Rapid cooling integrated device for cryopump

Abstract

The utility model relates to the technical field of cryopumps, in particular to a cryopump rapid cooling integrated device which comprises a pump shell, a compressor is installed at the bottom of the pump shell, a first expansion cavity and a second expansion cavity are further formed in the pump shell, and the air outlet end of the compressor is connected with the second expansion cavity through a pipeline. A first cold plate and a second cold plate are coaxially arranged in the pump shell, the first cold plate is sleeved with the second cold plate, first refrigerant channels are formed in the close faces of the first cold plate and the second cold plate, and one end of each first refrigerant channel is connected with the second expansion cavity through a pipeline. According to the utility model, through the first refrigerant channel, the second refrigerant channel and the annular refrigerant channel, a refrigerant which is subjected to primary expansion and cooling can be conveyed, meanwhile, the refrigerant can cool the first cold plate and the second cold plate, and then the refrigerant which is subjected to secondary expansion can be conveyed into the cold column through the return pipe and the air guide pipe so as to rapidly cool the cold column; the cooling speed is high and the use effect is improved.

Description

Technical Field

[0001] This utility model relates to the field of cryogenic pump technology, specifically to a cryogenic pump rapid cooling integrated device. Background Technology

[0002] Cryogenic pump cooling integration is a technology system that deeply integrates the refrigeration unit with the vacuum pumping structure. By controlling the energy transfer path at the molecular scale, it enables the rapid establishment and stable maintenance of ultra-high vacuum.

[0003] Existing cryogenic pumps typically cool their primary and secondary cold heads by using refrigerant expansion to generate low-temperature refrigerant, which is then transferred to the cold heads via a heat conduction mechanism. This method results in slow cooling and poor performance. Furthermore, the primary and secondary cold heads are usually fixed inside the pump casing with fasteners, requiring separate disassembly and reassembly of each cold head when the pump is removed for maintenance, further complicating the process.

[0004] Therefore, a cryogenic pump rapid cooling integrated device is proposed to solve the problems mentioned above. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a cryogenic pump rapid cooling integrated device, which can solve the problem of slow cooling speed of the primary and secondary cold heads.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a cryogenic pump rapid cooling integrated device, including a pump housing, a compressor installed at the bottom of the pump housing, and a first expansion chamber and a second expansion chamber provided inside the pump housing, with the compressor outlet connected to the second expansion chamber via a pipe;

[0007] The pump casing is coaxially provided with a first cold plate and a second cold plate. The second cold plate is sleeved on the outside of the first cold plate, and a first refrigerant channel is opened on the close surface of the first cold plate and the second cold plate. One end of the first refrigerant channel is connected to the second expansion chamber through a pipe.

[0008] An annular refrigerant channel is provided between the top of the first cold plate and the second cold plate. One end of the annular refrigerant channel is connected to one end of the first refrigerant channel. A second refrigerant channel is also provided between the first cold plate and the second cold plate. The other end of the second refrigerant channel is connected to the first expansion chamber through a return pipe.

[0009] The top edges of the first cold plate and the second cold plate are both provided with a second perimeter, and the edge of each second perimeter is provided with a first perimeter. A first flange is provided at the top edge of the pump casing, and a second flange is provided above the first flange. The edge of the first perimeter extends to the space between the first flange and the second flange, and the three are connected by a fixing mechanism.

[0010] Preferably, a cold column is coaxially mounted on the inner bottom of the first cold plate. One side of the bottom of the cold column is connected to the first expansion chamber through a duct pipe, and the other side of the bottom of the cold column is connected to the compressor intake end through an exhaust pipe.

[0011] Preferably, a partition is vertically installed at the bottom of the interior of the cold column, and there is a gap between the top of the partition and the top of the interior of the cold column.

[0012] Preferably, a cooling umbrella is installed on the outer surface of the cooling column.

[0013] Preferably, the fixing mechanism includes mounting holes formed on the top of the first flange, the second flange, and the first perimeter. Each mounting hole is provided with a mounting bolt, one end of which passes through the corresponding mounting hole and is connected to an external device.

[0014] Preferably, a guide plate is installed on the top of the pump casing, and the bottom of the guide plate is connected to the inner surface of the second perimeter through a bracket.

[0015] Preferably, the inner surface of the pump casing is provided with a radiation coating.

[0016] Preferably, a connecting pipe is installed on one side of the bottom of the pump casing, the top of the connecting pipe passes through the first cold plate and the second cold plate, and a valve is installed at the bottom of the connecting pipe.

[0017] Compared with the prior art, this utility model provides a cryogenic pump rapid cooling integrated device, which has the following beneficial effects:

[0018] 1. The refrigerant after initial expansion and cooling can be transported through the first refrigerant channel, the second refrigerant channel and the annular refrigerant channel. At the same time, the refrigerant can cool the first cold plate and the second cold plate. Then, the refrigerant after secondary expansion can be transported into the cold column through the return pipe and the gas guide pipe to quickly cool the cold column. The cooling speed is fast and the use effect is improved.

[0019] 2. By cooperating with the first flange and the second flange, the first cold plate and the second cold plate can be fixed simultaneously when the pump casing is connected to external equipment. The fixing is simple and the disassembly and assembly are convenient. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model;

[0021] Figure 2 This is a side sectional view of the structure of this utility model;

[0022] Figure 3 This is a partial side sectional view of the structure of this utility model.

[0023] Figure 4 This is a structural diagram of the first and second cold plates of this utility model.

[0024] In the diagram: 1. Pump casing; 2. First flange; 3. Mounting hole; 4. Mounting bolt; 5. Second flange; 6. Exhaust pipe; 7. Guide plate; 8. Compressor; 9. Valve; 10. Connecting pipe; 11. First refrigerant passage; 12. Return pipe; 13. Second refrigerant passage; 14. First cold plate; 15. Second cold plate; 16. Cold umbrella; 17. Cold column; 18. Partition; 19. First expansion chamber; 20. Second expansion chamber; 21. First perimeter; 22. Second perimeter; 23. Gas guide pipe; 24. Annular refrigerant passage. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Example:

[0027] Please see Figure 1 - Figure 4 The cryogenic pump rapid cooling integrated device in this embodiment includes a pump housing 1, a compressor 8 installed at the bottom of the pump housing 1, and a first expansion chamber 19 and a second expansion chamber 20 are provided inside the pump housing 1. The outlet of the compressor 8 is connected to the second expansion chamber 20 through a pipe. The compressor 8 can compress the high-temperature refrigerant and deliver it to the second expansion chamber 20 for expansion.

[0028] like Figure 2 and Figure 4 As shown, a first cold plate 14 and a second cold plate 15 are coaxially arranged inside the pump casing 1. The second cold plate 15 is fitted outside the first cold plate 14, and a first refrigerant channel 11 is opened on the adjacent surfaces of the first cold plate 14 and the second cold plate 15. One end of the first refrigerant channel 11 is connected to the second expansion chamber 20 through a pipe. During use, the expanded low-temperature refrigerant will be transported to the first refrigerant channel 11 along the pipe. When the refrigerant flows in the first refrigerant channel 11, it will rapidly cool down the first cold plate 14 and the second cold plate 15, and the cooling speed is fast.

[0029] like Figure 2 and Figure 4 As shown, an annular refrigerant channel 24 is provided between the tops of the first cold plate 14 and the second cold plate 15. The annular refrigerant channel 24 is connected to one end of the first refrigerant channel 11, and a second refrigerant channel 13 is also provided between the first cold plate 14 and the second cold plate 15. The other end of the second refrigerant channel 13 is connected to the first expansion chamber 19 through the return pipe 12. The refrigerant can flow along the first refrigerant channel 11 into the annular refrigerant channel 24, and then the refrigerant flows into the second refrigerant channel 13 through the annular refrigerant channel 24 to cool the first cold plate 14 and the second cold plate 15 again. The cooling is sufficient. Finally, the refrigerant after cooling the first cold plate 14 and the second cold plate 15 is transported to the first expansion chamber 19 through the return pipe 12 for secondary expansion.

[0030] like Figure 2 and Figure 4 As shown, a cold column 17 is coaxially mounted on the bottom of the first cold plate 14. One side of the bottom of the cold column 17 is connected to the first expansion chamber 19 through a gas guide pipe 23, and the other side of the bottom of the cold column 17 is connected to the air inlet of the compressor 8 through an exhaust pipe 6. A baffle 18 is vertically mounted on the bottom of the inside of the cold column 17. There is a gap between the top of the baffle 18 and the top of the inside of the cold column 17. In use, the refrigerant after secondary expansion in the first expansion chamber 19 can be transported to the cold column 17 through the gas guide pipe 23 to cool the cold column 17. In this way, gas molecules will be captured and fixed on the surface of the cold column 17. Then the refrigerant is transported back to the compressor 8 through the exhaust pipe 6 for cyclic compression.

[0031] like Figure 2 and Figure 4 As shown, a cooling umbrella 16 is installed on the outer surface of the cooling column 17. The cooling column 17 can transfer temperature to the cooling umbrella 16, so that the cooling umbrella 16 is also in a low temperature state. Under the action of the cooling umbrella 16, the contact area between the cooling column 17 and the air can be increased, and gas molecules in the air can be adsorbed.

[0032] like Figure 1 and Figure 2 As shown, a guide plate 7 is installed on the top of the pump casing 1. The bottom of the guide plate 7 is connected to the inner surface of the second circumference 22 through a bracket. The first cold plate 14 can transfer low temperature to the guide plate 7, so that the guide plate 7 is kept at a low temperature and the gas molecules are initially adsorbed. This can prevent a large number of gas molecules from impacting the cold column 17 and the first cold plate 14, so as to avoid damage to both.

[0033] like Figure 1 and Figure 3As shown, the top edges of the first cold plate 14 and the second cold plate 15 are both provided with a second perimeter 22, and the edge of each second perimeter 22 is provided with a first perimeter 21. A first flange 2 is provided at the top edge of the pump housing 1, and a second flange 5 is provided above the first flange 2. The edge of the first perimeter 21 extends between the first flange 2 and the second flange 5. In actual use, the two first perimeters 21 can be clamped and fixed by the first flange 2 and the second flange 5, thereby fixing the first cold plate 14 and the second cold plate 15 to the pump housing 1, which is convenient.

[0034] like Figure 2 and Figure 3 As shown, the first flange 2, the second flange 5, and the first perimeter 21 are connected by a fixing mechanism. The fixing mechanism includes mounting holes 3 opened on the top of the first flange 2, the second flange 5, and the first perimeter 21. Each mounting hole 3 is provided with a mounting bolt 4. One end of the mounting bolt 4 passes through the corresponding mounting hole 3 and is connected to the external equipment. By passing the mounting bolt 4 through the mounting hole 3 and tightening it with the external equipment, the first flange 2 and the second flange 5 can tightly clamp and fix the first perimeter 21, thereby fixing the first cold plate 14 and the second cold plate 15, making the fixation stable.

[0035] It should be noted that the inner surface of the pump casing 1 is provided with a radiation coating, which can prevent the external ambient temperature from hindering the low-temperature environment inside the pump casing 1.

[0036] It should be noted that, as Figure 2 As shown, a connecting pipe 10 is installed on one side of the bottom of the pump casing 1. The top of the connecting pipe 10 passes through the first cold plate 14 and the second cold plate 15, and a valve 9 is installed at the bottom of the connecting pipe 10. When not in use, the valve 9 is opened, and the gas molecules adsorbed on the first cold plate 14, the second cold plate 15, the cold column 17 and the cold umbrella 16 can be discharged through the connecting pipe 10.

[0037] The working principle of the above embodiments is as follows:

[0038] During use, the operator fixes the second cold plate 15 together with the first cold plate 14, forming a first refrigerant passage 11 and a second refrigerant passage 13 between them. Then, the first cold plate 14 and the second cold plate 15 are placed inside the pump casing 1, and the first refrigerant passage 11 is connected to the second expansion chamber 20 via a pipe. Simultaneously, the return pipe 12 at the end of the second refrigerant passage 13 is connected to the first expansion chamber 19. The air guide pipe 23 on the first expansion chamber 19 is then connected to the bottom of the cold column 17, and the exhaust pipe 6 at the bottom of the cold column 17 is connected to the air inlet of the compressor 8. After the first edge 21 of the second edge 22 at the top of the first cold plate 14 and the second cold plate 15 is stacked on the first flange 2, the second flange 5 is then stacked on the first edge 21. Finally, the mounting bolts 4 are passed through the corresponding mounting holes 3 and connected to the external equipment. When the mounting bolts 4 are tightened, the first flange 2 and the second flange 5 can abut and fix the first edge 21, thus completing the installation. For disassembly and maintenance, simply remove the mounting bolts 4 from the first flange 21. The first cold plate 14 and the second cold plate 15 can be separated from the pump housing 1 by disassembly on the external equipment, making disassembly and assembly convenient. During use, the compressor 8 delivers the compressed high-pressure refrigerant to the second expansion chamber 20 for initial expansion. The medium-pressure low-temperature refrigerant after collision is delivered to the first refrigerant channel 11. The refrigerant flows along the first refrigerant channel 11 to the annular refrigerant channel 24, and then along the annular refrigerant channel 24 to the second refrigerant channel 13. During the flow, the refrigerant can cool the first cold plate 14 and the second cold plate 15, allowing them to cool down rapidly. Then, the refrigerant is delivered to the first expansion chamber 19 through the return pipe 12 for secondary expansion. The expanded low-pressure refrigerant is delivered to the cold column 17 through the gas guide pipe 23 to cool down the cold column 17, allowing it to quickly drop to an extremely low temperature and adsorb the gas entering the pump housing 1. The cooling speed is fast, improving the performance. Afterward, the refrigerant is discharged into the compressor 8 through the exhaust pipe 6 for cyclic compression.

[0039] The installation, connection, or setting methods disclosed in this embodiment are all common mechanical connection methods. As long as they can achieve their beneficial effects, they can be implemented. Therefore, this embodiment will not elaborate on their specific structural composition and working principle.

[0040] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cryogenic pump rapid cooling integrated device, characterized in that: It includes a pump housing (1), a compressor (8) is installed at the bottom of the pump housing (1), and a first expansion chamber (19) and a second expansion chamber (20) are provided inside the pump housing (1). The air outlet of the compressor (8) is connected to the second expansion chamber (20) through a pipe. The pump casing (1) is coaxially provided with a first cold plate (14) and a second cold plate (15). The second cold plate (15) is sleeved on the outside of the first cold plate (14). The first cold plate (14) and the second cold plate (15) are provided with a first refrigerant channel (11) on their adjacent surfaces. One end of the first refrigerant channel (11) is connected to the second expansion chamber (20) through a pipe. An annular refrigerant channel (24) is provided between the top of the first cold plate (14) and the second cold plate (15). The annular refrigerant channel (24) is connected to one end of the first refrigerant channel (11). A second refrigerant channel (13) is also provided between the first cold plate (14) and the second cold plate (15). The other end of the second refrigerant channel (13) is connected to the first expansion chamber (19) through a return pipe (12). The top edges of the first cold plate (14) and the second cold plate (15) are provided with a second perimeter (22), and the edge of each second perimeter (22) is provided with a first perimeter (21). A first flange (2) is provided at the top edge of the pump housing (1), and a second flange (5) is provided above the first flange (2). The edge of the first perimeter (21) extends between the first flange (2) and the second flange (5), and the three are connected by a fixing mechanism.

2. The cryogenic pump rapid cooling integrated device according to claim 1, characterized in that: A cold column (17) is coaxially mounted on the bottom of the first cold plate (14). One side of the bottom of the cold column (17) is connected to the first expansion chamber (19) through a duct pipe (23), and the other side of the bottom of the cold column (17) is connected to the air inlet of the compressor (8) through an exhaust pipe (6).

3. The cryogenic pump rapid cooling integrated device according to claim 2, characterized in that: A partition (18) is vertically installed at the bottom of the interior of the cold column (17), and there is a gap between the top of the partition (18) and the top of the interior of the cold column (17).

4. The cryogenic pump rapid cooling integrated device according to claim 3, characterized in that: A cooling umbrella (16) is installed on the outer surface of the cooling column (17).

5. The cryogenic pump rapid cooling integrated device according to claim 1, characterized in that: The fixing mechanism includes mounting holes (3) opened on the top of the first flange (2), the second flange (5) and the first perimeter (21). Each mounting hole (3) is provided with a mounting bolt (4). One end of the mounting bolt (4) passes through the corresponding mounting hole (3) and is connected to the external equipment.

6. The cryogenic pump rapid cooling integrated device according to claim 1, characterized in that: The pump casing (1) is equipped with a guide plate (7) on top, and the bottom of the guide plate (7) is connected to the inner surface of the second perimeter (22) through a bracket.

7. The cryogenic pump rapid cooling integrated device according to claim 1, characterized in that: The inner surface of the pump casing (1) is provided with a radiation coating.

8. The cryogenic pump rapid cooling integrated device according to claim 1, characterized in that: A connecting pipe (10) is installed on one side of the bottom of the pump casing (1). The top of the connecting pipe (10) passes through the first cold plate (14) and the second cold plate (15), and a valve (9) is installed at the bottom of the connecting pipe (10).

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