Photomask substrate surface defect detection device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a photomask substrate surface defect detection device which comprises a main body, the top of the main body is fixedly connected with a two-dimensional translation assembly and a data acquisition and analysis assembly, and the top of the two-dimensional translation assembly is fixedly connected with a rotating assembly; according to the utility model, the first motor is used for driving the lead screw, so that the threaded block moves on the lead screw, and the second motor is used for driving the rotating wheel and the transmission wheel to rotate in a meshed manner, so that the precise two-dimensional translation and rotation movement of the photomask substrate on the carrying platform can be realized; the light source module comprises a plurality of light sources with different wavelengths, a proper light source wavelength can be selected according to detection requirements to enhance the contrast ratio of defects, the light source module is used for collecting images of the surface of the photomask substrate, and the optical imaging unit comprises a high-resolution camera and a plurality of switchable lenses. And the method can adapt to detection tasks with different sizes and resolution requirements.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a device for detecting surface defects on a photomask substrate. Background Technology

[0002] In semiconductor manufacturing, photomasks are critical process tools used to transfer circuit patterns onto silicon wafers. The surface quality of the photomask substrate directly affects the yield and performance of chip manufacturing. However, photomask substrates are prone to surface defects such as scratches, particles, and stains during manufacturing, storage, and use.

[0003] Traditional inspection methods typically rely on manual visual inspection or low-precision optical inspection equipment. Manual visual inspection requires operators to examine every area of ​​the photomask substrate individually, which is time-consuming and unsuitable for large-scale production. Furthermore, the human eye has limited resolution, making it difficult to detect minute defects, especially those at the micrometer or even nanometer scale, which are almost impossible to identify manually. Some optical inspection equipment can only detect specific types of defects, such as scratches or particles, and cannot effectively identify other types. Therefore, a surface defect detection device for photomasks is needed to address these issues. Utility Model Content

[0004] Traditional inspection methods typically rely on manual visual inspection or low-precision optical inspection equipment. Manual visual inspection requires operators to examine every area of ​​the photomask substrate one by one, which is time-consuming and difficult to meet the inspection needs of large-scale production. The resolution of the human eye is limited, making it difficult to detect tiny defects, especially those at the micrometer or even nanometer scale, which are almost impossible to identify with manual visual inspection. Some optical inspection equipment can only detect specific types of defects, such as scratches or particles, and cannot effectively identify other types of defects. The purpose of this invention is to provide a photomask substrate surface defect detection device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A surface defect detection device for a photomask substrate includes a main body, a two-dimensional translation component and a data acquisition and analysis component are fixedly connected to the top of the main body, and a rotation component is fixedly connected to the top of the two-dimensional translation component.

[0007] The two-dimensional translation component includes a support frame, a first motor is mounted on the side of the support frame, a threaded block is fixedly connected to the output end of the first motor, a lead screw is threadedly connected to the side of the threaded block, and a mounting plate is fixedly connected to the top of the lead screw.

[0008] The rotating assembly includes a carrier box, inside which a second motor is installed. The output end of the second motor is fixedly connected to a rotating wheel, and the side of the rotating wheel is meshed with a transmission wheel. The inside of the transmission wheel is fixedly connected to a rotating rod, and the output end of the rotating rod is fixedly connected to a loading platform.

[0009] The data acquisition and analysis component includes a top frame, inside which a light source module and an optical imaging unit are installed.

[0010] As a preferred embodiment of this utility model, a slide rail is fixedly connected to the top of the support frame, and a slider is slidably connected to the top of the slide rail, with the slider being fixedly connected to the mounting plate.

[0011] As a preferred embodiment of this utility model, a first bearing seat is fixedly connected inside the support frame, and the threaded block extends into the interior of the first bearing seat.

[0012] As a preferred embodiment of this utility model, a second bearing seat is fixedly connected inside the bearing box, and the rotating rod extends into the interior of the second bearing seat.

[0013] As a preferred embodiment of this utility model, the light source module includes multiple light sources of different wavelengths, and the optical imaging unit includes a high-resolution camera and multiple switchable lenses.

[0014] As a preferred embodiment of this utility model, a side plate is fixedly connected to the side of the top frame, and a controller is fixedly connected to the side of the side plate.

[0015] As a preferred embodiment of this utility model, a user interface is fixedly connected to the side of the controller, and physical buttons are provided on the side of the controller.

[0016] As a preferred embodiment of this utility model, the main body includes a base frame, a storage box is provided inside the base frame, a pad is fixedly connected to the bottom of the base frame, and control buttons are provided on the side of the base frame.

[0017] Compared with the prior art, the beneficial effects of this utility model are:

[0018] 1. In this utility model, by using a first motor to drive a lead screw to move a threaded block on it, and a second motor to drive a rotating wheel and a transmission wheel to mesh and rotate, it is possible to achieve precise two-dimensional translation and rotation of the photomask substrate on the carrier platform, so as to ensure that the entire substrate surface can be scanned uniformly. The precise motion control of the carrier platform and the automated detection process greatly improve the detection efficiency and shorten the detection time.

[0019] 2. In this utility model, the light source module can be used to provide uniform illumination light to light up the surface of the photomask substrate. The light source module includes multiple light sources of different wavelengths, and the appropriate light source wavelength can be selected according to the detection requirements to enhance the contrast of defects. It is used to acquire images of the surface of the photomask substrate. The optical imaging unit includes a high-resolution camera and multiple switchable lenses, which can adapt to detection tasks with different size and resolution requirements. By using a high-resolution camera and advanced image processing algorithms, it can detect tiny surface defects and improve detection accuracy. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the two-dimensional translation component structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the rotating component structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the data acquisition and analysis component structure of this utility model.

[0024] In the diagram: 1. Main body; 101. Base frame; 102. Storage box; 103. Pad; 104. Control button; 2. Two-dimensional translation component; 201. Bearing frame; 202. First motor; 203. Threaded block; 204. Lead screw; 205. Slider; 206. Slide rail; 207. Mounting plate; 208. First bearing seat; 3. Rotation component; 301. Bearing box; 302. Second motor; 303. Rotating wheel; 304. Transmission wheel; 305. Rotating rod; 306. Loading platform; 307. Second bearing seat; 4. Data acquisition and analysis component; 401. Top frame; 402. Light source module; 403. Optical imaging unit; 404. Side plate; 405. Controller; 406. User interface; 407. Physical button. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0026] For examples, please refer to Figures 1-4 This utility model provides a technical solution:

[0027] A surface defect detection device for a photomask substrate includes a main body 1. A two-dimensional translation component 2 and a data acquisition and analysis component 4 are fixedly connected to the top of the main body 1. A rotation component 3 is fixedly connected to the top of the two-dimensional translation component 2.

[0028] In this embodiment, as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the two-dimensional translation component 2 includes a support frame 201, a first motor 202 mounted on the side of the support frame 201, a threaded block 203 fixedly connected to the output end of the first motor 202, a lead screw 204 threadedly connected to the side of the threaded block 203, and a mounting plate 207 fixedly connected to the top of the lead screw 204. The rotation component 3 includes a support box 301, a second motor 302 mounted inside the support box 301, a rotating wheel 303 fixedly connected to the output end of the second motor 302, a transmission wheel 304 meshing with the side of the rotating wheel 303, a rotating rod 305 fixedly connected inside the transmission wheel 304, and a fixedly connected rod 305 to the output end of the rotating rod 305. The platform 306 and the data acquisition and analysis component 4 include a top frame 401, which houses a light source module 402 and an optical imaging unit 403. A first motor 202 drives a lead screw 204, causing a threaded block 203 to move on it. A second motor 302 drives a rotating wheel 303 and a transmission wheel 304 to mesh and rotate. This enables precise two-dimensional translation and rotation of the photomask substrate on the platform 306, ensuring uniform scanning of the entire substrate surface. The precise motion control and automated detection process of the platform 306 significantly improve detection efficiency and shorten detection time.

[0029] In this embodiment, as Figure 1 , Figure 3 and Figure 4As shown, a slide rail 206 is fixedly connected to the top of the support frame 201, and a slider 205 is slidably connected to the top of the slide rail 206. The slider 205 is fixedly connected to the mounting plate 207. A first bearing seat 208 is fixedly connected inside the support frame 201, and a threaded block 203 extends into the interior of the first bearing seat 208. A second bearing seat 307 is fixedly connected inside the support box 301, and a rotating rod 305 extends into the interior of the second bearing seat 307. The light source module 402 includes multiple light sources of different wavelengths. The optical imaging unit 403 includes a high-resolution camera and multiple switchable lenses. A side plate 404 is fixedly connected to the side of the top frame 401. A controller 405 is fixedly connected to the side of the side plate 404. A user interface 406 is fixedly connected to the side of the controller 405. The side of the device is equipped with physical buttons 407. The main body 1 includes a base frame 101, and a storage box 102 is provided inside the base frame 101. A pad 103 is fixedly connected to the bottom of the base frame 101. Control buttons 104 are provided on the side of the base frame 101. The light source module 402 can be used to provide uniform illumination light to illuminate the surface of the photomask substrate. The light source module 402 includes multiple light sources of different wavelengths. The appropriate light source wavelength can be selected according to the detection requirements to enhance the contrast of defects. It is used to acquire images of the surface of the photomask substrate. The optical imaging unit 403 includes a high-resolution camera and multiple switchable lenses, which can adapt to detection tasks with different size and resolution requirements. By using a high-resolution camera and advanced image processing algorithms, it can detect tiny surface defects and improve detection accuracy.

[0030] The working process of this utility model is as follows: When the photomask substrate surface defect detection device designed using this solution is working, the photomask substrate is placed on the carrier platform 306, and the detection process is started by the controller 405. The light source module 402 provides uniform illumination light to illuminate the surface of the photomask substrate. The carrier platform 306 performs two-dimensional translation and rotation movements according to a preset path. The optical imaging unit 403 acquires images of the surface of the photomask substrate during the movement. The controller 405 processes and analyzes the acquired images in real time, identifies surface defects, calculates their characteristic parameters, and displays the analysis results on the user interface 406.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for detecting surface defects on a photomask substrate, comprising a main body (1), characterized in that: The top of the main body (1) is fixedly connected to a two-dimensional translation component (2) and a data acquisition and analysis component (4), and the top of the two-dimensional translation component (2) is fixedly connected to a rotation component (3). The two-dimensional translation component (2) includes a support frame (201), a first motor (202) is mounted on the side of the support frame (201), a threaded block (203) is fixedly connected to the output end of the first motor (202), a lead screw (204) is threadedly connected to the side of the threaded block (203), and a mounting plate (207) is fixedly connected to the top of the lead screw (204). The rotating assembly (3) includes a carrier box (301), inside which a second motor (302) is installed. The output end of the second motor (302) is fixedly connected to a rotating wheel (303), and the side of the rotating wheel (303) is meshed with a transmission wheel (304). The inside of the transmission wheel (304) is fixedly connected to a rotating rod (305), and the output end of the rotating rod (305) is fixedly connected to a loading platform (306). The data acquisition and analysis component (4) includes a top frame (401), inside which a light source module (402) and an optical imaging unit (403) are installed.

2. The photomask substrate surface defect detection device according to claim 1, characterized in that, The top of the support frame (201) is fixedly connected to a slide rail (206), and the top of the slide rail (206) is slidably connected to a slider (205), which is fixedly connected to the mounting plate (207).

3. The photomask substrate surface defect detection device according to claim 1, characterized in that, The first bearing seat (208) is fixedly connected inside the support frame (201), and the threaded block (203) extends into the interior of the first bearing seat (208).

4. The device for detecting surface defects on a photomask substrate according to claim 1, characterized in that, The bearing housing (301) is fixedly connected to the interior of the bearing housing (307), and the rotating rod (305) extends into the interior of the second bearing housing (307).

5. The device for detecting surface defects on a photomask substrate according to claim 1, characterized in that, The light source module (402) includes multiple light sources of different wavelengths, and the optical imaging unit (403) includes a high-resolution camera and multiple switchable lenses.

6. The photomask substrate surface defect detection device according to claim 1, characterized in that, A side plate (404) is fixedly connected to the side of the top frame (401), and a controller (405) is fixedly connected to the side of the side plate (404).

7. The photomask substrate surface defect detection device according to claim 6, characterized in that, The controller (405) has a user interface (406) fixedly connected to its side, and a physical button (407) is provided on the side of the controller (405).

8. The photomask substrate surface defect detection device according to claim 3, characterized in that, The main body (1) includes a base frame (101), a storage box (102) is provided inside the base frame (101), a pad (103) is fixedly connected to the bottom of the base frame (101), and control buttons (104) are provided on the side of the base frame (101).

Images