CL-LIBS-LA-ICP-MS combined multifunctional analyzer and analysis method

By combining an integrated multi-functional analyzer with CL, LA-ICP-MS and LIBS, the problem of accurately correlating structure and elemental distribution in zircon dating was solved, achieving efficient and accurate zircon micro-area dating analysis.

CN122084522APending Publication Date: 2026-05-26SHANGHAICHEMLABINSTRUMENTCO LTD
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Patent Information

Application Number
CN202610559941.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-04-27
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Existing zircon dating techniques suffer from problems such as difficulty in identifying isotope test points, positioning errors caused by switching between multiple instruments, and large and cumbersome equipment, making it difficult to achieve accurate correlation analysis of internal structure and elemental distribution.

Method used

An integrated multifunctional analyzer is used, combining cathodoluminescence detection (CL), laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS), and laser-induced breakdown spectroscopy (LIBS). Through a coaxial microscopic observation system and a triaxial nano-displacement sample stage, structural imaging, elemental distribution, and quantitative analysis are achieved simultaneously, eliminating positioning errors and improving analytical accuracy.

Benefits of technology

It achieves a precise correlation between structure and elemental distribution in zircon dating, improves detection efficiency and accuracy, simplifies optical path structure, and is suitable for high-throughput geochronology applications.

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Abstract

The invention discloses a CL-LIBS-LA-ICP-MS combined multifunctional analyzer. The CL-LIBS-LA-ICP-MS combined multifunctional analyzer comprises a laser light path module, an electronic excitation system, a spectrum detection module, a sample bin and a mass spectrum detection module, the laser light path module comprises a laser source, a light beam adjusting system, a scanning galvanometer and a coaxial microscopic observation system; the spectrum detection module comprises an optical signal collection end, an echelle grating spectrometer, a gating camera and a time sequence control module. On the other hand, the invention discloses an analysis method which comprises the following steps: setting a vacuum environment, and carrying out CL imaging scanning; selecting an LIBS (laser-induced breakdown spectroscopy) test area according to an image obtained by CL imaging scanning, and carrying out LIBS scanning; and selecting a third test area according to an LIBS scanning result, filling the sample bin with carrier gas, and carrying out laser ablation mass spectrometry detection. According to the method, the positioning error of transferring the sample among a plurality of instruments during technology combination is eliminated, the structure and composition information of the sample to be detected can be more comprehensively provided, and the detection efficiency of the whole method is further improved by screening the test range twice.
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