Machining equipment for three-hole ceramic guide rail

Abstract

The utility model discloses processing equipment for a three-hole ceramic guide rail, and belongs to the field of semiconductor processing equipment. The workbench is used for bearing the three-hole ceramic guide rail, and the workbench and the supporting frame are movably connected through a first driving assembly; and a cutting line of the reciprocating linear cutting assembly is used for penetrating through a prefabricated small hole of the three-hole ceramic guide rail, and the reciprocating linear cutting assembly and the supporting frame are movably connected through a second driving assembly. The reciprocating linear cutting assembly comprises two drivers, and the fixed ends of the two drivers are connected with the driving end of the second driving assembly. And the two wire wheels are correspondingly connected with the driving ends of the two drivers, and the cutting wire is matched with the two wire wheels. The two drivers are arranged in an axial symmetry mode relative to the workbench, and the two wire wheels are arranged in an axial symmetry mode relative to the workbench. The utility model has the technical effects that the thin wall between the holes can be conveniently prevented from being broken, and the machining precision of the holes can be improved.

Description

Technical Field

[0001] This utility model relates to semiconductor processing equipment, and more particularly to a processing equipment for a three-hole ceramic guide rail. Background Technology

[0002] Three-hole ceramic guide rails are semiconductor devices used to support and guide wafers through different processing stations, and they have the advantage of good stability.

[0003] Three-hole ceramic guide rails are generally manufactured by hydrostatic pressing. However, hydrostatic pressing is limited by the thin walls between the holes, which can easily lead to breakage of the thin walls between the holes and low machining accuracy of the holes. Utility Model Content

[0004] Purpose of the utility model: The purpose of this utility model is to provide a processing equipment for three-hole ceramic guide rails, which not only helps to prevent the thin walls between the holes from breaking, but also improves the processing accuracy of the holes.

[0005] Technical solution:

[0006] A processing device for three-hole ceramic guide rails, comprising:

[0007] Support frame;

[0008] A worktable for supporting the three-hole ceramic guide rail, wherein the worktable and the support frame are movably connected via a first drive assembly;

[0009] A reciprocating wire cutting assembly, wherein the cutting wire of the reciprocating wire cutting assembly is used to pass through the pre-made small holes of the three-hole ceramic guide rail, and the reciprocating wire cutting assembly and the support frame are movably connected by a second drive assembly.

[0010] Optionally, the reciprocating wire cutting assembly includes:

[0011] Two drivers, the fixed ends of both drivers are connected to the driving ends of the second driving component;

[0012] Two spools are connected to the drive ends of the two drivers, and the cutting wire is engaged with both spools.

[0013] Optionally, the two drives are arranged symmetrically about the worktable, and the two thread pulleys are arranged symmetrically about the worktable.

[0014] Optional, also includes:

[0015] A groove provided on the worktable;

[0016] A fixing component that slides and locks into the groove, the fixing component being used to abut against the three-hole ceramic guide rail.

[0017] Optionally, the fixing component includes a fixing block and several fasteners. The fixing block and the groove are slidably engaged. The fixing block is used to abut against the three-hole ceramic guide rail. The several fasteners are all threadedly connected to the fixing block and abut against the worktable.

[0018] Optionally, the groove is dovetail-shaped, and one end of the fixing block is connected to a dovetail tenon, with the dovetail tenon and the dovetail groove slidingly engaged.

[0019] Optionally, it may also include a number of foot posts, all of which are connected to the support frame.

[0020] Optionally, it may also include a plurality of anti-slip pads, with the ends of the plurality of anti-slip pads and the plurality of foot posts connected in a corresponding manner to the ends of the foot posts away from the support frame.

[0021] Beneficial effects: Activating the reciprocating wire cutting assembly causes the cutting line to move back and forth along the X direction. Activating the first drive assembly sequentially moves the worktable and the three-hole ceramic guide rail along the Y direction, facilitating the processing of the short side of the large square hole. Activating the second drive assembly then causes the cutting line to move along the Z direction, facilitating the processing of the long side of the large square hole. This process transforms the pre-made small holes into large square holes. The remaining two pre-made small holes are processed into large square holes in the same way. In summary, this processing equipment uses wire cutting to process large square holes, which not only helps prevent the thin walls between holes from breaking but also improves the processing accuracy of the holes. Attached Figure Description

[0022] Figure 1 This is one of the structural diagrams of a processing device for a three-hole ceramic guide rail according to Embodiment 1 of this utility model;

[0023] Figure 2 This is a second structural diagram of a processing equipment for a three-hole ceramic guide rail according to Embodiment 1 of this utility model;

[0024] Figure 3 This is the third structural diagram of a processing device for a three-hole ceramic guide rail according to Embodiment 1 of this utility model;

[0025] Figure 4 for Figure 3 A partial view of A in the middle;

[0026] Figure 5 This is a structural diagram of the three-hole ceramic guide rail of Embodiment 1 of this utility model;

[0027] In the diagram: 1. Support frame; 2. Workbench; 21. Groove; 3. Reciprocating wire cutting assembly; 31. Driver; 32. Wire wheel; 33. Cutting wire; 4. Fixing assembly; 41. Fixing block; 42. Fastener; 43. Dovetail tenon; 5. Foot; 6. Three-hole ceramic guide rail; 61. Pre-drilled small hole; 62. Square large hole. Detailed Implementation

[0028] To make the technical solution of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0029] The present application will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the relevant utility model and not intended to limit the utility model. Furthermore, it should be noted that, for ease of description, only the parts related to the utility model are shown in the accompanying drawings. The terms "first," "second," etc., used in this utility model are provided for the convenience of describing the technical solution of this utility model and have no specific limiting effect; they are all general terms and do not constitute a limitation on the technical solution of this utility model. It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of this application can be combined with each other. In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Multiple technical solutions in the same embodiment, as well as multiple technical solutions in different embodiments, can be arranged and combined to form new technical solutions that do not contradict or conflict, all of which are within the scope of protection claimed by this utility model.

[0030] Example 1

[0031] like Figure 1This embodiment provides a processing device for a three-hole ceramic guide rail, including: a support frame 1; a worktable 2 for supporting the three-hole ceramic guide rail 6, the worktable 2 and the support frame 1 being movably connected by a first drive assembly; a reciprocating wire cutting assembly 3, the cutting wire 33 of the reciprocating wire cutting assembly 3 being used to pass through the pre-made small hole 61 of the three-hole ceramic guide rail 6, the reciprocating wire cutting assembly 3 and the support frame 1 being movably connected by a second drive assembly.

[0032] Specifically, during processing, firstly, a three-hole ceramic guide rail 6 with three pre-made small holes 61 is formed by hydrostatic pressing. At this time, because the walls between the holes are relatively thick, it is not easy to break. Next, the three-hole ceramic guide rail 6 is fixed on the worktable 2. Then, the cutting wire 33 of the reciprocating wire cutting assembly 3 is passed through the pre-made small holes 61 of the three-hole ceramic guide rail 6. Finally, the reciprocating wire cutting assembly 3 is started, so that the cutting wire 33 moves back and forth along the X direction, and the first drive assembly is started, which sequentially drives the worktable 2 and the three-hole ceramic guide rail 6. The ceramic guide rail 6 moves along the Y direction, which facilitates the processing of the short side of the large square hole 62. Then, the second drive component is activated, causing the cutting line 33 to move along the Z direction, which facilitates the processing of the long side of the large square hole 62. This process transforms the pre-made small hole 61 into the large square hole 62. The other two pre-made small holes 61 are processed into the large square hole 62 in the same way. In summary, the processing equipment in this scheme uses the cutting line 33 to process the large square hole 62, which not only helps to prevent the thin wall between holes from breaking, but also improves the processing accuracy of the holes.

[0033] The support frame 1 is used to support the worktable 2, the first drive assembly, etc.; the worktable 2 is used to support the three-hole ceramic guide rail 6; the first drive assembly is used to drive the worktable 2 and the three-hole ceramic guide rail 6 to move in the Y direction in sequence. The first drive assembly can be a motor with a lead screw and slider, or a telescopic cylinder, etc.; the reciprocating wire cutting assembly 3 is used to process the pre-made small hole 61 into a square large hole 62. The material of the cutting wire 33 is preferably diamond; the second drive assembly is used to drive the reciprocating wire cutting assembly 3 to move in the Z direction. The second drive assembly can be a motor with a lead screw and slider, or a telescopic cylinder, etc.

[0034] Furthermore, such as Figure 1 The reciprocating wire cutting assembly 3 includes: two drivers 31, the fixed ends of which are connected to the driving ends of the second driving assembly; two wire wheels 32, which are correspondingly connected to the driving ends of the two drivers 31; and the cutting wire 33 is engaged with both wire wheels 32.

[0035] Specifically, the driving ends of the two drivers 31 are used to drive the two thread wheels 32 to rotate (they can rotate in both directions), so that the cutting line 33 reciprocates along the X direction. In order to facilitate the adjustment of the transmission direction, the driving ends of the drivers 31 and the thread wheels 32 can be transmitted through a gear structure. The drivers 31 can be servo motors, stepper motors, etc.

[0036] Furthermore, such as Figure 1 The two actuators 31 are arranged symmetrically about the worktable 2, and the two threaded wheels 32 are also arranged symmetrically about the worktable 2. Specifically, the symmetrical arrangement facilitates the increase of force symmetry in the three-hole ceramic guide rail 6, thereby facilitating further improvement in the machining accuracy of the holes.

[0037] Furthermore, such as Figures 1-3 It also includes: a groove 21 provided on the worktable 2; a fixing component 4 that slides and locks into the groove 21, the fixing component 4 being used to abut against the three-hole ceramic guide rail 6.

[0038] Specifically, the fixing component 4 is used to fix the worktable 2 and the three-hole ceramic guide rail 6 to prevent the three-hole ceramic guide rail 6 from shifting during the processing and to ensure the processing accuracy of the holes. Preferably, several fixing components 4 are set on both sides of the three-hole ceramic guide rail 6.

[0039] Furthermore, such as Figure 4 The fixing component 4 includes a fixing block 41 and several fasteners 42. The fixing block 41 and the groove 21 are slidably engaged. The fixing block 41 is used to abut against the three-hole ceramic guide rail 6. The several fasteners 42 are all threadedly connected to the fixing block 41 and abut against the worktable 2.

[0040] Specifically, the fixing block 41 and several fasteners 42 are used to jointly fix the three-hole ceramic guide rail 6. The fasteners 42 can be screws, bolts, etc.

[0041] Furthermore, such as Figure 4 The groove 21 is dovetail-shaped, and one end of the fixing block 41 is connected to a dovetail tenon 43, which slides into the dovetail groove. Specifically, the dovetail groove and the dovetail tenon 43 cooperate to prevent the fixing block 41 and the worktable 2 from separating from each other along the Z-direction.

[0042] Furthermore, such as Figure 1 It also includes several foot posts 5, each connected to the support frame 1. Specifically, the foot posts 5 are used to support the support frame 1 and prevent the support frame 1 from directly contacting the ground.

[0043] Furthermore, such as Figure 1 It also includes several anti-slip mats, and several anti-slip mats and several foot posts 5 connected at the ends away from the support frame 1. Specifically, the anti-slip mats are used for anti-slip purposes, and the material of the anti-slip mats can be silicone rubber, fluororubber, etc.

[0044] The above embodiments only illustrate several implementation methods of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A processing equipment for a three-hole ceramic guide rail, characterized in that, include: Support frame (1); A worktable (2) for supporting the three-hole ceramic guide rail (6), wherein the worktable (2) and the support frame (1) are movably connected by a first drive assembly; A reciprocating wire cutting assembly (3) is provided, wherein the cutting wire (33) of the reciprocating wire cutting assembly (3) is used to pass through the pre-made small hole (61) of the three-hole ceramic guide rail (6), and the reciprocating wire cutting assembly (3) and the support frame (1) are movably connected by a second drive assembly.

2. The processing equipment for a three-hole ceramic guide rail according to claim 1, characterized in that, The reciprocating wire cutting assembly (3) includes: Two drivers (31), the fixed ends of both drivers (31) are connected to the driving ends of the second driving component; Two spools (32) are connected to the drive ends of the two spools (32) and the two drivers (31), and the cutting wire (33) is engaged with both spools (32).

3. The processing equipment for a three-hole ceramic guide rail according to claim 2, characterized in that, The two drives (31) are arranged symmetrically about the worktable (2), and the two reels (32) are arranged symmetrically about the worktable (2).

4. The processing equipment for a three-hole ceramic guide rail according to any one of claims 1-3, characterized in that, Also includes: A groove (21) is provided on the worktable (2); A fixing component (4) is slidably locked into the groove (21), the fixing component (4) being used to abut against the three-hole ceramic guide rail (6).

5. The processing equipment for a three-hole ceramic guide rail according to claim 4, characterized in that, The fixing component (4) includes a fixing block (41) and several fasteners (42). The fixing block (41) and the groove (21) are slidably engaged. The fixing block (41) is used to abut against the three-hole ceramic guide rail (6). The several fasteners (42) are all threadedly connected to the fixing block (41) and all abut against the worktable (2).

6. The processing equipment for a three-hole ceramic guide rail according to claim 5, characterized in that, The groove (21) is dovetail groove in shape, and one end of the fixing block (41) is connected to a dovetail tenon (43), which slides into the dovetail groove.

7. The processing equipment for a three-hole ceramic guide rail according to any one of claims 1-3, characterized in that, It also includes several foot posts (5) that are all connected to the support frame (1).

8. The processing equipment for a three-hole ceramic guide rail according to claim 7, characterized in that, It also includes several anti-slip pads, and the ends of several of the anti-slip pads and several of the foot posts (5) are connected to each other away from the support frame (1).

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