Leakage-proof conveying pipe for high-purity gas

Abstract

According to the high-purity gas leakage-proof conveying pipe, a leakage-proof connecting structure is arranged at the flange connecting position of a first conveying pipe and a second conveying pipe, so that during connection, flanges at the ends of the first conveying pipe and the second conveying pipe are fixedly connected through bolts, then a first sealing cover and a second sealing cover are arranged at the flange connecting position in a covering mode, and the first sealing cover and the second sealing cover are sealed; and a sealing sleeve structure is formed through bolt fixation, so that the flange joint is positioned in the first leakage-proof cavity. A first gas detector and a second gas detector are arranged on the outer side wall of the first sealing cover and are used for detecting the leakage condition of high-purity gas in the first leakage-proof cavity and the second leakage-proof cavity at regular time. When leakage is detected, after the controller receives a signal, the air inlet electromagnetic valve is opened, the air extracting pump is started, leaked air is collected into the air collecting box through the air extracting pipe, and meanwhile an alarm is sent to an operator. After an operator arrives, the gas outlet electromagnetic valve can be opened, and high-purity gas in the gas collection tank is recycled through the output pipe, so that resource waste is avoided.

Description

Technical Field

[0001] This application relates to the field of high-purity gas technology, and more specifically to a high-purity gas leak-proof delivery pipe. Background Technology

[0002] High-purity gases refer to gases that have reached a certain purity level using modern purification techniques. Their purity varies depending on the type of gas. In semiconductor manufacturing, microelectronics processing, and other high-tech industries, high-purity gases (such as high-purity nitrogen, high-purity hydrogen, high-purity argon, and high-purity helium) play an irreplaceable role, serving as both carrier and protective gases, as well as basic raw materials for preparing gas mixtures. Therefore, ensuring the purity stability of high-purity gases during transportation and use is crucial for guaranteeing the precision of production processes and product quality.

[0003] Currently, stainless steel pipes are commonly used in laboratories and industrial applications for transporting high-purity gases due to their advantages such as corrosion resistance and high-temperature resistance. However, in existing technologies, stainless steel pipes for high-purity gases in laboratories are typically connected by flanges. In practical applications, due to improper installation techniques, aging of flange seals, or material fatigue after prolonged use, tiny gaps may appear at the flange connections between pipes, leading to leaks of high-purity gases during transport. Such leaks can not only waste valuable gas resources but also pose safety hazards or affect the purity and stability of the gas. Furthermore, because leaks are often hidden, they are difficult to detect and address in a timely manner, thus posing potential risks to the production process. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of this application is to provide a high-purity gas leak-proof delivery pipe to solve the problems mentioned in the background art.

[0005] According to one aspect of this application, a high-purity gas leak-proof delivery pipe includes a first delivery pipe, a second delivery pipe, and a leak-proof connection structure. The first delivery pipe and the second delivery pipe are fixedly connected by flanges at their ends. A leak-proof connection structure is fixedly installed on the outer side of the flange connection between the first delivery pipe and the second delivery pipe. The leak-proof connection structure includes a first sealing cover, a second sealing cover, a gas detection component, and a gas collection component. Both the first and second sealing covers are semi-cylindrical thin-walled structures and can form a complete cylindrical thin-walled structure. The middle sidewalls of the first and second sealing covers protrude outwards along their circumference. Two arc-shaped sealing partitions are fixedly installed along their circumference at the middle position of the inner sidewalls of both the first and second sealing covers. The arc-shaped sealing partitions are semi-circular structures. The first and second sealing covers are fixedly connected to form a sealing sleeve structure and are fixedly sleeved on the outer circumference of the flange connection between the first and second delivery pipes. The connection between the first sealing cover and the second sealing cover is a sealed connection, and the two arc-shaped sealing partitions on their inner sidewalls are respectively aligned and connected. The inner arc edges of the two arc-shaped sealing partitions respectively contact and seal with the outer sidewalls of the first and second conveying pipes to form a first leak-proof cavity. The flange connection positions of the first and second conveying pipes are located inside the first leak-proof cavity. The two ends of the sealing sleeve structure are closed structures and respectively contact and seal with the outer sidewalls of the first and second conveying pipes. The cavities between the two ends of the sealing sleeve structure and the arc-shaped sealing partitions adjacent to it are both second leak-proof cavities. A gas detection component is fixedly installed on the outer sidewall of the first sealing cover. The gas detection component is used to detect leaked high-purity gas in the first and second leak-proof cavities. A gas collection component is fixedly installed on the outer sidewall of the second sealing cover. The gas collection component is used to collect leaked high-purity gas in the first and second leak-proof cavities.

[0006] Preferably, the gas detection assembly includes a first gas detector and a second gas detector. The first gas detector and the second gas detector are respectively fixedly installed on the outer wall of the first sealing cover corresponding to the first leak-proof cavity and the second leak-proof cavity. The first gas detector and the second gas detector respectively detect the leakage of high-purity gas in the first leak-proof cavity and the second leak-proof cavity.

[0007] Preferably, the gas collection assembly includes a protective square shell, a first suction pipe, a second suction pipe, a gas delivery pipe, a suction pump, a gas collection box, and an output pipe. The protective square shell is fixedly installed on the outer wall of the second sealing cover. The suction pump is fixedly installed on the top of the protective square shell. The suction port of the suction pump is fixedly connected to the gas delivery pipe. The gas delivery pipe is disposed inside the protective square shell. The first suction pipe and the second suction pipe are respectively connected to the gas delivery pipe at positions corresponding to the first leak-proof cavity and the second leak-proof cavity. The open ends of the first suction pipe and the second suction pipe extend into the first leak-proof cavity and the second leak-proof cavity, respectively. The outlet of the suction pump is connected to the gas collection box through a connecting pipe. The gas collection box is disposed inside the protective square shell. An output pipe is also connected to the gas collection box. The output pipe passes through the protective square shell and communicates with the outside.

[0008] Preferably, an intake solenoid valve is installed on both the first and second extraction pipes, and an outlet solenoid valve is installed on the output pipe.

[0009] Preferably, both sides of the first and second sealing covers are provided with connecting plates and are fixedly connected by bolts. A strip-shaped sealing strip is embedded along the axial direction on both sides of the connecting surface of the first and second sealing covers. An arc-shaped sealing strip is embedded along the circumferential direction on the inner sidewall of the openings at both ends of the first and second sealing covers. When the first and second sealing covers are fixedly connected, the strip-shaped sealing strip on their mating surfaces contacts and seals, and the arc-shaped sealing strip contacts and seals with the outer sidewall of the first and second conveying pipes.

[0010] Preferably, an arc-shaped rubber strip is fixedly provided on the inner arc edge of each of the arc-shaped sealing partitions. When the first sealing cover and the second sealing cover are fixedly connected, the inner arc edge of the arc-shaped rubber strip contacts and seals with the outer wall of the first conveying pipe and the second conveying pipe.

[0011] Preferably, a power supply box is installed at the bottom of the protective housing, and the power supply box contains a battery and a controller. The power supply box is electrically connected to the air pump, the first gas detector, the second gas detector, the inlet solenoid valve, and the outlet solenoid valve.

[0012] The advantages of this application compared to the prior art are as follows: This application provides a high-purity gas leak-proof delivery pipe. By setting a leak-proof connection structure at the flange connection of the first and second delivery pipes, during connection, the end flanges of the first and second delivery pipes are first fixedly connected by bolts. Then, a first sealing cover and a second sealing cover are placed over the flange connection and fixedly connected by bolts to form a sealing sleeve structure. This ensures that the flange connection is located within the first leak-proof cavity. Furthermore, a first gas detector and a second gas detector installed on the outer wall of the first sealing cover can periodically detect leaked high-purity gas in the first and second leak-proof cavities, respectively. When leakage is detected in either the first or second leak-proof cavity... After a leak of high-purity gas, the corresponding first and second gas detectors can send feedback to the controller in the power supply box. The controller controls the inlet solenoid valves on the corresponding first and second extraction pipes connected to the first and second leak-proof chambers to open and simultaneously start the extraction pump. This allows the leaked high-purity gas in the first and second leak-proof chambers to be collected into the gas collection box by the extraction pump through the first and second extraction pipes. In addition, the controller will also send a high-purity gas leak signal back to the operator for timely handling. After arriving at the site, the operator can open the outlet solenoid valve to discharge the high-purity gas in the gas collection box through the outlet pipe for collection and recycling, avoiding the waste of high-purity gas resources. Attached Figure Description

[0013] Figure 1 This is a perspective view of a high-purity gas leak-proof delivery pipe according to an embodiment of this application.

[0014] Figure 2 This is a three-dimensional exploded view of a high-purity gas leak-proof delivery pipe according to an embodiment of this application.

[0015] Figure 3 This is a cross-sectional view of a high-purity gas leak-proof delivery pipe according to an embodiment of this application.

[0016] Figure 4 This is a front sectional view of a leak-proof connection structure for a high-purity gas leak-proof delivery pipe according to an embodiment of this application.

[0017] Figure 5 This is a side sectional view of a leak-proof connection structure of a high-purity gas leak-proof delivery pipe according to an embodiment of this application.

[0018] Reference numerals: 1. First delivery pipe; 2. Second delivery pipe; 3. First sealing cover; 4. Second sealing cover; 5. Arc-shaped sealing partition; 6. First leak-proof cavity; 7. Second leak-proof cavity; 8. First gas detector; 9. Second gas detector; 10. Protective square shell; 11. First extraction pipe; 12. Second extraction pipe; 13. Gas delivery pipe; 14. Extraction pump; 15. Gas collection box; 16. Output pipe; 17. Inlet solenoid valve; 18. Strip-shaped sealing strip; 19. Arc-shaped sealing strip; 20. Arc-shaped rubber strip; 21. Power supply box; 22. Outlet solenoid valve. Detailed Implementation

[0019] To make the content of this application easier to understand, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be noted that the terms "front," "rear," "left," "right," "upper," and "lower" used in the following description refer to the accompanying drawings. Figure 2 In this context, the terms "inner" and "outer" refer to directions toward or away from the geometric center of a specific component, respectively. Furthermore, terms such as "first," "second," etc., are used for descriptive purposes only and should not be interpreted as indicating or implying relative importance.

[0020] like Figures 1-5As shown, a high-purity gas leak-proof delivery pipe includes a first delivery pipe 1, a second delivery pipe 2, and a leak-proof connection structure. The first delivery pipe 1 and the second delivery pipe 2 are fixedly connected by flanges at their ends. A leak-proof connection structure is fixedly installed on the outside of the flange connection between the first delivery pipe 1 and the second delivery pipe 2. The leak-proof connection structure includes a first sealing cover 3, a second sealing cover 4, a gas detection component, and a gas collection component. Both the first sealing cover 3 and the second sealing cover 4 are semi-cylindrical thin-walled structures and can form a complete cylindrical thin-walled structure. Connecting plates are extended on both sides of the first sealing cover 3 and the second sealing cover 4, and they are fixedly connected by bolts. After connection, the two form a sealing sleeve. The cylindrical structure is fixedly sleeved on the outer periphery of the flange connection between the first conveying pipe 1 and the second conveying pipe 2; strip-shaped sealing strips 18 are embedded axially on both sides of the connecting surface of the first sealing cover 3 and the second sealing cover 4, and arc-shaped sealing strips 19 are embedded circumferentially on the inner sidewalls of the openings at both ends of the first sealing cover 3 and the second sealing cover 4. When the first sealing cover 3 and the second sealing cover 4 are fixedly connected, the strip-shaped sealing strips 18 on their mating surfaces contact and seal, and the arc-shaped sealing strips 19 contact and seal with the outer sidewalls of the first conveying pipe 1 and the second conveying pipe 2. This design can ensure that the first sealing cover 3 and the second sealing cover 4 have good sealing performance after connection; the first sealing cover 3 and the second sealing cover 4 The middle sidewall of the first sealing cover 3 and the second sealing cover 4 protrudes outward along its circumference to cover the flange at the end of the conveying pipe. Two arc-shaped sealing baffles 5 are fixedly installed circumferentially at the middle position of the inner sidewalls of both the first sealing cover 3 and the second sealing cover 4. Each arc-shaped sealing baffle 5 has a semi-circular structure, and an arc-shaped rubber strip 20 is fixedly installed on the inner arc edge of each arc-shaped sealing baffle 5. When the first sealing cover 3 and the second sealing cover 4 are fixedly connected, the inner arc edge of the arc-shaped rubber strip 20 contacts and seals against the outer sidewalls of the first conveying pipe 1 and the second conveying pipe 2. The connection between the first sealing cover 3 and the second sealing cover 4 is sealed, and the two arc-shaped sealing baffles 5 on their inner sidewalls are aligned and connected accordingly. The inner arc edge of plate 5 is in contact with and sealed to the outer walls of the first conveying pipe 1 and the second conveying pipe 2 to form a first leak-proof cavity 6. The flange connection of the first conveying pipe 1 and the second conveying pipe 2 is located in the first leak-proof cavity 6. When a leak occurs at the flange connection of the first conveying pipe 1 and the second conveying pipe 2, high-purity gas will enter the first leak-proof cavity 6. The two ends of the sealing sleeve structure are closed structures and the arc-shaped sealing strip 19 on its inner side wall is in contact with and sealed to the outer walls of the first conveying pipe 1 and the second conveying pipe 2. The cavity between the two ends of the sealing sleeve structure and the arc-shaped sealing partition 5 that are close to it is a second leak-proof cavity 7. That is, a second leak-proof cavity 7 is provided on both sides of the first leak-proof cavity 6.

[0021] A gas detection assembly is fixedly installed on the outer wall of the first sealing cover 3. Specifically, the gas detection assembly includes a first gas detector 8 and a second gas detector 9. The first gas detector 8 and the second gas detector 9 are fixedly installed on the outer walls of the first sealing cover 3 corresponding to the first leak-proof chamber 6 and the second leak-proof chamber 7, respectively. The first gas detector 8 and the second gas detector 9 detect the leaked high-purity gas in the first leak-proof chamber 6 and the second leak-proof chamber 7, respectively. A gas collection assembly is fixedly installed on the outer wall of the second sealing cover 4. The gas collection assembly is used to collect the leaked high-purity gas in the first leak-proof chamber 6 and the second leak-proof chamber 7. Specifically, the gas collection assembly includes a protective square shell 10, a first suction pipe 11, a second suction pipe 12, a gas delivery pipe 13, a suction pump 14, a gas collection box 15, and an output pipe 16. The protective square shell 10 is fixedly installed on the outer wall of the second sealing cover 4. The suction pump 14 is fixedly installed on the top of the protective square shell 10. The suction port of the suction pump 14 is fixedly connected to the gas delivery pipe 13. The gas delivery pipe 13 is disposed inside the protective square shell 10. A first suction pipe 11 and a second suction pipe 12 are respectively connected to the positions corresponding to the first leak-proof cavity 6 and the second leak-proof cavity 7. The open ends of the first suction pipe 11 and the second suction pipe 12 extend into the first leak-proof cavity 6 and the second leak-proof cavity 7, respectively. The air outlet of the suction pump 14 is connected to the air collection box 15 through a connecting pipe. The air collection box 15 is set inside the protective square shell 10. An output pipe 16 is also connected to the air collection box 15. The output pipe 16 passes through the protective square shell 10 and connects to the outside. In addition, the first suction pipe 11 An inlet solenoid valve 17 is installed on both the first and second extraction pipes 12, and an outlet solenoid valve 22 is installed on the outlet pipe 16. A power supply box 21 is installed at the bottom of the protective housing 10. The power supply box 21 contains a battery and a controller. The battery provides power to the extraction pump 14, the first gas detector 8, the second gas detector 9, the inlet solenoid valve 17, and the outlet solenoid valve 22. The controller is electrically connected to the extraction pump 14, the first gas detector 8, the second gas detector 9, the inlet solenoid valve 17, and the outlet solenoid valve 22, respectively.

[0022] Working principle: During connection, the end flanges of the first delivery pipe 1 and the second delivery pipe 2 are first fixedly connected by bolts. Then, the first sealing cover 3 and the second sealing cover 4 are placed over the flange connection and fixedly connected by bolts to form a sealing sleeve structure, so that the flange connection is located inside the first leak-proof cavity 6. The first gas detector 8 and the second gas detector 9, which are installed on the outer wall of the first sealing cover 3, can periodically detect the high-purity gas leaking in the first leak-proof cavity 6 and the second leak-proof cavity 7, respectively. When high-purity gas is detected to be leaking in the first leak-proof cavity 6 or the second leak-proof cavity 7, the corresponding first gas detector 8 and second gas detector 9 can feed back to the power supply box 21. The controller controls the opening of the inlet solenoid valves 17 on the corresponding first extraction pipe 11 and second extraction pipe 12 of the first leak-proof chamber 6 and the second leak-proof chamber 7, and simultaneously starts the extraction pump 14. This allows the high-purity gas leaking from the first leak-proof chamber 6 and the second leak-proof chamber 7 to be collected into the gas collection box 15 by the first extraction pipe 11 and the second extraction pipe 12 through the extraction pump 14. In addition, the controller will also feed back the high-purity gas leakage signal to the operator, so that the operator can deal with it in time. After arriving at the site, the operator can open the outlet solenoid valve 22 to discharge the high-purity gas in the gas collection box 15 through the outlet pipe 16 for collection and recycling, thus avoiding the waste of high-purity gas resources.

[0023] The above embodiments are only used to illustrate the technical solutions of the embodiments of this application, and are not intended to limit them. Although the embodiments of this application have been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features, without departing from the spirit and scope defined by the claims of this application.

Claims

1. A high-purity gas leak-proof delivery pipe, comprising a first delivery pipe (1), a second delivery pipe (2), and a leak-proof connection structure, wherein the first delivery pipe (1) and the second delivery pipe (2) are fixedly connected by flanges at their ends, and a leak-proof connection structure is fixedly installed on the outside of the flange connection between the first delivery pipe (1) and the second delivery pipe (2), characterized in that, The leak-proof connection structure includes a first sealing cover (3), a second sealing cover (4), a gas detection component, and a gas collection component. The first sealing cover (3) and the second sealing cover (4) are both semi-cylindrical thin-walled structures and can form a complete cylindrical thin-walled structure. The middle sidewalls of the first sealing cover (3) and the second sealing cover (4) protrude outward along their circumference. Two arc-shaped sealing partitions (5) are fixedly provided along their circumference at the middle position of the inner sidewalls of the first sealing cover (3) and the second sealing cover (4). The arc-shaped sealing partitions (5) are semi-circular structures. The first sealing cover (3) and the second sealing cover (4) are fixedly connected to form a sealing sleeve structure and are fixedly sleeved on the outer circumference of the flange connection between the first conveying pipe (1) and the second conveying pipe (2). The connection between the first sealing cover (3) and the second sealing cover (4) is a sealed connection, and the two arc-shaped sealing partitions (5) on their inner sidewalls are respectively aligned and connected. The inner arc edge of the arc-shaped sealing partition (5) is respectively in contact with the outer walls of the first delivery pipe (1) and the second delivery pipe (2) to form a first leak-proof cavity (6), and the flange connection position of the first delivery pipe (1) and the second delivery pipe (2) is located in the first leak-proof cavity (6). The two ends of the sealing sleeve structure are closed structures and are respectively in contact with the outer walls of the first delivery pipe (1) and the second delivery pipe (2). The cavity between the two ends of the sealing sleeve structure and the arc-shaped sealing partition (5) that are close to it is a second leak-proof cavity (7). A gas detection component is fixedly installed on the outer wall of the first sealing cover (3). The gas detection component is used to detect the leakage of high-purity gas in the first leak-proof cavity (6) and the second leak-proof cavity (7). A gas collection component is fixedly installed on the outer wall of the second sealing cover (4). The gas collection component is used to collect the leakage of high-purity gas in the first leak-proof cavity (6) and the second leak-proof cavity (7).

2. A high purity gas delivery tube according to claim 1, wherein The gas detection assembly includes a first gas detector (8) and a second gas detector (9). The first gas detector (8) and the second gas detector (9) are respectively fixedly installed on the outer side wall of the first sealing cover (3) corresponding to the first leak-proof cavity (6) and the second leak-proof cavity (7). The first gas detector (8) and the second gas detector (9) respectively detect the leakage of high-purity gas in the first leak-proof cavity (6) and the second leak-proof cavity (7).

3. A high purity gas delivery tube according to claim 2, wherein The gas collection assembly includes a protective square shell (10), a first suction pipe (11), a second suction pipe (12), a gas delivery pipe (13), a suction pump (14), a gas collection box (15), and an output pipe (16). The protective square shell (10) is fixedly installed on the outer wall of the second sealing cover (4). The suction pump (14) is fixedly installed on the top of the protective square shell (10). The suction port of the suction pump (14) is fixedly connected to the gas delivery pipe (13). The gas delivery pipe (13) is located inside the protective square shell (10). The gas delivery pipe (13) has corresponding holes for the first leak-proof cavity (6) and the second gas collection box (15). The first suction pipe (11) and the second suction pipe (12) are connected to the two leak-proof chambers (7) respectively. The open ends of the first suction pipe (11) and the second suction pipe (12) extend into the first leak-proof chamber (6) and the second leak-proof chamber (7) respectively. The air outlet of the suction pump (14) is connected to the air collection box (15) through the connecting pipe. The air collection box (15) is set inside the protective square shell (10). The air collection box (15) is also connected to the output pipe (16). The output pipe (16) passes through the protective square shell (10) and connects to the outside.

4. A high purity gas delivery tube according to claim 3, wherein An intake solenoid valve (17) is installed on both the first extraction pipe (11) and the second extraction pipe (12), and an outlet solenoid valve (22) is installed on the output pipe (16).

5. The high purity gas delivery tube of claim 1, wherein, Both sides of the first sealing cover (3) and the second sealing cover (4) are provided with connecting plates and are fixedly connected by bolts. Both sides of the first sealing cover (3) and the second sealing cover (4) are embedded with strip-shaped sealing strips (18) along the axial direction. Both ends of the first sealing cover (3) and the second sealing cover (4) are embedded with arc-shaped sealing strips (19) along the circumferential direction on the inner sidewalls of the openings. When the first sealing cover (3) and the second sealing cover (4) are fixedly connected, the strip-shaped sealing strips (18) on their mating surfaces are in contact and sealed, and the arc-shaped sealing strips (19) are in contact and sealed with the outer sidewalls of the first conveying pipe (1) and the second conveying pipe (2).

6. A high purity gas delivery tube according to claim 1, wherein Each of the arc-shaped sealing partitions (5) has an arc-shaped rubber strip (20) fixedly provided on its inner arc edge. When the first sealing cover (3) and the second sealing cover (4) are fixedly connected, the inner arc edge of the arc-shaped rubber strip (20) is in contact with and sealed to the outer side wall of the first conveying pipe (1) and the second conveying pipe (2).

7. A high purity gas delivery tube according to claim 4, wherein The bottom of the protective housing (10) is equipped with a power supply box (21), which contains a battery and a controller. The power supply box (21) is electrically connected to the air pump (14), the first gas detector (8), the second gas detector (9), the inlet solenoid valve (17), and the outlet solenoid valve (22).

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