High-vacuum reaction device

Abstract

The utility model relates to a high-vacuum reaction device which comprises a vacuum cavity, a lower door frame, an upper door frame, upper window glass, an upper window gasket, a side window cover, a blowing flange, a PM type quick connector, a fixed metal plate, a ceramic heating piece cover plate, a ceramic heating piece, a workpiece, a pressing elastic piece stud, a pressing elastic piece, a gas heating device and a vacuum flange. The vacuum cavity and the cover plate are combined to form a seal, so that a vacuum chamber is formed; a lower door frame is mounted at the bottom of the vacuum cavity and is combined with the cavity to form a seal, so that a vacuum chamber is formed; an upper door frame is mounted at the top of the vacuum cavity and is combined with the cavity to form a seal, so that a vacuum chamber is formed; two PM type quick connectors are installed on the outer side of the vacuum cavity, and water cooling is used for cooling the cavity. According to the utility model, temperature-controlled heating is realized through the ceramic heating sheet, the pressing elastic sheet stud, the pressing elastic sheet and the gas heating device, and observable operation is realized at the same time.

Description

A high vacuum reaction device Technical Field

[0001] This utility model relates to the field of high-temperature gas synthesis of nanomaterials, and in particular to a high-vacuum reaction device. Background Technology

[0002] High-temperature gas synthesis of nanomaterials is an advanced preparation method that uses pyrolysis, redox reactions, or plasma activation of gaseous precursors (such as CH4, SiH4, and organometallic compounds) at high temperatures (above 500–3000℃) to nucleate and grow nanoparticles, nanowires, or thin films in the gas phase. However, it is energy-intensive and dependent on high temperatures (typically >1000℃), leading to high production costs and hindering large-scale application. It also suffers from low thermal efficiency, with significant energy loss as waste heat. Product uniformity is poor due to complex gas-phase reaction kinetics, easily resulting in agglomerated particles or products with uneven size distribution. Precise control of the nucleation and growth processes is difficult, affecting the morphology and properties of the nanomaterials. Equipment and process limitations include stringent requirements for reactor materials (such as high-temperature resistant ceramics and metals), leading to high equipment costs. Some precursors (such as organometallic compounds) may not decompose completely at high temperatures, introducing impurities. Safety and environmental concerns include the potential for toxic byproducts (such as CO and NOx) at high temperatures, requiring complex exhaust gas treatment. The use of high-pressure gases (such as H2 and NH3) increases the risk of explosion. Limited applicability to certain materials: Some low-melting-point or thermally unstable materials (such as polymers and sulfides) are prone to decomposition or oxidation. It is difficult to prepare composite nanomaterials (such as core-shell structures) due to interdiffusion of components caused by high temperatures. Summary of the Invention

[0003] The problem solved by this invention is to provide a high-vacuum reaction device that achieves temperature control and heating through a ceramic heating element, a clamping spring stud, a clamping spring, and a gas heating device, while also enabling observable operation.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a high vacuum reaction device, comprising a vacuum chamber, a lower door frame, an upper door frame, an upper viewing window glass, an upper viewing window gasket, a side viewing window cover, a blowing flange, a PM type quick connector, a fixed sheet metal, a ceramic heating plate cover, a ceramic heating plate, a workpiece, a clamping spring stud, a clamping spring, a gas heating device, and a vacuum flange, wherein the vacuum chamber and the cover plate are combined to form a seal, forming a vacuum chamber;

[0005] A lower door frame is installed at the bottom of the vacuum cavity, which is combined with the cavity to form a seal, thus forming a vacuum chamber.

[0006] The top of the vacuum chamber is equipped with an upper door frame, which is combined with the chamber to form a seal, thus forming a vacuum chamber.

[0007] Two PM-type quick connectors are installed on the outside of the vacuum chamber, which are circulated with water for cooling the chamber.

[0008] The vacuum chamber is equipped with a liner, and a parallel fixing sheet metal is installed on the top of the liner for fixing the central reaction device.

[0009] The two fixed sheet metal parts are connected by a ceramic heating element cover plate, and a ceramic heating element is installed at the bottom of the ceramic heating element cover plate for heating the platform.

[0010] The liner is equipped with clamping spring studs on both sides of the fixed sheet metal, and clamping springs are installed on the top of the clamping spring studs to clamp the sample in the chamber.

[0011] Gas heating devices are installed on both sides of the liner plate on the fixed sheet metal to heat the gas conveyed by the blowing flange.

[0012] Preferably, an upper viewing window pad is provided at the middle position of the top of the upper door frame for placing the viewing mirror glass and ensuring a vacuum.

[0013] The upper viewing window is placed on top of the upper viewing window pad to observe the reaction inside the cavity.

[0014] The side window cover is located above the upper window glass and is fitted onto the top of the upper door frame to cover the upper window glass.

[0015] Preferably, four air-blowing flanges are installed on the outside of the vacuum chamber to blow gas into the vacuum chamber.

[0016] Preferably, two vacuum flanges are installed on the outside of the vacuum chamber to create a vacuum environment within the chamber.

[0017] Preferably, a viewing window is installed outside the vacuum chamber, and an upper viewing window gasket is provided on the outside of the viewing window, and an upper viewing window glass is provided on one side of the upper viewing window gasket. A side viewing window cover is fitted onto the viewing window, and the upper viewing window glass is fitted inside the side viewing window cover.

[0018] Preferably, the ceramic heating element cover plate is used to place the workpiece.

[0019] The beneficial effects of this utility model are: temperature control heating is achieved through ceramic heating elements, clamping spring studs, clamping springs, and gas heating devices, while also enabling observable operation. Attached Figure Description

[0020] Figure 1 is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 is a top view of the present invention;

[0022] Figure 3 is a schematic diagram of the overall structure of this utility model;

[0023] Figure 4 is a schematic diagram of the overall structure of this utility model;

[0024] Figure 5 is a schematic diagram of the overall structure of this utility model;

[0025] Figure 6 is a schematic diagram of the overall internal structure of this utility model;

[0026] Figure 7 is a schematic diagram of the position and structure of the ceramic heating element of this utility model.

[0027] Legend:

[0028] 1. Vacuum chamber; 2. Lower door frame; 3. Upper door frame; 4. Upper viewing window glass; 5. Upper viewing window gasket; 6. Side viewing window cover; 7. Air blowing flange; 8. PM type quick connector; 9. Fixed sheet metal; 10. Ceramic heating element cover plate; 11. Ceramic heating element; 12. Workpiece; 13. Clamping spring stud; 14. Clamping spring; 15. Gas heating device; 16. Vacuum flange. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0030] Specific implementation examples are given below.

[0031] Referring to Figures 1 to 7, a high vacuum reaction device includes a vacuum chamber 1, a lower door frame 2, an upper door frame 3, an upper viewing window glass 4, an upper viewing window gasket 5, a side viewing window cover 6, a blowing flange 7, a PM-type quick connector 8, a fixed sheet metal 9, a ceramic heating plate cover 10, a ceramic heating plate 11, a workpiece 12, a clamping spring stud 13, a clamping spring 14, a gas heating device 15, and a vacuum flange 16. The vacuum chamber 1 and the cover plate are combined to form a seal, forming a vacuum chamber.

[0032] A lower door frame 2 is installed at the bottom of the vacuum chamber 1, which is combined with the chamber to form a seal, thus forming a vacuum chamber.

[0033] A top door frame 3 is installed on the top of the vacuum chamber 1, which is combined with the chamber to form a seal, thus forming a vacuum chamber.

[0034] Two PM-type quick connectors 8 are installed on the outside of the vacuum chamber 1, which are circulated with water for cooling the chamber.

[0035] A liner is installed inside the vacuum chamber 1, and a parallel fixed sheet metal 9 is installed on the top of the liner to fix the central reaction device.

[0036] Two fixed sheet metals 9 are connected by a ceramic heating element cover plate 10. A ceramic heating element 11 is installed at the bottom of the ceramic heating element cover plate 10 for heating the platform.

[0037] The liner is mounted on both sides of the fixed sheet metal 9 with clamping spring studs 13, and clamping springs 14 are mounted on the top of the clamping spring studs 13 to clamp the sample of the chamber.

[0038] Gas heating devices 15 are installed on both sides of the liner plate on the fixed sheet metal 9 to heat the gas conveyed by the blowing flange.

[0039] An upper viewing window pad 5 is provided at the top center of the upper door frame 3 for placing the viewing mirror glass and ensuring a vacuum.

[0040] A top viewing window glass 4 is placed on top of the top viewing window pad to observe the reaction inside the cavity;

[0041] The side window cover 6 is located above the upper window glass 4 and is fitted onto the top of the upper door frame 3 to cover the upper window glass 4.

[0042] Four air-blowing flanges 7 are installed on the outside of the vacuum chamber 1 to blow gas into the vacuum chamber; two vacuum flanges 16 are installed on the outside of the vacuum chamber 1 to create a vacuum environment in the chamber; a viewing window is installed on the outside of the vacuum chamber 1, and an upper viewing window gasket 5 is provided on the outside of the viewing window, and an upper viewing window glass 4 is provided on one side of the upper viewing window gasket 5; a side viewing window cover 6 is fitted on the viewing window, and the upper viewing window glass 4 is fitted inside the side viewing window cover 6; a ceramic heating plate cover 10 is used to place the workpiece 12;

[0043] Vacuum is drawn through vacuum flange 16 to bring vacuum chamber 1 to a high vacuum state. Protective gas can also be introduced. The reaction gas enters the gas heating device through gas blowing flange 7. The temperature is controllable from room temperature to 1200℃. Gas heating device 15 heats to the temperature required for the reaction. Ceramic heating plate 11 heats the workpiece 12 to the test temperature, which is controllable from room temperature to 1500℃. Experimental substances are synthesized on the sample stage.

[0044] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A high-vacuum reaction apparatus, characterized in that, The system includes a vacuum chamber (1), a lower door frame (2), an upper door frame (3), an upper viewing window glass (4), an upper viewing window gasket (5), a side viewing window cover (6), a blowing flange (7), a PM-type quick connector (8), a fixed sheet metal (9), a ceramic heating element cover plate (10), a ceramic heating element (11), a workpiece (12), a clamping spring stud (13), a clamping spring (14), a gas heating device (15), and a vacuum flange (16). The vacuum chamber (1) is sealed with the cover plate to form a vacuum chamber. The lower door frame (2) is installed at the bottom of the vacuum chamber (1) and is sealed with the chamber to form a vacuum chamber. The upper door frame (3) is installed at the top of the vacuum chamber (1) and is sealed with the chamber to form a vacuum chamber. Two PM-type quick connectors (8) are installed on the outside of the cavity (1) for water cooling to lower the temperature of the cavity; a liner is installed inside the vacuum cavity (1), and parallel fixed sheet metal (9) is installed on the top of the liner for fixing the central reaction device; the two fixed sheet metal (9) are connected by a ceramic heating plate cover (10), and a ceramic heating plate (11) is installed at the bottom of the ceramic heating plate cover (10) for heating the stage; clamping spring studs (13) are installed on both sides of the liner on the fixed sheet metal (9), and clamping springs (14) are installed on the top of the clamping spring studs (13) to clamp the sample in the chamber; a gas heating device (15) is installed on both sides of the liner on the fixed sheet metal (9) for heating the gas conveyed by the blowing flange.

2. The high-vacuum reaction apparatus according to claim 1, characterized in that, An upper viewing window pad (5) is provided at the top center of the upper door frame (3) for placing the viewing glass and ensuring a vacuum; the upper viewing window glass (4) is placed on top of the upper viewing window pad to observe the reaction inside the cavity; the side viewing window cover (6) is located above the upper viewing window glass (4) and is fitted onto the top of the upper door frame (3) to cover the upper viewing window glass (4).

3. The high-vacuum reaction apparatus according to claim 1, characterized in that, Four air-blowing flanges (7) are installed on the outside of the vacuum chamber (1) to blow gas into the vacuum chamber.

4. The high-vacuum reaction apparatus according to claim 1, characterized in that, Two vacuum flanges (16) are installed on the outside of the vacuum chamber (1) to create a vacuum environment in the chamber.

5. A high-vacuum reaction apparatus according to claim 1, characterized in that, A viewing window is installed outside the vacuum cavity (1), and an upper viewing window gasket (5) is provided on the outside of the viewing window. An upper viewing window glass (4) is provided on one side of the upper viewing window gasket (5). A side viewing window cover (6) is fitted onto the viewing window, and the upper viewing window glass (4) is fitted inside the side viewing window cover (6).

6. The high-vacuum reaction apparatus according to claim 1, characterized in that, The ceramic heating plate cover (10) is used to place the workpiece (12).

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