Spin coating device

Abstract

The utility model provides a spin coating device which comprises a box body, a connecting plate is arranged in the box body, a rotating plate is rotationally arranged in the connecting plate through a rotating column, a mounting plate is arranged on the rear side of the box body, a liquid spraying head is arranged in the mounting plate in a sliding mode, and a protective frame plate is arranged in a butt joint groove formed in the upper end of the box body in a sliding mode. The left side and the right side of the box body are each provided with a quick disassembly and assembly mechanism used for quickly disassembling and assembling the protection frame plate. According to the spin-coating device, the protective part can be quickly detached to be cleaned outside, the inconvenience of operation in a narrow space is avoided, the efficiency of cleaning work is improved, in addition, more effective cleaning methods such as a high-pressure water gun and ultrasonic cleaning can be used, and operators can conveniently conduct comprehensive and thorough cleaning.

Description

Technical Field

[0001] This utility model belongs to the technical field of spin coating devices, and specifically relates to a spin coating device. Background Technology

[0002] A spin coater is a device used to uniformly coat liquid materials (such as photoresist, coatings, etc.) on the surface of a substrate. Its working principle is to use centrifugal force to rapidly diffuse and uniformly distribute the liquid material dropped into the center of the substrate by rotating the substrate at high speed. This technology is widely used in semiconductor manufacturing, optical coating, biosensors and other fields.

[0003] Existing spin coating devices work by placing a substrate on a mounting assembly, rotating the substrate, and then applying the liquid material to the substrate surface using centrifugal force to rapidly spread and evenly distribute the liquid material across the substrate surface. To prevent the liquid material from being spin-out during rotation, a protective plate is typically used. However, the liquid material tends to adhere to the inner wall of the protective plate, which is fixed and cannot be removed, making cleaning complex and time-consuming. Operators must manually clean the plate using brushes or other tools, increasing labor intensity and making manual cleaning inconvenient. Utility Model Content

[0004] In view of this, this utility model addresses the shortcomings of the prior art by providing a spin coating device. The protective parts can be quickly removed for external cleaning, avoiding the inconvenience of operation in confined spaces and improving the efficiency of cleaning work. In addition, more effective cleaning methods such as high-pressure water guns and ultrasonic cleaning can be used, making it convenient for operators to perform comprehensive and thorough cleaning.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a spin coating device, including a box body, a connecting plate is provided inside the box body, the box body and the connecting plate are fixed by welding, a rotating plate is rotatably provided inside the connecting plate through a rotating column, an mounting plate is provided on the rear side of the box body, a spray head is slidably provided inside the mounting plate, a protective frame plate is slidably provided in the docking groove opened at the upper end of the box body, and quick-release mechanisms for quick disassembly and assembly of the protective frame plate are respectively provided on the left and right sides of the box body. The quick-release mechanism includes a sliding groove frame respectively provided on the left and right sides of the box body, a rectangular frame plate is slidably provided between adjacent sliding groove frames, two sliding columns are provided on the inner side of each rectangular frame plate, locking holes are opened on the left and right sides of the protective frame plate, and multiple locking columns pass through the docking holes opened at the upper end of the box body and are respectively inserted into the adjacent locking holes.

[0006] Each rectangular frame plate has a rotating seat on its inner side. Each rotating seat has a rotating connecting rod hinged inside. The lower end of the box has a connecting frame plate. The connecting frame plate has multiple guide posts inside. Two connecting rotating frames are slidably mounted on the outer arc surface of the multiple guide posts. The two connecting rotating frames are positioned in a corresponding front-to-back manner. The multiple rotating connecting rods are rotatably connected to the interior of the adjacent connecting rotating frames. The connecting frame plate has a bidirectional lead screw rotatably mounted inside. The multiple connecting rotating frames are threaded to the corresponding front and rear ends of the bidirectional lead screw. A knob is mounted at the front end of the bidirectional lead screw.

[0007] As a further improvement of this utility model, an electric push rod is provided on the rear side of the mounting plate, and the telescopic end of the electric push rod is connected to the lower end of the spray head.

[0008] As a further improvement of this utility model, a support frame is provided at the lower end of the box, and the box and the support frame are fixed together by welding.

[0009] As a further improvement of this utility model, a motor is provided at the lower end of the connecting plate, and the output shaft of the motor is connected to the lower end of the rotating column through a coupling.

[0010] As a further improvement of this utility model, a drain pipe is provided on the lower right side of the box body. The drain pipe is connected to the inside of the box body, and a solenoid valve is connected in series in the middle of the drain pipe.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] Firstly, the mold with substrate to be spin-coated is fixed to the rotating plate with bolts. Then, the spin-coating liquid pipe is connected to the spray head, so that the spin-coating liquid drips onto the substrate through the spray head. Then, the motor is turned on by control to realize the spin coating of the substrate. The liquid material flying out during the spin coating process can be blocked by the protective frame plate, thus realizing the efficient and stable spin coating operation of the substrate.

[0013] Secondly, by rotating the knob counterclockwise, the locking pin on the rectangular frame plate disengages from the locking hole of the protective frame plate. Then, personnel can remove the protective frame plate from the housing, making it easy to clean any adhering liquid materials using a high-pressure water gun. After cleaning, the protective frame plate is slid into the mating groove, aligning the locking hole with the locking hole. Then, rotating the knob clockwise inserts the locking hole into the locking hole of the protective frame plate, thus installing the protective frame plate. The protective components can be quickly removed for external cleaning, avoiding the inconvenience of operating in confined spaces and improving cleaning efficiency. Furthermore, more effective cleaning methods such as high-pressure water guns and ultrasonic cleaning can be used, facilitating comprehensive and thorough cleaning by operators.

[0014] Third, some of the liquid ejected during spin coating adheres to the protective frame, while some flows into the interior of the container. Personnel can open the solenoid valve to allow the ejected liquid material to be discharged through the drain pipe for further processing or recycling. Attached Figure Description

[0015] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a front sectional view of the present invention.

[0018] Figure 3 This is a schematic diagram of the right-side structure of this utility model;

[0019] Figure 4 This is a schematic diagram of the exploded structure of this utility model.

[0020] In the diagram: 101, housing; 102, drain pipe; 103, connecting plate; 104, mounting plate; 105, spray head; 106, electric push rod; 107, rotating plate; 108, motor; 109, solenoid valve; 110, support frame; 201, protective frame plate; 202, slide rail frame; 203, rectangular frame plate; 204, connecting frame plate; 205, knob; 206, rotating seat; 207, rotating connecting rod; 208, connecting rotating frame; 209, locking hole; 210, guide post; 211, double-acting screw; 212, locking post. Detailed Implementation

[0021] To better understand this utility model, the following embodiments further illustrate its content, but the scope of protection of this utility model is not limited to the embodiments described below. Numerous specific details are set forth in the following description to provide a more thorough understanding of this utility model. However, it will be apparent to those skilled in the art that this utility model can be practiced without one or more of these details.

[0022] like Figure 1 , 2As shown in Figure 3, a spin coating device includes a housing 101. A connecting plate 103 is provided inside the housing 101. A rotating plate 107 is rotatably mounted inside the connecting plate 103 via a rotating column. A mounting plate 104 is provided on the rear side of the housing 101. A spray head 105 is slidably mounted inside the mounting plate 104. A protective frame plate 201 is slidably mounted in a docking groove opened at the upper end of the housing 101. Quick-release mechanisms for quickly assembling and disassembling the protective frame plate 201 are provided on the left and right sides of the housing 101, respectively. A motor 108 is provided at the lower end of the connecting plate 103. The output shaft of the motor 108 is connected to the lower end of the rotating column via a coupling. An electric push rod 106 is provided on the rear side of the mounting plate 104. The telescopic end of the electric push rod 106 is connected to the lower end of the spray head 105.

[0023] like Figure 2 , 4 As shown, the quick-release mechanism includes sliding rails 202 respectively arranged on the left and right sides of the housing 101. A rectangular frame plate 203 is slidably arranged between adjacent sliding rails 202. Two sliding posts are provided on the inner side of each rectangular frame plate 203. Locking holes 209 are opened on the left and right sides of the protective frame plate 201. Multiple locking posts 212 pass through the docking holes opened at the upper end of the housing 101 and are inserted into the adjacent locking holes 209. A rotating seat 206 is provided on the inner side of each rectangular frame plate 203. A rotating connecting rod 207 is hinged and rotated inside each rotating seat 206. The lower end of the housing 101 is provided with A connecting frame plate 204 is provided, and the housing 101 and the connecting frame plate 204 are fixed together by welding. Multiple guide posts 210 are provided inside the connecting frame plate 204. Two connecting rotating frames 208 are slidably provided on the outer arc surface of the multiple guide posts 210. Multiple rotating connecting rods 207 are rotatably connected to the interior of the adjacent connecting rotating frames 208. A bidirectional screw 211 is rotatably provided inside the connecting frame plate 204. The multiple connecting rotating frames 208 are threadedly connected to the front and rear corresponding ends of the bidirectional screw 211. A knob 205 is provided at the front end of the bidirectional screw 211. The bidirectional screw 211 and the knob 205 are fixed together by welding.

[0024] like Figure 1 As shown, a support frame 110 is provided at the lower end of the housing 101. The support frame 110 at the lower end of the housing 101 can provide stable support for the spin coating device, ensuring that the spin coating device is more stable when spin coating the substrate.

[0025] First, the personnel fix the mold with substrate to be spin-coated onto the rotating plate 107 with bolts. Then, the spin-coating liquid pipe is connected to the spray head 105, so that the spin-coating liquid drips onto the substrate through the spray head 105. By controlling the opening of the electric push rod 106, the telescopic end can drive the spray head 105 to move up and down to adjust the appropriate spray height. Then, by controlling the start of the motor 108, the output shaft drives the mold with substrate on the rotating plate 107 on the rotating column to rotate. Using centrifugal force, the liquid material dripped into the center of the substrate is quickly diffused and evenly distributed on the surface of the substrate, realizing the spin coating of the substrate. The liquid material that flies out during the spin coating process can be blocked by the protective frame plate 201 to prevent it from flying out into the workshop.

[0026] When the protective frame plate 201 needs to be cleaned, the knob 205 is rotated counterclockwise, causing the bidirectional lead screw 211 to rotate. This causes the connecting rotating frames 208 on both sides to move away from each other under the constraint of multiple guide posts 210. Consequently, the rotating connecting rods 207 on both sides rotate and expand towards each other, causing the rectangular frame plates 203 on the rotating seat 206 to move away from each other under the constraint of the slide rail frame 202. This causes the locking posts 212 on the rectangular frame plates 203 to disengage from the lock of the protective frame plate 201. Inside the stop hole 209, personnel can then remove the protective frame plate 201 from the housing 101, making it easier for personnel to clean the liquid material adhering to the protective frame plate 201 using a high-pressure water gun or similar means. After cleaning, the protective frame plate 201 is slid into the docking groove, so that the locking hole 209 is aligned with the locking hole 209. Then, the knob 205 is rotated clockwise to insert the locking hole 209 into the locking hole 209 of the protective frame plate 201, thus completing the installation of the protective frame plate 201.

[0027] According to another embodiment of the present invention, such as Figure 1 , 2 As shown in Figures 3 and 4, a drain pipe 102 is provided on the lower right side of the housing 101. The drain pipe 102 is connected to the interior of the housing 101. A solenoid valve 109 is connected in series in the middle of the drain pipe 102. Part of the liquid that flies out during spin coating adheres to the protective frame plate 201, and another part flows into the interior of the housing 101. Personnel can open the solenoid valve 109 by controlling it, so that the liquid material that flies out can be discharged through the drain pipe 102 for subsequent processing.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Any other modifications or equivalent substitutions made by those skilled in the art to the technical solution of this utility model, as long as they do not depart from the spirit and scope of the technical solution of this utility model, should be covered within the scope of the claims of this utility model.

Claims

1. A spin coating apparatus, comprising a housing (101), characterized in that: The box body (101) is provided with a connecting plate (103) inside. A rotating plate (107) is rotatably provided inside the connecting plate (103) via a rotating column. An mounting plate (104) is provided on the rear side of the box body (101). A spray head (105) is slidably provided inside the mounting plate (104). A protective frame plate (201) is slidably provided in the docking groove opened at the upper end of the box body (101). Quick-release mechanisms for quick disassembly and assembly of the protective frame plate (201) are provided on the left and right sides of the box body (101).

2. The spin coating apparatus as described in claim 1, characterized in that: The quick-release mechanism includes sliding frames (202) respectively arranged on the left and right sides of the housing (101). A rectangular frame plate (203) is slidably arranged between adjacent sliding frames (202). Two sliding posts are provided on the inner side of each rectangular frame plate (203). Locking holes (209) are opened on the left and right sides of the protective frame plate (201). Multiple locking posts (212) pass through the docking holes opened at the top of the housing (101) and are inserted into the interior of the adjacent locking holes (209). A rotating seat (206) is provided on the inner side of each rectangular frame plate (203). Each rotating seat (206) The interior of 206) is hinged with rotating connecting rods (207). The lower end of the box (101) is provided with a connecting frame plate (204). The interior of the connecting frame plate (204) is provided with multiple guide columns (210). Two connecting rotating frames (208) are slidably provided on the outer arc surface of the multiple guide columns (210). The multiple rotating connecting rods (207) are rotatably connected to the interior of the adjacent connecting rotating frames (208). The interior of the connecting frame plate (204) is rotatably provided with a two-way screw rod (211). The multiple connecting rotating frames (208) are threadedly connected to the front and rear corresponding ends of the two-way screw rod (211).

3. The spin coating apparatus as described in claim 2, characterized in that: A knob (205) is provided at the front end of the bidirectional lead screw (211).

4. The spin coating apparatus as described in claim 1, characterized in that: The lower end of the connecting plate (103) is provided with a motor (108), and the output shaft of the motor (108) is connected to the lower end of the rotating column through a coupling.

5. The spin coating apparatus as described in claim 1, characterized in that: An electric push rod (106) is provided on the rear side of the mounting plate (104), and the telescopic end of the electric push rod (106) is connected to the lower end of the spray head (105).

6. The spin coating apparatus as described in claim 1, characterized in that: A drain pipe (102) is provided on the lower right side of the box (101). The drain pipe (102) is connected to the interior of the box (101). A solenoid valve (109) is connected in series in the middle of the drain pipe (102).

7. The spin coating apparatus as described in claim 1, characterized in that: A support frame (110) is provided at the lower end of the housing (101).

Images