Device for removing light boron and light phosphorus of trichlorosilane

Abstract

The utility model belongs to the technical field of removal of light boron and light phosphorus, and particularly relates to a device for removing light boron and light phosphorus of trichlorosilane, which comprises a treatment tank, a tank cover is mounted at the top of the treatment tank through bolts, a cooling pipe is arranged in the treatment tank, an inlet and an outlet of the cooling pipe penetrate through the treatment tank, and the inlet and the outlet of the cooling pipe are communicated with each other. A circulating pipe is arranged at the bottom of the treatment tank in a communicating manner, the tail end of the circulating pipe is propped against the tank cover, a reflux inlet is formed in the top of the tank cover and penetrates through the tank cover, and the reflux inlet corresponds to the tail end of the circulating pipe in position. By arranging the treatment tank, trichlorosilane can penetrate through the treatment tank, then is cooled by the cooling pipe in the treatment tank, is conveyed to the upper part of the treatment tank again by the submersible pump in the treatment tank through the circulating pipe, and completely penetrates through the adsorption column, so that light boron and light phosphorus impurities of trichlorosilane are removed in a targeted manner, the removal efficiency is high, and the treatment effect is good. The waste gas treatment amount is reduced, the cost is saved, and safety and environmental protection are achieved.

Description

Technical Field

[0001] This solution belongs to the field of light boron and light phosphorus removal equipment, specifically involving a device for removing trichlorosilane, light boron, and light phosphorus. Background Technology

[0002] In the polysilicon production process, the purification of trichlorosilane is crucial, especially the light boron and light phosphorus impurities in trichlorosilane, which are the most difficult to remove.

[0003] A search revealed a utility model patent with authorization announcement number CN210084964U, which discloses an apparatus for the distillation and purification of trichlorosilane, comprising a boron removal adsorber, a primary distillation column, a secondary distillation column, a phosphorus removal adsorber, and a tertiary distillation column connected in series. The boron removal adsorber is mainly used to remove boron impurities from the raw material chlorosilane, while also removing some phosphorus impurities and metal impurities. The primary distillation column is a partitioned column, which can simultaneously remove dichlorosilane from the top of the column.

[0004] In existing technologies, trichlorosilane, light boron, and light phosphorus are vented from the top of a distillation column and discharged to a waste gas treatment device for hydrolysis, resulting in increased chlorine consumption. The hydrolysis process requires a large amount of production water and lime slurry, and generates a large amount of waste gas, wastewater, and waste residue, which puts significant pressure on the environment. Utility Model Content

[0005] The purpose of this solution is to provide a device for removing trichlorosilane, light boron, and light phosphorus, in order to solve the problems of low efficiency and high environmental pressure of existing methods for removing trichlorosilane, light boron, and light phosphorus.

[0006] To achieve the above objectives, this solution provides an apparatus for removing trichlorosilane, light boron, and light phosphorus, comprising a treatment tank. A tank cover is bolted to the top of the treatment tank. A cooling pipe is installed inside the treatment tank, with its inlet and outlet penetrating the tank. A circulation pipe is connected to the bottom of the treatment tank, with its end abutting against the tank cover. A reflux port is opened at the top of the tank cover, penetrating the tank cover and corresponding to the end of the circulation pipe. Two fixing rods are fixedly connected to the inner wall of the treatment tank, and a mounting base is fixedly connected between the two fixing rods. An adsorption column is slidably connected to the inner wall of the mounting base, and a retaining ring is fixedly connected to the outer side of the adsorption column, contacting the upper end of the mounting base.

[0007] The principle of this solution is as follows: During use, a low-temperature medium flows through the cooling pipe, and then trichlorosilane can enter the treatment tank through the inlet pipe. It is then cooled at low temperature through the cooling pipe. Subsequently, the submersible pump transports the cooled trichlorosilane to the top of the treatment tank through the circulation pipe and completely passes through the adsorption column, thereby specifically removing trichlorosilane light boron and light phosphorus impurities. In addition, after removing the tank cover, the pin is pulled horizontally by the lever to disengage the pin from the positioning block, thereby releasing the restriction on the positioning block and the retaining ring. Then the adsorption column can be removed and replaced.

[0008] The technical advantages of this solution are as follows: by setting up a treatment tank, trichlorosilane can pass through the treatment tank, and after being cooled by the cooling pipes inside the treatment tank, it is transported back to the top of the treatment tank by the submersible pump inside the treatment tank through the circulation pipe, and completely passes through the adsorption column, thereby specifically removing trichlorosilane, light boron and light phosphorus impurities. This not only has high removal efficiency, but also reduces the amount of waste gas to be treated, saves costs, and is safe and environmentally friendly.

[0009] By setting a fixing rod and a mounting base on the inner wall of the treatment tank, and then setting a retaining ring with a positioning block on the outside of the adsorption column, the adsorption column is mounted on the mounting base through the retaining ring and positioned by the positioning block. At the same time, the spring-loaded pin in the mounting base is used for locking and fixing. This not only makes installation and disassembly convenient, but also ensures relatively stable stability after installation.

[0010] Furthermore, a drain pipe is connected to the bottom of the processing tank, and an inlet pipe is connected to the tank cover. The drain pipe and inlet pipe facilitate the entry and exit of materials within the processing tank.

[0011] Furthermore, a rubber ring is fixedly connected to the top of the can lid, the position of which corresponds to the position of the reflux port, and the rubber ring is engaged with the circulation pipe. The rubber ring enhances the seal between the circulation pipe and the can lid.

[0012] Furthermore, a flow guide shroud, which is funnel-shaped, is fixedly connected to the top of the adsorption column. The flow guide shroud facilitates the complete passage of cooled material through the adsorption column.

[0013] Furthermore, a positioning block is fixedly connected to the bottom of the retaining ring. The positioning block passes through the mounting base and is slidably connected to it. A guide rod is fixedly connected to the inner wall of the mounting base. A pin is sleeved on the outer side of the guide rod. The pin is inserted into the positioning block. A spring is installed inside the pin. One end of the spring is fixedly connected to the guide rod, and the other end is fixedly connected to the inner surface of the pin. The spring force acting on the pin ensures that the pin is always inserted into the positioning block, thereby improving the installation stability of the adsorption column.

[0014] Furthermore, a lever is fixedly connected to the pin body of the latch, and the lever passes through the mounting base and is slidably connected to the mounting base. The lever facilitates the lateral pulling of the latch.

[0015] Furthermore, a protective cover made of rubber is fixedly connected to the upper edge of the mounting base. This protective cover prevents materials from entering the mounting base. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model;

[0017] Figure 2 This is an embodiment of the present utility model. Figure 1 A front sectional view;

[0018] Figure 3 This is an embodiment of the present utility model. Figure 2 A schematic diagram of the adsorption column structure;

[0019] Figure 4 This is an embodiment of the present utility model. Figure 2 Enlarged view of point A;

[0020] Figure 5 This is an embodiment of the present utility model. Figure 2 Enlarged view of point B.

[0021] The following detailed explanation illustrates the specific implementation methods:

[0022] The reference numerals in the accompanying drawings include: 1. Processing tank; 2. Tank cover; 3. Cooling pipe; 4. Drain pipe; 5. Circulation pipe; 6. Submersible pump; 7. Return port; 8. Rubber ring; 9. Inlet pipe; 10. Fixing rod; 11. Mounting base; 12. Adsorption column; 13. Retaining ring; 14. Positioning block; 15. Guide rod; 16. Pin; 17. Spring; 18. Lever; 19. Protective cover; 20. Flow guide. Detailed Implementation

[0023] The basic implementation examples are as follows: Figures 1-5As shown: An apparatus for removing trichlorosilane, light boron, and light phosphorus includes a treatment tank 1. A tank cover 2 is bolted to the top of the treatment tank 1. A cooling pipe 3 is installed inside the treatment tank 1, and the inlet and outlet of the cooling pipe 3 are through the treatment tank 1. A circulation pipe 5 is connected to the bottom of the treatment tank 1, and the end of the circulation pipe 5 abuts against the tank cover 2. A return port 7 is opened on the top of the tank cover 2, and the return port 7 is through the tank cover 2. The return port 7 corresponds to the end of the circulation pipe 5. Two fixing rods 10 are fixedly connected to the inner wall of the treatment tank 1. A mounting base 11 is fixedly connected between the two fixing rods 10. An adsorption column 12 is slidably connected to the inner ring wall of the mounting base 11. The adsorption column 12 is made of chelating resin material and has multiple through honeycomb holes inside, which can increase the contact area with the material and thus improve the adsorption efficiency. A retaining ring 13 is fixedly connected to the outer side of the adsorption column 12, and the retaining ring 13 contacts the upper end of the mounting base 11.

[0024] like Figure 1 , Figure 2 , Figure 4 As shown, a drain pipe 4 is connected to the bottom of the treatment tank 1, and an inlet pipe 9 is connected to the tank cover 2. The drain pipe 4 and inlet pipe 9 facilitate the entry and exit of materials within the treatment tank 1. A rubber ring 8 is fixedly connected to the top of the tank cover 2, and the position of the rubber ring 8 corresponds to the position of the return port 7. The rubber ring 8 engages with the circulation pipe 5. The rubber ring 8 increases the sealing between the circulation pipe 5 and the tank cover 2. A flow guide hood 20, which is funnel-shaped, is fixedly connected to the top of the adsorption column 12. The flow guide hood 20 facilitates the complete passage of cooled materials through the adsorption column 12.

[0025] like Figure 2 , Figure 5 As shown, a positioning block 14 is fixedly connected to the bottom of the retaining ring 13. The positioning block 14 passes through the mounting base 11 and is slidably connected to the mounting base 11. A guide rod 15 is fixedly connected to the inner wall of the mounting base 11. A pin 16 is sleeved on the outer side of the guide rod 15. The pin 16 is inserted into the positioning block 14. A spring 17 is installed inside the pin 16. One end of the spring 17 is fixedly connected to the guide rod 15, and the other end of the spring 17 is fixedly connected to the inner surface of the pin 16. The elastic force of the spring 17 acts on the pin 16, ensuring that the pin 16 is always inserted into the positioning block 14, thereby improving the installation stability of the adsorption column 12. A lever 18 is fixedly connected to the pin of the pin 16. The lever 18 passes through the mounting base 11 and is slidably connected to the mounting base 11. The lever 18 facilitates the lateral pulling of the pin 16. A protective cover 19, made of rubber, is fixedly connected to the upper edge of the mounting base 11. The protective cover 19 is designed to prevent materials from entering the mounting base 11.

[0026] The specific implementation process of this utility model is as follows: In use, a low-temperature medium flows through the cooling pipe 3, and then trichlorosilane can enter the treatment tank 1 through the liquid inlet pipe 9. Subsequently, it is cooled at low temperature through the cooling pipe 3. Then, the submersible pump 6 transports the cooled trichlorosilane to the top of the treatment tank 1 through the circulation pipe 5 and completely passes through the adsorption column 12, thereby specifically removing trichlorosilane light boron and light phosphorus impurities. In addition, after removing the tank cover 2, the pin 16 is pulled horizontally by the lever 18 to disengage the pin 16 from the positioning block 14, thereby releasing the restriction on the positioning block 14 and the retaining ring 13. Then, the adsorption column 12 can be removed and replaced.

[0027] This solution uses a treatment tank 1. Trichlorosilane can pass through the treatment tank 1 and be cooled by the cooling pipe 3 inside the treatment tank 1. Then, it is pumped back to the top of the treatment tank 1 by the submersible pump 6 inside the treatment tank 1 through the circulation pipe 5 and completely passes through the adsorption column 12. This effectively removes trichlorosilane, light boron, and light phosphorus impurities. It not only has high removal efficiency but also reduces the amount of waste gas to be treated, saves costs, and is safe and environmentally friendly.

[0028] By setting a fixing rod 10 and a mounting base 11 on the inner wall of the treatment tank 1, and then setting a retaining ring 13 with a positioning block 14 on the outer side of the adsorption column 12, the adsorption column 12 is mounted on the mounting base 11 by the retaining ring 13 and is installed and positioned by the positioning block 14. At the same time, the pin 16 inside the mounting base 11, which is extended and retracted by the spring 17, is used for locking and fixing. This not only makes installation and disassembly convenient, but also ensures that the stability after installation is relatively stable.

[0029] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. An apparatus for removing trichlorosilane, light boron, and light phosphorus, comprising a processing tank, characterized in that: The top of the treatment tank is bolted with a tank cover. A cooling pipe is installed inside the treatment tank, with its inlet and outlet penetrating the entire tank. A circulation pipe is connected to the bottom of the treatment tank, with its end abutting against the tank cover. A return port is opened at the top of the tank cover, penetrating the entire cover and corresponding to the end of the circulation pipe. Two fixing rods are fixedly connected to the inner wall of the treatment tank, and a mounting base is fixedly connected between the two fixing rods. An adsorption column is slidably connected to the inner wall of the mounting base, and a retaining ring is fixedly connected to the outer side of the adsorption column, contacting the upper end of the mounting base.

2. The apparatus for removing trichlorosilane, light boron, and light phosphorus according to claim 1, characterized in that: The bottom of the treatment tank is connected to a drain pipe, and the tank cover is connected to an inlet pipe.

3. The apparatus for removing trichlorosilane, light boron, and light phosphorus according to claim 1, characterized in that: A rubber ring is fixedly connected to the top of the can lid, the position of which corresponds to the position of the reflux port, and the rubber ring is snapped into the circulation pipe.

4. The apparatus for removing trichlorosilane, light boron, and light phosphorus according to claim 1, characterized in that: The top of the adsorption column is fixedly connected to a flow guide hood, which is funnel-shaped.

5. The apparatus for removing trichlorosilane, light boron, and light phosphorus according to claim 1, characterized in that: A positioning block is fixedly connected to the bottom of the retaining ring. The positioning block passes through the mounting base and is slidably connected to the mounting base. A guide rod is fixedly connected to the inner wall of the mounting base. A pin is sleeved on the outer side of the guide rod. The pin is inserted into the positioning block. A spring is provided inside the pin. One end of the spring is fixedly connected to the guide rod, and the other end of the spring is fixedly connected to the inner surface of the pin.

6. The apparatus for removing trichlorosilane, light boron, and light phosphorus according to claim 5, characterized in that: A lever is fixedly connected to the pin body of the latch, and the lever passes through the mounting base and is slidably connected to the mounting base.

7. The apparatus for removing trichlorosilane, light boron, and light phosphorus according to claim 5, characterized in that: A protective cover, made of rubber, is fixedly connected to the upper edge of the mounting base.

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