Particle beam electrostatic deflector

Abstract

The utility model discloses a particle beam electrostatic deflector, which comprises an insulating base and an electrode group body consisting of a plurality of groups of poles, a circular cavity is formed in the circle center of the insulating base, a plurality of first through holes are uniformly formed in the circumference of the inner side wall of the cavity, and grooves are formed in the upper end face and the lower end face of the insulating base; the plurality of groups of poles are circumferentially arranged on the insulating base to form a circular array, an insulating gap is arranged between each group of poles and is marked as H. The electrode group body comprises a boss part and a welding part, the diameter of the boss part is larger than that of the cavity, second through holes with the same number as the first through holes are formed in the boss part, and the welding part is welded to the boss part. And the first through hole and the second through hole correspond to each other to form a through hole. According to the utility model, the complex structure of the pole is simplified, the distribution of an electric field in each direction is more uniform, the deflection precision is improved, and the cylindricity and roundness of an electron beam channel hole are ensured.

Description

Technical Field

[0001] This utility model belongs to the field of electrostatic deflector technology, and in particular relates to a particle beam electrostatic deflector. Background Technology

[0002] Electrostatic deflectors are primarily used in particle accelerators, electron microscopes, and other equipment to achieve high-precision control of the trajectories of charged particle beams such as electrons and ions. Their working principle is based on using electrostatic force to deflect the ion or particle beam. Generally, an electrostatic deflector consists of multiple electrode groups distributed circumferentially, collectively enclosing a channel for the electron beam to pass through. Each electrode group contains multiple poles, and the poles within the same electrode group are all connected to the same power source, with each pole insulated from the others.

[0003] However, in existing electrostatic deflectors, each electrode plate uses an independent wiring method, which results in a large number of wires and complex wiring. Consequently, the assembly process becomes cumbersome, leading to a decrease in product yield. Summary of the Invention

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A particle beam electrostatic deflector includes an insulating base and an electrode body composed of several sets of poles.

[0006] The insulating base has a circular cavity at its center, and a number of first through holes are evenly arranged on the circumference of the inner sidewall of the cavity. The upper and lower surfaces of the insulating base are both provided with grooves.

[0007] Several groups of electrodes are arranged in a circular array on an insulating base. An insulating gap, denoted as H, is provided between each group of electrodes. The electrode group body includes a boss and a welding part. The diameter of the boss is larger than the diameter of the cavity. The boss has a second through hole with the same number as the first through hole. The first through hole and the second through hole correspond to each other to form a through hole.

[0008] Furthermore, the insulation gap H is 0.2-0.25 mm.

[0009] Furthermore, the boss portion is also provided with a number of threaded holes, which are evenly distributed around the circumference.

[0010] Furthermore, the insulating base is made of aluminum oxide, and the inner walls of the grooves and cavities are metallized.

[0011] Furthermore, several sets of the poles are brazed to the inner wall of the cavity.

[0012] Furthermore, there are 12 through holes, numbered 1-12 in sequence, of which 1, 3, and 11 are conductive, 4, 2, and 6 are conductive, 7, 5, and 9 are conductive, 10, 8, and 12 are conductive, and the rest are in an open circuit state.

[0013] The beneficial effects of this utility model are:

[0014] This invention connects multiple poles together to form a motor unit using the insulating base of the electrostatic deflector, eliminating the need for wire connections, reducing the number of wires, simplifying the complex structure of the poles, and thus omitting the pole assembly operation, improving the yield rate and greatly reducing costs. At the same time, the subsequent wire cutting ensures the size of the electron beam channel aperture, which is beneficial to the uniformity of the electric field and ensures the cylindricity and roundness of the electron beam channel aperture, thereby improving the deflection accuracy. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the electrode assembly body structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the insulating base structure of this utility model (red indicates the metallized area);

[0019] Figure 4 This is a top view of the electrode assembly body of this utility model (blue indicates the second through hole, and green indicates the cut straight groove);

[0020] Figure 5 This is a schematic diagram of the conductive state of this utility model;

[0021] Explanation of reference numerals in the attached figures:

[0022] 1. Insulating base; 11. Cavity; 12. First through hole; 13. Groove; 2. Electrode assembly body; 21. Boss; 22. Welding part; 211. Second through hole; 212. Threaded hole. Detailed Implementation

[0023] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention. Specific Implementation Example 1:

[0025] like Figures 1 to 5 As shown, a particle beam electrostatic deflector includes an insulating base 1 and an electrode assembly body 2 composed of several sets of electrodes; wherein, the insulating base 1 is made of alumina, and the grooves 13 and the inner walls of the cavity 11 are metallized. The electrodes are made of tungsten-copper alloy. The several sets of electrodes are brazed to the inner walls of the cavity 11.

[0026] The insulating base 1 has a circular cavity 11 at its center. Several first through holes 12 are evenly arranged around the inner sidewall of the cavity 11. The upper and lower surfaces of the insulating base 1 are both provided with grooves 13.

[0027] Several groups of electrodes are arranged circumferentially on the insulating base 1 to form a circular array. An insulating gap, denoted as H, is provided between each group of electrodes. The electrode assembly body 2 includes a boss portion 21 and a welding portion 22. The diameter of the boss portion 21 is larger than the diameter of the cavity 11. The boss portion 21 has the same number of second through holes 211 as the first through holes 12. The first through holes 12 and the second through holes 211 correspond to each other, forming a through hole. Specifically, the insulating gap H is 0.2-0.25 mm. The boss portion 21 also has several threaded holes 212, which are evenly distributed circumferentially. The threaded holes are used to prevent the fixing bolts from protruding when installing wires.

[0028] Preferably, there are 12 through holes, numbered 1-12, of which holes 1, 3, and 11 are conductive; holes 4, 2, and 6 are conductive; holes 7, 5, and 9 are conductive; holes 10, 8, and 12 are conductive; and the rest are in an open circuit state. The pole initially appears as a single piece, with four straight grooves cut into it for stress relief. Figure 4 As shown, brazing must be completed before wire cutting, and then wire cutting is used to disconnect the 12 poles.

[0029] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A particle beam electrostatic deflector, characterized in that: It includes an insulating base (1) and an electrode assembly body (2) composed of several sets of poles; The insulating base (1) has a circular cavity (11) at its center. Several first through holes (12) are evenly arranged around the inner sidewall of the cavity (11). The upper and lower surfaces of the insulating base (1) are provided with grooves (13). Several groups of electrodes are arranged in a circular array on an insulating base (1). An insulating gap, denoted as H, is provided between each group of electrodes. The electrode body (2) includes a boss (21) and a welding part (22). The diameter of the boss (21) is larger than the diameter of the cavity (11). The boss (21) is provided with a second through hole (211) in the same number as the first through hole (12). The first through hole (12) and the second through hole (211) correspond to each other to form a through hole.

2. The particle beam electrostatic deflector according to claim 1, characterized in that: The insulation gap H is 0.2-0.25 mm.

3. The particle beam electrostatic deflector according to claim 1, characterized in that: The boss (21) is also provided with a number of threaded holes (212), which are evenly arranged around the circumference.

4. The particle beam electrostatic deflector according to claim 1, characterized in that: The insulating base (1) is made of aluminum oxide, and the inner walls of the groove (13) and cavity (11) are metallized.

5. A particle beam electrostatic deflector according to claim 1, characterized in that: Several sets of the poles are brazed to the inner wall of the cavity (11).

6. A particle beam electrostatic deflector according to claim 1, characterized in that: There are 12 through holes, numbered 1-12 in sequence. Among them, 1, 3, and 11 are conductive, 4, 2, and 6 are conductive, 7, 5, and 9 are conductive, 10, 8, and 12 are conductive, and the rest are in an open circuit state.

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