Bearing platform applied to exposure machine

Abstract

The utility model relates to a bearing platform applied to an exposure machine. The bearing platform comprises a base, a suction cup and a plurality of supporting assemblies, a plurality of air injection areas are sequentially distributed on the base in the first direction, and air injection holes are formed in each air injection area. Suckers are arranged at the two ends of the base in the first direction, and the side faces, away from the base, of the suckers form adsorption faces. The multiple supporting assemblies are arranged on the base at intervals in the first direction, an air injection area is formed between every two adjacent supporting assemblies, each supporting assembly comprises an elastic supporting piece and a rigid supporting piece, the top end of each rigid supporting piece is lower than the adsorption face, and the top end of each elastic supporting piece is higher than the adsorption face. The display panel is supported by the airflow, so that rigid contact between a product area of the display panel and the base can be avoided, and the risk of friction damage between the display panel and the base is reduced. And moreover, the supporting assembly is fixedly mounted, so that the risk that foreign matters are generated due to friction is reduced, and the display panel is prevented from being bad due to adhesion of the foreign matters.

Description

Technical Field

[0001] This utility model relates to the field of display device manufacturing technology, and in particular to a support platform for use in an exposure machine. Background Technology

[0002] In the manufacturing process of display panels, exposure is a crucial step, which involves using ultraviolet light to irradiate the photoresist and denature it. (Refer to...) Figure 1 As shown, an existing exposure machine includes a platform 1', an exposure lens 5', and a transport robot 6'. The platform 1' is positioned directly below the exposure lens 5' and supports a display panel 4'. A connecting rod 3' is rotatably mounted on the platform 1', with a temporary support 2' for placing the display panel 4' at the end of the connecting rod 3' facing away from the platform 1'. The transport robot 6' is used to transport the display panel 4'. Before and after exposure, the transport robot 6' is used to move the display panel 4' to and from the platform 1'. During this process, the connecting rod 3' rotates upward, driving the temporary support 2' to rise above the upper surface of the platform 1'. The transport robot 6' places the display panel 4' on the temporary support 2' or removes the display panel 4' from the temporary support 2'. It should be noted that the temporary support 2' allows the transport robot 6' to easily insert into and remove from the bottom of the display panel 4'. During the exposure process, the connecting rod 3' rotates downwards to drive the temporary support 2' to lower below the upper surface of the platform 1', at which point the display panel 4' lies flat on the platform 1'. Finally, the exposure lens 5' shines ultraviolet light downwards through the mask, so that the ultraviolet light matching the mask image illuminates the photoresist coated on the display panel 4'.

[0003] The existing exposure machine has the following shortcomings: Due to the frequent rotation of the connecting rod 3', foreign matter is generated between the connecting rod 3' and the platform 1' due to friction. This foreign matter adheres to the display panel 4', causing defects and affecting the manufacturing quality of the display panel 4'. Furthermore, since the display panel 4' is placed directly on the platform 1', friction also occurs between the display panel 4' and the platform 1', leading to wear and tear on both. Utility Model Content

[0004] The purpose of this invention is to provide a support platform for an exposure machine, which can effectively prevent foreign objects from being generated during exposure operations and prevent wear and tear on the support platform and the display panel.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A support platform for use in an exposure machine is provided, comprising:

[0007] The base has multiple jet zones distributed sequentially along a first direction. Each jet zone is provided with a jet hole for spraying gas upward. At least one of the jet zones is located in the middle of the base along the first direction. The length direction of the jet zone is perpendicular to the first direction, and both ends of the length direction of the jet zone are close to the ends of the display panel.

[0008] The base is provided with suction cups at both ends along the first direction, and the end of the suction cup facing away from the base forms an adsorption surface for adsorbing the display panel.

[0009] Multiple support components are spaced apart on the base along a first direction, and the air jet zone is formed between two adjacent support components. Each support component includes an elastic support member and a rigid support member embedded inside the elastic support member. The top end of the rigid support member is lower than the adsorption surface, and the top end of the elastic support member is higher than the adsorption surface. The display panel is placed on the top end of the elastic support member and can cause the elastic support member to undergo elastic deformation.

[0010] As a preferred embodiment of a support platform for an exposure machine, the elastic support includes a lower support section and an upper support section. The bottom end of the lower support section is connected to the base, and the top end of the lower support section is connected to the upper support section. The upper support section has a cavity. The bottom end of the rigid support passes through the lower support section and is connected to the base. The top end of the rigid support extends into the cavity, and the top end of the rigid support is spaced apart from the top wall of the cavity.

[0011] As a preferred embodiment of the support platform used in an exposure machine, the top of the rigid support member is spherical.

[0012] As a preferred embodiment of the support platform for an exposure machine, the length direction of the elastic support is perpendicular to the first direction, and each elastic support contains a plurality of rigid supports, which are spaced apart along the length direction of the elastic support.

[0013] As a preferred embodiment of the support platform used in the exposure machine, each of the jet zones is provided with a plurality of jet holes, which are spaced apart along a second direction, which is perpendicular to the first direction.

[0014] As a preferred embodiment of the support platform for the exposure machine, it also includes an air supply device. The base is provided with multiple air supply channels. All the air jets in each air jet zone are connected to the same air supply channel. The end of the air supply channel away from the air jet is connected to the air supply device, and each air supply channel is provided with a solenoid valve.

[0015] As a preferred embodiment of the support platform for an exposure machine, a sensor for detecting the distance between the display panel and the base is provided in the jet zone, and the sensor is electrically connected to the solenoid valve.

[0016] As a preferred embodiment of the support platform for an exposure machine, along the second direction, elastic plates are respectively provided at both ends of the jet zone, and the jet zone is formed between two adjacent support components and the two elastic plates.

[0017] As a preferred embodiment of the support platform used in an exposure machine, part of the elastic plate is rotatably connected to the base so that the elastic plate can avoid the handling robot arm from picking up and placing the display panel.

[0018] As a preferred embodiment of the support platform used in the exposure machine, the base is provided with a positioning member at one end along the second direction, the positioning member being used to abut against the end of the display panel, the second direction being perpendicular to the first direction.

[0019] The advantages of this utility model compared to the prior art are:

[0020] This invention relates to a support platform for an exposure machine. By incorporating air jets into the base, airflow is used to support the display panel, preventing rigid contact between the product area of ​​the display panel and the base, thus reducing the risk of frictional damage. A support assembly provides temporary support when air jets are not in use. This assembly includes an elastic support member and a rigid support member embedded within the elastic member. The rigid support member does not directly contact the display panel, further reducing the risk of frictional damage. Simultaneously, because the support assembly is fixedly installed, there are no moving parts on the base, reducing the risk of foreign matter buildup due to friction and preventing defects in the display panel caused by foreign matter adhesion. Attached Figure Description

[0021] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0022] Figure 1 This is a schematic diagram of an exposure machine in the prior art.

[0023] Figure 2 This is a top view of the support platform of the exposure machine according to an embodiment of the present invention.

[0024] Figure 3 This is a cross-sectional view (in working condition) of the support platform of the exposure machine according to an embodiment of the present invention.

[0025] Figure 4 This is a cross-sectional view (non-working state) of the support platform of the exposure machine according to an embodiment of the present invention.

[0026] Figure 5 This is a cross-sectional view of the support component according to an embodiment of the present utility model.

[0027] Figure 1 middle:

[0028] 1′ Platform; 2′ Temporary support; 3′ Linkage rod; 4′ Display panel; 5′ Exposure lens; 6′ Handling robot.

[0029] Figures 2 to 5 middle:

[0030] 1. Base; 10. Jet Zone; 101. First Jet Zone; 102. Second Jet Zone; 103. Third Jet Zone; 104. Fourth Jet Zone; 11. Jet Hole; 12. Air Delivery Channel; 2. Suction Cup; 21. Adsorption Surface; 3. Support Assembly; 31. Elastic Support Component; 311. Lower Support Section; 312. Upper Support Section; 313. Cavity; 32. Rigid Support Component; 4. Elastic Plate; 5. Sensor; 6. Positioning Component; 7. Display Panel; 8. Air Supply Device; 9. Solenoid Valve. Detailed Implementation

[0031] The advantages and features of this invention, as well as methods of implementing them, will become apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, this invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided merely to complete the disclosure of this invention and to enable those skilled in the art to fully understand its scope, which is defined only by the scope of the claims. The same reference numerals denote the same constituent elements throughout the specification.

[0032] The present invention will now be described in detail with reference to the accompanying drawings.

[0033] like Figures 2 to 5As shown, a support platform (hereinafter referred to as the support platform) for use in an exposure machine is provided to support a display panel 7 during the exposure process and keep the display panel 7 in a horizontal state. The support platform includes a base 1, suction cups 2, and multiple support components 3. The base 1 is the main body of the entire support platform, providing overall support and installation space for the suction cups 2 and support components 3. The suction cups 2 are used to support and adsorb the peripheral area of ​​the display panel 7. It should be noted that during the manufacturing process, the peripheral area of ​​the display panel 7 is a non-product area, which will be removed after processing. The support components 3 are used to temporarily support the display panel 7 during the handling of the robotic arm. It should be noted that the display panel 7 mainly consists of a glass substrate and various patterned film layers formed on the glass substrate during manufacturing. The display panel 7 is a square plate with a side length of 1.8-2.6m. Due to its large overall size, if the central area of ​​the display panel 7 loses support, the display panel 7 will bend and deform under its own weight. Therefore, by setting up the support components 3, the display panel 7 can be temporarily supported.

[0034] The base 1 has a cuboid structure, and its shape matches the display panel 7. The length direction of the base 1 is defined as the X direction (second direction) shown in the diagram, the width direction as the Y direction (first direction) shown in the diagram, and the height direction as the Z direction shown in the diagram. The suction cup 2 and the support assembly 3 are both mounted on the top surface of the base 1. Multiple air jet zones 10 are sequentially distributed along the width direction on the top surface of the base 1, and each air jet zone 10 is provided with an air jet hole 11. The air jet hole 11 is used to spray gas upwards, using the gas to support the display panel 7 above.

[0035] The suction cup 2 is existing technology, which uses the principle of vacuum adsorption to adhere and fix the display panel 7 placed on the suction cup 2. In this embodiment, the specific structure of the suction cup 2 will not be described in detail. Suction cups 2 are provided at both ends along the width direction of the top surface of the base 1. Multiple suction cups 2 are provided, spaced apart along the length direction of the base 1. The side of the suction cup 2 facing away from the base 1 forms an adsorption surface 21 for adsorbing the display panel 7. The adsorption surfaces 21 of all suction cups 2 are coplanar, and all adsorption surfaces 21 are located on the same horizontal plane. This structure allows the display panel 7 to be placed horizontally on the support platform.

[0036] At least one of the jet spray zones 10 is located in the middle of the base 1 along its width. When the display panel 7 is placed on the suction cup 2, the display panel 7 bends downwards under its own weight, and the bending amplitude is greatest at the middle of the base 1 along its width. Therefore, a jet spray zone 10 needs to be located in the middle of the base 1 along its width to directly spray air onto the middle area of ​​the display panel 7. The length direction of the jet spray zone 10 is perpendicular to the first direction, that is, the length of the jet spray zone 10 extends along the length direction of the base 1. The two ends of the jet spray zone 10 along its length are close to the two ends of the length direction of the display panel 7 (X direction in the figure). This structure allows the jet spray zone 10 to approximately cover the entire area of ​​the display panel 7 along its length, ensuring a good blowing effect on the display panel 7.

[0037] Multiple support components 3 are spaced apart on the top surface of the base 1 along its width. Each support component 3 has a long, strip-like structure, and its length extends along the length of the base 1. The support components 3 also serve to separate the various air jet zones 10, creating air jet zones 10 between adjacent support components 3. Each support component 3 includes an elastic support 31 and a rigid support 32. The elastic support 31 is made of a flexible material, such as silicone or rubber. The elastic support 31 is the main body of the support component 3, and its length extends along the length of the base 1. The elastic support 31 cannot provide support for the display panel 7; when the display panel 7 is placed on the elastic support 31, the elastic support 31 is compressed by the display panel 7 and undergoes elastic deformation. The rigid support 32 has a long rod structure and is made of a rigid material, such as ceramic, glass, or metal. The rigid support 32 can provide support for the display panel 7. The rigid support 32 is embedded inside the elastic support 31, with the top of the rigid support 32 lower than the adsorption surface 21 and the top of the elastic support 31 higher than the adsorption surface 21. When the handling robot places the display panel 7 onto the carrying platform, the display panel 7 contacts the top of the elastic support 31 and compresses the elastic support 31 to cause elastic deformation.

[0038] Understandably, by providing air jet holes 11 on the base 1 and using the jetted airflow to support the display panel 7, rigid contact between the product area of ​​the display panel 7 and the base 1 can be avoided, thereby reducing the risk of frictional damage between the two. Furthermore, by providing the support component 3, temporary support can be provided for the display panel 7 when air jetting is not in use, preventing significant bending deformation of the central area of ​​the display panel 7 due to lack of support. When the display panel 7 is placed on the suction cup 2, since the top of the elastic support 31 is higher than the suction surface 21, the display panel 7 presses against the elastic support 31, causing the elastic support 31 to elastically deform, and the display panel 7 continues to bend downwards. Since the top of the rigid support 32 is lower than the suction surface 21, the downwardly bending display panel 7 is ultimately supported by the rigid support 32, thus preventing further bending. Under the action of the support component 3, the bending amplitude of the display panel 7 can be reduced. Throughout the exposure process, there is no friction between the various components on the base 1, avoiding the risk of foreign matter generation, and thus preventing defects in the display panel 7 due to foreign matter adhesion.

[0039] It should be noted that in this embodiment, the vertical distance between the top of the rigid support 32 and the adsorption surface 21 should be designed to match the safe bending radius of the display panel 7. When not spraying air, the display panel 7 is supported by the rigid support 32, and at this time, the display panel 7 is bent downwards. However, the bending radius of the display panel 7 is within an acceptable range and will not threaten the quality of the display panel 7. In this state, since the elastic support 31 is sandwiched between the rigid support 32 and the display panel 7, the risk of frictional damage between the support assembly 3 and the display panel 7 can be reduced when the support assembly 3 provides temporary support. During air spraying, the display panel 7 and the adsorption surface 21 are on the same horizontal plane, and the display panel 7 is freed from the support of the rigid support 32. (Refer to...) Figure 3 and Figure 4 As shown, the support platform has a working state and a non-working state. In the non-working state, the display panel 7 is not placed on the support platform. The elastic support 31 is in a free state, and the top of the elastic support 31 is higher than the adsorption surface 21. In the working state, the display panel 7 is placed on the support platform. The display panel 7 compresses the elastic support 31, causing elastic deformation.

[0040] Specifically, refer to Figure 2 and Figure 5As shown, the elastic support 31 includes a lower support section 311 and an upper support section 312. The bottom end of the lower support section 311 is connected to the top surface of the base 1, and the top end of the lower support section 311 is connected to the upper support section 312. The upper support section 312 has a cavity 313. In this embodiment, the cross-section of the upper support section 312 is elliptical, which facilitates elastic deformation under pressure from the display panel 7 and rapid rebound when the pressure is released. The bottom end of the rigid support 32 passes through the lower support section 311 and is fixedly connected to the base 1. The top end of the rigid support 32 extends into the cavity 313, and the top end of the rigid support 32 is spaced from the inner wall of the cavity 313 of the upper support section 312. The top end of the rigid support 32 is spherical. This structure makes the top end of the rigid support 32 smooth, avoiding compression damage to the upper support section 312 when subjected to pressure from the display panel 7.

[0041] The elastic support 31 extends along the length of the base 1, and both ends of the elastic support 31 extend to both ends of the base 1 along its length, so that the entire display panel 7 can be placed on the support assembly 3. Each elastic support 31 contains multiple rigid support members 32, which are spaced apart along the length of the elastic support 31. In this embodiment, the rigid support members 32 are long rods, and by spaced multiple rigid support members 32, each area of ​​the display panel 7 can be effectively supported. Of course, in other embodiments, the rigid support members 32 can also be plate-like structures, with their length extending along the length of the base 1.

[0042] Specifically, refer to Figures 2 to 4 As shown, each jet zone 10 is provided with multiple jet holes 11, which are spaced apart along the length of the base 1. All the jet holes 11 on the base 1 are arranged in an array so that a uniform airflow can be ejected from below the display panel 7 to stably support the display panel 7.

[0043] The support platform also includes an air supply device 8, which supplies gas to the jet holes 11. Multiple air supply channels 12 are provided within the base 1, which supply gas and connect the jet holes 11 to the air supply device 8. All jet holes 11 in each jet zone 10 are connected to the same air supply channel 12. The end of the air supply channel 12 opposite to the jet holes 11 is connected to the air supply device 8, and each air supply channel 12 is equipped with a solenoid valve 9. The solenoid valve 9 controls the opening and closing of the air supply channel 12 and the flow rate. It is understood that the jet holes 11 in each jet zone 10 can be controlled independently. By adjusting the flow rate of the solenoid valve 9, the amount of gas in the corresponding jet zone 10 can be adjusted. By individually adjusting the gas in each jet zone 10, the entire display panel 7 can be kept horizontal under the support of the gas in each jet zone 10, thereby ensuring exposure quality.

[0044] A sensor 5, a distance sensor, is installed within the jet zone 10 to detect the distance between the display panel 7 and the base 1, thereby obtaining the overall flatness data of the display panel 7. The sensor 5 is electrically connected to a solenoid valve 9 via a controller. In practical applications, the controller acquires the detection data from the sensors 5 within each jet zone 10 to obtain the real-time shape of the display panel 7. The controller controls the opening of each solenoid valve 9 to control the jet volume of each jet zone 10, thereby maintaining the display panel 7 in a horizontal state to meet the exposure process requirements. In this embodiment, along the width direction of the base 1, from the middle to the end of the base 1, the jet zones 10 are respectively the first jet zone 101, the second jet zone 102, the third jet zone 103, and the fourth jet zone 104. The display panel 7 undergoes bending deformation under its own gravity, and from the middle to the end, the deformation amount of the display panel 7 in the same area is similar. That is, the deformation amounts of the two second jet zones 102 are similar, the deformation amounts of the two third jet zones 103 are similar, and the deformation amounts of the two fourth jet zones 104 are similar. To reduce control complexity and the number of solenoid valves 9 used, in this embodiment, all jet holes 11 in the two second jet zones 102 are connected to the same air supply channel 12, all jet holes 11 in the two third jet zones 103 are connected to the same air supply channel 12, and all jet holes 11 in the two fourth jet zones 104 are connected to one air supply channel 12. Of course, in other embodiments, the number of jet zones 10 can be set to other numbers, and the specific number can be adapted to the actual size of the display panel 7.

[0045] Specifically, refer to Figure 2As shown, along the length of the base 1, elastic plates 4 are respectively provided at both ends of the jet zone 10. The material and structure of the elastic plates 4 are the same as or similar to those of the elastic support 31, and will not be described in detail here. The jet zone 10 is formed between two adjacent support components 3 and two elastic plates 4. When the display panel 7 is placed, the support components 3 and elastic plates 4 can fit tightly against the bottom of the display panel 7, so that the jet zone 10 is in a relatively sealed state. This structure is more conducive to adjusting the horizontal state of the display panel 7 by changing the jet volume of each jet zone 10.

[0046] A positioning element 6 is provided at one end of the base 1 along its length, which serves to position the display panel 7 during transportation. When the handling robot places the display panel 7, the handling robot inserts into the air jet zone 10 along the length of the base 1, and then withdraws from the bottom of the display panel 7. When placing the display panel 7, the end of the display panel 7 abuts against the positioning element 6, at which point the position of the display panel 7 matches the preset position.

[0047] In this embodiment, the display panel 7 is placed on the support platform or removed from the support platform by a handling robot. To avoid interference between the handling robot and the elastic plate 4, a portion of the elastic plate 4 is rotatably connected to the base 1, so that this portion of the elastic plate 4 can avoid the handling robot from picking up or placing the display panel 7. Specifically, the rotatably connected elastic plate 4 is located at the end of the base 1 opposite to the positioning member 6.

[0048] The working process of the support platform in this embodiment is as follows: The support platform is used in an exposure machine, which includes a support platform, an exposure lens, and a transport robot. The exposure lens is located above the support platform, and the transport robot is located on one side of the support platform along its length (X direction in the figure). The transport robot picks up the display panel 7 and moves it onto the support platform. The display panel 7 moves along the length of the base 1 and one end of the display panel 7 abuts against the positioning member 6. After the display panel 7 reaches the preset position, the transport robot descends so that both ends of the display panel 7 in the width direction are placed on the suction cup 2, which then adheres and fixes the display panel 7. The transport robot is pulled out from the bottom of the display panel 7, and the display panel 7 bends under its own weight. The bent display panel 7 presses against the support component 3. The air supply device 8 is activated, and the air jet 11 begins to spray air. Under the support of the gas, the bent part of the display panel 7 moves upward and the entire display panel 7 tends to be horizontal. During the air jetting process, the air jet volume in each air jet zone 10 is adjusted in real time according to the detection data of the sensor 5 to keep the entire display panel 7 in a horizontal state. Finally, the exposure lens illuminates the photoresist on the display panel 7 to complete the exposure. After exposure, a robotic arm removes the display panel 7.

[0049] Although embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be made in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential characteristics of the present invention. Therefore, it should be understood that the above embodiments are exemplary in all respects and not restrictive.

Claims

1. A support platform for use in an exposure machine, characterized in that, include: The base has multiple jet zones distributed sequentially along a first direction. Each jet zone is provided with a jet hole for spraying gas upward. At least one of the jet zones is located in the middle of the base along the first direction. The length direction of the jet zone is perpendicular to the first direction, and both ends of the length direction of the jet zone are close to the ends of the display panel. The base is provided with suction cups at both ends along the first direction, and the end of the suction cup facing away from the base forms an adsorption surface for adsorbing the display panel. Multiple support components are spaced apart on the base along a first direction, and the air jet zone is formed between two adjacent support components. Each support component includes an elastic support member and a rigid support member embedded inside the elastic support member. The top end of the rigid support member is lower than the adsorption surface, and the top end of the elastic support member is higher than the adsorption surface. The display panel is placed on the top end of the elastic support member and can cause the elastic support member to undergo elastic deformation.

2. The support platform for an exposure machine according to claim 1, characterized in that, The elastic support includes a lower support section and an upper support section. The bottom end of the lower support section is connected to the base, and the top end of the lower support section is connected to the upper support section. The upper support section has a cavity. The bottom end of the rigid support is inserted through the lower support section and connected to the base. The top end of the rigid support extends into the cavity, and the top end of the rigid support is spaced apart from the top wall of the cavity.

3. The support platform for an exposure machine according to claim 2, characterized in that, The top of the rigid support is spherical.

4. The support platform for an exposure machine according to claim 2, characterized in that, The length direction of the elastic support is perpendicular to the first direction, and each elastic support contains a plurality of rigid support members, which are spaced apart along the length direction of the elastic support.

5. The support platform for an exposure machine according to claim 1, characterized in that, Each jet zone is provided with a plurality of jet holes, which are spaced apart along a second direction, which is perpendicular to the first direction.

6. The support platform for an exposure machine according to claim 5, characterized in that, It also includes an air supply device. The base is provided with multiple air supply channels. All the air jets in each air jet zone are connected to the same air supply channel. The end of the air supply channel away from the air jet is connected to the air supply device, and each air supply channel is provided with a solenoid valve.

7. The support platform for an exposure machine according to claim 6, characterized in that, A sensor for detecting the distance between the display panel and the base is provided in the jet zone, and the sensor is electrically connected to the solenoid valve.

8. The support platform for an exposure machine according to any one of claims 1 to 7, characterized in that, Along the second direction, elastic plates are respectively provided at both ends of the jet zone, and the jet zone is formed between two adjacent support components and the two elastic plates.

9. The support platform for an exposure machine according to claim 8, characterized in that, Part of the elastic plate is rotatably connected to the base so that the elastic plate can avoid the handling robot arm from picking up and placing the display panel.

10. The support platform for an exposure machine according to any one of claims 1 to 7, characterized in that, The base is provided with a positioning member at one end along the second direction, the positioning member being used to abut against the end of the display panel, the second direction being perpendicular to the first direction.

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