Wafer retaining ring gluing device

Abstract

The utility model discloses a gluing device for a wafer retaining ring. The gluing device comprises a box body, a gluing unit, a glue supply unit, a weighing unit and a visual inspection unit, the gluing unit and the weighing unit are located in the box body, and the gluing unit is communicated with the glue supply unit; the gluing unit comprises a three-axis movement assembly, a two-component screw pump metering valve, a static mixing pipe, a stop valve and a glue outlet needle head, the three-axis movement assembly has the X-direction movement function, the Y-direction movement function and the Z-direction movement function, and the two-component screw pump metering valve, the static mixing pipe, the stop valve and the glue outlet needle head are arranged in the Z direction; the static mixing pipe is arranged at the output end of the double-component screw pump metering valve, the glue outlet needle head is located under the static mixing pipe, the stop valve controls the glue outlet needle head, and the double-component screw pump metering valve is connected with the glue supply unit through a pipeline. According to the utility model, gluing and detection are combined, and transfer is not needed, so that the detection precision and the processing efficiency are improved, time and labor are saved, and meanwhile, the cost can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of adhesive coating equipment technology, specifically to an adhesive coating device for wafer retaining rings. Background Technology

[0002] During the processing of wafer retaining rings, they need to be coated with adhesive before inspection. Currently, two separate devices are generally used for this process: first, adhesive is applied, and then the rings are transferred to the inspection equipment for testing. This is not only time-consuming and labor-intensive, but also increases costs. Furthermore, the transfer process affects the accuracy of the inspection. Utility Model Content

[0003] The purpose of this invention is to provide a wafer retaining ring coating device to address the defects and shortcomings of the existing technology.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is: a wafer holding ring coating device, the innovation of which is: including a housing, a coating unit, a glue supply unit, a weighing unit, and a vision inspection unit; the coating unit and the weighing unit are located inside the housing, and the coating unit is connected to the glue supply unit; the coating unit includes a three-axis motion assembly, a two-component screw pump metering valve, a static mixing tube, a shut-off valve, and a glue dispensing needle; the three-axis motion assembly has XYZ three-directional motion functions; the two-component screw pump metering valve, the static mixing tube, the shut-off valve, and the glue dispensing needle are arranged in the Z direction; the output end of the two-component screw pump metering valve is provided with a static mixing tube; the glue dispensing needle is located directly below the static mixing tube; the shut-off valve controls the glue dispensing needle; the two-component screw pump metering valve is connected to the glue supply unit through a pipe; the vision inspection unit includes a vision inspection camera and an inspection device; the vision inspection camera is arranged on the top of the housing and directly above the weighing unit.

[0005] Furthermore, the glue supply unit includes a trolley, on which a control unit and a pair of feeding screw pumps are installed, and each feeding screw pump is equipped with a glue storage tank. The feeding screw pumps are driven by servo motors, and the feeding screw pumps are respectively connected to the metering valves of the two-component screw pumps.

[0006] Furthermore, the three-axis motion assembly includes multiple gantry supports arranged in a U-shape, with Y-axis servo linear guides and Y-axis auxiliary guides respectively installed on the left and right gantry supports. An X-axis servo linear guide is installed between the sliders of the Y-axis servo linear guide and the Y-axis auxiliary guide. A Z-axis servo linear guide is installed on the slider of the X-axis servo linear guide, and an adhesive application unit is installed on the slider of the Z-axis servo linear guide.

[0007] Furthermore, the weighing unit includes an electronic scale, with lifting cylinders installed at the four corners of the electronic scale, a tray placed on the electronic scale, the tray being raised and lowered under the action of the lifting cylinders, and limiting brackets installed at the four corners of the tray.

[0008] The beneficial effects of this utility model after adopting the above structure are as follows:

[0009] This invention combines adhesive application and testing, eliminating the need for transfer, thereby improving testing accuracy and processing efficiency, saving time and effort, and reducing costs. Attached Figure Description

[0010] Figure 1 This is the front view of the present invention;

[0011] Figure 2 The three-dimensional representation of this utility model Figure 1 ;

[0012] Figure 3 The three-dimensional representation of this utility model Figure 2 ;

[0013] Figure 4 This is a schematic diagram of the structure of a three-axis motion assembly.

[0014] Explanation of reference numerals in the attached figures:

[0015] 1. Housing; 2. Glue application unit; 21. Three-axis motion assembly; 211. Gantry bracket; 212. Y-axis servo linear guide; 213. Y-axis auxiliary guide; 214. X-axis servo linear guide; 215. Z-axis servo linear guide; 22. Two-component screw pump metering valve; 23. Static mixing tube; 24. Shut-off valve; 25. Glue dispensing needle; 3. Glue supply unit; 31. Trolley; 32. Control machine; 33. Feeding screw pump; 34. Glue storage tank; 4. Weighing unit; 41. Electronic scale; 42. Lifting cylinder; 43. Pallet; 44. Limit bracket; 5. Vision inspection unit; 51. Vision inspection camera; 52. Inspection equipment. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings.

[0017] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the present utility model and are not intended to limit the present utility model.

[0018] See Figure 1-3A wafer retaining ring coating device includes a housing 1, a coating unit 2, a glue supply unit 3, a weighing unit 4, and a vision inspection unit 5. The coating unit 2 and the weighing unit 4 are located inside the housing 1, and the coating unit 2 is connected to the glue supply unit 3. The coating unit 2 includes a three-axis motion assembly 21, a two-component screw pump metering valve 22, a static mixing tube 23, a shut-off valve 24, and a glue dispensing needle 25. The three-axis motion assembly 21 has XYZ three-directional motion functions. The two-component screw pump metering valve 22, the static mixing tube 23, the shut-off valve 24, and the glue dispensing needle 25 are all included. The mixing pipe 23, the shut-off valve 24, and the dispensing needle 25 are arranged in the Z direction. The output end of the two-component screw pump metering valve 22 is provided with a static mixing pipe 23. The dispensing needle 25 is located directly below the static mixing pipe 23. The shut-off valve 24 controls the dispensing needle 25. The two-component screw pump metering valve 22 is connected to the glue supply unit 3 through a pipe. The visual inspection unit 5 includes a visual inspection camera 51 and an inspection device 52. The visual inspection camera 51 is arranged on the top of the box and is located directly above the weighing unit 4. Specifically, the product is first placed manually on the weighing unit 4, where it is automatically weighed and the weight recorded. Then, the glue supply unit 3 is activated to deliver the coating to the two-component screw pump metering valve 22 for mixing. The coating is then applied through the static mixing tube 23 and the glue dispensing needle 25. The glue application unit 2 applies the coating evenly under the action of the three-axis motion component 21. After the coating is completed, the visual inspection unit 5 performs visual inspection to judge the coating effect and records the inspection data. Then, the weighing unit 4 performs a second weighing and records the data. At the same time, the detection system calculates the weight of the glue and judges whether the amount of glue applied is correct. After the coating is completed, the product is removed manually. The two-component screw pump metering valve 22 has a mixing head that combines two screw pumps. This mixing head can be easily integrated into a robotic arm or automated production line. The screw pump delivers viscous materials to the static mixer, which ensures the mixing ratio and accuracy of the materials, even in the case of rapid continuous feeding or rapid start-stop. The detection device 52 is equipped with an internal detection system.

[0019] In this embodiment, the glue supply unit 3 includes a trolley 31, on which a controller 32 and a pair of feeding screw pumps 33 are mounted. Each feeding screw pump 33 is equipped with a glue storage tank 34. The feeding screw pumps 34 are driven by servo motors and are connected to two-component screw pump metering valves 22. The glue in the glue storage tank 34 is transported to the two-component screw pump metering valves 22 by the feeding screw pumps 33, and the glue is mixed by the two-component screw pump metering valves 22 before being applied.

[0020] See Figure 4The three-axis motion assembly 21 includes multiple gantry supports 211 arranged in a U-shape. Y-axis servo linear guides 212 and Y-axis auxiliary guides 213 are respectively mounted on the left and right gantry supports 211. An X-axis servo linear guide 214 is positioned between the sliders of the Y-axis servo linear guide 212 and the Y-axis auxiliary guide 213. A Z-axis servo linear guide 215 is mounted on the slider of the X-axis servo linear guide 214, and a glue application unit 2 is mounted on the slider of the Z-axis servo linear guide 215. The glue application unit 2 moves in the XYZ directions along the Y-axis servo linear guide 212, X-axis servo linear guide 214, and Z-axis servo linear guide 215, thereby achieving the glue application function of the glue application unit 2. The use of servo motors ensures product stability during the production weighing process, reduces the complexity of the mechanical structure, and extends the equipment's lifespan.

[0021] In this embodiment, the weighing unit 4 includes an electronic scale 41. Lifting cylinders 42 are installed at the four corners of the electronic scale 41. A tray 43 is placed on the electronic scale 42, and the tray 43 is raised and lowered under the action of the lifting cylinders 42. Limiting brackets 44 are installed at the four corners of the tray 43. A product carrier is manufactured according to the product. After the product is placed in the carrier, the lifting cylinders drop, placing the carrier and the product together on the tray 43 for weighing. At this time, the product carrier only contacts the electronic scale 41, and the tray is detached from the lifting cylinders 42, ensuring accurate weighing data. To improve the weighing process, positioning holes are provided at the four corners of the tray 43, and positioning pins are provided at the end of the piston rod of the lifting cylinder 42. When the positioning pins are lifted, they are inserted into the positioning holes to guide the position and prevent deviation. When the tray 43 is lowered, the positioning pins disengage from the tray and do not contact it, ensuring accurate weighing data.

[0022] The above description is only used to illustrate the technical solution of this utility model and is not intended to limit it. Any other modifications or equivalent substitutions made by those skilled in the art to the technical solution of this utility model, as long as they do not depart from the spirit and scope of the technical solution of this utility model, should be covered within the scope of the claims of this utility model.

Claims

1. A wafer holding ring coating device, characterized in that: The system includes a housing, an adhesive application unit, an adhesive supply unit, a weighing unit, and a vision inspection unit. The adhesive application unit and the weighing unit are located inside the housing, and the adhesive application unit is connected to the adhesive supply unit. The adhesive application unit includes a three-axis motion assembly, a two-component screw pump metering valve, a static mixing tube, a shut-off valve, and an adhesive dispensing needle. The three-axis motion assembly has XYZ three-directional motion functions. The two-component screw pump metering valve, the static mixing tube, the shut-off valve, and the adhesive dispensing needle are positioned in the Z-direction. The static mixing tube is located at the output end of the two-component screw pump metering valve, and the adhesive dispensing needle is located directly below the static mixing tube. The shut-off valve controls the adhesive dispensing needle. The two-component screw pump metering valve is connected to the adhesive supply unit via a pipe. The vision inspection unit includes a vision inspection camera and inspection equipment. The vision inspection camera is located on the top of the housing and directly above the weighing unit.

2. The wafer holding ring coating apparatus according to claim 1, characterized in that: The glue supply unit includes a trolley, on which a control unit and a pair of feeding screw pumps are installed. Each feeding screw pump is equipped with a glue storage tank. The feeding screw pumps are driven by servo motors and are respectively connected to the metering valves of the two-component screw pumps.

3. The wafer holding ring coating apparatus according to claim 1, characterized in that: The three-axis motion assembly includes multiple gantry supports arranged in a U-shape. Y-axis servo linear guides and Y-axis auxiliary guides are respectively installed on the left and right gantry supports. An X-axis servo linear guide is installed between the sliders of the Y-axis servo linear guide and the Y-axis auxiliary guide. A Z-axis servo linear guide is installed on the slider of the X-axis servo linear guide. An adhesive application unit is installed on the slider of the Z-axis servo linear guide.

4. The wafer holding ring coating apparatus according to claim 1, characterized in that: The weighing unit includes an electronic scale, with lifting cylinders installed at the four corners of the electronic scale. A tray is placed on the electronic scale, and the tray is raised and lowered under the action of the lifting cylinders. Limiting brackets are installed at the four corners of the tray.

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