Hollow mandrel cooling water circulation device

Abstract

The hollow mandrel cooling water circulation device comprises a fixing unit and a circulation unit which abut against each other, the circulation unit comprises a middle ceramic ring, the middle ceramic ring is arranged on the outer side of a mandrel in a sleeved mode, and a third through hole of the middle ceramic ring is communicated with a first circulation channel of the mandrel; the front anti-overflow assembly is arranged on the outer side of the central spindle in a sleeving mode, and the front anti-overflow assembly is arranged at one end of the middle ceramic ring; the rear anti-overflow assembly is arranged on the outer side of the central spindle in a sleeving mode, and the rear anti-overflow assembly is arranged at the other end of the middle ceramic ring; and the contact surfaces of the front anti-overflow assembly, the rear anti-overflow assembly and the middle ceramic ring are mirror surfaces. The hollow mandrel cooling water circulation device thoroughly solves the problems that multiple water pipes are complex and easy to leak during cooling of a rotating shaft of vacuum equipment, realizes zero leakage of a cooling medium while ensuring synchronous rotation of a shaft body, remarkably improves the reliability of a system, simplifies the maintenance process, and is suitable for long-term stable operation of high-rotating-speed vacuum equipment.

Description

Technical Field

[0001] This invention belongs to the field of magnetic fluid sealing technology, specifically a hollow mandrel cooling water circulation device. Background Technology

[0002] In recent years, the development of vacuum equipment both domestically and internationally has been rapid. Magnetohydrodynamic (MHD) seals have been widely applied in many rotary sealing devices, such as those used in vacuum equipment like single-crystal silicon furnaces, vacuum brazing furnaces, vacuum melting furnaces, chemical vapor deposition, ion plating, and liquid crystal regeneration equipment, as well as in low-temperature, high-pressure equipment and equipment with stringent environmental requirements. This improves product quality and yields significant economic benefits. However, existing products often require multiple cooling water lines for cooling the vacuum equipment within the cavity. Furthermore, since the equipment needs to rotate synchronously with the shaft, the cooling pipe design is complex, prone to leakage, and can damage the vacuum equipment. Utility Model Content

[0003] In view of the deficiencies in the existing technology, the purpose of this utility model is to provide a hollow mandrel cooling water circulation device that is not prone to leakage.

[0004] To solve the above-mentioned technical problems, the present invention provides a hollow mandrel cooling water circulation device, comprising a fixed unit and a circulation unit that abut against each other, wherein...

[0005] The loop unit includes:

[0006] A middle ceramic ring is sleeved on the outside of the mandrel, and the third through hole of the middle ceramic ring is connected to the first circulation channel of the mandrel;

[0007] A front anti-overflow assembly, which is sleeved on the outside of the mandrel and disposed at one end of the middle ceramic ring;

[0008] A rear anti-overflow assembly, which is sleeved on the outside of the mandrel and disposed at the other end of the middle ceramic ring;

[0009] The contact surfaces of the front anti-overflow component, the rear anti-overflow component, and the middle ceramic ring are mirror-like.

[0010] The front spill prevention component includes:

[0011] A front ceramic ring is sleeved on the outside of the mandrel and disposed at one end of the middle ceramic ring; the contact surface between the front ceramic ring and the middle ceramic ring is a mirror surface.

[0012] A front cover is fitted onto the outside of the spindle, and a front spring is provided between the front cover and the front ceramic ring.

[0013] The rear spill prevention component includes:

[0014] A rear ceramic ring is sleeved on the outside of the mandrel and located at the other end of the middle ceramic ring; the contact surface between the rear ceramic ring and the middle ceramic ring is mirror-like.

[0015] The outer casing is fitted onto the outside of the mandrel, and a rear spring is provided between the outer casing and the rear ceramic ring;

[0016] A fourth through hole and a fifth through hole are provided on the outer casing; wherein

[0017] The fourth through hole is connected to the third through hole, and the fifth through hole is connected to the second circulation channel of the mandrel.

[0018] The fixing unit includes:

[0019] A front bearing and a rear bearing, wherein the front bearing and the rear bearing are respectively sleeved on both sides of the mandrel step;

[0020] A bearing mounting tube, which is sleeved on the outside of the front bearing and the rear bearing;

[0021] A sealing ring is sleeved on the outside of the mandrel and is located between the rear bearing and the bearing mounting tube.

[0022] A front watertight spacer is provided between the front cover and the bearing mounting tube.

[0023] An axial sealing ring is provided between the sealing ring and the front ceramic ring.

[0024] A bearing top cover is also provided at the end of the bearing mounting tube.

[0025] A rear cover is also provided at the end of the outer casing; a sixth through hole is provided on the rear cover, the sixth through hole connecting the fifth through hole and the second circulation channel.

[0026] A rear watertight spacer is provided between the outer shell and the rear cover.

[0027] A spacer is also provided between the front bearing and the rear bearing, and the spacer is attached to the inner wall of the bearing mounting tube.

[0028] This utility model of hollow mandrel cooling water circulation device completely solves the problem of complex and easily leaking multi-channel water pipes in the cooling of rotating shafts of vacuum equipment. It achieves zero leakage of cooling medium while ensuring synchronous rotation of the shaft, significantly improving system reliability and simplifying maintenance procedures. It is suitable for long-term stable operation of high-speed vacuum equipment. Attached Figure Description

[0029] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings.

[0030] Figure 1 This is a schematic diagram of the hollow mandrel cooling water circulation device of this utility model.

[0031] Explanation of reference numerals in the attached drawings of the hollow mandrel cooling water circulation device of this utility model:

[0032] Detailed Implementation

[0033] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the present invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0034] The embodiments described with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application. In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "several" or "more than" means two or more, unless otherwise explicitly specified. In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances. In this application, unless otherwise expressly specified and limited, "above" or "below" a second feature can include direct contact between the first and second features, or it can include contact between the first and second features through another feature between them. Moreover, "above," "over," and "on top" of a second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" of a second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] like Figure 1 As shown, the hollow mandrel cooling water circulation device of this utility model mainly consists of a mandrel 1, a bearing top cover 2, a bearing mounting tube 3, a front bearing 4, a rear bearing 23, a spacer 5, a sealing ring 6, an axial sealing ring 7, a front cover 8, a front ceramic ring 9, a middle ceramic ring 10, a rear ceramic ring 11, a front watertight spacer 12, a rear watertight spacer 13, a front spring 14, a rear spring 15, a housing 16, a rear cover 17, a first sealing ring 18, a second sealing ring 19, a third sealing ring 20, a fourth sealing ring 21, and a fifth sealing ring 22.

[0036] Specifically, it includes fixed units and loop units that abut against each other, wherein...

[0037] The loop unit includes:

[0038] The middle ceramic ring 10 is sleeved on the outside of the mandrel 1, and the third through hole 26 of the middle ceramic ring 10 is connected to the first circulation channel 30 of the mandrel 1.

[0039] The front anti-overflow component is sleeved on the outside of the mandrel 1 and is located at one end of the middle ceramic ring 10.

[0040] The rear anti-overflow component is sleeved on the outside of the mandrel 1 and is located at the other end of the middle ceramic ring 10.

[0041] The contact surfaces of the front and rear spill prevention components with the middle ceramic ring 10 are mirror-like.

[0042] The front spill prevention components include:

[0043] The front ceramic ring 9 is sleeved on the outside of the mandrel 1 and is located at one end of the middle ceramic ring 10; the contact surface between the front ceramic ring 9 and the middle ceramic ring 10 is a mirror surface.

[0044] The front cover 8 is sleeved on the outside of the spindle 1, and a front spring 14 is provided between the front cover 8 and the front ceramic ring 9.

[0045] The rear spill prevention components include:

[0046] The rear ceramic ring 11 is sleeved on the outside of the mandrel 1 and is located at the other end of the middle ceramic ring 10; the contact surface between the rear ceramic ring 11 and the middle ceramic ring 10 is a mirror surface.

[0047] The outer casing 16 is sleeved on the outside of the spindle 1, and a rear spring 15 is provided between the outer casing 16 and the rear ceramic ring 11.

[0048] The fourth through hole 27 and the fifth through hole 28 are provided on the outer casing 16; wherein

[0049] The fourth through hole 27 is connected to the third through hole 26, and the fifth through hole 28 is connected to the second circulation channel 31 of the mandrel 1.

[0050] The fixed unit includes:

[0051] The front bearing 4 and the rear bearing 23 are respectively sleeved on both sides of the mandrel step 34;

[0052] Bearing mounting tube 3 is sleeved on the outside of the front bearing 4 and the rear bearing 23;

[0053] The sealing ring 6 is sleeved on the outside of the spindle 1 and is located between the rear bearing 23 and the bearing mounting tube 3.

[0054] A front watertight spacer 12 is provided between the front cover 8 and the bearing mounting tube 3.

[0055] An axial sealing ring 7 is provided between the sealing ring 6 and the front ceramic ring 9.

[0056] A bearing top cover 2 is also provided at the end of the bearing mounting tube 3.

[0057] A rear cover 17 is also provided at the end of the outer casing 16; a sixth through hole 29 is provided on the rear cover 17, which connects the fifth through hole 28 and the second circulation channel 31.

[0058] A rear watertight seal 13 is provided between the outer casing 16 and the rear cover 17.

[0059] A spacer 5 is provided between the front bearing 4 and the rear bearing 23, and the spacer 5 is attached to the inner wall of the bearing mounting tube 3.

[0060] During operation, cooling water flows in from the fourth through hole 27, passes through the first circulation channel 30, flows out from the first through hole 24, flows into the equipment 35, circulates, flows in from the second through hole 25, enters the second circulation channel 31, passes through the sixth through hole 29, and flows out from the fifth through hole 28; the third sealing ring 20 prevents cooling water from entering the first cavity 32; the fourth sealing ring 21 maintains the cooling water circulation and prevents cooling water from overflowing into the second circulation channel 31; the contact surface between the front ceramic ring 9 and the middle ceramic ring 10 is mirror-finished, achieving a sealing effect through a water film, preventing cooling water from overflowing into the first cavity 32; the middle ceramic ring 9... The contact surface between the ceramic ring 10 and the rear ceramic ring 11 is mirror-like, achieving a sealing effect through a water film to prevent cooling water from overflowing into the second circulation channel 31; the axial sealing ring 7 is made of rubber and contacts the sealing ring 6 to prevent cooling water from overflowing from the spindle 1 into the second cavity 33; the first sealing ring 18 contacts and seals with the bearing mounting tube 3 to prevent cooling water from overflowing from the bearing mounting tube 3 into the second cavity 33; the front watertight spacer 12 is installed at the front cover 8 to prevent cooling water from overflowing into the outside of the product; the rear watertight spacer 13 is installed at the outer shell 16 to prevent cooling water from overflowing into the outside of the product.

[0061] The front spring 14 is connected to the front cover 8 and the front ceramic ring 9. The front ceramic ring 9 is pushed out to the right to ensure that the front ceramic ring 9 and the end face of the middle ceramic ring 10 are in close contact. The rear spring 15 is connected to the outer shell 16 and the rear ceramic ring 11. The rear ceramic ring 11 is pushed out to the left to ensure that the rear ceramic ring 11 and the end face of the middle ceramic ring 10 are in close contact.

[0062] The outer ring of the front bearing 4 contacts the bearing mounting tube 3, the left side contacts the bearing top cover 2, and the inner ring contacts the left side of the spindle step 34; the outer ring of the rear bearing 23 contacts the bearing mounting tube 3, the right side contacts the sealing ring 6, and the inner ring contacts the right side of the spindle step 34, preventing the two squares of the spindle 1 from moving around.

[0063] The specific embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the substantive content of this utility model. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A hollow mandrel cooling water circulation device, characterized in that, Includes fixed units and circulating units that abut against each other, wherein The loop unit includes: A middle ceramic ring is sleeved on the outside of the mandrel, and the third through hole of the middle ceramic ring is connected to the first circulation channel of the mandrel; A front anti-overflow assembly is sleeved on the outside of the mandrel and disposed at one end of the middle ceramic ring; A rear anti-overflow assembly, which is sleeved on the outside of the mandrel and disposed at the other end of the middle ceramic ring; The contact surfaces of the front anti-overflow component, the rear anti-overflow component, and the middle ceramic ring are mirror-like.

2. The hollow mandrel cooling water circulation device according to claim 1, characterized in that, The front spill prevention component includes: A front ceramic ring is sleeved on the outside of the mandrel and disposed at one end of the middle ceramic ring; the contact surface between the front ceramic ring and the middle ceramic ring is a mirror surface. A front cover is fitted onto the outside of the spindle, and a front spring is provided between the front cover and the front ceramic ring.

3. The hollow mandrel cooling water circulation device according to claim 2, characterized in that, The rear spill prevention component includes: A rear ceramic ring is sleeved on the outside of the mandrel and located at the other end of the middle ceramic ring; the contact surface between the rear ceramic ring and the middle ceramic ring is mirror-like. The outer casing is fitted onto the outside of the mandrel, and a rear spring is provided between the outer casing and the rear ceramic ring; A fourth through hole and a fifth through hole are provided on the outer casing; wherein The fourth through hole is connected to the third through hole, and the fifth through hole is connected to the second circulation channel of the mandrel.

4. The hollow mandrel cooling water circulation device according to claim 3, characterized in that, The fixing unit includes: A front bearing and a rear bearing, wherein the front bearing and the rear bearing are respectively sleeved on both sides of the mandrel step; A bearing mounting tube, which is sleeved on the outside of the front bearing and the rear bearing; A sealing ring is sleeved on the outside of the mandrel and is located between the rear bearing and the bearing mounting tube.

5. The hollow mandrel cooling water circulation device according to claim 4, characterized in that, A front watertight spacer is provided between the front cover and the bearing mounting tube.

6. The hollow mandrel cooling water circulation device according to claim 5, characterized in that, An axial sealing ring is provided between the sealing ring and the front ceramic ring.

7. The hollow mandrel cooling water circulation device according to claim 6, characterized in that, A bearing top cover is also provided at the end of the bearing mounting tube.

8. The hollow mandrel cooling water circulation device according to claim 7, characterized in that, A rear cover is also provided at the end of the outer casing; a sixth through hole is provided on the rear cover, the sixth through hole connecting the fifth through hole and the second circulation channel.

9. The hollow mandrel cooling water circulation device according to claim 8, characterized in that, A rear watertight spacer is provided between the outer shell and the rear cover.

10. The hollow mandrel cooling water circulation device according to claim 9, characterized in that, A spacer is also provided between the front bearing and the rear bearing, and the spacer is attached to the inner wall of the bearing mounting tube.

Images