White light interference detection device for on-machine detection

By installing a white light interferometer detection device on the CNC machine tool tool post, the problem of in-machine inspection of white light interferometers was solved, realizing efficient and accurate three-dimensional shape measurement of in-machine inspection, and improving machining accuracy and quality stability.

CN224216051UActive Publication Date: 2026-05-08XIAN ENKE MICRO-NANO PHOTOELECTRIC TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
XIAN ENKE MICRO-NANO PHOTOELECTRIC TECH CO LTD
Filing Date
2025-07-15
Publication Date
2026-05-08

AI Technical Summary

Technical Problem

Existing white light interferometers are difficult to apply in complex environments such as factory production workshops, and cannot achieve on-machine inspection, resulting in installation position errors during part disassembly and clamping, which affects inspection accuracy and processing quality.

Method used

The white light interferometric inspection device is installed on the tool post of a CNC machine tool. By adjusting the mechanism and the tool post connecting plate, the position and angle of the white light interferometric inspection device can be adjusted, so as to realize the three-dimensional morphology of the surface of the processed product during on-machine inspection.

Benefits of technology

In-machine inspection is achieved, avoiding the loss of precision caused by part disassembly and clamping, improving inspection efficiency and the stability of processing quality, and ensuring the accuracy of inspection data and processing precision.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a white light interference detection device for on-machine detection, comprising an adjusting mechanism which comprises a transverse adjusting table sliding left and right, a longitudinal adjusting table sliding up and down, and a two-dimensional radian adjusting table used for adjusting the horizontal inclination and angle, the transverse adjusting table is fixedly installed on the front side of the longitudinal adjusting table, and the longitudinal adjusting table is fixedly connected with the two-dimensional radian adjusting table through a connecting plate. The optical detection device is fixedly installed above the two-dimensional radian adjusting table, one side of the tool rest connecting piece is fixedly connected with the front side of the transverse adjusting table, and the other side of the tool rest connecting piece is fixedly connected with a tool rest of the numerical control machine tool. According to the utility model, the detection device is directly arranged in a processing environment, and the position of the detection device is adjusted through the adjusting mechanism, so that on-machine detection in production is realized, the processing fixing position of a product is not influenced by detection, parts do not need to be disassembled, and the production detection efficiency is improved.
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Description

Technical Field

[0001] This utility model relates to the field of in-machine testing optical instrument technology, specifically a white light interferometric testing device for in-machine testing. Background Technology

[0002] In the field of high-precision manufacturing, 3D topography inspection is a crucial step in ensuring product quality, and white light interferometers, with their superior inspection accuracy, have become an important testing device in this field. Currently, the core applications of white light interferometers on the market are mainly concentrated in laboratory or professional testing environments, used for the precise measurement and analysis of the 3D topography of various products.

[0003] In practical applications, these types of equipment have many specific requirements for the products being tested. Typically, the products need to be small in size and light in weight to fit the testing space and load-bearing capacity of the equipment. At the same time, because the measurement principle of white light interferometers is extremely sensitive to environmental factors, they have stringent requirements for the testing environment, such as stable temperature and humidity conditions, and avoidance of vibration, airflow, and external light interference. This makes it difficult to directly apply them to complex industrial environments such as factory production workshops.

[0004] In addition, most existing white light interferometers are fixed inspection equipment sets. Their structural design and functional configuration determine that they do not have on-machine inspection capabilities, that is, they cannot be directly integrated into production equipment to perform real-time online inspection of workpieces during the processing.

[0005] For high-precision machining and manufacturing, the accuracy of the part's mounting position directly affects the quality of the final product. In traditional inspection methods, parts need to be removed from the machining equipment, transported to the inspection room for testing, and then re-clamped back onto the machining equipment for subsequent processing. However, during each clamping process, mounting position errors are inevitably generated due to factors such as fixture accuracy and operational errors. The existence of these errors not only leads to deviations between the inspection results and the actual machining state of the part, affecting the accurate judgment of machining quality, but also accumulates in subsequent processing, adversely affecting the final machining accuracy of the part, and may even erase the results achieved in the early high-precision machining, seriously restricting the efficiency and quality stability of high-precision manufacturing. Utility Model Content

[0006] To address the aforementioned technical problems, this utility model provides a white light interferometry inspection device for in-machine inspection. The white light interferometer is mounted on the tool post of a CNC machine tool by adjusting the adjustment mechanism and the tool post connecting plate. By adjusting the position of the tool post and the adjustment mechanism, the working angle and position of the white light interferometer are adjusted, thereby realizing the in-machine inspection of the three-dimensional morphology of the processed product surface.

[0007] To achieve its technical objectives, this utility model adopts the following technical solution:

[0008] A white light interferometry detection device for in-machine inspection, comprising:

[0009] The adjustment mechanism includes a horizontal adjustment platform that slides left and right, a vertical adjustment platform that slides up and down, and a two-dimensional arc adjustment platform for adjusting the horizontal tilt and angle. The horizontal adjustment platform is fixedly installed on the front side of the vertical adjustment platform, and the vertical adjustment platform is fixedly connected to the two-dimensional arc adjustment platform through a connecting plate.

[0010] An optical inspection device and a tool holder connector are provided. The optical inspection device is fixedly installed above the two-dimensional arc adjustment table. One side of the tool holder connector is fixedly connected to the front side of the transverse adjustment table, and the other side is fixedly connected to the tool holder of the CNC machine tool.

[0011] Preferably, the connecting plate is vertically fixedly installed on the rear side of the lower end of the longitudinal adjustment platform, and the two-dimensional arc adjustment platform is fixedly installed on the upper part of the connecting plate.

[0012] Preferably, the side wall of the transverse adjustment platform is provided with a first adjustment knob.

[0013] Preferably, a second adjustment knob is provided on the top of the longitudinal adjustment platform.

[0014] Preferably, a tilt adjustment knob is provided at the bottom of one side of the two-dimensional arc adjustment platform, and the tilt adjustment knob is used to adjust the horizontal tilt of the two-dimensional arc adjustment platform.

[0015] Preferably, an arc-shaped swing adjustment knob is provided on both the front and rear sides of one end of the two-dimensional arc adjustment platform, and the arc-shaped swing adjustment knob is used to adjust the angle of the two-dimensional arc adjustment platform.

[0016] Preferably, the optical detection device includes a white light interferometer.

[0017] The beneficial effects of this utility model are as follows:

[0018] This invention places the complete testing device in the processing equipment environment, breaking through the limitation of traditional white light interferometers which are only applicable to laboratories, and realizing in-situ testing. At the same time, the testing process is completed directly in the production process without disassembling and transporting parts, which improves the efficiency of production testing. It can reflect the true three-dimensional shape of the parts in processing in real time, providing accurate data for subsequent processing adjustments and ensuring processing quality.

[0019] This invention ensures that the detection does not affect the fixed position of the product during processing; by fixing the detection device on the tool holder, the parts do not need to change their fixed state, avoiding the loss of accuracy caused by clamping. It not only ensures that the detection data is accurate and reliable, but also retains the positional accuracy of the previous high-precision processing, thereby improving the stability of processing accuracy and product quality. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention from a first angle;

[0021] Figure 2 This is a schematic diagram of the assembly structure of the adjustment mechanism and the tool holder connector of this utility model;

[0022] Figure 3 This is a top view of the present invention.

[0023] Figure label:

[0024] 1. Tool holder connector; 2. Horizontal adjustment stage; 3. Longitudinal adjustment stage; 4. Two-dimensional arc adjustment stage; 5. First adjustment knob; 6. Second adjustment knob; 7. Arc-shaped swing adjustment knob; 8. Tilt adjustment knob; 9. Connecting plate; 10. White light interferometer. Detailed Implementation

[0025] In the description of this utility model, it should be noted that the terms "upper / lower," "left / right," "front / rear," "inner / outer," and "top / bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are only used to more clearly correspond to different connection positions in the description, and should not be construed as indicating or implying relative importance.

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," and "connected," etc., should be interpreted broadly. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within the components of a compatible model. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, unless otherwise specified, all components used in this application are commercially available components, and the connection between different components can be achieved through conventional technical means.

[0027] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0028] A white light interferometry detection device for in-machine inspection, such as Figures 1-3 As shown, it includes:

[0029] The adjustment mechanism includes a horizontal adjustment platform 2 that slides left and right, a vertical adjustment platform 3 that slides up and down, and a two-dimensional arc adjustment platform 4 for adjusting the horizontal tilt and angle. The horizontal adjustment platform 2 is fixedly installed on the front side of the vertical adjustment platform 3. The vertical adjustment platform 3 is fixedly connected to the two-dimensional arc adjustment platform 4 through a connecting plate 9. Specifically, the connecting plate 9 is vertically fixedly installed on the rear side of the lower end of the vertical adjustment platform 3, and the two-dimensional arc adjustment platform 4 is fixedly installed on the top of the connecting plate 9.

[0030] The optical inspection device and the tool holder connector 1 are fixedly installed above the two-dimensional arc adjustment table 4. One side of the tool holder connector 1 is fixedly connected to the front side of the transverse adjustment table 2, and the other side is fixedly connected to the tool holder of the CNC machine tool. The tool holder connector 1 fixes the entire combination of the adjustment mechanism and the optical inspection device on the tool holder of the CNC machine tool, thus placing the complete inspection system into the CNC machine tool.

[0031] Preferably, the side wall of the horizontal adjustment platform 2 is provided with a first adjustment knob 5; the top of the vertical adjustment platform 3 is provided with a second adjustment knob 6. The side walls of the horizontal adjustment platform 2 and the vertical adjustment platform 3 are provided with scales. By rotating the knobs in conjunction with the scales, the moving distance of the adjustment platform can be precisely adjusted to achieve precise fine-tuning.

[0032] Preferably, a tilt adjustment knob 8 is provided at the bottom of one side of the two-dimensional arc adjustment platform 4. The tilt adjustment knob 8 is used to adjust the horizontal tilt of the two-dimensional arc adjustment platform 4. Arc-shaped swing adjustment knobs 7 are provided on both the front and rear sides of one end of the two-dimensional arc adjustment platform 4. The arc-shaped swing adjustment knobs 7 are used to adjust the angle of the two-dimensional arc adjustment platform 4.

[0033] Understandably, the horizontal adjustment stage 2 can drive the vertical adjustment stage 3, the two-dimensional arc adjustment stage 4, and the optical inspection device to move left and right, that is, horizontally along the machining axis of the CNC machine tool; the vertical adjustment stage 3 can drive the two-dimensional arc adjustment stage 4 and the optical inspection device to move up and down, that is, vertically or vertically along the direction perpendicular to the machining axis of the CNC machine tool. During inspection, different machining areas can be selected by adjusting the up, down, left, and right movements, and the image of the area to be inspected can be clearly adjusted and displayed on the inspection screen.

[0034] The two-dimensional arc adjustment stage 4 can rotate at a small angle in the horizontal plane, and the horizontal platform can also be tilted using the tilt adjustment knob 8. By adjusting the horizontal rotation and tilt, the optical axis of the optical inspection system can be made strictly perpendicular to the inspection position surface of the workpiece being inspected. This adjustment allows the interference fringes to be thickened or thinned during inspection, and the tilt direction of the interference fringes can be adjusted, which helps to improve the inspection accuracy.

[0035] It is understood that those skilled in the art can select and install the appropriate models of the various components of the adjustment mechanism (including the horizontal adjustment platform, the vertical adjustment platform, and the two-dimensional arc adjustment platform) according to actual needs, as long as the above functions can be achieved. The horizontal adjustment platform, the vertical adjustment platform, and the two-dimensional arc adjustment platform are existing technologies, and their internal structures will not be described in detail here.

[0036] Preferably, the optical detection device includes a white light interferometer 10.

[0037] Although the embodiments of this utility model have been described in the specification, these embodiments are merely illustrative and should not limit the scope of protection of this utility model. Various omissions, substitutions, and modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

Claims

1. A white light interferometric testing device for in-machine inspection, characterized in that, include: The adjustment mechanism includes a horizontal adjustment platform that slides left and right, a vertical adjustment platform that slides up and down, and a two-dimensional arc adjustment platform for adjusting the horizontal tilt and angle. The horizontal adjustment platform is fixedly installed on the front side of the vertical adjustment platform, and the vertical adjustment platform is fixedly connected to the two-dimensional arc adjustment platform through a connecting plate. An optical inspection device and a tool holder connector are provided. The optical inspection device is fixedly installed above the two-dimensional arc adjustment table. One side of the tool holder connector is fixedly connected to the front side of the transverse adjustment table, and the other side is fixedly connected to the tool holder of the CNC machine tool.

2. The white light interferometry detection device for in-machine inspection as described in claim 1, characterized in that, The connecting plate is vertically fixedly installed on the rear side of the lower end of the longitudinal adjustment platform, and the two-dimensional arc adjustment platform is fixedly installed on the upper part of the connecting plate.

3. The white light interferometry detection device for in-machine inspection as described in claim 1, characterized in that, The side wall of the horizontal adjustment platform is provided with a first adjustment knob.

4. The white light interferometry detection device for in-machine inspection as described in claim 1, characterized in that, A second adjustment knob is provided on the top of the longitudinal adjustment platform.

5. A white light interferometric detection device for in-machine inspection as described in claim 1, characterized in that, A tilt adjustment knob is provided at the bottom of one side of the two-dimensional arc adjustment platform. The tilt adjustment knob is used to adjust the horizontal tilt of the two-dimensional arc adjustment platform.

6. The white light interferometry detection device for in-machine inspection as described in claim 1, characterized in that, Both the front and rear sides of one end of the two-dimensional arc adjustment platform are provided with arc-shaped swing adjustment knobs, which are used to adjust the angle of the two-dimensional arc adjustment platform.

7. The white light interferometry detection device for in-machine inspection as described in claim 1, characterized in that, The optical detection device includes a white light interferometer.