Device for calibrating linearity of integrated nanometer displacement table of laser interferometer

Abstract

The utility model discloses a laser interferometer integrated nanometer displacement platform linearity calibration device which comprises a base platform and a laser instrument installed on one side of the top of the base platform, a spectroscope is installed on the top of the base platform and corresponds to the position of the laser instrument, and a nanometer displacement platform to be detected is installed on the other side of the top of the base platform. A nanometer displacement table fixing assembly used for fixing the nanometer displacement table to be detected is installed at the position, corresponding to the nanometer displacement table to be detected, of the base table. According to the utility model, the two-way screw is rotated to drive the clamping seat to conveniently and stably fix the nanometer displacement table to be detected, so that micro displacement or vibration of the displacement table in the calibration process is effectively prevented, and the calibration accuracy is improved; meanwhile, the fixing frame is clamped and matched with the fixing bolt and the threaded seat, so that the reflector body can be conveniently and accurately installed on the to-be-detected nanometer displacement table, and the accuracy of the laser interferometer calibration system is ensured.

Description

Technical Field

[0001] This utility model relates to the technical field of nanoscale displacement stage calibration devices, and in particular to a linearity calibration device for an integrated nanoscale displacement stage of a laser interferometer. Background Technology

[0002] In the field of precision measurement and manufacturing, the nanoscale displacement stage, as a core component for achieving precise positioning at the micrometer and even nanometer scale, directly affects the performance and reliability of the entire system due to its linearity accuracy. Laser interferometers, as a high-precision, non-contact displacement measurement tool, are widely used in the linearity calibration process of nanoscale displacement stages.

[0003] For example, Chinese Patent Publication No. CN220556313U discloses a nanoscale displacement stage calibration device based on grating interferometry, including a collimated light source, a photoelectric detection module placed in the optical path of the collimated light source, a nanoscale displacement stage to be calibrated corresponding to the position of the photoelectric detection module, a grating placed on the nanoscale displacement stage to be calibrated, a signal processing system connected to the photoelectric detection module circuit, and a displacement stage driving system connected to the nanoscale displacement stage to be calibrated circuit. The displacement stage driving system drives the nanoscale displacement stage to be calibrated to move synchronously with the grating. The photoelectric detection module is equipped with a photodetector for collecting interference signals. The interference signals collected by the photodetector are converted into current signals and transmitted to the signal processing system.

[0004] However, existing technologies for linearity calibration devices for nanoscale displacement stages generally suffer from several problems that urgently need to be addressed:

[0005] On the one hand, many calibration devices fail to fully consider the fixation requirements of the nanostage to be tested in their design, which makes the nanostage prone to slight displacement or vibration during the calibration process, thus affecting the accuracy of the calibration results. Poor fixation methods not only increase the difficulty of calibration, but may also cause potential damage to the nanostage itself.

[0006] On the other hand, as a key optical component in a laser interferometer calibration system, the accuracy of the mirror's installation position and angle has a decisive impact on the calibration results. However, existing calibration devices often suffer from complex operation and inaccurate positioning when installing the mirror. Especially when the mirror needs to be installed on the nanoscale displacement stage to be tested, the compact structure and limited space of the nanoscale displacement stage make traditional installation methods difficult to meet the requirements for fast, convenient, and accurate installation. Utility Model Content

[0007] The purpose of this invention is to provide an integrated nanoscale displacement stage linearity calibration device for laser interferometers. By rotating a bidirectional screw, the device drives the clamp to achieve convenient and stable fixation of the nanoscale displacement stage to be tested, effectively preventing minor displacement or vibration of the stage during calibration and improving calibration accuracy. At the same time, the device utilizes a fixed frame to snap on the stage and, together with fixing bolts and threaded seats, enables convenient and precise installation of the reflector body on the nanoscale displacement stage to be tested, ensuring the accuracy of the laser interferometer calibration system.

[0008] To achieve the above objectives, the main technical solutions adopted by this utility model include:

[0009] A linearity calibration device for an integrated nanometer displacement stage of a laser interferometer includes:

[0010] The base and a laser instrument are mounted on one side of the top of the base. A beam splitter is mounted on the top of the base and at the position corresponding to the laser instrument. A nano-displacement stage to be tested is mounted on the other side of the top of the base. A nano-displacement stage fixing assembly for fixing the nano-displacement stage to be tested is mounted on the base and at the position corresponding to the nano-displacement stage to be tested. A mirror fixing assembly is also mounted on the nano-displacement stage to be tested.

[0011] The aforementioned laser interferometer integrated nanoscale displacement stage linearity calibration device includes a nanoscale displacement stage fixing assembly comprising a bidirectional screw rotatably mounted on the base, the bidirectional screw having reverse threads, and two symmetrically arranged threaded sleeves threadedly connected to the bidirectional screw. Each of the two threaded sleeves is fixedly connected to an L-shaped clamping rod, and each of the two L-shaped clamping rods having a clamping seat for clamping and fixing the nanoscale displacement stage to be tested fixedly connected to one side of the two L-shaped clamping rods that are close to each other.

[0012] In the aforementioned laser interferometer integrated nano-displacement stage linearity calibration device, a clamping pad is fixedly connected to the side of the clamp near the nano-displacement stage to be tested.

[0013] The aforementioned laser interferometer integrated nano-displacement stage linearity calibration device includes a mirror fixing assembly comprising a fixing frame that matches the nano-displacement stage to be tested, and a mirror body that cooperates with the beam splitter is mounted on the side of the fixing frame.

[0014] In the aforementioned laser interferometer integrated nano-displacement stage linearity calibration device, a threaded seat is fixedly connected to the fixed frame, and a fixing bolt for fixing the fixed frame is threadedly connected to the threaded seat.

[0015] The aforementioned laser interferometer integrated nano-displacement stage linearity calibration device includes an anti-slip pad fixedly connected to the inner wall of the fixed frame.

[0016] This utility model has at least the following beneficial effects:

[0017] 1. Convenient and Stable Fixing Method for the Nanoscale Displacement Stage: This invention utilizes the rotation of a bidirectional screw, where the relative motion of the two threaded sleeves on the screw, under the action of the threads, causes two clamps on the threaded sleeves to approach and hold the nanoscale displacement stage to be tested. This design not only achieves convenient fixing of the nanoscale displacement stage to be tested, but also effectively prevents minor displacement or vibration of the nanoscale displacement stage during calibration through the stable clamping of the clamps, thereby improving the accuracy of the calibration results.

[0018] 2. Convenient and Precise Reflector Installation: This invention achieves convenient fixation of the fixing frame onto the nano-displacement stage by snapping it into place and utilizing the threaded engagement between the fixing bolts on the fixing frame and the threaded seat. Since the reflector body is mounted on the side of the fixing frame, this design also indirectly facilitates the installation of the reflector body. Simultaneously, by precisely adjusting the position and angle of the fixing frame, the installation position and angle of the reflector body can be ensured to meet the requirements of the laser interferometer calibration system, thereby improving calibration accuracy.

[0019] 3. Improved Calibration Efficiency and Accuracy: The combination of a convenient and stable fixing method with a convenient and precise installation method significantly shortens the preparation time for linearity calibration of the nanometer displacement stage and improves calibration efficiency. At the same time, by reducing calibration errors caused by unstable fixing or inaccurate installation, the accuracy and reliability of the calibration results are also improved.

[0020] 4. Strong adaptability and scalability: The calibration device of this invention is flexibly designed and can be adjusted and optimized according to the different sizes and shapes of the nano-displacement stages to be tested. Furthermore, by replacing or upgrading components such as the fixing frame and the reflector body, calibration requirements for different types of nano-displacement stages can be met, demonstrating strong adaptability and scalability. Attached Figure Description

[0021] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0022] Figure 1 This is a schematic diagram of the linearity calibration device for the integrated nano-displacement stage of the laser interferometer of this utility model.

[0023] Figure 2 This is a cross-sectional structural schematic diagram of the linearity calibration device for the integrated nano-displacement stage of the laser interferometer of this utility model.

[0024] Figure 3This is a schematic diagram of the structure of the nano-displacement stage fixing component in the integrated nano-displacement stage linearity calibration device for laser interferometers of this utility model.

[0025] Figure 4 This is a schematic diagram of the reflector fixing assembly in the integrated nano-displacement stage linearity calibration device for laser interferometers of this utility model.

[0026] Explanation of icon numbers:

[0027] 1. Base; 2. Laser instrument; 3. Beam splitter; 4. Nanoscale displacement stage to be tested; 5. Nanoscale displacement stage fixing assembly; 6. Mirror fixing assembly;

[0028] 501. Double-acting screw; 502. Threaded sleeve; 503. L-shaped clamping rod; 504. Clamping seat; 5041. Clamping pad;

[0029] 601, Fixing frame; 6011, Mirror body;

[0030] 602, threaded seat; 6021, fixing bolt; 603, anti-slip pad. Detailed Implementation

[0031] The following will describe in detail the implementation of this application with reference to the accompanying drawings and embodiments, so that the implementation process of how this application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0032] Please refer to Figures 1 to 4 As shown in the figure, an embodiment of the present invention provides a linearity calibration device for an integrated nano-displacement stage of a laser interferometer, comprising: a base 1 and a laser 2 installed on one side of the top of the base 1; a beam splitter 3 is installed on the top of the base 1 and at the position corresponding to the laser 2; a nano-displacement stage 4 to be tested is installed on the other side of the top of the base 1; a nano-displacement stage fixing assembly 5 for fixing the nano-displacement stage 4 to be tested is installed on the base 1 and at the position corresponding to the position of the nano-displacement stage 4 to be tested; and a mirror fixing assembly 6 is also installed on the nano-displacement stage 4 to be tested.

[0033] By adopting the above technical solution, the bidirectional screw 501 drives the clamp 504 to achieve convenient and stable fixation of the nano-displacement stage 4 to be tested, effectively preventing minor displacement or vibration of the displacement stage during calibration and improving calibration accuracy. At the same time, the fixing frame 601 is used to snap on and cooperate with the fixing bolt 6021 and the threaded seat 602 to achieve convenient and precise installation of the reflector body 6011 on the nano-displacement stage 4 to be tested, ensuring the accuracy of the laser interferometer calibration system. The overall design not only shortens the calibration preparation time and improves the calibration efficiency, but also reduces the calibration error caused by unstable fixation or inaccurate installation, enhances the accuracy and reliability of the calibration results, and the device has strong adaptability and good scalability, which can meet the calibration needs of different types of nano-displacement stages.

[0034] To achieve convenient and stable fixation of the nanoscale displacement stage 4 to be tested, in this embodiment: the nanoscale displacement stage fixing assembly 5 includes a bidirectional screw 501 rotatably mounted on the base 1. The bidirectional screw 501 has a reverse thread, and two symmetrically arranged threaded sleeves 502 are threadedly connected to the bidirectional screw 501. Each of the two threaded sleeves 502 is fixedly connected to an L-shaped clamping rod 503. The sides of the two L-shaped clamping rods 503 that are close to each other are fixedly connected to a clamping seat 504 for clamping and fixing the nanoscale displacement stage 4 to be tested. By rotating the bidirectional screw 501, the reverse thread causes the two threaded sleeves 502 to drive the L-shaped clamping rods 503 and the clamping seat 504 to move closer to each other, thus achieving convenient and stable fixation of the nanoscale displacement stage 4 to be tested. This effectively prevents minor displacement or vibration of the displacement stage during calibration and improves the accuracy of calibration.

[0035] In order to enhance the clamping effect of the clamp 504 on the nano-displacement stage 4 to be tested and prevent scratches, in this embodiment, a clamping pad 5041 is fixedly connected to the side of the clamp 504 near the nano-displacement stage 4 to be tested.

[0036] In order to facilitate the installation and precise alignment of the reflector body 6011, in this embodiment: the reflector fixing assembly 6 includes a fixing frame 601 that matches the nano-displacement stage 4 to be tested, and the reflector body 6011 that is used in conjunction with the beam splitter 3 is installed on the side of the fixing frame 601.

[0037] In order to facilitate the fixing of the fixed frame 601 on the nano-displacement stage 4 to be tested, in this embodiment: a threaded seat 602 is fixedly connected to the fixed frame 601, and a fixing bolt 6021 for fixing the fixed frame 601 is threadedly connected to the threaded seat 602.

[0038] In order to enhance the friction between the fixed frame 601 and the nano-displacement stage 4 to be detected and to prevent slippage, in this embodiment, an anti-slip pad 603 is also fixedly connected to the inner wall of the fixed frame 601.

[0039] The working principle of this invention is as follows: When calibrating the linearity of the nano-displacement stage, the nano-displacement stage 4 to be tested is first placed on the base 1. Then, the bidirectional screw 501 is rotated, and the reverse thread on it causes the two threaded sleeves 502 to drive the L-shaped clamping rod 503 and the clamping seat 504 to move closer to each other until the clamping pad 5041 is tightly attached and securely holds the nano-displacement stage 4 to be tested. Next, the fixing frame 601 is snapped onto the nano-displacement stage 4 to be tested, and its position and angle are adjusted so that the reflector body 6011 and the beam splitter 3 are precisely aligned. Finally, the fixing bolt 6021 is tightened, and the fixing frame 601 is securely fixed onto the nano-displacement stage 4 to be tested by the threaded engagement between the threaded seat 602 and the fixing bolt 6021. At this time, the anti-slip pad 603 increases the friction between the fixing frame 601 and the nano-displacement stage 4 to be tested, preventing the fixing frame 601 from sliding. After the entire device is ready, the linearity calibration of the laser interferometer integrated nano-displacement stage can begin.

[0040] The detection principle of the nano-displacement stage 4 to be tested is as follows:

[0041] 1. Detection System Setup

[0042] Laser beam emission: A stable laser beam is emitted using laser device 2.

[0043] Beam splitter 3 splits the laser beam into two beams: one beam serves as a reference beam and is directed directly at the reference mirror; the other beam serves as a measurement beam and is directed at the mirror body 6011 mounted on the nanometer displacement stage 4 to be tested.

[0044] 2. Generation of interference fringes

[0045] Measurement light reflection: The measurement light is reflected back from the mirror of the nano-displacement stage, carrying the position information of the nano-displacement stage.

[0046] Interference fringe formation: The reflected measurement light and reference light superimpose at the beam splitter. Due to the optical path difference between the two beams, interference fringes are generated. The shape of the interference fringes is closely related to the optical path difference between the two beams.

[0047] 3. Interference fringe analysis

[0048] Fringe counting and monitoring: Changes in interference fringes are monitored using devices such as photodetectors or image sensors. When the nanostage 4 is displaced, the optical path of the measuring light changes, resulting in a change in the shape of the interference fringes.

[0049] Optical path difference calculation: By analyzing the changes in interference fringes, the optical path difference between the measuring light and the reference light can be calculated. The change in optical path difference directly reflects the displacement of the nanometer displacement stage 4.

[0050] 4. Absolute displacement calculation

[0051] Displacement conversion: Based on the geometric relationship between optical path difference and displacement, which is usually based on the periodicity of laser wavelength and interference fringes, the change in optical path difference is converted into the absolute displacement of nano-displacement stage 4.

[0052] Data processing and output: The calculated displacement is processed by filtering, smoothing and other methods to eliminate noise and errors, and finally the absolute displacement value of the nanometer displacement stage 4 is output.

[0053] The foregoing description illustrates and describes several preferred embodiments of the present invention. However, as previously stated, it should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the present invention's conception through the foregoing teachings or related technical or knowledge. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. A linearity calibration device for an integrated nanometer displacement stage of a laser interferometer, comprising a base (1) and a laser (2) mounted on one side of the top of the base (1), characterized in that, A beam splitter (3) is installed on the top of the base (1) and at the position corresponding to the laser (2). A nano-displacement stage (4) to be tested is installed on the other side of the top of the base (1). A nano-displacement stage fixing assembly (5) for fixing the nano-displacement stage (4) to be tested is installed on the base (1) and at the position corresponding to the nano-displacement stage (4). A mirror fixing assembly (6) is also installed on the nano-displacement stage (4).

2. The linearity calibration device for an integrated nanoscale displacement stage of a laser interferometer according to claim 1, characterized in that: The nano-displacement stage fixing assembly (5) includes a bidirectional screw (501) rotatably mounted on the base (1). The bidirectional screw (501) has reverse threads. Two threaded sleeves (502) are symmetrically arranged and threadedly connected to the bidirectional screw (501). L-shaped clamps (503) are fixedly connected to both threaded sleeves (502). A clamping seat (504) for clamping and fixing the nano-displacement stage (4) to be tested is fixedly connected to the side of the two L-shaped clamps (503) that are close to each other.

3. The linearity calibration device for an integrated nanoscale displacement stage of a laser interferometer according to claim 2, characterized in that: The clamp (504) is fixedly connected to a clamping pad (5041) on the side of the clamp (504) near the nano-displacement stage (4) to be detected.

4. The linearity calibration device for an integrated nanoscale displacement stage of a laser interferometer according to claim 3, characterized in that: The mirror fixing assembly (6) includes a fixing frame (601) that matches the nano-displacement stage (4) to be detected, and a mirror body (6011) that works with the beam splitter (3) is mounted on the side of the fixing frame (601).

5. The linearity calibration device for an integrated nanoscale displacement stage of a laser interferometer according to claim 4, characterized in that: A threaded seat (602) is fixedly connected to the fixed frame (601), and a fixing bolt (6021) for fixing the fixed frame (601) is threadedly connected to the threaded seat (602).

6. The linearity calibration device for an integrated nanoscale displacement stage of a laser interferometer according to claim 5, characterized in that: An anti-slip pad (603) is also fixedly connected to the inner wall of the fixed frame (601).

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