Carrier plate lifting device and vapor deposition equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a carrier plate lifting device and vapor deposition equipment, the carrier plate lifting device is used for transferring a carrier plate between a backflow device and a reaction cavity, the carrier plate is used for bearing a silicon wafer, the carrier plate lifting device comprises a lifting assembly, a supporting assembly and a clamping assembly, the supporting assembly comprises a plurality of guide wheels, the guide wheels are arranged in the same horizontal plane at intervals, the guide wheels are used for supporting the carrier plate, the clamping assembly comprises at least two clamping pieces, and the at least two clamping pieces can move oppositely in the horizontal direction at the same time so as to clamp the carrier plate in a horizontal centering mode or move oppositely so as to be separated from the carrier plate; when the clamping assembly clamps the carrier plate, the lifting assembly can lift the carrier plate in the vertical direction. When the clamping assembly is separated from the carrier plate, the supporting assembly can move the carrier plate in the horizontal direction. According to the carrier plate lifting device, the movement stability of the carrier plate can be improved, a silicon wafer is prevented from sliding and fragmenting, and the product yield and the production efficiency of vapor deposition equipment are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a carrier lifting device and a vapor deposition equipment. Background Technology

[0002] In plate-type PVD (Physical Vapor Deposition) equipment, the finished silicon wafers are carried by a carrier plate, which is transported via a lifting device to a reflow unit below the process chamber for the next process. The carrier plate first moves horizontally from the process chamber into the lifting device, then descends to the bottom of the lifting device and moves horizontally into the reflow unit. Existing technology provides a lifting device with multiple rollers. The carrier plate is placed on the rollers and moves horizontally or vertically with the rollers as they rotate. During the lifting process, the rollers have poor support stability, leading to unstable movement and tilting of the carrier plate. This not only affects the positional accuracy of the silicon wafers but can also cause wafer slippage and breakage, impacting product yield and reducing production efficiency. Utility Model Content

[0003] One objective of this invention is to provide a carrier plate lifting device that can solve the problems of unstable carrier plate movement and tilting during the lifting process of existing lifting devices, which can lead to problems such as silicon wafer slippage and breakage.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A carrier plate lifting device is provided for transferring a carrier plate between a reflux device and a reaction chamber. The carrier plate is used to support silicon wafers. The carrier plate lifting device includes a lifting assembly, a support assembly, and a clamping assembly. The support assembly includes multiple guide wheels spaced apart in the same horizontal plane, which support the carrier plate. The clamping assembly includes at least two clamping members, which can simultaneously move towards each other in the horizontal direction to horizontally center and clamp the carrier plate, or move away from each other to disengage from the carrier plate. When the clamping assembly clamps the carrier plate, the lifting assembly can lift the carrier plate vertically. When the clamping assembly disengages from the carrier plate, the support assembly can move the carrier plate horizontally.

[0006] In one embodiment, the carrier plate lifting device includes a bracket assembly, a support assembly and a clamping assembly disposed on the bracket assembly, the support assembly moves the carrier plate along the X direction, the clamping assembly clamps the carrier plate along the Y direction, and the guide wheel supports the carrier plate in the vertical direction, with the X direction, Y direction and vertical direction being mutually perpendicular to each other.

[0007] In one embodiment, a plurality of guide wheels are spaced apart along the Y direction on both sides of the support assembly to support the two ends of the carrier plate respectively; wherein, each side of the support assembly is provided with a plurality of guide wheels, and the plurality of guide wheels are spaced apart along the X direction.

[0008] In one embodiment, the support component further includes:

[0009] A first driving component, comprising a dual-axis motor and two transmission rods, wherein the two transmission rods are coaxially arranged and the dual-axis motor drives the two transmission rods to rotate in the same direction;

[0010] Two sets of synchronous belt mechanisms are respectively arranged on both sides of the bracket assembly. Each synchronous belt mechanism includes a synchronous belt, a drive pulley, and multiple transmission pulleys. The drive pulley is connected to the end of the transmission rod away from the dual-axis motor. The multiple transmission pulleys correspond one-to-one with the multiple guide pulleys. The transmission pulleys are connected to the guide pulleys and are coaxially arranged with the guide pulleys. The synchronous belt is fitted onto the transmission pulleys and the drive pulley to drive the multiple guide pulleys to rotate in the same direction.

[0011] In one embodiment, the clamping assembly includes a second driving member and an elastic member. The clamping assembly includes two clamping members symmetrically arranged on both sides of the second driving member. One end of each clamping member is connected to the output end of the second driving member. The second driving member simultaneously drives the two clamping members to move in opposite directions along the Y direction. The elastic member applies an elastic force to the two clamping members so that the two clamping members always have a tendency to move in opposite directions along the Y direction to abut against the carrier plate.

[0012] In one embodiment, the second driving member is a cylinder, the output end of which can reciprocate vertically. The clamping assembly further includes a support base, and the clamping member is horizontally reciprocatingly connected to the support base. The clamping member has a guide slope, which is set at an angle to the horizontal direction, and the two guide slopes are arranged opposite to each other. The output end simultaneously abuts against the two guide slopes, and the output end moves vertically to push the clamping member moving in the Y direction.

[0013] In one embodiment, the output end includes a piston rod and two rollers, the two rollers being rotatably connected to the piston rod, and the two rollers respectively rollingly abutting against the two guide ramps; and / or,

[0014] The clamping assembly includes two elastic elements, each corresponding to one of the two clamping members. One end of each elastic element is connected to the support base, and the other end is connected to the end of the clamping member away from the second driving member.

[0015] In one embodiment, the guide wheel includes a wheel body and a flexible buffer member, the flexible buffer member covering the outer side of the wheel body circumferentially, the flexible buffer member abutting against the carrier plate; and / or,

[0016] The carrier plate includes a first support portion and a second support portion, which are parallel to each other and spaced apart in the vertical direction. The support assembly also includes a plurality of support wheels, each support wheel having a support plane. The axial direction of the guide wheel is parallel to the support plane. The guide wheel abuts against and supports the first support portion, and the support plane abuts against and supports the second support portion.

[0017] In one embodiment, the carrier plate lifting device further includes a detection component. The carrier plate lifting device includes a support component, and a support component is disposed on the support component. The support component has a working position. When the support component moves the carrier plate to the working position in the X direction, the clamping component actuates to clamp the carrier plate.

[0018] The detection component includes at least two positioning sensors, which are spaced apart along the X direction on the support assembly. The positioning sensors are used to detect the distance between the carrier plate and the working position.

[0019] Another objective of this invention is to provide a vapor deposition equipment with a carrier plate lifting device that can solve the problems of unstable carrier plate movement and tilting during the lifting process of existing lifting devices, which can lead to problems such as silicon wafer slippage and breakage, thereby improving the product yield and production efficiency of the vapor deposition equipment.

[0020] To achieve this objective, the present invention employs the following technical solution in another aspect:

[0021] Provide vapor deposition equipment, including a carrier plate lifting device as described above.

[0022] The beneficial effects of this utility model are:

[0023] The carrier plate lifting device provided by this utility model includes a support assembly and a clamping assembly. The support assembly includes multiple guide wheels spaced apart in the same horizontal plane. The guide wheels support the carrier plate. The support assembly can move the carrier plate horizontally to transfer it from the reaction chamber to the carrier plate lifting device, or to transfer the carrier plate on the carrier plate lifting device into the recirculation device. The clamping assembly includes at least two clamping members. The at least two clamping members can move simultaneously in opposite directions in the horizontal direction to horizontally center and clamp the carrier plate, or move away from each other to detach from the carrier plate. The centering and clamping of the at least two clamping members ensures that the position of the carrier plate will not change during the clamping process, thus avoiding affecting the positional accuracy of the silicon wafer. When the clamping assembly clamps the carrier plate, the lifting assembly can lift the carrier plate vertically; when the clamping assembly detaches from the carrier plate, the support assembly can move the carrier plate horizontally. During the lifting and lowering process, the guide wheels provide vertical support, and the clamping components clamp and limit the position of the carrier in the horizontal plane, ensuring the positional accuracy of the carrier, improving the stability of the carrier during lifting and lowering, avoiding carrier shaking or tilting, and thus preventing silicon wafers from sliding or breaking.

[0024] The vapor deposition equipment provided by this utility model includes the aforementioned carrier plate lifting device. The carrier plate lifting device can improve the safety and reliability of the carrier plate carrying the silicon wafer, avoid affecting the product yield, and improve the production efficiency of the vapor deposition equipment. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of the carrier plate lifting device provided in this embodiment of the utility model;

[0026] Figure 2 This is a partial structural schematic diagram of the carrier plate lifting device provided in this embodiment of the utility model;

[0027] Figure 3 yes Figure 2 A schematic diagram of the structure from another perspective;

[0028] Figure 4 yes Figure 3 A magnified schematic diagram of a portion of the structure in section A.

[0029] Figure 5 yes Figure 3 Enlarged schematic diagram of a local structure in section B;

[0030] Figure 6 This is a schematic diagram of the clamping assembly provided in an embodiment of the present invention from one perspective;

[0031] Figure 7 yes Figure 2 A schematic diagram of the structure from a third-person perspective.

[0032] In the picture:

[0033] 1. Support assembly; 11. Guide wheel; 111. Wheel body; 112. Flexible buffer; 12. Support wheel; 121. Support plane; 13. First drive component; 131. Dual-axis motor; 132. Transmission rod; 14. Synchronous belt mechanism; 141. Synchronous belt; 143. Transmission wheel; 144. Tensioner wheel;

[0034] 2. Clamping assembly; 21. Clamping element; 211. Guide ramp; 22. Second drive element; 221. Roller; 23. Elastic element; 24. Support base;

[0035] 3. Bracket assembly;

[0036] 4. Detection components; 41. First positioning sensor; 42. Second positioning sensor; 43. Third positioning sensor; 44. Fourth positioning sensor;

[0037] 5. Lifting assembly; 51. Lifting motor; 52. Lifting lead screw. Detailed Implementation

[0038] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0039] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0041] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0042] like Figures 1 to 6 As shown, this embodiment first provides a carrier plate lifting device. The carrier plate lifting device is used to move a carrier plate (not shown in the figure) horizontally and vertically between the reflow device and the reaction chamber. The carrier plate carries silicon wafers, allowing the wafers to flow between different production stations. The carrier plate lifting device is equipped with a lifting assembly 5, which realizes the lifting and lowering of the carrier plate. The carrier plate carrying the reacted silicon wafers is moved horizontally from the reaction chamber into the carrier plate lifting device. The carrier plate lifting device, through the lifting assembly 5, lowers the carrier plate to align it with the reflow device, and then the carrier plate is moved horizontally into the reflow device.

[0043] The carrier plate lifting device includes a support assembly 1 and a clamping assembly 2. The support assembly 1 includes multiple guide wheels 11, which are spaced apart in the same horizontal plane. The guide wheels 11 support the carrier plate. The support assembly 1 can move the carrier plate horizontally to transfer it from the reaction chamber to the carrier plate lifting device, or to transfer the carrier plate on the carrier plate lifting device into the recirculation device. The clamping assembly 2 includes at least two clamping members 21, which can move simultaneously in opposite directions in the horizontal direction to horizontally center and clamp the carrier plate, or move away from each other to disengage from the carrier plate. The centering and clamping of the at least two clamping members 21 ensures that the position of the carrier plate will not change during the clamping process, thus avoiding affecting the positional accuracy of the silicon wafer. When the clamping assembly 2 clamps the carrier plate, the lifting assembly 5 can lift the carrier plate vertically; when the clamping assembly 2 disengages from the carrier plate, the support assembly 1 can move the carrier plate horizontally. During the lifting and lowering process of the carrier plate, the guide roller 11 provides support in the vertical direction, and the clamping component 2 clamps and limits it in the horizontal plane to ensure the positional accuracy of the carrier plate, improve the stability of the carrier plate during the lifting and lowering process, avoid the carrier plate shaking or tilting, and thus prevent the silicon wafer from sliding or breaking, improve the safety and reliability of the carrier plate carrying the silicon wafer, avoid affecting the product yield, and improve the production efficiency of the vapor deposition equipment.

[0044] The carrier plate lifting device includes a bracket assembly 3, a support assembly 1, and a clamping assembly 2 disposed on the bracket assembly 3. The support assembly 1 moves the carrier plate along the X direction, and the clamping assembly 2 clamps the carrier plate along the Y direction, avoiding interference between the structure and movement of the support assembly 1 and the clamping assembly 2. The guide wheel 11 supports the carrier plate in the vertical direction, and the X direction, Y direction, and vertical direction are mutually perpendicular.

[0045] The lifting assembly 5 includes a lifting motor 51 and two lifting screws 52 disposed on both sides of the carrier plate. Driven by the dual-axis lifting motor 51, the two lifting screws 52 rotate simultaneously, causing the two ends of the support assembly 3 to rise and fall in the vertical direction.

[0046] Multiple guide wheels 11 are spaced apart along the Y direction on both sides of the support assembly 3 to support the two ends of the carrier plate respectively. Each side of the support assembly 3 is provided with multiple guide wheels 11, which are spaced apart along the X direction. The multiple guide wheels 11 provide multi-point support to the carrier plate in the horizontal plane, maintaining the carrier plate's horizontal state and preventing it from tilting during horizontal movement.

[0047] Support assembly 1 also includes a first drive component 13 and two sets of synchronous belt mechanisms 14. The first drive component 13 includes a dual-axis motor 131 and two transmission rods 132, which are coaxially arranged. The dual-axis motor 131 drives the two transmission rods 132 to rotate in the same direction, such as... Figure 2 As shown, two sets of synchronous belt mechanisms 14 are respectively disposed on both sides of the support assembly 3. Each synchronous belt mechanism 14 includes a synchronous belt 141, a drive pulley, and multiple transmission pulleys 143. The drive pulley is connected to the end of the transmission rod 132 away from the dual-axis motor 131. Multiple transmission pulleys 143 correspond one-to-one with multiple guide pulleys 11. The transmission pulley 143 is connected to and coaxially arranged with the guide pulley 11. The synchronous belt 141 is fitted onto the transmission pulley 143 and the drive pulley to drive the multiple guide pulleys 11 to rotate in the same direction. In one embodiment, the multiple synchronous belt mechanisms 14 have multiple synchronous belts 141. One of the synchronous belts 141 is fitted onto the drive pulley and one transmission pulley 143; the remaining synchronous belts 141 are fitted onto two transmission pulleys 143, thus forming multiple sets of synchronous belts. Power transmission is achieved between adjacent sets of synchronous belts on the same side, improving the consistency of the rotational speed of the multiple guide pulleys 11 and thus enhancing the motion stability of the carrier plate. This embodiment does not limit the number of synchronous belts 141, transmission pulleys 143, and guide pulleys 11.

[0048] The synchronous belt mechanism 14 also includes a tensioning pulley 144, which is used to tension the synchronous belt 141, which is fitted onto the outside of the drive pulley 143 and the driving pulley, such as... Figure 3 and Figure 4 As shown.

[0049] The clamping assembly 2 also includes a second driving member 22 and an elastic member 23. The clamping assembly 2 includes two clamping members 21, symmetrically arranged on both sides of the second driving member 22. Since the carrier plate has a certain thickness, each clamping member 21 includes a plate-like member extending vertically to abut against the side of the carrier plate, increasing the clamping area. One end of each clamping member 21 is drive-connected to the output end of the second driving member 22. The second driving member 22 simultaneously drives the two clamping members 21 to move in opposite directions along the Y direction. The elastic member 23 applies an elastic force to the two clamping members 21, ensuring that the two clamping members 21 always have a tendency to move towards each other along the Y direction to abut against the carrier plate. The elasticity of the elastic member 23 makes the clamping force of the clamping assembly 2 an elastic force, ensuring clamping reliability while preventing excessive clamping force from damaging the carrier plate. Moreover, through the cooperation of the elastic member 23 and the second driving member 22, only one power component is needed to achieve the opposite and backward movements of the two clamping members 21, simplifying the structure.

[0050] The second driving component 22 is a cylinder, and the output end of the cylinder can reciprocate vertically. The clamping assembly 2 also includes a support base 24, and the clamping member 21 is horizontally reciprocatingly connected to the support base 24. The clamping member 21 has a guide ramp 211, which is set at an angle to the horizontal direction, and the two guide ramps 211 are arranged opposite to each other. The output end simultaneously abuts against the two guide ramps 211, and the output end moves vertically to push the clamping member 21 to move in the Y direction. In one embodiment, a guide rail structure is provided between the clamping member 21 and the support base 24 to guide the horizontal movement of the clamping member 21.

[0051] The output end of the cylinder includes a piston rod and two rollers 221. The two rollers 221 are rotatably connected to the piston rod, and the two rollers 221 roll against two guide inclined surfaces 211 respectively, thereby converting the vertical movement of the cylinder into the horizontal movement of the clamping member 21. Figure 3 and Figure 5 As shown.

[0052] Specifically, the clamping assembly 2 includes two elastic elements 23, each corresponding to one of the two clamping members 21. One end of each elastic element 23 is connected to the support base 24, and the other end is connected to the end of the clamping member 21 away from the second driving member 22. In one embodiment, to increase the reliability of the elastic elements 23 pushing the clamping member 21, each clamping member 21 is provided with two elastic elements 23, which are spaced apart along the X direction.

[0053] The guide roller 11 includes a roller body 111 and a flexible buffer 112. The flexible buffer 112 covers the outer side of the roller body 111 circumferentially and abuts against the carrier plate. Due to the flexibility of the flexible buffer 112, when the weight of the carrier plate acts on the guide roller 11, the flexible buffer 112 is compressed and deformed, which increases the contact area between the buffer and the carrier plate and provides motion cushioning for the carrier plate, reducing the risk of carrier plate swaying, further improving the stability of the carrier plate, and the safety and reliability of carrying the silicon wafer. The flexible buffer 112 may use multiple sealing rings, fitted on the outer periphery of the roller body 111.

[0054] The carrier plate includes a first support portion and a second support portion, which are parallel to each other and spaced apart in the vertical direction. The first and second support portions are two parallel planes at different positions on the carrier plate, and their vertical heights are different. The support assembly 1 also includes multiple support wheels 12, each with a support plane 121. The axial direction of guide wheels 11 is parallel to the support plane 121. Guide wheels 11 abut against the first support portion, and support plane 121 abut against the second support portion. A surface contact support is formed between the support wheels 12 and the carrier plate. Furthermore, the support wheels 12 and guide wheels 11 provide vertical support to the carrier plate at different heights, resulting in more support points and reducing the risk of carrier plate tilting.

[0055] The support assembly 3 has a working position. When the support assembly 1 moves the carrier plate to the working position along the X direction, the clamping assembly 2 actuates to clamp the carrier plate, and then the carrier plate can be raised or lowered. To ensure the positional stability of the carrier plate when it is translated to the working position, the carrier plate raising and lowering device also includes a detection assembly 4. The detection assembly 4 includes at least two positioning sensors, which are spaced apart along the X direction on the support assembly 3. The positioning sensors are used to detect the distance of the carrier plate relative to the working position. The support assembly 3 forms a stable support frame structure. This embodiment does not limit the specific structure of the support assembly 3. The specific structure and detection principle of the positioning sensors can be set with reference to the prior art, and will not be described in detail here.

[0056] In one embodiment, the detection component 4 includes four positioning sensors, namely a first positioning sensor 41, a second positioning sensor 42, a third positioning sensor 43, and a fourth positioning sensor 44, as follows: Figure 7 As shown. Along the direction in which the carrier plate enters the support assembly 3, a first positioning sensor 41, a second positioning sensor 42, a third positioning sensor 43, and a fourth positioning sensor 44 are sequentially arranged. The first positioning sensor 41 is used to detect the carrier plate entering the support assembly 3, and the fourth positioning sensor 44 is used to detect the carrier plate reaching the working position. The second positioning sensor 42 and the third positioning sensor 43 adjust the rotational speed of the first drive member 13 by detecting the distance of the carrier plate relative to the working position.

[0057] Specifically, the rotational speed of the first drive unit 13 is adjustable. When the first positioning sensor 41 detects that the carrier plate has entered the support assembly 3, the first drive unit 13 is activated, and multiple guide wheels 11 begin to rotate to move the carrier plate horizontally. When the second positioning sensor 42 detects the carrier plate, the rotational speed of the first drive unit 13 increases, increasing the speed at which the carrier plate moves along the X direction. Until the third positioning sensor 43 detects the carrier plate, the rotational speed of the first drive unit 13 begins to decrease, reducing the speed at which the carrier plate moves. Finally, when the fourth positioning sensor 44 detects the carrier plate, it indicates that the carrier plate has reached the working position, at which point the first drive unit 13 stops rotating to prevent the carrier plate from continuing to move. Through multiple detections by multiple positioning sensors, the rotational speed of the first drive unit 13 is controlled, and the start and stop of the carrier plate's movement are both gradual, preventing sudden changes in the carrier plate's motion state from causing the silicon wafer to slip.

[0058] This utility model embodiment further provides a vapor deposition apparatus, which includes the carrier plate lifting device from any of the above embodiments. The carrier plate lifting device includes a support assembly 1 and a clamping assembly 2. The support assembly 1 includes multiple guide wheels 11, which are spaced apart in the same horizontal plane. The guide wheels 11 are used to support the carrier plate. The support assembly 1 can move the carrier plate horizontally to transfer the carrier plate from the reaction chamber to the carrier plate lifting device, or to transfer the carrier plate on the carrier plate lifting device into the recirculation device. The clamping assembly 2 includes at least two clamping members 21, which can move simultaneously in opposite directions in the horizontal direction to horizontally center and clamp the carrier plate, or move away from each other to detach from the carrier plate. The centering and clamping of the at least two clamping members 21 ensures that the position of the carrier plate will not change during the clamping process, thus avoiding affecting the positional accuracy of the silicon wafer. When the clamping assembly 2 clamps the carrier plate, the lifting assembly 5 can lift the carrier plate vertically; when the clamping assembly 2 detaches from the carrier plate, the support assembly 1 can move the carrier plate horizontally. During the lifting and lowering process of the carrier plate, the guide roller 11 provides support in the vertical direction, and the clamping component 2 clamps and limits it in the horizontal plane to ensure the positional accuracy of the carrier plate, improve the stability of the carrier plate during the lifting and lowering process, avoid the carrier plate shaking or tilting, and thus prevent the silicon wafer from sliding or breaking, improve the safety and reliability of the carrier plate carrying the silicon wafer, avoid affecting the product yield, and improve the production efficiency of the vapor deposition equipment.

[0059] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A carrier plate lifting device for transferring a carrier plate between a reflux device and a reaction chamber, the carrier plate being used to support silicon wafers, the carrier plate lifting device comprising a lifting assembly (5), characterized in that, The carrier plate lifting device further includes a support assembly (1) and a clamping assembly (2). The support assembly (1) includes a plurality of guide wheels (11) which are spaced apart in the same horizontal plane. The guide wheels (11) are used to support the carrier plate. The clamping assembly (2) includes at least two clamping members (21). The at least two clamping members (21) can move simultaneously in opposite directions in the horizontal direction to clamp the carrier plate horizontally, or move away from each other to disengage from the carrier plate. When the clamping assembly (2) clamps the carrier plate, the lifting assembly (5) can lift the carrier plate vertically. When the clamping assembly (2) disengages from the carrier plate, the support assembly (1) can move the carrier plate horizontally.

2. The carrier lifting device according to claim 1, characterized in that, The carrier plate lifting device includes a bracket assembly (3), a support assembly (1) and a clamping assembly (2) disposed on the bracket assembly (3), the support assembly (1) moves the carrier plate along the X direction, the clamping assembly (2) clamps the carrier plate along the Y direction, and the guide wheel (11) supports the carrier plate in the vertical direction. The X direction, the Y direction and the vertical direction are perpendicular to each other.

3. The carrier plate lifting device according to claim 2, characterized in that, Multiple guide wheels (11) are spaced apart along the Y direction on both sides of the support assembly (3) to support the two ends of the carrier plate respectively; wherein, multiple guide wheels (11) are provided on each side of the support assembly (3), and the multiple guide wheels (11) are spaced apart along the X direction.

4. The carrier plate lifting device according to claim 3, characterized in that, The support component (1) also includes: The first driving component (13) includes a dual-axis motor (131) and two transmission rods (132). The two transmission rods (132) are coaxially arranged, and the dual-axis motor (131) drives the two transmission rods (132) to rotate in the same direction. Two sets of synchronous belt mechanisms (14) are respectively disposed on both sides of the bracket assembly (3). The synchronous belt mechanism (14) includes a synchronous belt (141), a drive wheel and multiple transmission wheels (143). The drive wheel is connected to the end of the transmission rod (132) away from the dual-axis motor (131). The multiple transmission wheels (143) correspond one-to-one with the multiple guide wheels (11). The transmission wheels (143) are connected to the guide wheels (11) and are coaxially arranged with the guide wheels (11). The synchronous belt (141) is fitted onto the transmission wheels (143) and the drive wheel to drive the multiple guide wheels (11) to rotate in the same direction.

5. The carrier plate lifting device according to claim 2, characterized in that, The clamping assembly (2) further includes a second driving member (22) and an elastic member (23). The clamping assembly (2) includes two clamping members (21), which are symmetrically arranged on both sides of the second driving member (22). One end of each clamping member (21) is connected to the output end of the second driving member (22). The second driving member (22) simultaneously drives the two clamping members (21) to move in opposite directions along the Y direction. The elastic member (23) applies an elastic force to the two clamping members (21) so that the two clamping members (21) always have a tendency to move in opposite directions along the Y direction to abut against the carrier plate.

6. The carrier plate lifting device according to claim 5, characterized in that, The second driving component (22) is a cylinder, and the output end of the cylinder can reciprocate vertically. The clamping assembly (2) also includes a support base (24). The clamping component (21) is horizontally reciprocatingly connected to the support base (24). The clamping component (21) has a guide slope (211), which is set at an angle to the horizontal direction. The two guide slopes (211) are arranged opposite to each other. The output end simultaneously abuts against the two guide slopes (211). The output end moves vertically to push the clamping component (21) to move in the Y direction.

7. The carrier plate lifting device according to claim 6, characterized in that, The output end includes a piston rod and two rollers (221), the two rollers (221) being rotatably connected to the piston rod, and the two rollers (221) respectively rollingly abutting against the two guide ramps (211); and / or, The clamping assembly (2) includes two elastic elements (23), which correspond to two clamping members (21) respectively. One end of the elastic element (23) is connected to the support base (24), and the other end is connected to the end of the clamping member (21) away from the second driving member (22).

8. The carrier lifting device according to any one of claims 1-7, characterized in that, The guide wheel (11) includes a wheel body (111) and a flexible buffer (112), the flexible buffer (112) covering the outer side of the wheel body (111) circumferentially, and the flexible buffer (112) abutting against the carrier plate; and / or, The carrier plate includes a first support portion and a second support portion, which are parallel to each other and spaced apart in the vertical direction. The support assembly (1) also includes a plurality of support wheels (12), each support wheel (12) having a support plane (121). The axial direction of the guide wheel (11) is parallel to the support plane (121). The guide wheel (11) abuts against the first support portion, and the support plane (121) abuts against the second support portion.

9. The carrier lifting device according to any one of claims 1-7, characterized in that, The carrier plate lifting device further includes a detection component (4), the carrier plate lifting device includes a bracket component (3), the support component (1) is disposed on the bracket component (3), the bracket component (3) has a working position, when the support component (1) moves the carrier plate to the working position in the X direction, the clamping component (2) actuates to clamp the carrier plate; The detection component (4) includes at least two positioning sensors, which are spaced apart along the X direction on the support component (3). The positioning sensors are used to detect the distance between the carrier plate and the working position.

10. A vapor deposition apparatus, characterized in that, Includes the carrier lifting device as described in any one of claims 1-9.

Images