location indicated by the dashed box is the stress concentration area of ​​the precursor 2.1, and each stress concentration area is provided with one piezoresistive strain element 2.3.

[0029] The piezoresistive strain element 2.3 is arranged in the stress concentration area of ​​the precursor 2.1, which can further improve the sensitivity of this omnidirectional sensing microflow sensor. The structural design of the temperature compensation sensor can eliminate the influence of temperature drift on the accuracy of this omnidirectional sensing microflow sensor.

[0030] Each piezoresistive strain gauge unit 2.3 is connected to the data acquisition and output unit 4 via a ribbon cable connector and wires. That is, the four piezoresistive strain gauge units 2.3 on the same precursor 2.1 are interconnected via wires to form a Wheatstone bridge, as shown in the attached diagram. Figure 7 As shown, , , , These correspond to the four piezoresistive strain gauge units 2.3 on the same precursor 2.1. VCC represents the positive power supply terminal of the Wheatstone bridge, represents the output terminal of the Wheatstone bridge, and GND is the reference zero potential point of the circuit.

[0031] When the sensitivity / bandwidth of this omnidirectional sensing microfluidic sensor is specifically adjusted, displacement is applied to the sensitivity / bandwidth adjustment block 3 to cause buckling deformation of the precursor 2.1. For ease of description, this invention defines the planar shape of the precursor 2.1 when it does not buckle under force as a two-dimensional precursor, and the three-dimensional buckling shape of the precursor 2.1 when it buckles under external tension as a three-dimensional configuration. The change in the shape of the precursor 2.1 will cause a change in the structural stiffness of the hair-like transducer sensing structure 2, which in turn will cause a change in the sensitivity of the hair-like transducer sensing structure 2. Meanwhile, the characteristic frequency calculation formula of the hair-like transducer sensing structure 2 is as follows:

[0032]

[0033] In the formula: The characteristic frequency of the hair-like transducer sensing structure 2 is represented;

[0034] k This indicates the stiffness of the hair-like transducer sensing structure 2;

[0035] m This indicates the mass of the hair-like transducer sensing structure 2.

[0036] During the buckling deformation of the precursor 2.1, the mass of the hair-like transducer sensing structure 2... m The only constant is the stiffness of the hair-like transducer sensing structure 2. k stiffness k The change in frequency leads to a change in the characteristic frequency of the hair-like transducer sensing structure 2, thereby enabling the regulation of the bandwidth of this omnidirectional sensing microflow sensor and increasing its bandwidth.

[0037] After the precursor 2.1 transforms from a two-dimensional precursor state to a three-dimensional configuration, when subjected to micro-flow velocity disturbances (i.e., disturbances from minute air vibration signals), the slender, hair-like cantilever beam 2.2 is disturbed by the airflow, causing the piezoresistive strain gauge unit 2.3 to deform. This leads to a change in the resistance of the piezoresistive strain gauge unit 2.3, which is then converted into an electrical signal through the output of the data acquisition and output unit 4, achieving ultra-sensitive detection of micro-flow velocity. The buckling deformation process of the hair-like transducer sensing structure 2 is shown in the attached figure. Figure 8 As shown. Example 2

[0038] A microfluidic sensor with omnidirectional sensing based on scorpion hair includes a sensor substrate 1, six hair-like transducer sensing structures 2, six sensitivity / bandwidth adjustment blocks 3, and a data acquisition and output unit 4. The free ends of the six hair-like transducer sensing structures 2 are all integrally connected to the movable ends of the six sensitivity / bandwidth adjustment blocks 3.

[0039] The sensor substrate 1 includes a circular substrate 1.1. The upper surface of the substrate 1.1 has six limiting guide grooves 1.2 and six through holes 1.3. The six limiting guide grooves 1.2 are evenly distributed in a circular array on the substrate 1.1, with the center lines of adjacent limiting guide grooves 1.2 forming an angle of 60°. Six sensitivity / bandwidth adjustment blocks 3 are slidably embedded in the six limiting guide grooves 1.2 in a one-to-one correspondence. Each hair-like transducer sensing structure 2 includes one precursor 2.1, and the tail end of each precursor 2.1... An integrated connection includes one simulated gu-hair cantilever beam 2.2. Each simulated gu-hair cantilever beam 2.2 has a temperature compensation sensor at its tail. Each precursor 2.1 has four stress concentration regions identified through finite element analysis, and each stress concentration region has one piezoresistive strain gauge element 2.3. Each piezoresistive strain gauge element 2.3 is connected to the data acquisition and output unit 4 via a ribbon cable connector and wires. In other words, the four piezoresistive strain gauge elements 2.3 on the same precursor 2.1 are interconnected via wires to form a Wheatstone bridge, as shown in the attached diagram. Figure 7 As shown, , , , These correspond to the four piezoresistive strain gauge units 2.3 on the same precursor 2.1. VCC represents the positive power supply terminal of the Wheatstone bridge, represents the output terminal of the Wheatstone bridge, and GND is the reference zero potential point of the circuit.

[0040] In this embodiment, the precursor 2.1 is in the shape of a curved beam, as shown in the attached figure. Figure 5 As shown.

[0041] In the specific implementation of this utility model, the number of the limiting guide groove 1.2 and the hair-like transducer sensing structure 2 can be determined according to different omnidirectional sensing usage environment requirements, and the length of the hair-like cantilever beam 2.2 can be adjusted according to actual needs in order to further adjust the characteristic frequency of the hair-like transducer sensing structure 2. In order to ensure the high sensitivity of this omnidirectional microflow sensor, the measurement range of this omnidirectional microflow sensor is increased by arraying; the shape of the precursor 2.1 can be continuously improved and optimized according to the needs, and is not limited to a straight beam or a curved beam.

[0042] In the description of this utility model, it should be understood that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this utility model and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0043] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An omnidirectional microfluidic sensor mimicking scorpion bristles, characterized in that: It includes a sensor substrate (1), a hair-like transducer sensing structure (2), a sensitivity / bandwidth adjustment block (3), and a data acquisition and output unit (4). The free end of the hair-like transducer sensing structure (2) is integrally connected to the movable end of the sensitivity / bandwidth adjustment block (3). The sensor substrate (1) includes a substrate (1.1), and a limiting guide groove (1.2) and a wire hole (1.3) are formed on the upper surface of the substrate (1.1). The sensitivity / bandwidth adjustment block (3) is slidably embedded in the limiting guide groove (1.2). The hair-like transducer sensing structure (2) includes a precursor (2.1), the tail end of the precursor (2.1) is integrally connected to a gu-hair-like cantilever beam (2.2), the tail end of the gu-hair-like cantilever beam (2.2) is provided with a temperature compensation sensor, and the stress concentration area of ​​the precursor (2.1) is provided with a piezoresistive strain unit (2.3). The stress concentration region is obtained through finite element analysis, and the number of stress concentration regions in each precursor (2.1) is 4. The piezoresistive strain unit (2.3) of each stress concentration region is connected to the data acquisition and output unit (4) through a ribbon cable plug and wire. The data acquisition and output unit (4) is a Wheatstone bridge formed by interconnecting four piezoresistive strain units (2.3) on the same precursor (2.1) with wires.

2. The omnidirectional microfluidic sensor mimicking scorpion hairs according to claim 1, characterized in that: The substrate (1.1) is circular, and there are 6 limiting guide grooves (1.2). The 6 limiting guide grooves (1.2) are evenly distributed in a circular array on the substrate (1.1). The included angle between the center lines of adjacent limiting guide grooves (1.2) is 60°. The number of wire holes (1.3) is the same as the number of limiting guide grooves (1.2).

3. The omnidirectional microfluidic sensor mimicking scorpion bristles according to claim 1, characterized in that: The precursor (2.1) is in the shape of a straight beam or a curved beam.

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