Modular probe station

Abstract

The utility model discloses a modularized probe station, and relates to the technical field of measuring equipment, the structure of a probe station in the prior art is optimized and improved, and a vacuum corrugated pipe is arranged between an upper cover of a detection container and a basic container, so that the upper cover has the capability of flexibly moving as required on the premise that the upper cover is not detached; the upper cover is provided with a container stirring assembly used for pushing a bearing container in the detection container to transversely move according to needs. The bottom of the detection container is provided with a part which can accommodate the stack of bearing containers and can drive the stack of bearing containers to lift integrally; after a single sample is detected, the detection of other samples can be continued only by pushing the bearing container carrying the detected sample to a position far away from the center of the detection container without waiting for the temperature return of the equipment; the modularized probe station can process multiple samples without opening the upper cover, does not need to wait for temperature return of equipment, and has the technical effects of high detection efficiency and relatively low energy consumption.

Description

Technical Field

[0001] This utility model relates to the field of measuring equipment technology, and in particular to a modular probe station. Background Technology

[0002] In the field of next-generation information technology, such as in-situ analysis of semiconductor devices, quantum optics, quantum transport, and superconducting materials research, it is often necessary to perform nanoscale manipulation and characterization of materials and devices in low-temperature and / or vacuum environments. Currently, the mainstream testing system is a characterization system that combines a probe station with an optical microscope.

[0003] In existing technologies, a probe station includes a support platform, a detection container (also called a sample stage, sample chamber), probe manipulators, a camera assembly, a cooling system, and a vacuum assembly. The detection container is positioned on the support platform, forming a sealed cavity to hold the sample to be tested. Multiple probe manipulators carry multiple probes that contact the sample. During use, the vacuum assembly and cooling system are used to evacuate and cool the sample (vacuum pumps are used to evacuate the sample, and liquid helium is vaporized to absorb heat, thereby cooling the sample), thus fulfilling the measurement and detection requirements.

[0004] Existing probe stations suffer from the following drawbacks due to limitations in their structure, manufacturing and usage costs, and the need to meet temperature control requirements:

[0005] The testing container can only hold one sample at a time for testing. After each test, it is necessary to wait for the equipment to cool down before the top cover can be opened to remove the sample and put in a new sample for further processing. This not only results in low processing efficiency but also wastes a lot of energy.

[0006] Therefore, there is a need for a modular probe station that can process multiple samples without opening the top cover, does not require waiting for the equipment to warm up, has high detection efficiency, and consumes relatively little energy. Utility Model Content

[0007] This application provides a modular probe station, which solves the technical problems of existing probe stations that can only accommodate one sample at a time for testing, and that after each test, the device must wait for the temperature to return to normal before the top cover can be opened to remove the sample and place a new sample for further processing, resulting in low efficiency and high energy consumption. The modular probe station achieves the technical effect of processing multiple samples without opening the top cover, without waiting for the device to return to normal, with high detection efficiency and relatively low energy consumption.

[0008] This application provides a modular probe station, including a support platform, a detection container, and a probe manipulator;

[0009] The testing container includes a base container, a vacuum bellows, a top cover, a top cover fixing bracket for fixing the top cover, a bearing container, a container storage tube, a lifting and lowering module, and a container actuation assembly.

[0010] The basic container is a cylindrical container with an open top and a bottom hole;

[0011] The vacuum bellows is vertically arranged and its bottom end is fixed to the top edge of the base container;

[0012] The top cover is a horizontally placed rigid plate with an observation window near the center and a bottom edge that can be detachably fixed to the top of the vacuum bellows.

[0013] The supporting container is used to hold the samples to be tested. There are multiple of them. They are cylindrical containers with an open top and placed vertically, and the diameter is less than one-third of the inner bottom diameter of the base container.

[0014] The container storage tube is vertically positioned and closed at the bottom, inserted into and fixed in the bottom hole; the sample-carrying containers are arranged in a row inside the container storage tube;

[0015] The lifting module is a vertical telescopic rod structure used to push the carrying container up and down;

[0016] The container actuation assembly is used to actuate the topmost carrier container within the base container as needed, thereby exposing other carrier containers. The main body is a rigid rod positioned on the top cover.

[0017] Furthermore, the diameter of the internal space of the carrying container is more than 5 times the height of the internal space; the distance between the two edges of the top surface of the carrying container is more than 0.6 times the height of the internal space.

[0018] Furthermore, the side wall of the container storage tube near the top is fixed to the side wall of the bottom hole of the base container, and the top surface of the container storage tube is flat and at the same height as the inner bottom of the base container.

[0019] The inner diameter of the container storage tube is similar to the diameter of the carrying container, with a difference of less than 0.5 cm.

[0020] Furthermore, the container actuation assembly includes a handle lever, a floating lever, a built-in compression spring, and an actuation lever;

[0021] The handle is a rigid straight rod, fixed to the top cover near the observation window;

[0022] The bottom of the handle is provided with a cavity; due to the presence of the cavity, the handle is a rigid tube with a closed top.

[0023] The floating rod is a rigid straight rod that is inserted into and slidably positioned in the bottom cavity of the handle rod;

[0024] The built-in compression spring is a hard metal compression spring, positioned in the bottom cavity, with one end fixed inside the handle rod and the other end fixed to the top of the floating rod. When the floating rod moves upward, the built-in compression spring accumulates elastic potential energy.

[0025] The actuating lever is a horizontally placed rigid rod, with its top hinged to the bottom of the floating rod near the center. Its bottom always abuts against the inner bottom of the base container, and its length direction is the same as the radial direction of the container storage tube and perpendicular to the length direction of the floating rod.

[0026] Preferably, the length direction of the handle is perpendicular to the top surface of the cover.

[0027] Preferably, the angle between the length direction of the handle and the top surface of the cover is 70 to 90 degrees.

[0028] Preferably, the inner bottom of the container storage tube can also be detachably positioned with a rotating module;

[0029] The horizontally positioned turntable of the rotating module is either a manual or automatic turntable that rotates around its own axis.

[0030] The bottom of the lifting module is detachably fixed to the top of the rotating module.

[0031] Preferably, the bottom of the toggle lever is also provided with two abutment blocks;

[0032] The contact block is a rigid rectangular block or a vertically placed rigid column, and the two contact blocks are set near the two ends of the lever.

[0033] The height of the contact block is greater than the height of the carrying container, and the distance between the two contact blocks is greater than the bottom radius of the carrying container and less than the bottom diameter of the carrying container.

[0034] When the carrier container is pushed, the sides or side edges of the two contact blocks simultaneously come into contact with the side wall of the carrier container.

[0035] Preferably, it also includes a container storage module;

[0036] The inner wall of the container storage tube is provided with a guide groove for the vertical guide rod of the container storage module to pass through; the guide groove is a straight groove.

[0037] The container storage module is used to store and contain carrier containers carrying the tested samples. The bottom is detachably fixed to the top of the lifting module, and the top is used to support stacks of carrier containers.

[0038] The container storage module includes two vertical guide rods, a top support plate, and multiple storage trays;

[0039] The number of vertical guide rods is two, which are inserted into and slidably positioned in the two guide slots respectively;

[0040] The top support plate is a horizontally placed rigid circular plate, fixed between two vertical guide rods with its top surface at the same height as the top of the vertical guide rods, used to support stacked containers.

[0041] The storage tray is a horizontally placed rigid circular plate, fixed between two vertical guide rods and located at the bottom of the top tray, arranged in a row;

[0042] When the top cover is raised to its limit position, the built-in compression spring is in a relaxed state, and the bottom of the contact block is detached from the inner bottom of the base container and the distance from the inner bottom of the base container is greater than the height of the supporting container.

[0043] Preferably, the bottom edge of the carrying container is chamfered;

[0044] The top surface of the storage tray has a recess that matches the bottom surface and bottom chamfer of the container.

[0045] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages:

[0046] By optimizing and improving the structure of the probe station in the existing technology, a vacuum bellows is installed between the top cover of the detection container and the base container, enabling the top cover to move flexibly as needed without disassembly. A container actuation component is installed on the top cover to push the carrier container inside the detection container to move laterally as needed. A component is installed at the bottom of the detection container to accommodate a stack of carrier containers and to move the stack of carrier containers as a whole. After a single sample is tested, there is no need to wait for the equipment to cool down; simply push the carrier container containing the tested sample away from the center of the detection container to continue testing other samples. This effectively solves the technical problems of existing probe stations, which can only accommodate one sample at a time, require waiting for the equipment to cool down after each test before opening the top cover to remove the sample and put in a new sample for further processing, and are inefficient and energy-intensive. Thus, the modular probe station achieves the technical effect of processing multiple samples without opening the top cover, without waiting for the equipment to cool down, with high detection efficiency and relatively low energy consumption. Attached Figure Description

[0047] Figure 1 This is a schematic diagram of the external structure of the modular probe station of this application;

[0048] Figure 2 This is a schematic diagram showing the positional relationship of the various components of the modular probe station in this application;

[0049] Figure 3 A schematic diagram of the internal structure of the container for inspection;

[0050] Figure 4A schematic diagram showing the state of the container after it has been pushed.

[0051] Figure 5 A simplified diagram showing the positional relationship between the handle lever and the float lever;

[0052] Figure 6 A simplified diagram showing the positional relationships of the components inside the container;

[0053] Figure 7 This is a schematic diagram showing the layout of the guide slots on the container storage tube;

[0054] Figure 8 A schematic diagram illustrating the state of the container being pushed using a lever with a stop block at the bottom;

[0055] Figure 9 A schematic diagram of the external structure when a lever with a stop block at the bottom is used to push the carrying container;

[0056] Figure 10 A schematic diagram showing the positional relationship between the carrying container and the container storage module;

[0057] Figure 11 This is a structural diagram of the module for storing containers.

[0058] In the picture:

[0059] Support platform 100, testing container 200, base container 210, bottom hole 211, vacuum bellows 220, top cover 230, observation window 231, top cover fixing rod 240, combination plate 241, bearing container 250, container storage tube 260, guide groove 261, lifting module 270, rotation module 271, handle rod 281, bottom cavity 282, floating rod 283, built-in compression spring 284, toggle rod 285, abutment block 286, bottom wheel 287, container storage module 290, vertical guide rod 291, top support plate 292, storage tray 293, probe manipulator 300. Detailed Implementation

[0060] To facilitate understanding of this utility model, a more comprehensive description of this application will be given below with reference to the accompanying drawings, which show preferred embodiments of the utility model. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to enable a more thorough and complete understanding of the disclosure of this utility model.

[0061] It should be noted that the terms "vertical," "horizontal," "up," "down," "left," "right," and similar expressions used in this article are for illustrative purposes only and do not represent the only possible implementation.

[0062] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the description of this invention is for the purpose of describing particular embodiments only and is not intended to limit the invention; the term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0063] Example 1

[0064] like Figures 1 to 3 As shown, the modular probe station of this application includes a support stage 100, a detection container 200, a probe manipulator 300, a camera assembly, a cooling system, a vacuum assembly, a power assembly, and a control unit.

[0065] The support platform 100 is a rigid frame structure platform that serves as a load-bearing and support structure and is positioned on the ground.

[0066] The detection container 200 is positioned at the top of the support platform 100 near the center. It is a hollow cylindrical container and is used to provide a sealed detection cavity for the detection process.

[0067] The number of probe manipulators 300 is multiple, all positioned on the top of the support platform 100 and distributed around the perimeter of the detection container 200, used to control multiple probes to penetrate into the detection container 200 and move them to contact the sample in a timely manner to assist in the detection process.

[0068] The camera assembly is mounted on top of the detection container 200 and suspended in the air by a rigid bracket. It is used to acquire images inside the detection container 200 for operation. An optical lens is provided close to the camera assembly.

[0069] The cooling system is used to control the temperature of the cavity containing the sample; the vacuum assembly is used to control the vacuum level of the cavity containing the sample; the power assembly is used to provide power for the operation of each component; and the control unit is used to control the coordinated operation of each component of the modular probe station.

[0070] The support platform 100, probe manipulator 300, camera assembly, cooling system, vacuum assembly, power assembly, and control unit are all existing technologies and will not be described in detail here.

[0071] The detection container 200 includes a base container 210, a vacuum bellows 220, a top cover 230, a top cover fixing rod 240, a carrying container 250, a container storage tube 260, a lifting and lowering module 270, and a container actuation assembly.

[0072] The basic container 210 is a cylindrical container with an open top, a channel on the side wall for probes to enter, and a bottom hole 211 at the center of the bottom for positioning the container storage tube 260; the bottom hole 211 is a circular through hole.

[0073] The vacuum bellows 220 is vertically arranged (it is a high-sealing bellows), and its bottom end is fixed to the top edge of the base container 210. It is used to allow the upper cover 230 fixed on it to be adjusted as needed without being removed through its own deformation.

[0074] The top cover 230 is a horizontally placed rigid plate with a transparent observation window 231 near the center for observing the sample being tested, and a handle at the top for easy handling; the bottom of the top cover 230 near the edge can be detachably fixed to the top edge of the vacuum bellows 220.

[0075] like Figure 1 As shown, the upper cover fixing bracket 240 is a vertically placed rigid rod-shaped frame used to indirectly and detachably fix the upper cover 230 to the support platform 100. The upper cover fixing bracket 240 is fixed to the top surface of the support platform 100, with three or more brackets, positioned close to the base container 210 and located around its perimeter. A horizontally placed combined plate 241 is fixed to the top of the upper cover fixing bracket 240. The combined plate 241, near its edge, is rotatably connected to the upper cover fixing bracket 240 around its axis. On 240; vertical bolts are positioned on the combined plate 241, and the top of the cover 230 near the edge is provided with threads that match the bolts; in use, before testing, the vacuum bellows 220 is manually compressed to move the cover 230 down to a position below the combined plate 241, and then the combined plate 241 is rotated so that part of the combined plate 241 is rotated directly above the cover 230; thereafter, the cover 230 is fixed to the combined plate 241 with bolts, and thus indirectly fixed to the cover fixing bracket 240 and the support platform 100;

[0076] The supporting container 250 is used to hold the samples to be tested. There are multiple of them. They are cylindrical containers with an open top and placed vertically. The diameter of the internal space is more than 5 times the height of the internal space. The distance between the two edges of the top surface of the supporting container 250 is more than 0.6 times the height of the internal space.

[0077] The diameter of the bearing container 250 is less than one-third of the inner bottom diameter of the base container 210;

[0078] The container storage tube 260 is a vertical, closed-bottom rigid tube inserted and fixed in the bottom hole 211. The side wall near the top is fixed to the side wall of the bottom hole 211 of the base container 210. The top surface of the container storage tube 260 is flat and at the same height as the inner bottom of the base container 210. The inner diameter of the container storage tube 260 is similar to the diameter of the carrier container 250, with a difference of less than 0.5 cm. The carrier containers 250 containing samples are stacked in a row inside the container storage tube 260.

[0079] The lifting module 270 is a vertically mounted electric or manual telescopic rod located within the space enclosed by the container storage tube 260. It is directly or indirectly detachably fixed within the container storage tube 260, and can be extended or retracted as needed. Its modular design allows for disassembly and replacement as required. The carrying container 250 is placed on top of the lifting module 270. When the lifting module 270 extends or retracts, it drives the carrying container 250 on it to rise or fall.

[0080] like Figures 4 to 6 As shown, the container actuation component is used to actuate the carrier container 250 within the base container 210 as needed, pushing the uppermost carrier container 250 away from directly above the other carrier containers 250.

[0081] The container actuation assembly includes a handle 281, a floating rod 283, a built-in compression spring 284, and an actuation rod 285;

[0082] The handle 281 is a rigid straight rod that runs through and is fixed to the upper cover 230 near the observation window 231, so that the operator can hold it and adjust the position of the lever 285.

[0083] The bottom of the handle 281 has a cavity 282; due to the presence of the cavity 282, the handle 281 is a rigid tube with a closed top; the floating rod 283 is a rigid straight rod that is inserted into and slidably positioned in the cavity 282 of the handle 281; the built-in compression spring 284 is a rigid metal compression spring that is positioned in the cavity 282, with one end fixed in the handle 281 and the other end fixed to the top of the floating rod 283. When the floating rod 283 moves upward, the built-in compression spring 284 accumulates elastic potential energy; the actuating rod 285 is a horizontal rigid rod with its top hinged to the bottom of the floating rod 283 near the center, and its bottom always abutting against the inner bottom of the base container 210. Its length direction is the same as the radial direction of the container storage tube 260 and perpendicular to the length direction of the floating rod 283.

[0084] Preferably, the actuating lever 285 has a recess on one or both sides that matches the outer wall of the carrying container 250.

[0085] Preferably, the length direction of the handle 281 is perpendicular to the top surface of the upper cover 230.

[0086] Preferably, the angle between the length direction of the handle 281 and the top surface of the upper cover 230 is 70 to 90 degrees.

[0087] Furthermore, the bottom of the actuating lever 285 is provided with multiple wheels for reducing friction during movement. These wheels are horizontally positioned cylindrical wheels or bullseye balls.

[0088] Preferred, such as Figure 6 As shown, the inner bottom of the container storage tube 260 can also be detachably positioned with a rotating module 271; the horizontally placed turntable of the rotating module 271 is either a manual turntable that rotates around its own axis or an automatic turntable that rotates around its own axis under the coordinated control of the power component and the control unit; the bottom of the lifting module 270 is detachably fixed to the top of the rotating module 271 and can be removed as needed; before testing, the angle of the sample to be tested can be adjusted by controlling the rotation module 271 to facilitate sample arrangement and testing.

[0089] Both the lifting module 270 and the rotation module 271 are modular designs and can be selected and installed as needed.

[0090] When using the modular probe station of this application:

[0091] Before testing, the sample to be tested is placed in the carrier container 250. Multiple carrier containers 250 containing multiple samples are stacked together and placed on top of the lifting module 270. The lifting module 270 is then retracted, ensuring that all carrier containers 250 enter the container storage tube 260, with at least a quarter of the top carrier container 250 entering the storage tube 260. The components are then coordinated to cool and evacuate the inside of the test container 200 before testing the sample in the top carrier container 250. After testing, the vacuum inside the test container 200 is removed without waiting for heating. All probes are moved away from directly above the carrier containers 250, and the lifting module 270 is then operated. The movement causes all the carrier containers 250 to move upwards, so that the bottom surface of the topmost carrier container 250 is at the same height as the inner bottom of the base container 210. At the same time, the top cover 230 is removed from the fixation, and the lever 281 is used to control the actuation lever 285 to push the topmost base container 210 away from directly above the container storage tube 260. The container actuation assembly and the top cover 230 are reset and the top cover 230 is re-fixed. The carrier container 250 carrying the next sample to be tested is moved upwards to continue the testing operation. When the actuation lever 285 is used to push the carrier container 250 again, the pushing angle needs to be adjusted as needed to avoid the direction of the force between the two carrier containers 250 when their side walls collide being consistent with the direction of the pushing force.

[0092] The technical solutions described in the embodiments of this application have at least the following technical effects or advantages:

[0093] This invention solves the technical problems of existing technologies, such as the probe station being able to hold only one sample at a time for testing, and the need to wait for the equipment to warm up after each test before opening the top cover to remove the sample and put in a new sample for further processing, resulting in low efficiency and high energy consumption. It achieves the technical effect of modular probe station being able to process multiple samples without opening the top cover, without waiting for the equipment to warm up, with high detection efficiency and relatively low energy consumption.

[0094] Example 2

[0095] Considering the above embodiments, although multiple sample tests can be performed continuously by pushing the carrier container 250 carrying the tested sample away from directly above the lifting module 270, the number of carrier containers 250 that can be placed inside the carrier container 250 is relatively small, and the presence of carrier containers 250 scattered at the bottom of the base container 210 can also slightly hinder and limit the adjustment of the probe. To address these issues, this application embodiment optimizes and improves the structure of the container actuation component and the structure of the container storage tube 260 based on the above embodiments. Furthermore, a container storage module 290 is added to the above embodiments to push the carrier container 250 carrying the tested sample back into the container storage tube 260 for storage; specifically:

[0096] like Figures 7 to 9 As shown, the bottom of the actuating lever 285 is also provided with two abutment blocks 286; the abutment blocks 286 are rigid rectangular blocks or vertically placed rigid columns, and the two abutment blocks 286 are set near the two ends of the actuating lever 285; the height of the abutment blocks 286 is greater than the height of the carrying container 250, and the distance between the two abutment blocks 286 is greater than the bottom radius of the carrying container 250 and smaller than the bottom diameter of the carrying container 250; when the carrying container 250 is pushed, the sides or side edges of the two abutment blocks 286 simultaneously contact the side wall of the carrying container 250; due to the presence of the abutment blocks 286, the amplitude of the actuating lever 285 needs to move when pushed;

[0097] The container storage module 290 is used to store and accommodate the carrier container 250 containing the sample after testing. The bottom is detachably fixed to the top of the lifting module 270, and the top is used to support the stack of carrier containers 250. Under normal conditions, the container storage module 290 is located inside the container storage tube 260. When it is necessary to accommodate the carrier container 250 containing the sample after testing, the whole module moves upward and protrudes from the top opening of the container storage tube 260.

[0098] The inner wall of the container storage tube 260 is provided with a guide groove 261 for the vertical guide rod 291 of the container storage module 290 to pass through (to guide the movement of the vertical guide rod 291); the guide groove 261 is a straight groove, and the top and inner wall of the container storage tube 260 are provided with openings of the guide groove 261.

[0099] like Figure 10 and Figure 11 As shown, the container storage module 290 includes two vertical guide rods 291, a top support plate 292, and multiple storage trays 293;

[0100] The vertical guide rod 291 is a vertical rigid rod, and there are two of them. They are inserted into and slidably positioned in the two guide slots 261, respectively. They are used to support the top support plate 292 and the storage support plate 293, and also to guide the movement of the entire container storage module 290.

[0101] The top support plate 292 is a horizontally placed rigid circular plate, fixed between two vertical guide rods 291 and with its top surface at the same height as the top of the vertical guide rods 291, used to support stacked support containers 250.

[0102] The storage tray 293 is a horizontally placed rigid circular plate, fixed between two vertical guide rods 291 and located at the bottom of the top tray 292, arranged in a row, with the distance between them greater than the height of the carrying container 250.

[0103] When the upper cover 230 is raised to its limit position, the built-in compression spring 284 is in a relaxed state, and the bottom of the contact block 286 is detached from the inner bottom of the base container 210 and the distance from the inner bottom of the base container 210 is greater than twice the height of the carrying container 250, so that the actuating rod 285 can push the carrying container 250.

[0104] When using the modular probe station of this embodiment: when a new sample needs to be replaced for testing, firstly, by moving the top cover 230, the container 250 containing the sample to be tested is pushed or pushed away from directly above the container storage tube 260 using the container actuation component. Figure 8 Move A in the middle to Figure 8 (B) Then, control the lifting module 270 to lift the container storage module 290 upward, so that the storage tray 293 of one layer that does not support the carrier container 250 moves to a position equal to the inner bottom of the base container 210; use the container toggle component to push the carrier container 250 into the container storage module 290; then control the lifting module 270 to drive the container storage module 290 and the stack of carrier containers 250 downward, exposing only the carrier container 250 containing the sample to be tested.

[0105] Furthermore, the bottom of the contact block 286 is provided with a bottom wheel 287 to reduce friction; there are multiple bottom wheels 287, which are horizontally placed cylindrical wheels or bullseye balls.

[0106] Furthermore, the bottom edge of the carrying container 250 is chamfered; the top surface of the storage tray 293 is provided with a recess that matches the bottom surface and bottom chamfer of the carrying container 250, and the presence of the recess facilitates efficient and accurate storage of the carrying container 250.

[0107] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model. For those skilled in the art, various modifications and variations are possible with this utility model. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A modular probe station, comprising a support stage (100), a detection container (200), and a probe manipulator (300); characterized in that: The testing container (200) includes a base container (210), a vacuum bellows (220), a top cover (230), a top cover fixing bracket (240) for fixing the top cover (230), a carrying container (250), a container storage tube (260), a lifting module (270), and a container actuation assembly. The basic container (210) is a cylindrical container with an open top and a bottom hole (211) at the bottom; The vacuum bellows (220) is vertically arranged and its bottom end is fixed to the top edge of the base container (210); The top cover (230) is a horizontally placed rigid plate with an observation window (231) near the center and a bottom edge that can be detachably fixed to the top of the vacuum bellows (220). The carrier container (250) is used to hold the samples to be tested. There are multiple samples. It is a cylindrical container with an open top and placed vertically. Its diameter is less than one-third of the inner bottom diameter of the base container (210). The container storage tube (260) is vertically positioned and closed at the bottom, inserted into and fixed in the bottom hole (211); the sample-carrying containers (250) are arranged in a row inside the container storage tube (260); The lifting module (270) is a vertical telescopic rod structure used to push the carrying container (250) to move up and down; The container actuation assembly is used to actuate the topmost carrier container (250) inside the base container (210) as needed, thereby exposing other carrier containers (250), and the main body is a rigid rod positioned on the top cover (230).

2. The modular probe station as described in claim 1, characterized in that: The diameter of the internal space of the carrier container (250) is more than 5 times the height of the internal space; the distance between the two edges of the top surface of the carrier container (250) is more than 0.6 times the height of the internal space.

3. The modular probe station as described in claim 1, characterized in that: The container storage tube (260) is fixed to the side wall of the bottom hole (211) of the base container (210) near the top. The top surface of the container storage tube (260) is flat and is at the same height as the inner bottom of the base container (210). The inner diameter of the container storage tube (260) is similar to the diameter of the carrying container (250), with a difference of less than 0.5 cm.

4. The modular probe station as described in claim 1, characterized in that: The container actuation assembly includes a handle (281), a floating rod (283), a built-in compression spring (284), and an actuation rod (285); The handle rod (281) is a rigid straight rod, fixed on the upper cover (230) near the observation window (231); The bottom of the handle (281) is provided with a bottom cavity (282); due to the presence of the bottom cavity (282), the handle (281) is a rigid tube with a closed top. The floating rod (283) is a rigid straight rod that is inserted into and slidably positioned in the bottom cavity (282) of the handle rod (281); The built-in compression spring (284) is a hard metal compression spring, positioned in the bottom cavity (282), with one end fixed in the handle rod (281) and the other end fixed to the top of the floating rod (283). When the floating rod (283) moves upward, the built-in compression spring (284) accumulates elastic potential energy. The actuating lever (285) is a horizontal rigid rod with its top hinged to the bottom of the floating rod (283) near the center. Its bottom always abuts against the inner bottom of the base container (210). Its length direction is the same as the radial direction of the container storage tube (260) and perpendicular to the length direction of the floating rod (283).

5. The modular probe station as described in claim 4, characterized in that: The length direction of the handle rod (281) is perpendicular to the top surface of the cover (230).

6. The modular probe station as described in claim 4, characterized in that: The angle between the length direction of the handle (281) and the top surface of the cover (230) is 70 to 90 degrees.

7. The modular probe station as described in claim 1, characterized in that: The inner bottom of the container storage tube (260) can also be detachably positioned with a rotating module (271); The rotating module (271) has a horizontally placed turntable, which can be a manual or automatic turntable that rotates around its own axis. The bottom of the lifting module (270) is detachably fixed to the top of the rotating module (271).

8. The modular probe station as described in claim 4, characterized in that: The bottom of the toggle lever (285) is also provided with two abutment blocks (286); The abutment block (286) is a rigid rectangular block or a vertically placed rigid column, and the two abutment blocks (286) are set near the two ends of the lever (285); The height of the contact block (286) is greater than the height of the bearing container (250), and the distance between the two contact blocks (286) is greater than the bottom radius of the bearing container (250) and less than the bottom diameter of the bearing container (250). When the carrier container (250) is pushed, the sides or side edges of the two contact blocks (286) simultaneously come into contact with the side wall of the carrier container (250).

9. The modular probe station as described in claim 1 or 8, characterized in that: It also includes a container storage module (290); The inner wall of the container storage tube (260) is provided with a guide groove (261) for the vertical guide rod (291) of the container storage module (290) to pass through; the guide groove (261) is a straight groove; The container storage module (290) is used to store and contain the carrier container (250) containing the sample after testing. The bottom is detachably fixed to the top of the lifting module (270), and the top is used to support the stack of carrier containers (250). The container storage module (290) includes two vertical guide rods (291), a top support plate (292), and multiple storage trays (293); The number of vertical guide rods (291) is two, which are inserted into and slidably positioned in the two guide slots (261); The top support plate (292) is a horizontally placed rigid circular plate, fixed between two vertical guide rods (291) with its top surface at the same height as the top of the vertical guide rods (291), and is used to support stacked support containers (250). The storage tray (293) is a horizontally placed rigid circular plate, fixed between two vertically placed guide rods (291) and located at the bottom of the top tray (292), arranged in a row; When the top cover (230) is raised to its limit position, the built-in compression spring (284) is in a relaxed state, and the bottom of the contact block (286) is detached from the inner bottom of the base container (210) and the distance from the inner bottom of the base container (210) is greater than the height of the carrying container (250).

10. The modular probe station as described in claim 9, characterized in that: The bottom edge of the carrying container (250) is chamfered; The top surface of the storage tray (293) is provided with a recess that matches the bottom surface and bottom chamfer of the carrying container (250).

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